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@@ -9348,6 +9348,12 @@
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<ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
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</RPTID>
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</CEID>
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+ <CEID id="20" logicalName="HOSTOFFLINE" description="" enabled="true">
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+ <RPTID id="1" logicalName="DefaultDefinedReport_1">
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+ <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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+ <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
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+ </RPTID>
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+ </CEID>
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<CEID id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
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<RPTID id="7" logicalName="DefaultDefinedReport_7">
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<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
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@@ -11319,11 +11325,6 @@
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<ALID id="330010887" logicalName="PM1.WaterFlowFS111ToleranceWarning" description="WaterFlowFS111 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010888" logicalName="PM1.WaterFlowFS116ToleranceAlarm" description="WaterFlowFS116 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010889" logicalName="PM1.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010890" logicalName="PM1.AlarmSignalMS6Alarm" description="MS6 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010891" logicalName="PM1.MS6ToleranceAlarm" description="MS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010892" logicalName="PM1.MS6ToleranceWarning" description="MS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010893" logicalName="PM1.VG15ToleranceAlarm" description="VG15 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010894" logicalName="PM1.VG15ToleranceWarning" description="VG15 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="860010001" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1008601" eventClear="2008601" />
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<ALID id="860010002" logicalName="WaferRobot.BladeWaferNotPresentWarning" description="Blade wafer not present " category="EquipmentStatusWarning" enabled="false" eventSet="1008601" eventClear="2008601" />
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<ALID id="860010003" logicalName="WaferRobot.BladeWaferPresentWarning" description="Blade wafer present " category="EquipmentStatusWarning" enabled="false" eventSet="1008601" eventClear="2008601" />
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