定义GemModel文件中的事件

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -60,6 +60,7 @@
 		<SVID id="25" valueType="Ascii" logicalName="PJId" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="26" valueType="Ascii" logicalName="ProcessRecipeStepNumber" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="27" valueType="Boolean" logicalName="IsInSubProcessing" value="" eventTrigger="" units="" description="" isArray="false" />
+
 		<SVID id="10010001" valueType="Ascii" logicalName="CJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10010002" valueType="Ascii" logicalName="PJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10010003" valueType="Boolean" logicalName="System.HasActiveAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -73,7 +74,6 @@
 		<SVID id="10010011" valueType="Boolean" logicalName="System.IsSpoolingEnable" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10010012" valueType="Ascii" logicalName="LP3_E84STATE" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10010013" valueType="Ascii" logicalName="LP4_E84STATE" value="" eventTrigger="" units="" description="" isArray="false" />
-		<SVID id="10010014" valueType="Boolean" logicalName="RecipeEditLock" value="" eventTrigger="" units="" description="" isArray="false" />
 
 		<SVID id="10020001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10030001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -293,7 +293,7 @@
 		<SVID id="40010032" valueType="Boolean" logicalName="LP3.TransferRequest" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="40010033" valueType="Boolean" logicalName="LP3.UnloadRequest" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="40010034" valueType="Boolean" logicalName="LP3.Valid" value="" eventTrigger="" units="" description="" isArray="false" />
-		
+
 		<SVID id="50010001" valueType="Ascii" logicalName="LP4.CasstleType" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="50010002" valueType="Ascii" logicalName="LP4.InfoPadCarrierIndex" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="50010003" valueType="Ascii" logicalName="LP4.intAccessMode" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -1696,7 +1696,7 @@
 		<SVID id="338940001" valueType="F8" logicalName="PM1.VG22.Value" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="338840001" valueType="F8" logicalName="PM1.VG32.Value" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="338850001" valueType="F8" logicalName="PM1.VG33.Value" value="" eventTrigger="" units="" description="" isArray="false" />
-		
+
 		<SVID id="338950001" valueType="F8" logicalName="PM1.VG14.Value" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="338960001" valueType="F8" logicalName="PM1.VG15.Value" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="338970001" valueType="Boolean" logicalName="PM1.SensorFrontbodyinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -1844,8 +1844,6 @@
 		<SVID id="1030010006" valueType="Ascii" logicalName="Scheduler.CycleSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
 
 
-
-
 		<SVID id="1040010001" valueType="F8" logicalName="HeaterBand.1_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="1040010002" valueType="F8" logicalName="HeaterBand.1_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="1040020001" valueType="F8" logicalName="HeaterBand.1_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -3011,9 +3009,6 @@
 		<ECID id="330540002" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Enable When Foup Enter" isArray="false" />
 		<ECID id="330540003" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge  Enable When Foup Enter" isArray="false" />
 		<ECID id="330540004" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Enable When Foup Enter" isArray="false" />
-		<ECID id="330540005" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="FOUP O2 CheckSV" isArray="false" />
-		<ECID id="330540006" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.LAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description=" LA O2 CheckSV" isArray="false" />
-
 		<ECID id="330550001" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable After BoatLoad" isArray="false" />
 		<ECID id="330550002" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitTime" value="" min="" max="" eventTrigger="" units="" description="FOUP TO FOUP WaitTime After BoatLoad" isArray="false" />
 		<ECID id="330560001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -3106,19 +3101,11 @@
 		<ECID id="330630002" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Charge Enable" isArray="false" />
 		<ECID id="330630003" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Charge Enable" isArray="false" />
 		<ECID id="330630004" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomO2DensityKeepEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Keep Charge Enable" isArray="false" />
-		
-		<ECID id="330630005" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.FOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferCharge FOUPO2CheckSV " isArray="false" />
-		<ECID id="330630006" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.LAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferCharge LAO2CheckSV" isArray="false" />
-		
 		<ECID id="330640001" valueType="Ascii" logicalName="PM1.N2Purge.WaferCooling.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When Wafer Cooling" isArray="false" />
 		<ECID id="330650001" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Discharge Enable" isArray="false" />
 		<ECID id="330650002" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Discharge Enable" isArray="false" />
 		<ECID id="330650003" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Discharge Enable" isArray="false" />
 		<ECID id="330650004" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.TransferRoomO2DensityKeepEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Keep Discharge Enable" isArray="false" />
-
-		<ECID id="330650005" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.FOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferDischarge FOUPO2CheckSV " isArray="false" />
-		<ECID id="330650006" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.LAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferDischarge LAO2CheckSV" isArray="false" />
-
 		<ECID id="330660001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AlarmTables.AlarmTable" value="" min="" max="" eventTrigger="" units="" description="Alarm Table" isArray="false" />
 		<ECID id="330670001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />
 		<ECID id="330670002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />
@@ -9197,11 +9184,11 @@
 		<ECID id="1060050001" valueType="Ascii" logicalName="FFU.BufferFFU5.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
 		<ECID id="1060060001" valueType="Ascii" logicalName="FFU.BufferFFU6.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
 		<ECID id="1060070001" valueType="Ascii" logicalName="FFU.FFU1.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
-		
+
 		<ECID id="1060170001" valueType="Ascii" logicalName="FFU.FFU2.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
 		<ECID id="1060180001" valueType="Ascii" logicalName="FFU.FFU3.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
 		<ECID id="1060190001" valueType="Ascii" logicalName="FFU.FFU4.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
-		
+
 		<ECID id="1060250001" valueType="Ascii" logicalName="FFU.HSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
 		<ECID id="1060250002" valueType="Ascii" logicalName="FFU.LSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
 		<ECID id="1070010001" valueType="Ascii" logicalName="LoadPort.CarrierIDReaderInUse" value="" min="" max="" eventTrigger="" units="" description="CarrierIDReaderInUse" isArray="false" />
@@ -9363,6 +9350,9 @@
 		<DVID id="3519" valueType="List" logicalName="ProcessCarrierIDList" value="" eventTrigger="" description="List of process CarrierID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;CarrierID&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
 		<DVID id="3520" valueType="List" logicalName="ProcessWaferIdList" value="" eventTrigger="" description="List of process waferID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;waferID&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
 		<DVID id="3521" valueType="List" logicalName="ProcessLotIdList" value="" eventTrigger="" description="List of process LotId.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;ProcessLotIdList&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
+		<DVID id="3524" valueType="Ascii" logicalName="StepId" value="" eventTrigger="" description="StepId" isArray="false" />
+		<DVID id="3525" valueType="Ascii" logicalName="RecipeName" value="" eventTrigger="" description="RecipeName" isArray="false" />
+		<DVID id="3526" valueType="List" logicalName="BoatSlotMapList" value="" eventTrigger="" description="List of boat map slot result.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;SlotMapInt&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
 		<DVID id="3526" valueType="List" logicalName="BoatSlotMapList" value="" eventTrigger="" description="List of boat map slot result.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;SlotMapInt&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
 	</DataVariables>
 	<DataCollections useAnnotatedEvent="false">
@@ -9544,6 +9534,22 @@
 				<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
 				<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
 			</RPTID>
+
+
+			<RPTID id="29" logicalName="DefaultDefinedReport_29">
+				<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+				<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+			</RPTID>
+			<RPTID id="30" logicalName="DefaultDefinedReport_30">
+				<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+				<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+			</RPTID>
+			<RPTID id="31" logicalName="DefaultDefinedReport_31">
+				<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+				<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				<ReportVariable id="3524" varType="DataVariable" logicalName="StepId" />
+			</RPTID>
 		</RPTIDs>
 		<CEIDs>
 			<CEID id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
@@ -9862,6 +9868,169 @@
 					<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
 				</RPTID>
 			</CEID>
+			<CEID id="2030" logicalName="AlarmConditionTriggerReset" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2031" logicalName="AlarmConditionTriggerEnd" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2032" logicalName="AlarmConditionTriggerHold" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2033" logicalName="AlarmConditionTriggerJumpStep" description="" enabled="true">
+				<RPTID id="31" logicalName="DefaultDefinedReport_31">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3524" varType="DataVariable" logicalName="StepId" />
+				</RPTID>
+			</CEID>
+			<CEID id="2034" logicalName="AlarmConditionTriggerCallAlarmRecipe" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2035" logicalName="AlarmConditionTriggerCallAbortRecipe" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2040" logicalName="LeakCheckTriggerReset" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2041" logicalName="LeakCheckTriggerEnd" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2042" logicalName="LeakCheckTriggerHold" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2043" logicalName="LeakCheckTriggerJumpStep" description="" enabled="true">
+				<RPTID id="31" logicalName="DefaultDefinedReport_31">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3524" varType="DataVariable" logicalName="StepId" />
+				</RPTID>
+			</CEID>
+			<CEID id="2044" logicalName="LeakCheckTriggerCallAlarmRecipe" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2045" logicalName="LeakCheckTriggerCallAbortRecipe" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2050" logicalName="ManualTriggerRecipeHold" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2051" logicalName="ManualTriggerRecipeRelease" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2052" logicalName="ManualTriggerRecipeSkip" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2053" logicalName="ManualTriggerRecipeJump" description="" enabled="true">
+				<RPTID id="31" logicalName="DefaultDefinedReport_31">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3524" varType="DataVariable" logicalName="StepId" />
+				</RPTID>
+			</CEID>
+			<CEID id="2054" logicalName="ManualTriggerRecipeAbort" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2060" logicalName="RecipeTriggerReset" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2061" logicalName="RecipeTriggerEnd" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2062" logicalName="RecipeTriggerHold" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2063" logicalName="RecipeTriggerLeakCheck" description="" enabled="true">
+				<RPTID id="30" logicalName="DefaultDefinedReport_30">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+				</RPTID>
+			</CEID>
+			<CEID id="2064" logicalName="RecipeTriggerJumpStep" description="" enabled="true">
+				<RPTID id="31" logicalName="DefaultDefinedReport_31">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3524" varType="DataVariable" logicalName="StepId" />
+				</RPTID>
+			</CEID>
+			<CEID id="2065" logicalName="RecipeTriggerCallSubRecipe" description="" enabled="true">
+				<RPTID id="29" logicalName="DefaultDefinedReport_29">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3109" varType="DataVariable" logicalName="RecipeStepNumber" />
+					<ReportVariable id="3525" varType="DataVariable" logicalName="RecipeName" />
+				</RPTID>
+			</CEID>
+			<CEID id="2066" logicalName="RecipeAbnormalEnd" description="" enabled="true">
+				<RPTID id="11" logicalName="DefaultDefinedReport_11">
+					<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
+					<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
+					<ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
+					<ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
+					<ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
+					<ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
+					<ReportVariable id="3521" varType="DataVariable" logicalName="ProcessLotIdList" />
+				</RPTID>
+			</CEID>
+
 			<CEID id="30200" logicalName="LPT_NtoO" description="Load Port Transfer State change form NA to Out of Service" enabled="true">
 				<RPTID id="19" logicalName="DefaultDefinedReport_19">
 					<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />