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@@ -110,6 +110,62 @@
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<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.5" Description="safe module:Power box interlock button led(D10.5)" />
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<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.6" Description="safe module:Gas box interlock button led(D10.6)" />
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<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.7" Description="safe module:Frontbody interlock button led(D10.7)" />
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+
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+ <DI_ITEM Index="176" Name="DI_FIMS1LoadRunningError" BufferOffset="176" Addr="D11.0" Description="E0000）FIMS1 Load Running Error(D11.0)" />
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+ <DI_ITEM Index="177" Name="DI_FIMS1UnloadRunningError" BufferOffset="177" Addr="D11.1" Description="E0001）FIMS1 Unload Running Error(D11.1)" />
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+ <DI_ITEM Index="178" Name="DI_FIMS1InitRunningError" BufferOffset="178" Addr="D11.2" Description="E0002）FIMS1 Init Running Error(D11.2)" />
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+ <DI_ITEM Index="179" Name="DI_FIMS2LoadRunningError" BufferOffset="179" Addr="D11.3" Description="E0003）FIMS2 Load Running Error(D11.3)" />
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+ <DI_ITEM Index="180" Name="DI_FIMS2UnloadRunningError" BufferOffset="180" Addr="D11.4" Description="E0004）FIMS2 Unload Running Error(D11.4)" />
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+ <DI_ITEM Index="181" Name="DI_FIMS2InitRunningError" BufferOffset="181" Addr="D11.5" Description="E0005）FIMS2 Init Running Error(D11.5)" />
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+ <DI_ITEM Index="182" Name="DI_FIMS1UndockRunningError" BufferOffset="182" Addr="D11.6" Description="E0006）FIMS1 Undock Running Error(D11.6)" />
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+ <DI_ITEM Index="183" Name="DI_FIMS1DockRunningError" BufferOffset="183" Addr="D11.7" Description="E0007）FIMS1 Dock Running Error(D11.7)" />
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+ <DI_ITEM Index="184" Name="DI_FIMS1VacuumOffRunningError" BufferOffset="184" Addr="D11.8" Description="E0008）FIMS1 Vacuum Off Running Error(D11.8)" />
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+ <DI_ITEM Index="185" Name="DI_FIMS1VacuumOnRunningError" BufferOffset="185" Addr="D11.9" Description="E0009）FIMS1 Vacuum On Running Error(D11.9)" />
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+ <DI_ITEM Index="186" Name="DI_FIMS1N2Closed" BufferOffset="186" Addr="D11.10" Description="E0010）FIMS1 N2 Closed(D11.10)" />
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+ <DI_ITEM Index="187" Name="DI_FIMS1N2Opened" BufferOffset="187" Addr="D11.11" Description="E0011）FIMS1 N2 Opened(D11.11)" />
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+ <DI_ITEM Index="188" Name="DI_FIMS1ReleaseRunningError" BufferOffset="188" Addr="D11.12" Description="E0012）FIMS1 Release Running Error(D11.12)" />
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+ <DI_ITEM Index="189" Name="DI_FIMS1SealRunningError" BufferOffset="189" Addr="D11.13" Description="E0013）FIMS1 Seal Running Error(D11.13)" />
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+ <DI_ITEM Index="190" Name="DI_FIMS1SlideCloseRunningError" BufferOffset="190" Addr="D11.14" Description="E0014）FIMS1 Slide Close Running Error(D11.14)" />
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+ <DI_ITEM Index="191" Name="DI_FIMS1SlideOpenRunningError" BufferOffset="191" Addr="D11.15" Description="E0015）FIMS1 Slide Open Running Error(D11.15)" />
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+ <DI_ITEM Index="192" Name="DI_FIMS1LatchKeyOnRunningError" BufferOffset="192" Addr="D12.0" Description="E0016）FIMS1 Latch Key On Running Error(D12.0)" />
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+ <DI_ITEM Index="193" Name="DI_FIMS1LatchKeyOffRunningError" BufferOffset="193" Addr="D12.1" Description="E0017）FIMS1 Latch Key Off Running Error(D12.1)" />
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+ <DI_ITEM Index="194" Name="DI_FIMS1N2ReleaseRunningError" BufferOffset="194" Addr="D12.2" Description="E0018）FIMS1 N2 Release Running Error(D12.2)" />
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+ <DI_ITEM Index="195" Name="DI_FIMS1N2SealRunningError" BufferOffset="195" Addr="D12.3" Description="E0019）FIMS1 N2 Seal Running Error(D12.3)" />
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+ <DI_ITEM Index="196" Name="DI_FIMS2UnDockRunningError" BufferOffset="196" Addr="D12.4" Description="E0020）FIMS2 UnDock Running Error(D12.4)" />
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+ <DI_ITEM Index="197" Name="DI_FIMS2DockRunningError" BufferOffset="197" Addr="D12.5" Description="E0021）FIMS2 Dock Running Error(D12.5)" />
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+ <DI_ITEM Index="198" Name="DI_FIMS2VacuumOffRunningError" BufferOffset="198" Addr="D12.6" Description="E0022）FIMS2 Vacuum Off Running Error(D12.6)" />
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+ <DI_ITEM Index="199" Name="DI_FIMS2VacuumOnRunningError" BufferOffset="199" Addr="D12.7" Description="E0023）FIMS2 Vacuum On Running Error(D12.7)" />
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+ <DI_ITEM Index="200" Name="DI_FIMS2N2Closed" BufferOffset="200" Addr="D12.8" Description="E0024）FIMS2 N2 Closed(D12.8)" />
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+ <DI_ITEM Index="201" Name="DI_FIMS2N2Opened" BufferOffset="201" Addr="D12.9" Description="E0025）FIMS2 N2 Opened(D12.9)" />
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+ <DI_ITEM Index="202" Name="DI_FIMS2SealRunningError" BufferOffset="202" Addr="D12.10" Description="E0026）FIMS2 Seal Running Error(D12.10)" />
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+ <DI_ITEM Index="203" Name="DI_FIMS2ReleaseRunningError" BufferOffset="203" Addr="D12.11" Description="E0027）FIMS2 Release Running Error(D12.11)" />
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+ <DI_ITEM Index="204" Name="DI_FIMS2SlideCloseRunningError" BufferOffset="204" Addr="D12.12" Description="E0028）FIMS2 Slide Close Running Error(D12.12)" />
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+ <DI_ITEM Index="205" Name="DI_FIMS2SlideOpenRunningError" BufferOffset="205" Addr="D12.13" Description="E0029）FIMS2 Slide Open Running Error(D12.13)" />
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+ <DI_ITEM Index="206" Name="DI_FIMS2LatchKeyOnRunningError" BufferOffset="206" Addr="D12.14" Description="E0030）FIMS2 Latch Key On Running Error(D12.14)" />
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+ <DI_ITEM Index="207" Name="DI_FIMS2LatchKeyOffRunningError" BufferOffset="207" Addr="D12.15" Description="E0031）FIMS2 Latch Key Off Running Error(D12.15)" />
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+ <DI_ITEM Index="208" Name="DI_FIMS2N2ReleaseRunningError" BufferOffset="208" Addr="D13.0" Description="E0032）FIMS2 N2 Release Running Error(D13.0)" />
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+ <DI_ITEM Index="209" Name="DI_FIMS2N2SealRunningError" BufferOffset="209" Addr="D13.1" Description="E0033）FIMS2 N2 Seal Running Error(D13.1)" />
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+
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+ <DI_ITEM Index="224" Name="DI_BufferA1N2LowPressureError" BufferOffset="224" Addr="D14.0" Description="E0070)Buffer A1 N2 Low Pressure Error(D14.0)" />
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+ <DI_ITEM Index="225" Name="DI_BufferB1N2LowPressureError" BufferOffset="225" Addr="D14.1" Description="E0071)Buffer B1 N2 Low Pressure Error(D14.1)" />
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+ <DI_ITEM Index="226" Name="DI_BufferC1N2LowPressureError" BufferOffset="226" Addr="D14.2" Description="E0072)Buffer C1 N2 Low Pressure Error(D14.2)" />
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+ <DI_ITEM Index="227" Name="DI_BufferD1N2LowPressureError" BufferOffset="227" Addr="D14.3" Description="E0073)Buffer D1 N2 Low Pressure Error(D14.3)" />
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+ <DI_ITEM Index="228" Name="DI_BufferA2N2LowPressureError" BufferOffset="228" Addr="D14.4" Description="E0074)Buffer A2 N2 Low Pressure Error(D14.4)" />
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+ <DI_ITEM Index="229" Name="DI_BufferB2N2LowPressureError" BufferOffset="229" Addr="D14.5" Description="E0075)Buffer B2 N2 Low Pressure Error(D14.5)" />
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+ <DI_ITEM Index="230" Name="DI_BufferC2N2LowPressureError" BufferOffset="230" Addr="D14.6" Description="E0076)Buffer C2 N2 Low Pressure Error(D14.6)" />
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+ <DI_ITEM Index="231" Name="DI_BufferD2N2LowPressureError" BufferOffset="231" Addr="D14.7" Description="E0077)Buffer D2 N2 Low Pressure Error(D14.7)" />
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+ <DI_ITEM Index="232" Name="DI_BufferA3N2LowPressureError" BufferOffset="232" Addr="D14.8" Description="E0078)Buffer A3 N2 Low Pressure Error(D14.8)" />
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+ <DI_ITEM Index="233" Name="DI_BufferB3N2LowPressureError" BufferOffset="233" Addr="D14.9" Description="E0079)Buffer B3 N2 Low Pressure Error(D14.9)" />
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+ <DI_ITEM Index="234" Name="DI_BufferC3N2LowPressureError" BufferOffset="234" Addr="D14.10" Description="E0080)Buffer C3 N2 Low Pressure Error(D14.10)" />
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+ <DI_ITEM Index="235" Name="DI_BufferD3N2LowPressureError" BufferOffset="235" Addr="D14.11" Description="E0081)Buffer D3 N2 Low Pressure Error(D14.11)" />
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+ <DI_ITEM Index="236" Name="DI_BufferA4N2LowPressureError" BufferOffset="236" Addr="D14.12" Description="E0082)Buffer A4 N2 Low Pressure Error(D14.12)" />
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+ <DI_ITEM Index="237" Name="DI_BufferB4N2LowPressureError" BufferOffset="237" Addr="D14.13" Description="E0083)Buffer B4 N2 Low Pressure Error(D14.13)" />
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+ <DI_ITEM Index="238" Name="DI_BufferC4N2LowPressureError" BufferOffset="238" Addr="D14.14" Description="E0084)Buffer C4 N2 Low Pressure Error(D14.14)" />
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+ <DI_ITEM Index="239" Name="DI_BufferD4N2LowPressureError" BufferOffset="239" Addr="D14.15" Description="E0085)Buffer D4 N2 Low Pressure Error(D14.15)" />
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+
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+
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+
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+
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<DI_ITEM Index="960" Name="DI_GLBoxPG1CNT1Alarm" BufferOffset="960" Addr="D60.0" Description="Gas box PG1 CNT1 alarm(D60.0)" />
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<DI_ITEM Index="961" Name="DI_GLBoxPG1CNT2Alarm" BufferOffset="961" Addr="D60.1" Description="Gas box PG1 CNT2 alarm(D60.1)" />
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<DI_ITEM Index="962" Name="DI_GLBoxPG2CNT1Alarm" BufferOffset="962" Addr="D60.2" Description="Gas box PG2 CNT1 alarm(D60.2)" />
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@@ -396,6 +452,12 @@
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<DI_ITEM Index="1861" Name="DI_LP1FOUPInPosition2" BufferOffset="1861" Addr="D116.5" Description="AGV loadport1 FOUP in position2(D116.5)" />
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<DI_ITEM Index="1862" Name="DI_LP1FOUPInPosition3" BufferOffset="1862" Addr="D116.6" Description="AGV loadport1 FOUP in position3(D116.6)" />
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<DI_ITEM Index="1863" Name="DI_LP1FOUPDetect" BufferOffset="1863" Addr="D116.7" Description="AGV loadport1 FOUP detect(D116.7)" />
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+
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+ <DI_ITEM Index="1864" Name="DI_FTRHome1" BufferOffset="1864" Addr="D116.8" Description="FTR Home1(D116.8)" />
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+ <DI_ITEM Index="1865" Name="DI_FTRHome1" BufferOffset="1865" Addr="D116.9" Description="FTR Home2(D116.9)" />
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+ <DI_ITEM Index="1866" Name="DI_FTRHome1" BufferOffset="1866" Addr="D116.10" Description="FTR Home3(D116.10)" />
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+
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+
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<DI_ITEM Index="1872" Name="DI_LP2FOUPLeftClamp" BufferOffset="1872" Addr="D117.0" Description="AGV loadport2 FOUP left clamp(D117.0)" />
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<DI_ITEM Index="1873" Name="DI_LP2FOUPRightClamp" BufferOffset="1873" Addr="D117.1" Description="AGV loadport2 FOUP right clamp(D117.1)" />
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<DI_ITEM Index="1874" Name="DI_LP2FOUPLeftRelease" BufferOffset="1874" Addr="D117.2" Description="AGV loadport2 FOUP left release(D117.2)" />
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@@ -1621,9 +1683,9 @@
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<AI_ITEM Index="2155" Name="AI_PG829AI" BufferOffset="2155" Addr="D9310" Description="PG829AI(1B)(D9310)" />
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<AI_ITEM Index="2156" Name="AI_PG830AI" BufferOffset="2156" Addr="D9312" Description="PG830AI(1C)(D9312)" />
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<AI_ITEM Index="2157" Name="AI_PG831AI" BufferOffset="2157" Addr="D9314" Description="PG831AI(1D)(D9314)" />
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+ <AI_ITEM Index="2175" Name="AI_RingBreakingNodeError" BufferOffset="2175" Addr="D9350" Description="RingBreaking Node Error(D9350)" />
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<AI_ITEM Index="2250" Name="AI_FOUPRobotActionCommand" BufferOffset="2250" Addr="D9500" Description="FOUP Robot Action Command(D9500)" />
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<AI_ITEM Index="2251" Name="AI_WaferRobotActionCommand" BufferOffset="2251" Addr="D9502" Description="Wafer Robot Action Command(D9502)" />
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- <AI_ITEM Index="2175" Name="AI_RingBreakingNodeError" BufferOffset="2175" Addr="D9350" Description="RingBreaking Node Error(D9350)" />
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</Ana_In>
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<Ana_Out>
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<AO_ITEM Index="5" Name="AO_TargetPositionBufferAxis" BufferOffset="5" Addr="D10010" Description="Target Position Buffer Axis(D10010)" />
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jiangjy