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@@ -52,7 +52,8 @@
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<SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="13" valueType="Ascii" logicalName="SpoolState" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="100" valueType="Ascii" logicalName="Boat.CurrentFilmThickness" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="20" valueType="Ascii" logicalName="BoatCurrentFilmThickness" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="21" valueType="Ascii" logicalName="DryClearCount" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="10010001" valueType="Ascii" logicalName="CJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="10010002" valueType="Ascii" logicalName="PJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="10010003" valueType="Boolean" logicalName="System.HasActiveAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
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@@ -1689,6 +1690,11 @@
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<SVID id="338890001" valueType="Boolean" logicalName="PM1.SensorGasboxinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="338900001" valueType="Boolean" logicalName="PM1.SensorPowerboxinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="338910001" valueType="Boolean" logicalName="PM1.SensorWTRinterlockreset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="338920001" valueType="Boolean" logicalName="PM1.AlarmSignalMS6.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="338930001" valueType="F8" logicalName="PM1.MS6.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="338940001" valueType="Boolean" logicalName="PM1.SensorPS14OUT1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="338950001" valueType="F8" logicalName="PM1.VG14.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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+ <SVID id="338960001" valueType="F8" logicalName="PM1.VG15.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
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<SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
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@@ -9082,6 +9088,7 @@
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<DVID id="3515" valueType="List" logicalName="BufferMaterialInfo" value="" eventTrigger="" description="List of BufferMaterial.
L, n
L, 3
<BufferMaterial> 
<TimeIn>
<TimeOut>" isArray="false" />
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<DVID id="3518" valueType="Ascii" logicalName="PPStepChange" value="" eventTrigger="" description="BoatThickness" isArray="false" />
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<DVID id="3519" valueType="List" logicalName="ProcessCarrierIDList" value="" eventTrigger="" description="List of process CarrierID.
L, n
L, 3
<CarrierID> 
<TimeIn>
<TimeOut>" isArray="false" />
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+ <DVID id="3520" valueType="List" logicalName="ProcessWaferIdList" value="" eventTrigger="" description="List of process waferID.
L, n
L, 3
<waferID> 
<TimeIn>
<TimeOut>" isArray="false" />
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<DVID id="3526" valueType="List" logicalName="BoatSlotMapList" value="" eventTrigger="" description="List of boat map slot result.
L, n
L, 3
<SlotMapInt> 
<TimeIn>
<TimeOut>" isArray="false" />
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</DataVariables>
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<DataCollections useAnnotatedEvent="false">
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@@ -9137,6 +9144,8 @@
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
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<ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
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+ <ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
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+ <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
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</RPTID>
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<RPTID id="12" logicalName="DefaultDefinedReport_12">
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<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
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@@ -9146,24 +9155,30 @@
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<ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
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</RPTID>
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<RPTID id="13" logicalName="DefaultDefinedReport_13">
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+ <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
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+ <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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+ <ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
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+ <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
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+ </RPTID>
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+ <RPTID id="14" logicalName="DefaultDefinedReport_14">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="14" logicalName="DefaultDefinedReport_14">
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+ <RPTID id="15" logicalName="DefaultDefinedReport_15">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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<ReportVariable id="3526" varType="DataVariable" logicalName="BoatSlotMapList" />
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</RPTID>
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- <RPTID id="15" logicalName="DefaultDefinedReport_15">
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+ <RPTID id="16" logicalName="DefaultDefinedReport_16">
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<ReportVariable id="3301" varType="DataVariable" logicalName="CJID" />
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="16" logicalName="DefaultDefinedReport_16">
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+ <RPTID id="17" logicalName="DefaultDefinedReport_17">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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</RPTID>
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- <RPTID id="17" logicalName="DefaultDefinedReport_17">
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+ <RPTID id="18" logicalName="DefaultDefinedReport_18">
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
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@@ -9171,7 +9186,7 @@
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<ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="18" logicalName="DefaultDefinedReport_18">
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+ <RPTID id="19" logicalName="DefaultDefinedReport_19">
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
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@@ -9193,12 +9208,12 @@
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<ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
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<ReportVariable id="3101" varType="DataVariable" logicalName="EventName" />
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</RPTID>
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- <RPTID id="19" logicalName="DefaultDefinedReport_19">
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+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="20" logicalName="DefaultDefinedReport_20">
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+ <RPTID id="21" logicalName="DefaultDefinedReport_21">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
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@@ -9207,7 +9222,7 @@
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<ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="21" logicalName="DefaultDefinedReport_21">
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+ <RPTID id="22" logicalName="DefaultDefinedReport_22">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
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@@ -9215,34 +9230,34 @@
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<ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="22" logicalName="DefaultDefinedReport_22">
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+ <RPTID id="23" logicalName="DefaultDefinedReport_23">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
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<ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="23" logicalName="DefaultDefinedReport_23">
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+ <RPTID id="24" logicalName="DefaultDefinedReport_24">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="24" logicalName="DefaultDefinedReport_24">
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+ <RPTID id="25" logicalName="DefaultDefinedReport_25">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="25" logicalName="DefaultDefinedReport_25">
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+ <RPTID id="26" logicalName="DefaultDefinedReport_26">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="26" logicalName="DefaultDefinedReport_26">
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+ <RPTID id="27" logicalName="DefaultDefinedReport_27">
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<ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="27" logicalName="DefaultDefinedReport_27">
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+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
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<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
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@@ -9251,7 +9266,7 @@
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<ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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- <RPTID id="28" logicalName="DefaultDefinedReport_28">
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+ <RPTID id="29" logicalName="DefaultDefinedReport_29">
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<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
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<ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
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<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
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@@ -9411,6 +9426,8 @@
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
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<ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
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+ <ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
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+ <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
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</RPTID>
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</CEID>
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<CEID id="2001" logicalName="RecipeComplete" description="" enabled="true">
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@@ -9419,6 +9436,8 @@
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
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<ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
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+ <ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
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+ <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
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</RPTID>
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</CEID>
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<CEID id="2002" logicalName="RecipeStepStart" description="" enabled="true">
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@@ -9440,7 +9459,7 @@
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</RPTID>
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</CEID>
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<CEID id="2004" logicalName="RecipeFailed" description="" enabled="true">
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- <RPTID id="11" logicalName="DefaultDefinedReport_11">
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+ <RPTID id="13" logicalName="DefaultDefinedReport_13">
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<ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3108" varType="DataVariable" logicalName="StationName" />
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@@ -9448,33 +9467,33 @@
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</RPTID>
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</CEID>
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<CEID id="2010" logicalName="ChargeStart" description="" enabled="true">
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- <RPTID id="13" logicalName="DefaultDefinedReport_13">
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+ <RPTID id="14" logicalName="DefaultDefinedReport_14">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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</CEID>
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<CEID id="2011" logicalName="ChargeEnd" description="" enabled="true">
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- <RPTID id="14" logicalName="DefaultDefinedReport_14">
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+ <RPTID id="15" logicalName="DefaultDefinedReport_15">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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<ReportVariable id="3526" varType="DataVariable" logicalName="BoatSlotMapList" />
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</RPTID>
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</CEID>
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<CEID id="2012" logicalName="DischargeStart" description="" enabled="true">
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- <RPTID id="14" logicalName="DefaultDefinedReport_14">
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+ <RPTID id="15" logicalName="DefaultDefinedReport_15">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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<ReportVariable id="3526" varType="DataVariable" logicalName="BoatSlotMapList" />
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</RPTID>
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</CEID>
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<CEID id="2013" logicalName="DischargeEnd" description="" enabled="true">
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- <RPTID id="13" logicalName="DefaultDefinedReport_13">
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+ <RPTID id="14" logicalName="DefaultDefinedReport_14">
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
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</RPTID>
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</CEID>
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<CEID id="2020" logicalName="BatchLocOccupied" description="" enabled="true">
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- <RPTID id="15" logicalName="DefaultDefinedReport_15">
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+ <RPTID id="16" logicalName="DefaultDefinedReport_16">
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<ReportVariable id="3301" varType="DataVariable" logicalName="CJID" />
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
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@@ -9482,7 +9501,7 @@
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</RPTID>
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</CEID>
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<CEID id="2021" logicalName="BatchLocUnOccupied" description="" enabled="true">
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- <RPTID id="15" logicalName="DefaultDefinedReport_15">
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+ <RPTID id="16" logicalName="DefaultDefinedReport_16">
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<ReportVariable id="3301" varType="DataVariable" logicalName="CJID" />
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<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
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<ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
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@@ -9490,17 +9509,17 @@
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</RPTID>
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</CEID>
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<CEID id="2022" logicalName="SideDummyStateAlarm" description="" enabled="true">
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- <RPTID id="16" logicalName="DefaultDefinedReport_16">
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+ <RPTID id="17" logicalName="DefaultDefinedReport_17">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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</RPTID>
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</CEID>
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<CEID id="2023" logicalName="ExtraDummyStateAlarm" description="" enabled="true">
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- <RPTID id="16" logicalName="DefaultDefinedReport_16">
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+ <RPTID id="17" logicalName="DefaultDefinedReport_17">
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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</RPTID>
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</CEID>
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<CEID id="2024" logicalName="CarrierInEnd" description="" enabled="true">
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- <RPTID id="17" logicalName="DefaultDefinedReport_17">
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+ <RPTID id="18" logicalName="DefaultDefinedReport_18">
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
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@@ -9510,7 +9529,7 @@
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</RPTID>
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</CEID>
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<CEID id="2025" logicalName="CarrierOutStart" description="" enabled="true">
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- <RPTID id="17" logicalName="DefaultDefinedReport_17">
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+ <RPTID id="18" logicalName="DefaultDefinedReport_18">
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<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
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<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
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<ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
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@@ -9520,7 +9539,7 @@
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</RPTID>
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</CEID>
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<CEID id="2026" logicalName="CarrierInStart" description="" enabled="true">
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- <RPTID id="17" logicalName="DefaultDefinedReport_17">
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|
|
+ <RPTID id="18" logicalName="DefaultDefinedReport_18">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
|
|
|
@@ -9530,7 +9549,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="2027" logicalName="CarrierOutEnd" description="" enabled="true">
|
|
|
- <RPTID id="18" logicalName="DefaultDefinedReport_18">
|
|
|
+ <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
|
|
|
@@ -9554,101 +9573,101 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="2028" logicalName="SideDummyStateWarning" description="" enabled="true">
|
|
|
- <RPTID id="16" logicalName="DefaultDefinedReport_16">
|
|
|
+ <RPTID id="17" logicalName="DefaultDefinedReport_17">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="2029" logicalName="ExtraDummyStateWarning" description="" enabled="true">
|
|
|
- <RPTID id="16" logicalName="DefaultDefinedReport_16">
|
|
|
+ <RPTID id="17" logicalName="DefaultDefinedReport_17">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30200" logicalName="LPT_NtoO" description="Load Port Transfer State change form NA to Out of Service" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30201" logicalName="LPT_NtoI" description="Load Port transfer state change from NA to in service" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30202" logicalName="LPT_OtoI" description="Out of service to in service" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30203" logicalName="LPT_ItoO" description="In service to out of service" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30204" logicalName="LPT_ItoTR" description="In service to transfer ready" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30205" logicalName="LPT_ItoTB" description="In service to Transfer block" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30206" logicalName="LPT_TRtoRTL" description="Transfer ready to Ready to load" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30207" logicalName="LPT_TRtoRTU" description="Transfer ready to read to unload" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30208" logicalName="LPT_RTLtoTB" description="Ready to unload to transfer block" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30209" logicalName="LPT_RTUtoTB" description="RTU to TB" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30210" logicalName="LPT_TBtoRTL" description="TB to RTL" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30211" logicalName="LPT_TBtoRTU" description="TB to RTU" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30212" logicalName="LPT_TBtoTR" description="TB to TR" enabled="true">
|
|
|
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
|
|
|
+ <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
@@ -9732,7 +9751,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30240" logicalName="CSM_SMNRtoWFH" description="Carrier Slot map change from not read to wait for host" enabled="true">
|
|
|
- <RPTID id="20" logicalName="DefaultDefinedReport_20">
|
|
|
+ <RPTID id="21" logicalName="DefaultDefinedReport_21">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
|
|
|
@@ -9743,7 +9762,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30241" logicalName="CSM_SMNRtoSMVO" description="Carrier Slot map change from not read to verification OK" enabled="true">
|
|
|
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
|
|
|
+ <RPTID id="22" logicalName="DefaultDefinedReport_22">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
@@ -9753,7 +9772,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30242" logicalName="CSM_WFHtoSMVO" description="Wait for host to verification OK" enabled="true">
|
|
|
- <RPTID id="22" logicalName="DefaultDefinedReport_22">
|
|
|
+ <RPTID id="23" logicalName="DefaultDefinedReport_23">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
|
|
|
@@ -9762,7 +9781,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30243" logicalName="CSM_WFHtoSMVF" description="Wait for host to verification failed" enabled="true">
|
|
|
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
|
|
|
+ <RPTID id="22" logicalName="DefaultDefinedReport_22">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
@@ -9772,7 +9791,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30244" logicalName="CSM_SMNRtoSMVF" description="Not read to verification failed" enabled="true">
|
|
|
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
|
|
|
+ <RPTID id="22" logicalName="DefaultDefinedReport_22">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
@@ -9782,28 +9801,28 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30250" logicalName="CA_NAtoIA" description="Carrier access state change from Not access to in access" enabled="true">
|
|
|
- <RPTID id="23" logicalName="DefaultDefinedReport_23">
|
|
|
+ <RPTID id="24" logicalName="DefaultDefinedReport_24">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30251" logicalName="CA_IAtoCC" description="Carrier access state change from In access to carrier complete." enabled="true">
|
|
|
- <RPTID id="23" logicalName="DefaultDefinedReport_23">
|
|
|
+ <RPTID id="24" logicalName="DefaultDefinedReport_24">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30252" logicalName="CA_IAtoCS" description="In access to carrier stopped." enabled="true">
|
|
|
- <RPTID id="23" logicalName="DefaultDefinedReport_23">
|
|
|
+ <RPTID id="24" logicalName="DefaultDefinedReport_24">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30253" logicalName="CA_NAtoCS" description="NA to Carrier stopped" enabled="true">
|
|
|
- <RPTID id="23" logicalName="DefaultDefinedReport_23">
|
|
|
+ <RPTID id="24" logicalName="DefaultDefinedReport_24">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
@@ -9824,7 +9843,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30270" logicalName="LPCA_NAtoA" description="Load Port carrier assocation from Not associated to associated" enabled="true">
|
|
|
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
|
|
|
+ <RPTID id="25" logicalName="DefaultDefinedReport_25">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
@@ -9832,14 +9851,14 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30271" logicalName="LPCA_AtoNA" description="" enabled="true">
|
|
|
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
|
|
|
+ <RPTID id="26" logicalName="DefaultDefinedReport_26">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30272" logicalName="LPCA_AtoA" description="" enabled="true">
|
|
|
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
|
|
|
+ <RPTID id="25" logicalName="DefaultDefinedReport_25">
|
|
|
<ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
|
|
|
<ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
|
|
|
<ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
|
|
|
@@ -9847,25 +9866,25 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30280" logicalName="AM_NtoA" description="Access mode from NA to Auto" enabled="true">
|
|
|
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
|
|
|
+ <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
<ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30281" logicalName="AM_NtoM" description="Access mode from NA to Manual" enabled="true">
|
|
|
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
|
|
|
+ <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
<ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30282" logicalName="AM_MtoA" description="Access mode from Manual to Auto" enabled="true">
|
|
|
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
|
|
|
+ <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
<ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30283" logicalName="AM_AtoM" description="Access mot changed from auto to manual" enabled="true">
|
|
|
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
|
|
|
+ <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
<ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
|
|
|
<ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
|
|
|
</RPTID>
|
|
|
@@ -9932,7 +9951,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30500" logicalName="CJ_CREATED" description="State change report : (no state)→QUEUED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -9943,7 +9962,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30501" logicalName="CJ_CANCELD" description="State change report : QUEUED→(no state)" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -9954,7 +9973,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30502" logicalName="CJ_SELECTED" description="State change report : QUEUED→SELECTED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -9965,7 +9984,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30504" logicalName="CJ_EXECUTING_5" description="State change report : SELECTED→EXECUTING(Control Job State Transition _5)" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -9976,7 +9995,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30505" logicalName="CJ_EXECUTING_7" description="State change report : WAITING FOR START→EXECUTING(Control Job State Transition _7" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -9987,7 +10006,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30506" logicalName="CJ_WAITINGFORSTART" description="State change report : SELECTED→WAITING FOR START" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -9998,7 +10017,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30507" logicalName="CJ_PAUSED" description="State change report : EXECUTING→PAUSED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10009,7 +10028,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30508" logicalName="CJ_RESUME" description="State change report : PAUSED→EXECUTING" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10020,7 +10039,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30509" logicalName="CJ_COMPLETE" description="State change report : EXECUTING→COMPLETED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10031,7 +10050,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30510" logicalName="CJ_STOPPED" description="Stop Process.State change report : ACTIVE→COMPLETED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10042,7 +10061,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30511" logicalName="CJ_ABORTED" description="Abort Process.State change report : ACTIVE→COMPLETED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10053,7 +10072,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30512" logicalName="CJ_DELETED" description="State change report : COMPLETED→(no state)" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10064,7 +10083,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30600" logicalName="PJ_CREATED" description="State change report : (no state)→POOLED" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10075,7 +10094,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30601" logicalName="PJ_SETTINGUP" description="State change report : POOLED→SETTING UP" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10086,7 +10105,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30602" logicalName="PJ_WAITINGFORSTART" description="State change report : SETTING UP→WAITING FOR START" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10097,7 +10116,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30603" logicalName="PJ_PROCESSING_4" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10108,7 +10127,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30604" logicalName="PJ_PROCESSING_5" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10119,7 +10138,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30605" logicalName="PJ_PRCOMPLETED" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10130,7 +10149,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30606" logicalName="PJ_COMPLETED" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10141,7 +10160,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30607" logicalName="PJ_PAUSING" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10152,7 +10171,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30608" logicalName="PJ_PAUSED" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10163,7 +10182,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30609" logicalName="PJ_RESUMED" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10174,7 +10193,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30610" logicalName="PJ_STOPPING_11" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10185,7 +10204,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30611" logicalName="PJ_STOPPING_12" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10196,7 +10215,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30612" logicalName="PJ_STOPPED" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10207,7 +10226,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30613" logicalName="PJ_ABORTING_13" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10218,7 +10237,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30614" logicalName="PJ_ABORTING_14" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10229,7 +10248,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30615" logicalName="PJ_ABORTING_15" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10240,7 +10259,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30616" logicalName="PJ_ABORTED" description="" enabled="true">
|
|
|
- <RPTID id="27" logicalName="DefaultDefinedReport_27">
|
|
|
+ <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
<ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
|
|
|
<ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
|
|
|
<ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
|
|
|
@@ -10251,7 +10270,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30706" logicalName="STS_ATDESTINATION" description="" enabled="true">
|
|
|
- <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
+ <RPTID id="29" logicalName="DefaultDefinedReport_29">
|
|
|
<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
|
|
|
<ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
|
|
|
<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
|
|
|
@@ -10259,7 +10278,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30710" logicalName="STS_PROCESSED" description="" enabled="true">
|
|
|
- <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
+ <RPTID id="29" logicalName="DefaultDefinedReport_29">
|
|
|
<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
|
|
|
<ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
|
|
|
<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
|
|
|
@@ -10267,7 +10286,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30711" logicalName="STS_ABORTED" description="" enabled="true">
|
|
|
- <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
+ <RPTID id="29" logicalName="DefaultDefinedReport_29">
|
|
|
<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
|
|
|
<ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
|
|
|
<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
|
|
|
@@ -10275,7 +10294,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30711" logicalName="STS_STOPPED" description="" enabled="true">
|
|
|
- <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
+ <RPTID id="29" logicalName="DefaultDefinedReport_29">
|
|
|
<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
|
|
|
<ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
|
|
|
<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
|
|
|
@@ -10283,7 +10302,7 @@
|
|
|
</RPTID>
|
|
|
</CEID>
|
|
|
<CEID id="30712" logicalName="STS_REJECTED" description="" enabled="true">
|
|
|
- <RPTID id="28" logicalName="DefaultDefinedReport_28">
|
|
|
+ <RPTID id="29" logicalName="DefaultDefinedReport_29">
|
|
|
<ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
|
|
|
<ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
|
|
|
<ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
|
|
|
@@ -10315,8 +10334,8 @@
|
|
|
</CEIDs>
|
|
|
</DataCollections>
|
|
|
<Alarms>
|
|
|
- <ALID id="10010001" logicalName="System.BoatRecipeThicknessAlarm" description="Boat RecipeThickness Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
|
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- <ALID id="10010002" logicalName="System.BoatRecipeThicknessWarning" description="Boat RecipeThickness Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010001" logicalName="System.BoatRecipeThicknessAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010002" logicalName="System.BoatRecipeThicknessWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010003" logicalName="System.ChargeProcessDischargeStartFailedWarning" description="ChargeProcessDischarge start failed " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010004" logicalName="System.ChargeWaferJobMonitorFailedAlarm" description="ChargeWafer job monitor start failed " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010005" logicalName="System.ChargeWaferJobStartFailedWarning" description="ChargeWafer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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@@ -10340,16 +10359,16 @@
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<ALID id="10010023" logicalName="System.MWaferTypeUseCountWarning" description="M wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010024" logicalName="System.PLCConnectRecoveryWarning" description="PLC connect recovery " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010025" logicalName="System.PLCDisconnectAlarm" description="PLC disconnect " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010026" logicalName="System.ReatorStepRunFreqAlarm" description="ReatorStepRunFreq Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010027" logicalName="System.ReatorStepRunFreqWarning" description="ReatorStepRunFreq Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010028" logicalName="System.ReatorStepRunTimeAlarm" description="ReatorStepRunTime Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010029" logicalName="System.ReatorStepRunTimeWarning" description="ReatorStepRunTime Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010030" logicalName="System.ReatorStepThicknessAlarm" description="ReatorStepThickness Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010031" logicalName="System.ReatorStepThicknessWarning" description="ReatorStepThickness Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010032" logicalName="System.RecipeExecuteFreqAlarm" description="RecipeExecuteFreq Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010033" logicalName="System.RecipeExecuteFreqWarning" description="RecipeExecuteFreq Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010034" logicalName="System.RecipeThicknessAlarm" description="RecipeThickness Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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- <ALID id="10010035" logicalName="System.RecipeThicknessWarning" description="RecipeThickness Warning" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010026" logicalName="System.ReatorStepRunFreqAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010027" logicalName="System.ReatorStepRunFreqWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010028" logicalName="System.ReatorStepRunTimeAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010029" logicalName="System.ReatorStepRunTimeWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010030" logicalName="System.ReatorStepThicknessAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010031" logicalName="System.ReatorStepThicknessWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010032" logicalName="System.RecipeExecuteFreqAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010033" logicalName="System.RecipeExecuteFreqWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010034" logicalName="System.RecipeThicknessAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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+ <ALID id="10010035" logicalName="System.RecipeThicknessWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010036" logicalName="System.ReturnAllWaferJobStartFailedWarning" description="ReturnAllWafer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010037" logicalName="System.ReturnWaferFailedWarning" description="Return wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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<ALID id="10010038" logicalName="System.SDWaferTypeThicknessAlarm" description="SD wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1000101" eventClear="2000101" />
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@@ -10917,19 +10936,19 @@
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<ALID id="330010512" logicalName="PM1.ExhaustBoxExhaustMS4ToleranceAlarm" description="ExhaustBoxExhaustMS4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010513" logicalName="PM1.ExhaustBoxExhaustMS4ToleranceWarning" description="ExhaustBoxExhaustMS4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010514" logicalName="PM1.FlowConvergenceTimeOutAlarm" description="Flow convergence timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010515" logicalName="PM1.ForLineCapsOverFlownAlarm" description="ForLine CapsOver Flown Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010516" logicalName="PM1.ForLineFloorOverFlowAlarm" description="ForLine FloorOver FlowAlarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010517" logicalName="PM1.ForLineOverTempAlarm" description="ForLine OverTemp Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010518" logicalName="PM1.ForLineTcBrokenAlarm" description="ForLine TcBroken Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010515" logicalName="PM1.ForLineCapsOverFlownAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010516" logicalName="PM1.ForLineFloorOverFlowAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010517" logicalName="PM1.ForLineOverTempAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010518" logicalName="PM1.ForLineTcBrokenAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010519" logicalName="PM1.FrontBodyExhaustMS6ToleranceAlarm" description="FrontBodyExhaustMS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010520" logicalName="PM1.FrontBodyExhaustMS6ToleranceWarning" description="FrontBodyExhaustMS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010521" logicalName="PM1.FurnaceTempabnormalAlarm" description="Furnace Temp abnormal Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010521" logicalName="PM1.FurnaceTempabnormalAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010522" logicalName="PM1.GasBoxExhaustMS2ToleranceAlarm" description="GasBoxExhaustMS2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010523" logicalName="PM1.GasBoxExhaustMS2ToleranceWarning" description="GasBoxExhaustMS2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010524" logicalName="PM1.GasLineCapsOverFlownAlarm" description="GasLine CapsOver Flow Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010525" logicalName="PM1.GasLineFloorOverFlowAlarm" description="GasLine FloorOver Flow Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010526" logicalName="PM1.GasLineOverTempAlarm" description="GasLine OverTemp Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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- <ALID id="330010527" logicalName="PM1.GasLineTcBrokenAlarm" description="GasLine TcBroken Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010524" logicalName="PM1.GasLineCapsOverFlownAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010525" logicalName="PM1.GasLineFloorOverFlowAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010526" logicalName="PM1.GasLineOverTempAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010527" logicalName="PM1.GasLineTcBrokenAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010528" logicalName="PM1.Heater10ToleranceAlarm" description="Heater10 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010529" logicalName="PM1.Heater10ToleranceWarning" description="Heater10 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010530" logicalName="PM1.Heater1ToleranceAlarm" description="Heater1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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@@ -11292,6 +11311,11 @@
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<ALID id="330010887" logicalName="PM1.WaterFlowFS111ToleranceWarning" description="WaterFlowFS111 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010888" logicalName="PM1.WaterFlowFS116ToleranceAlarm" description="WaterFlowFS116 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="330010889" logicalName="PM1.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010890" logicalName="PM1.AlarmSignalMS6Alarm" description="MS6 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010891" logicalName="PM1.MS6ToleranceAlarm" description="MS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010892" logicalName="PM1.MS6ToleranceWarning" description="MS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010893" logicalName="PM1.VG15ToleranceAlarm" description="VG15 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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+ <ALID id="330010894" logicalName="PM1.VG15ToleranceWarning" description="VG15 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1003301" eventClear="2003301" />
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<ALID id="860010001" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1008601" eventClear="2008601" />
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<ALID id="860010002" logicalName="WaferRobot.BladeWaferNotPresentWarning" description="Blade wafer not present " category="EquipmentStatusWarning" enabled="false" eventSet="1008601" eventClear="2008601" />
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<ALID id="860010003" logicalName="WaferRobot.BladeWaferPresentWarning" description="Blade wafer present " category="EquipmentStatusWarning" enabled="false" eventSet="1008601" eventClear="2008601" />
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