update vids

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -13660,15 +13660,6 @@
     <ALID id="330010067" logicalName="PM1.AlarmSignalFBEMO1" description="FB EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010067" eventClear="2330010067" />
     <ALID id="330010068" logicalName="PM1.AlarmSignalFBEMO2" description="FB EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010068" eventClear="2330010068" />
     <ALID id="330010069" logicalName="PM1.AlarmSignalFBFrontDoorSwitch" description="FB Front Door Switch Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010069" eventClear="2330010069" />
-    <ALID id="330010070" logicalName="PM1.AlarmSignalFFU1DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010070" eventClear="2330010070" />
-    <ALID id="330010071" logicalName="PM1.AlarmSignalFFU2DataWriteError" description="FFU2 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010071" eventClear="2330010071" />
-    <ALID id="330010072" logicalName="PM1.AlarmSignalFFU3DataWriteError" description="FFU3 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010072" eventClear="2330010072" />
-    <ALID id="330010073" logicalName="PM1.AlarmSignalFFU4DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010073" eventClear="2330010073" />
-    <ALID id="330010074" logicalName="PM1.AlarmSignalFFU5DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010074" eventClear="2330010074" />
-    <ALID id="330010075" logicalName="PM1.AlarmSignalFFU6DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010075" eventClear="2330010075" />
-    <ALID id="330010076" logicalName="PM1.AlarmSignalFFU7DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010076" eventClear="2330010076" />
-    <ALID id="330010077" logicalName="PM1.AlarmSignalFFU8DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010077" eventClear="2330010077" />
-    <ALID id="330010078" logicalName="PM1.AlarmSignalFFU9DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010078" eventClear="2330010078" />
     <ALID id="330010079" logicalName="PM1.AlarmSignalFilterBox1DoorSwitch" description="Filter Box1 Door Switch" category="EquipmentStatusWarning" enabled="false" eventSet="1330010079" eventClear="2330010079" />
     <ALID id="330010080" logicalName="PM1.AlarmSignalFilterBox1Fan1Alarm" description="Filter Box1 Fan1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010080" eventClear="2330010080" />
     <ALID id="330010081" logicalName="PM1.AlarmSignalFilterBox1Fan2Alarm" description="Filter Box1 Fan2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010081" eventClear="2330010081" />
@@ -13887,7 +13878,7 @@
     <ALID id="330010294" logicalName="PM1.APCSetModeAlarm" description="PM1 APC alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010294" eventClear="2330010294" />
     <ALID id="330010295" logicalName="PM1.AUCPump InterlockAlarm" description="AUCPump Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010295" eventClear="2330010295" />
     <ALID id="330010296" logicalName="PM1.AutoProfileTimeOutAlarm" description="Auto profile timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010296" eventClear="2330010296" />
-      <ALID id="330010523" logicalName="PM1.BoatHomeFailedWarning" description="Boat home failed warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010523" eventClear="2330010523" />
+    <ALID id="330010523" logicalName="PM1.BoatHomeFailedWarning" description="Boat home failed warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010523" eventClear="2330010523" />
     <ALID id="330010524" logicalName="PM1.BoatMoveTimeOutAlarm" description="Boat move timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010524" eventClear="2330010524" />
     <ALID id="330010525" logicalName="PM1.BoatMoveToLoadPositionTimeoutWarning" description="Boat Move To Load Position Timeout Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010525" eventClear="2330010525" />
     <ALID id="330010526" logicalName="PM1.BothPump1 InterlockAlarm" description="BothPump1 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010526" eventClear="2330010526" />
@@ -14820,7 +14811,7 @@
     <ALID id="330011453" logicalName="PM1.AlarmSignalBufferD2N2LowPressureError" description="Buffer D2 N2 Low Pressure Error" category="EquipmentStatusWarning" enabled="false" eventSet="1330011453" eventClear="2330011453" />
     <ALID id="330011454" logicalName="PM1.AlarmSignalBufferD3N2LowPressureError" description="Buffer D3 N2 Low Pressure Error" category="EquipmentStatusWarning" enabled="false" eventSet="1330011454" eventClear="2330011454" />
     <ALID id="330011455" logicalName="PM1.AlarmSignalBufferD4N2LowPressureError" description="Buffer D4 N2 Low Pressure Error" category="EquipmentStatusWarning" enabled="false" eventSet="1330011455" eventClear="2330011455" />
-  <ALID id="860010001" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1860010001" eventClear="2860010001" />
+    <ALID id="860010001" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1860010001" eventClear="2860010001" />
     <ALID id="860010002" logicalName="WaferRobot.BladeWaferNotPresentWarning" description="Blade wafer not present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010002" eventClear="2860010002" />
     <ALID id="860010003" logicalName="WaferRobot.BladeWaferPresentWarning" description="Blade wafer present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010003" eventClear="2860010003" />
     <ALID id="860010004" logicalName="WaferRobot.CheckLoadFailAlarm" description="Check load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010004" eventClear="2860010004" />