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修复lotID未上报

jiangjy 1 month ago
parent
commit
c1321a3a17

+ 4 - 4
Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -9089,7 +9089,7 @@
     <DVID id="3518" valueType="Ascii" logicalName="PPStepChange" value="" eventTrigger="" description="BoatThickness" isArray="false" />
     <DVID id="3519" valueType="List" logicalName="ProcessCarrierIDList" value="" eventTrigger="" description="List of process CarrierID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;CarrierID&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
     <DVID id="3520" valueType="List" logicalName="ProcessWaferIdList" value="" eventTrigger="" description="List of process waferID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;waferID&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
-    <DVID id="3521" valueType="List" logicalName="LotIdList" value="" eventTrigger="" description="List of process waferID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;LotIdList&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
+    <DVID id="3521" valueType="List" logicalName="ProcessLotIdList" value="" eventTrigger="" description="List of process LotId.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;ProcessLotIdList&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
     <DVID id="3526" valueType="List" logicalName="BoatSlotMapList" value="" eventTrigger="" description="List of boat map slot result.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;SlotMapInt&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" isArray="false" />
   </DataVariables>
   <DataCollections useAnnotatedEvent="false">
@@ -9147,7 +9147,7 @@
         <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
         <ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
         <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
-        <ReportVariable id="3521" varType="DataVariable" logicalName="LotIdList" />
+        <ReportVariable id="3521" varType="DataVariable" logicalName="ProcessLotIdList" />
       </RPTID>
       <RPTID id="12" logicalName="DefaultDefinedReport_12">
         <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
@@ -9430,7 +9430,7 @@
           <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
           <ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
           <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
-          <ReportVariable id="3521" varType="DataVariable" logicalName="LotIdList" />
+          <ReportVariable id="3521" varType="DataVariable" logicalName="ProcessLotIdList" />
         </RPTID>
       </CEID>
       <CEID id="2001" logicalName="RecipeComplete" description="" enabled="true">
@@ -9441,7 +9441,7 @@
           <ReportVariable id="3110" varType="DataVariable" logicalName="SlotID" />
           <ReportVariable id="3520" varType="DataVariable" logicalName="ProcessWaferIdList" />
           <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
-          <ReportVariable id="3521" varType="DataVariable" logicalName="LotIdList" />
+          <ReportVariable id="3521" varType="DataVariable" logicalName="ProcessLotIdList" />
         </RPTID>
       </CEID>
       <CEID id="2002" logicalName="RecipeStepStart" description="" enabled="true">

+ 1 - 1
Furnace/FurnaceRT/Config/VIDs/_DVID.xml

@@ -51,6 +51,6 @@
   <VIDItem Name="PPStepChange" Index="3518" DataType="String" Description="BoatThickness" Module="System" Type="" Unit="" Parameter="PPStepChange" />
   <VIDItem Name="ProcessCarrierIDList" Index="3519" DataType="List" Description="List of process CarrierID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;CarrierID&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" Module="System" Type="" Unit="" Parameter="ProcessCarrierIDList" />
   <VIDItem Name="ProcessWaferIdList" Index="3520" DataType="List" Description="List of process waferID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;waferID&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" Module="System" Type="" Unit="" Parameter="ProcessWaferIdList" />
-  <VIDItem Name="LotIdList" Index="3521" DataType="List" Description="List of process waferID.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;LotIdList&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" Module="System" Type="" Unit="" Parameter="LotIdList" />
+  <VIDItem Name="ProcessLotIdList" Index="3521" DataType="List" Description="List of process LotId.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;ProcessLotIdList&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" Module="System" Type="" Unit="" Parameter="ProcessLotIdList" />
   <VIDItem Name="BoatSlotMapList" Index="3526" DataType="List" Description="List of boat map slot result.&#xD;&#xA;L, n&#xD;&#xA;L, 3&#xD;&#xA;&lt;SlotMapInt&gt; &#xD;&#xA;&lt;TimeIn&gt;&#xD;&#xA;&lt;TimeOut&gt;" Module="System" Type="" Unit="" Parameter="BoatSlotMapList" />
 </ArrayOfVIDItem>

+ 9 - 11
Furnace/FurnaceRT/Equipments/PMs/RecipeFACallback.cs

@@ -83,7 +83,7 @@ namespace FurnaceRT.Equipments.PMs
             {
                 foreach (var wafer in wafers)
                 {
-                    if (!(fdcwafers.Contains(wafer.OriginCarrierID)))
+                    if (!(fdcCarriers.Contains(wafer.OriginCarrierID)))
                     {
                         fdcCarriers.Add(wafer.OriginCarrierID);
                     }
@@ -92,7 +92,7 @@ namespace FurnaceRT.Equipments.PMs
                     {
                         fdcwafers.Add(wafer.WaferID);
                     }
-                    if (!(fdcwafers.Contains(wafer.LotId)))
+                    if (!(fdcLotIds.Contains(wafer.LotId)))
                     {
                         fdcLotIds.Add(wafer.LotId);
                     }
@@ -116,15 +116,13 @@ namespace FurnaceRT.Equipments.PMs
                 _fdcLotIds.Add("CRID", fdcid, SECsFormat.Ascii);
             }
 
-       
-
             EV.Notify(PMRecipeComplete[moduleName], new SerializableDictionary<string, object>()
             {
                 {DVIDName.RecipeID,  recipeName},
                 {DVIDName.StationName,  module},
                 {"ProcessWaferIdList",  _fdcwaferList},
                 {"ProcessCarrierIDList",  _fdccridlst},
-                {"LotIdList",  _fdcLotIds},
+                {"ProcessLotIdList",  _fdcLotIds},
             });
         }
 
@@ -149,7 +147,7 @@ namespace FurnaceRT.Equipments.PMs
             {
                 foreach (var wafer in wafers)
                 {
-                    if (!(fdcwafers.Contains(wafer.OriginCarrierID)))
+                    if (!(fdcCarriers.Contains(wafer.OriginCarrierID)))
                     {
                         fdcCarriers.Add(wafer.OriginCarrierID);
                     }
@@ -157,8 +155,8 @@ namespace FurnaceRT.Equipments.PMs
                     if (!(fdcwafers.Contains(wafer.WaferID)))
                     {
                         fdcwafers.Add(wafer.WaferID);
-                    }   
-                    if (!(fdcwafers.Contains(wafer.LotId)))
+                    }
+                    if (!(fdcLotIds.Contains(wafer.LotId)))
                     {
                         fdcLotIds.Add(wafer.LotId);
                     }
@@ -174,8 +172,8 @@ namespace FurnaceRT.Equipments.PMs
             foreach (var fdcid in fdcwafers)
             {
                 _fdcwaferList.Add("CRID", fdcid, SECsFormat.Ascii);
-            }    
-            
+            }
+
             SECsDataItem _fdcLotIds = new SECsDataItem(SECsFormat.List);
             foreach (var fdcid in fdcLotIds)
             {
@@ -188,7 +186,7 @@ namespace FurnaceRT.Equipments.PMs
                 {DVIDName.StationName,  module},
                 {"ProcessWaferIdList",  _fdcwaferList},
                 {"ProcessCarrierIDList",  _fdccridlst},
-                {"LotIdList",  _fdcLotIds},
+                {"ProcessLotIdList",  _fdcLotIds},
             });
         }