以机台GemModel版本变动：增加加热带温度等SVID

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -72,6 +72,7 @@
 		<SVID id="10010011" valueType="Boolean" logicalName="System.IsSpoolingEnable" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10010012" valueType="Ascii" logicalName="LP3_E84STATE" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10010013" valueType="Ascii" logicalName="LP4_E84STATE" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="10010014" valueType="Boolean" logicalName="RecipeEditLock" value="" eventTrigger="" units="" description="" isArray="false" />
 
 		<SVID id="10020001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="10030001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -1840,6 +1841,266 @@
 		<SVID id="1030010004" valueType="Ascii" logicalName="Scheduler.CycledTotalWafer" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="1030010005" valueType="Ascii" logicalName="Scheduler.CycledWafer" value="" eventTrigger="" units="" description="" isArray="false" />
 		<SVID id="1030010006" valueType="Ascii" logicalName="Scheduler.CycleSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+
+
+
+
+		<SVID id="1040010001" valueType="F8" logicalName="HeaterBand.1_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040010002" valueType="F8" logicalName="HeaterBand.1_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040020001" valueType="F8" logicalName="HeaterBand.1_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040020002" valueType="F8" logicalName="HeaterBand.1_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040030001" valueType="F8" logicalName="HeaterBand.1_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040030002" valueType="F8" logicalName="HeaterBand.1_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040040001" valueType="F8" logicalName="HeaterBand.1_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040040002" valueType="F8" logicalName="HeaterBand.1_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040050001" valueType="F8" logicalName="HeaterBand.1_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040050002" valueType="F8" logicalName="HeaterBand.1_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040060001" valueType="F8" logicalName="HeaterBand.1_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040060002" valueType="F8" logicalName="HeaterBand.1_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040070001" valueType="F8" logicalName="HeaterBand.1_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040070002" valueType="F8" logicalName="HeaterBand.1_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040080001" valueType="F8" logicalName="HeaterBand.1_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040080002" valueType="F8" logicalName="HeaterBand.1_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040090001" valueType="F8" logicalName="HeaterBand.1_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040090002" valueType="F8" logicalName="HeaterBand.1_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040100001" valueType="F8" logicalName="HeaterBand.1_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040100002" valueType="F8" logicalName="HeaterBand.1_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040110001" valueType="F8" logicalName="HeaterBand.1_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040110002" valueType="F8" logicalName="HeaterBand.1_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040120001" valueType="F8" logicalName="HeaterBand.1_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040120002" valueType="F8" logicalName="HeaterBand.1_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040130001" valueType="F8" logicalName="HeaterBand.1_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040130002" valueType="F8" logicalName="HeaterBand.1_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040140001" valueType="F8" logicalName="HeaterBand.1_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040140002" valueType="F8" logicalName="HeaterBand.1_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040150001" valueType="F8" logicalName="HeaterBand.1_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040150002" valueType="F8" logicalName="HeaterBand.1_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040160001" valueType="F8" logicalName="HeaterBand.1_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040160002" valueType="F8" logicalName="HeaterBand.1_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040170001" valueType="F8" logicalName="HeaterBand.2_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040170002" valueType="F8" logicalName="HeaterBand.2_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040180001" valueType="F8" logicalName="HeaterBand.2_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040180002" valueType="F8" logicalName="HeaterBand.2_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040190001" valueType="F8" logicalName="HeaterBand.2_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040190002" valueType="F8" logicalName="HeaterBand.2_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040200001" valueType="F8" logicalName="HeaterBand.2_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040200002" valueType="F8" logicalName="HeaterBand.2_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040210001" valueType="F8" logicalName="HeaterBand.2_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040210002" valueType="F8" logicalName="HeaterBand.2_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040220001" valueType="F8" logicalName="HeaterBand.2_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040220002" valueType="F8" logicalName="HeaterBand.2_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040230001" valueType="F8" logicalName="HeaterBand.2_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040230002" valueType="F8" logicalName="HeaterBand.2_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040240001" valueType="F8" logicalName="HeaterBand.2_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040240002" valueType="F8" logicalName="HeaterBand.2_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040250001" valueType="F8" logicalName="HeaterBand.2_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040250002" valueType="F8" logicalName="HeaterBand.2_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040260001" valueType="F8" logicalName="HeaterBand.2_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040260002" valueType="F8" logicalName="HeaterBand.2_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040270001" valueType="F8" logicalName="HeaterBand.2_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040270002" valueType="F8" logicalName="HeaterBand.2_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040280001" valueType="F8" logicalName="HeaterBand.2_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040280002" valueType="F8" logicalName="HeaterBand.2_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040290001" valueType="F8" logicalName="HeaterBand.2_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040290002" valueType="F8" logicalName="HeaterBand.2_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040300001" valueType="F8" logicalName="HeaterBand.2_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040300002" valueType="F8" logicalName="HeaterBand.2_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040310001" valueType="F8" logicalName="HeaterBand.2_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040310002" valueType="F8" logicalName="HeaterBand.2_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040320001" valueType="F8" logicalName="HeaterBand.2_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040320002" valueType="F8" logicalName="HeaterBand.2_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040330001" valueType="F8" logicalName="HeaterBand.3_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040330002" valueType="F8" logicalName="HeaterBand.3_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040340001" valueType="F8" logicalName="HeaterBand.3_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040340002" valueType="F8" logicalName="HeaterBand.3_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040350001" valueType="F8" logicalName="HeaterBand.3_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040350002" valueType="F8" logicalName="HeaterBand.3_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040360001" valueType="F8" logicalName="HeaterBand.3_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040360002" valueType="F8" logicalName="HeaterBand.3_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040370001" valueType="F8" logicalName="HeaterBand.3_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040370002" valueType="F8" logicalName="HeaterBand.3_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040380001" valueType="F8" logicalName="HeaterBand.3_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040380002" valueType="F8" logicalName="HeaterBand.3_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040390001" valueType="F8" logicalName="HeaterBand.3_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040390002" valueType="F8" logicalName="HeaterBand.3_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040400001" valueType="F8" logicalName="HeaterBand.3_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040400002" valueType="F8" logicalName="HeaterBand.3_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040410001" valueType="F8" logicalName="HeaterBand.3_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040410002" valueType="F8" logicalName="HeaterBand.3_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040420001" valueType="F8" logicalName="HeaterBand.3_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040420002" valueType="F8" logicalName="HeaterBand.3_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040430001" valueType="F8" logicalName="HeaterBand.3_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040430002" valueType="F8" logicalName="HeaterBand.3_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040440001" valueType="F8" logicalName="HeaterBand.3_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040440002" valueType="F8" logicalName="HeaterBand.3_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040450001" valueType="F8" logicalName="HeaterBand.3_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040450002" valueType="F8" logicalName="HeaterBand.3_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040460001" valueType="F8" logicalName="HeaterBand.3_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040460002" valueType="F8" logicalName="HeaterBand.3_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040470001" valueType="F8" logicalName="HeaterBand.3_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040470002" valueType="F8" logicalName="HeaterBand.3_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040480001" valueType="F8" logicalName="HeaterBand.3_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040480002" valueType="F8" logicalName="HeaterBand.3_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040490001" valueType="F8" logicalName="HeaterBand.4_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040490002" valueType="F8" logicalName="HeaterBand.4_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040500001" valueType="F8" logicalName="HeaterBand.4_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040500002" valueType="F8" logicalName="HeaterBand.4_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040510001" valueType="F8" logicalName="HeaterBand.4_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040510002" valueType="F8" logicalName="HeaterBand.4_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040520001" valueType="F8" logicalName="HeaterBand.4_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040520002" valueType="F8" logicalName="HeaterBand.4_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040530001" valueType="F8" logicalName="HeaterBand.4_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040530002" valueType="F8" logicalName="HeaterBand.4_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040540001" valueType="F8" logicalName="HeaterBand.4_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040540002" valueType="F8" logicalName="HeaterBand.4_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040550001" valueType="F8" logicalName="HeaterBand.4_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040550002" valueType="F8" logicalName="HeaterBand.4_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040560001" valueType="F8" logicalName="HeaterBand.4_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040560002" valueType="F8" logicalName="HeaterBand.4_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040570001" valueType="F8" logicalName="HeaterBand.4_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040570002" valueType="F8" logicalName="HeaterBand.4_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040580001" valueType="F8" logicalName="HeaterBand.4_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040580002" valueType="F8" logicalName="HeaterBand.4_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040590001" valueType="F8" logicalName="HeaterBand.4_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040590002" valueType="F8" logicalName="HeaterBand.4_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040600001" valueType="F8" logicalName="HeaterBand.4_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040600002" valueType="F8" logicalName="HeaterBand.4_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040610001" valueType="F8" logicalName="HeaterBand.4_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040610002" valueType="F8" logicalName="HeaterBand.4_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040620001" valueType="F8" logicalName="HeaterBand.4_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040620002" valueType="F8" logicalName="HeaterBand.4_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040630001" valueType="F8" logicalName="HeaterBand.4_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040630002" valueType="F8" logicalName="HeaterBand.4_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040640001" valueType="F8" logicalName="HeaterBand.4_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040640002" valueType="F8" logicalName="HeaterBand.4_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040650001" valueType="F8" logicalName="HeaterBand.5_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040650002" valueType="F8" logicalName="HeaterBand.5_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040660001" valueType="F8" logicalName="HeaterBand.5_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040660002" valueType="F8" logicalName="HeaterBand.5_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040670001" valueType="F8" logicalName="HeaterBand.5_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040670002" valueType="F8" logicalName="HeaterBand.5_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040680001" valueType="F8" logicalName="HeaterBand.5_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040680002" valueType="F8" logicalName="HeaterBand.5_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040690001" valueType="F8" logicalName="HeaterBand.5_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040690002" valueType="F8" logicalName="HeaterBand.5_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040700001" valueType="F8" logicalName="HeaterBand.5_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040700002" valueType="F8" logicalName="HeaterBand.5_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040710001" valueType="F8" logicalName="HeaterBand.5_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040710002" valueType="F8" logicalName="HeaterBand.5_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040720001" valueType="F8" logicalName="HeaterBand.5_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040720002" valueType="F8" logicalName="HeaterBand.5_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040730001" valueType="F8" logicalName="HeaterBand.5_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040730002" valueType="F8" logicalName="HeaterBand.5_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040740001" valueType="F8" logicalName="HeaterBand.5_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040740002" valueType="F8" logicalName="HeaterBand.5_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040750001" valueType="F8" logicalName="HeaterBand.5_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040750002" valueType="F8" logicalName="HeaterBand.5_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040760001" valueType="F8" logicalName="HeaterBand.5_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040760002" valueType="F8" logicalName="HeaterBand.5_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040770001" valueType="F8" logicalName="HeaterBand.5_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040770002" valueType="F8" logicalName="HeaterBand.5_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040780001" valueType="F8" logicalName="HeaterBand.5_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040780002" valueType="F8" logicalName="HeaterBand.5_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040790001" valueType="F8" logicalName="HeaterBand.5_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040790002" valueType="F8" logicalName="HeaterBand.5_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040800001" valueType="F8" logicalName="HeaterBand.5_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040800002" valueType="F8" logicalName="HeaterBand.5_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040810001" valueType="F8" logicalName="HeaterBand.6_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040810002" valueType="F8" logicalName="HeaterBand.6_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040820001" valueType="F8" logicalName="HeaterBand.6_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040820002" valueType="F8" logicalName="HeaterBand.6_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040830001" valueType="F8" logicalName="HeaterBand.6_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040830002" valueType="F8" logicalName="HeaterBand.6_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040840001" valueType="F8" logicalName="HeaterBand.6_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040840002" valueType="F8" logicalName="HeaterBand.6_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040850001" valueType="F8" logicalName="HeaterBand.6_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040850002" valueType="F8" logicalName="HeaterBand.6_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040860001" valueType="F8" logicalName="HeaterBand.6_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040860002" valueType="F8" logicalName="HeaterBand.6_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040870001" valueType="F8" logicalName="HeaterBand.6_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040870002" valueType="F8" logicalName="HeaterBand.6_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040880001" valueType="F8" logicalName="HeaterBand.6_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040880002" valueType="F8" logicalName="HeaterBand.6_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040890001" valueType="F8" logicalName="HeaterBand.6_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040890002" valueType="F8" logicalName="HeaterBand.6_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040900001" valueType="F8" logicalName="HeaterBand.6_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040900002" valueType="F8" logicalName="HeaterBand.6_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040910001" valueType="F8" logicalName="HeaterBand.6_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040910002" valueType="F8" logicalName="HeaterBand.6_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040920001" valueType="F8" logicalName="HeaterBand.6_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040920002" valueType="F8" logicalName="HeaterBand.6_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040930001" valueType="F8" logicalName="HeaterBand.6_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040930002" valueType="F8" logicalName="HeaterBand.6_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040940001" valueType="F8" logicalName="HeaterBand.6_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040940002" valueType="F8" logicalName="HeaterBand.6_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040950001" valueType="F8" logicalName="HeaterBand.6_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040950002" valueType="F8" logicalName="HeaterBand.6_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040960001" valueType="F8" logicalName="HeaterBand.6_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040960002" valueType="F8" logicalName="HeaterBand.6_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040970001" valueType="F8" logicalName="HeaterBand.7_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040970002" valueType="F8" logicalName="HeaterBand.7_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040980001" valueType="F8" logicalName="HeaterBand.7_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040980002" valueType="F8" logicalName="HeaterBand.7_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040990001" valueType="F8" logicalName="HeaterBand.7_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1040990002" valueType="F8" logicalName="HeaterBand.7_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041000001" valueType="F8" logicalName="HeaterBand.7_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041000002" valueType="F8" logicalName="HeaterBand.7_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041010001" valueType="F8" logicalName="HeaterBand.7_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041010002" valueType="F8" logicalName="HeaterBand.7_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041020001" valueType="F8" logicalName="HeaterBand.7_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041020002" valueType="F8" logicalName="HeaterBand.7_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041030001" valueType="F8" logicalName="HeaterBand.7_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041030002" valueType="F8" logicalName="HeaterBand.7_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041040001" valueType="F8" logicalName="HeaterBand.7_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041040002" valueType="F8" logicalName="HeaterBand.7_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041050001" valueType="F8" logicalName="HeaterBand.7_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041050002" valueType="F8" logicalName="HeaterBand.7_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041060001" valueType="F8" logicalName="HeaterBand.7_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041060002" valueType="F8" logicalName="HeaterBand.7_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041070001" valueType="F8" logicalName="HeaterBand.7_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041070002" valueType="F8" logicalName="HeaterBand.7_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041080001" valueType="F8" logicalName="HeaterBand.7_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041080002" valueType="F8" logicalName="HeaterBand.7_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041090001" valueType="F8" logicalName="HeaterBand.7_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041090002" valueType="F8" logicalName="HeaterBand.7_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041100001" valueType="F8" logicalName="HeaterBand.7_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041100002" valueType="F8" logicalName="HeaterBand.7_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041110001" valueType="F8" logicalName="HeaterBand.7_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041110002" valueType="F8" logicalName="HeaterBand.7_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041120001" valueType="F8" logicalName="HeaterBand.7_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041120002" valueType="F8" logicalName="HeaterBand.7_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041130001" valueType="F8" logicalName="HeaterBand.8_1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041130002" valueType="F8" logicalName="HeaterBand.8_1.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041140001" valueType="F8" logicalName="HeaterBand.8_10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041140002" valueType="F8" logicalName="HeaterBand.8_10.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041150001" valueType="F8" logicalName="HeaterBand.8_11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041150002" valueType="F8" logicalName="HeaterBand.8_11.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041160001" valueType="F8" logicalName="HeaterBand.8_12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041160002" valueType="F8" logicalName="HeaterBand.8_12.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041170001" valueType="F8" logicalName="HeaterBand.8_13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041170002" valueType="F8" logicalName="HeaterBand.8_13.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041180001" valueType="F8" logicalName="HeaterBand.8_14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041180002" valueType="F8" logicalName="HeaterBand.8_14.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041190001" valueType="F8" logicalName="HeaterBand.8_15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041190002" valueType="F8" logicalName="HeaterBand.8_15.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041200001" valueType="F8" logicalName="HeaterBand.8_16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041200002" valueType="F8" logicalName="HeaterBand.8_16.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041210001" valueType="F8" logicalName="HeaterBand.8_2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041210002" valueType="F8" logicalName="HeaterBand.8_2.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041220001" valueType="F8" logicalName="HeaterBand.8_3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041220002" valueType="F8" logicalName="HeaterBand.8_3.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041230001" valueType="F8" logicalName="HeaterBand.8_4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041230002" valueType="F8" logicalName="HeaterBand.8_4.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041240001" valueType="F8" logicalName="HeaterBand.8_5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041240002" valueType="F8" logicalName="HeaterBand.8_5.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041250001" valueType="F8" logicalName="HeaterBand.8_6.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041250002" valueType="F8" logicalName="HeaterBand.8_6.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041260001" valueType="F8" logicalName="HeaterBand.8_7.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041260002" valueType="F8" logicalName="HeaterBand.8_7.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041270001" valueType="F8" logicalName="HeaterBand.8_8.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041270002" valueType="F8" logicalName="HeaterBand.8_8.Power" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041280001" valueType="F8" logicalName="HeaterBand.8_9.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+		<SVID id="1041280002" valueType="F8" logicalName="HeaterBand.8_9.Power" value="" eventTrigger="" units="" description="" isArray="false" />
 	</StatusVariables>
 	<EquipmentConstants>
 		<ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
@@ -2749,6 +3010,9 @@
 		<ECID id="330540002" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Enable When Foup Enter" isArray="false" />
 		<ECID id="330540003" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge  Enable When Foup Enter" isArray="false" />
 		<ECID id="330540004" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Enable When Foup Enter" isArray="false" />
+		<ECID id="330540005" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="FOUP O2 CheckSV" isArray="false" />
+		<ECID id="330540006" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.LAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description=" LA O2 CheckSV" isArray="false" />
+
 		<ECID id="330550001" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable After BoatLoad" isArray="false" />
 		<ECID id="330550002" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitTime" value="" min="" max="" eventTrigger="" units="" description="FOUP TO FOUP WaitTime After BoatLoad" isArray="false" />
 		<ECID id="330560001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -2841,11 +3105,19 @@
 		<ECID id="330630002" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Charge Enable" isArray="false" />
 		<ECID id="330630003" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Charge Enable" isArray="false" />
 		<ECID id="330630004" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.TransferRoomO2DensityKeepEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Keep Charge Enable" isArray="false" />
+		
+		<ECID id="330630005" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.FOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferCharge FOUPO2CheckSV " isArray="false" />
+		<ECID id="330630006" valueType="Ascii" logicalName="PM1.N2Purge.WaferCharge.LAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferCharge LAO2CheckSV" isArray="false" />
+		
 		<ECID id="330640001" valueType="Ascii" logicalName="PM1.N2Purge.WaferCooling.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When Wafer Cooling" isArray="false" />
 		<ECID id="330650001" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Discharge Enable" isArray="false" />
 		<ECID id="330650002" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Discharge Enable" isArray="false" />
 		<ECID id="330650003" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.TransferRoomO2DensityCheckEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Check Discharge Enable" isArray="false" />
 		<ECID id="330650004" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.TransferRoomO2DensityKeepEnable" value="" min="" max="" eventTrigger="" units="" description="LA O2 Density Keep Discharge Enable" isArray="false" />
+
+		<ECID id="330650005" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.FOUPO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferDischarge FOUPO2CheckSV " isArray="false" />
+		<ECID id="330650006" valueType="Ascii" logicalName="PM1.N2Purge.WaferDischarge.LAO2CheckSV" value="" min="" max="" eventTrigger="" units="" description="WaferDischarge LAO2CheckSV" isArray="false" />
+
 		<ECID id="330660001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AlarmTables.AlarmTable" value="" min="" max="" eventTrigger="" units="" description="Alarm Table" isArray="false" />
 		<ECID id="330670001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.AI" value="" min="" max="" eventTrigger="" units="" description="AI" isArray="false" />
 		<ECID id="330670002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.AUX.1.AO" value="" min="" max="" eventTrigger="" units="" description="AO" isArray="false" />