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@@ -429,9 +429,10 @@
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doFIMS2Interlock="DO_WaferRobotFIMS2Interlock"
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doFIMS2Interlock="DO_WaferRobotFIMS2Interlock"
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doBoatRotateInterlock="DO_WaferRobotBoatRotaryInterlock"
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doBoatRotateInterlock="DO_WaferRobotBoatRotaryInterlock"
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doBoatBottomInterlock="DO_WaferRobotBoatBottomInterlock"
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doBoatBottomInterlock="DO_WaferRobotBoatBottomInterlock"
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-
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- scRootPath=""
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- />
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+ aoRobotActionCommand="AO_WaferRobotActionCommand"
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+ aiRobotActionCommand="AI_WaferRobotActionCommand"
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+ scRootPath=""
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+ />
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</IoWaferRobots>
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</IoWaferRobots>
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<IoCarrierRobots classType="FurnaceRT.Devices.IoCarrierRobot" assembly="FurnaceRT">
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<IoCarrierRobots classType="FurnaceRT.Devices.IoCarrierRobot" assembly="FurnaceRT">
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<IoCarrierRobot id="IoCarrierRobot" display="IoCarrierRobot" schematicId="IoCarrierRobot" unit=""
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<IoCarrierRobot id="IoCarrierRobot" display="IoCarrierRobot" schematicId="IoCarrierRobot" unit=""
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@@ -447,21 +448,21 @@
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diRobotPowerOn="DI_FOUPRobotFoupOnRobotCheck"
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diRobotPowerOn="DI_FOUPRobotFoupOnRobotCheck"
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diAlarm="DI_FOUPRobotAlarmSignal"
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diAlarm="DI_FOUPRobotAlarmSignal"
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diBlade1WaferPresent="DI_FOUPRobotEachHandWaferStatus"
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diBlade1WaferPresent="DI_FOUPRobotEachHandWaferStatus"
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-
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diZAxisHomePosition="DI_FOUPRobotAxisZHomePosition"
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diZAxisHomePosition="DI_FOUPRobotAxisZHomePosition"
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diYAxisHomePosition="DI_FOUPRobotAxisYHomePosition"
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diYAxisHomePosition="DI_FOUPRobotAxisYHomePosition"
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diRAxisHomePosition="DI_FOUPRobotAxisRHomePosition"
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diRAxisHomePosition="DI_FOUPRobotAxisRHomePosition"
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diRunning="DI_FOUPRobotRunning"
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diRunning="DI_FOUPRobotRunning"
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-
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doAlarmReset="DO_FOUPRobotAlarmReset"
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doAlarmReset="DO_FOUPRobotAlarmReset"
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doActionHold="DO_FOUPRobotActionHold"
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doActionHold="DO_FOUPRobotActionHold"
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doTPEnable="DO_FOUPRobotTPEnable"
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doTPEnable="DO_FOUPRobotTPEnable"
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doFIMS1Interlock="DO_FOUPRobotFIMS1Interlock"
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doFIMS1Interlock="DO_FOUPRobotFIMS1Interlock"
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doFIMS2Interlock="DO_FOUPRobotFIMS2Interlock"
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doFIMS2Interlock="DO_FOUPRobotFIMS2Interlock"
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doStockerInterlock="DO_FOUPRobotBufferInterlock"
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doStockerInterlock="DO_FOUPRobotBufferInterlock"
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-
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- scRootPath=""
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- />
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+ aoRobotActionCommand="AO_FOUPRobotActionCommand"
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+ aiRobotActionCommand="AI_FOUPRobotActionCommand"
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+
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+ scRootPath=""
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+ />
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</IoCarrierRobots>
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</IoCarrierRobots>
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<IoStockers classType="FurnaceRT.Devices.IoStocker" assembly="FurnaceRT">
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<IoStockers classType="FurnaceRT.Devices.IoStocker" assembly="FurnaceRT">
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