门开之后检查是否位移

Furnace/FurnaceRT/Equipments/FIMSs/FIMSLoadRoutine.cs

@@ -167,7 +167,7 @@ namespace FurnaceRT.Equipments.FIMSs
                 return true;
             }, () =>
             {
-                if (_fimsModule.IsWaferOnRobot)
+                if (_fimsModule.FIMSDevice.IsPLCLoadCompleted && !_fimsModule.FIMSDevice.IsRunning && _fimsModule.IsWaferOnRobot)
                 {
                     _fimsModule.LoadFailAlarm.Set($"The wafer on {Module} has shifted");
                     return false;