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update alarmEventDefine

jiangjy 1 month ago
parent
commit
7bd2a7d59d

+ 0 - 1
Furnace/FurnaceRT/Config/AlarmEventDefine.xml

@@ -1180,7 +1180,6 @@
       <Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="System equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.TransferJobStartFailedWarning" DisplayName="System.TransferJobStartFailedWarning" Id="10204024" Source="System" Description="Transfer job start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
     </AlarmCategory>

+ 0 - 1
Furnace/FurnaceRT/Config/ELK/AlarmEventDefine.xml

@@ -1194,7 +1194,6 @@
 			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>
 		<AlarmCategory Name="InterlockAlarm">
 			<Alarm Name="PM1.UserDefineInterlockAlarm" DisplayName="PM1.UserDefineInterlockAlarm" Id="460218134" Source="PM1" Description="User define interlock occure alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="InterlockAlarm" />

+ 3 - 0
Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -2302,6 +2302,7 @@
     <SVID id="339850001" valueType="F8" logicalName="PM1.VG33.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339860001" valueType="Boolean" logicalName="PM1.AlarmSignaFOUPRobotTPStatusWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339870001" valueType="Boolean" logicalName="PM1.AlarmSignaWaferRobotTPStatusWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339880001" valueType="Boolean" logicalName="PM1.SensorPLCHeartBeatPC.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -2357,6 +2358,7 @@
     <ECID id="10010041" valueType="Ascii" logicalName="System.AxisMonShowKey" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="10010042" valueType="Ascii" logicalName="System.EnableUpdateWafersNotify" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="10010043" valueType="Ascii" logicalName="System.IsShowJetValve" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="10010044" valueType="Ascii" logicalName="System.PLCConnectSensorFoolTime" value="" min="" max="" eventTrigger="" units="" description="PLC Connect Sensor Fool Time" isArray="false" />
     <ECID id="10020001" valueType="Ascii" logicalName="System.EditParameter.EditChamberType" value="" min="" max="" eventTrigger="" units="" description="Edit Chamber Type" isArray="false" />
     <ECID id="10020002" valueType="Ascii" logicalName="System.EditParameter.EditParameterType" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition,Temp Correction,Temp PID,Temp Profile,Temp Auto PID,Leak Check Condition,APC PID" isArray="false" />
     <ECID id="10030001" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" eventTrigger="" units="" description="FDC data group" isArray="false" />
@@ -14493,6 +14495,7 @@
     <ALID id="330011012" logicalName="PM1.AlarmSignalWTRinterlockreset" description="WTR interlock reset" category="EquipmentStatusWarning" enabled="false" eventSet="1330011012" eventClear="2330011012" />
     <ALID id="330011013" logicalName="PM1.VG33ToleranceAlarm" description="VG33 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011013" eventClear="2330011013" />
     <ALID id="330011014" logicalName="PM1.VG33ToleranceWarning" description="VG33 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330011014" eventClear="2330011014" />
+    <ALID id="330011015" logicalName="PM1.SensorPLCConnectedAlarm" description="PM1 Sensor PLC Connected Alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011015" eventClear="2330011015" />
     <ALID id="330020001" logicalName="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020001" eventClear="2330020001" />
     <ALID id="330020002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020002" eventClear="2330020002" />
     <ALID id="330020003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020003" eventClear="2330020003" />

+ 0 - 1
Furnace/FurnaceRT/Config/NTP/AlarmEventDefine.xml

@@ -1194,7 +1194,6 @@
 			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>
 		<AlarmCategory Name="InterlockAlarm">
 			<Alarm Name="PM1.UserDefineInterlockAlarm" DisplayName="PM1.UserDefineInterlockAlarm" Id="460218134" Source="PM1" Description="User define interlock occure alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="InterlockAlarm" />

+ 0 - 1
Furnace/FurnaceRT/Config/SiBCN/AlarmEventDefine.xml

@@ -1179,7 +1179,6 @@
 			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="System equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.TransferJobStartFailedWarning" DisplayName="System.TransferJobStartFailedWarning" Id="10204024" Source="System" Description="Transfer job start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>

+ 0 - 1
Furnace/FurnaceRT/Config/TiN/AlarmEventDefine.xml

@@ -1179,7 +1179,6 @@
 			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="System equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.TransferJobStartFailedWarning" DisplayName="System.TransferJobStartFailedWarning" Id="10204024" Source="System" Description="Transfer job start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>

BIN
Furnace/FurnaceRT/Config/VIDs/Equipment_VIDs_20250610.xlsx


+ 1 - 0
Furnace/FurnaceRT/Config/VIDs/_ALID.xml

@@ -1118,6 +1118,7 @@
 	<VIDItem Name="PM1.AlarmSignalWTRinterlockreset" Index="330011012" DataType="" Description="WTR interlock reset" Module="PM1" Type="" Unit="" Parameter="AlarmSignalWTRinterlockreset" />
 	<VIDItem Name="PM1.VG33ToleranceAlarm" Index="330011013" DataType="" Description="VG33 tolerance alarm " Module="PM1" Type="" Unit="" Parameter="VG33ToleranceAlarm" />
 	<VIDItem Name="PM1.VG33ToleranceWarning" Index="330011014" DataType="" Description="VG33 tolerance warning " Module="PM1" Type="" Unit="" Parameter="VG33ToleranceWarning" />
+	<VIDItem Name="PM1.SensorPLCConnectedAlarm" Index="330011015" DataType="" Description="PM1 Sensor PLC Connected Alarm " Module="PM1" Type="" Unit="" Parameter="SensorPLCConnectedAlarm" />
 	<VIDItem Name="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" Index="330020001" DataType="" Description="APC external heater Temp.PV High Limit" Module="PM1" Type="" Unit="AlarmHighLimit" Parameter="AI_APCExternalHeaterTempPV" />
 	<VIDItem Name="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" Index="330020002" DataType="" Description="APC ring heater Temp.PV High Limit" Module="PM1" Type="" Unit="AlarmHighLimit" Parameter="AI_APCRingHeaterTempPV" />
 	<VIDItem Name="PM1.AlarmHighLimit.AI_CapHeaterTempPV" Index="330020003" DataType="" Description="Cap heater Temp.PV High Limit" Module="PM1" Type="" Unit="AlarmHighLimit" Parameter="AI_CapHeaterTempPV" />

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+ 1 - 992
Furnace/FurnaceRT/Config/VIDs/_CEID.xml


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+ 1 - 51
Furnace/FurnaceRT/Config/VIDs/_DVID.xml


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+ 1 - 9863
Furnace/FurnaceRT/Config/VIDs/_ECID.xml


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+ 1 - 2257
Furnace/FurnaceRT/Config/VIDs/_SVID.xml


+ 36 - 36
Furnace/FurnaceRT/Equipments/Systems/EquipmentManagerAlarmDefine.cs

@@ -274,42 +274,7 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            SDWaferTypeUseCountWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.SDWaferTypeUseCountWarning",
-                Description = $"SD wafer useCount warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "SystemAlarm",
-            }, () => { return true; });
-
-            SDWaferTypeUseCountAlarm = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.SDWaferTypeUseCountAlarm",
-                Description = $"SD wafer useCount alarm ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Alarm,
-                Action = EventAction.Clear,
-                Category = "SystemAlarm",
-            }, () => { return true; });
-
-            SDWaferTypeUseTimeWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.SDWaferTypeUseTimeWarning",
-                Description = $"SD wafer useTime warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "SystemAlarm",
-            }, () => { return true; });
-
+        
             RecipeExecuteFreqWarning = SubscribeAlarm(new AlarmEventItem()
             {
                 EventEnum = $"{Name}.RecipeExecuteFreqWarning",
@@ -424,6 +389,41 @@ namespace FurnaceRT.Equipments.Systems
                 Action = EventAction.Clear,
                 Category = "SystemAlarm",
             }, () => { return true; });
+            SDWaferTypeUseCountWarning = SubscribeAlarm(new AlarmEventItem()
+            {
+                EventEnum = $"{Name}.SDWaferTypeUseCountWarning",
+                Description = $"SD wafer useCount warning ",
+                Solution = "No information available. Press[Clear] to delete alarm message.",
+                Explaination = "No information available.",
+                AutoRecovery = false,
+                Level = EventLevel.Warning,
+                Action = EventAction.Clear,
+                Category = "SystemAlarm",
+            }, () => { return true; });
+
+            SDWaferTypeUseCountAlarm = SubscribeAlarm(new AlarmEventItem()
+            {
+                EventEnum = $"{Name}.SDWaferTypeUseCountAlarm",
+                Description = $"SD wafer useCount alarm ",
+                Solution = "No information available. Press[Clear] to delete alarm message.",
+                Explaination = "No information available.",
+                AutoRecovery = false,
+                Level = EventLevel.Alarm,
+                Action = EventAction.Clear,
+                Category = "SystemAlarm",
+            }, () => { return true; });
+
+            SDWaferTypeUseTimeWarning = SubscribeAlarm(new AlarmEventItem()
+            {
+                EventEnum = $"{Name}.SDWaferTypeUseTimeWarning",
+                Description = $"SD wafer useTime warning ",
+                Solution = "No information available. Press[Clear] to delete alarm message.",
+                Explaination = "No information available.",
+                AutoRecovery = false,
+                Level = EventLevel.Warning,
+                Action = EventAction.Clear,
+                Category = "SystemAlarm",
+            }, () => { return true; });
 
             SDWaferTypeUseTimeAlarm = SubscribeAlarm(new AlarmEventItem()
             {