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@@ -408,7 +408,7 @@
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diFIMS2WaferOnRobot="DI_POD2WaferOnRobot"
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diTPEmo="DI_WaferRobotTPEMOButtonStatus"
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diServoOn="DI_WaferRobotTPServoOn"
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- diTPStatus="DI_WaferRobotTPStatus"
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+ diTPStatus="DI_WaferRobotIsTPStatus"
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diRobotPowerOn="DI_WaferRobotPowerOn"
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diAlarm="DI_WaferRobotAlarm"
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diBlade1WaferPresent="DI_WaferRobotWafer1Checked"
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@@ -443,7 +443,7 @@
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diInStockerLayer4="DI_FOUPRobotWithinBufferLayer4Area"
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diTPEmo="DI_FOUPRobotTPEMOButton"
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diServoOn="DI_FOUPRobotTPServoOn"
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- diTPStatus="DI_FOUPRobotTPStatus"
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+ diTPStatus="DI_FOUPRobotIsTPStatus"
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diRobotPowerOn="DI_FOUPRobotFoupOnRobotCheck"
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diAlarm="DI_FOUPRobotAlarmSignal"
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diBlade1WaferPresent="DI_FOUPRobotEachHandWaferStatus"
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@@ -463,7 +463,7 @@
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scRootPath=""
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/>
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</IoCarrierRobots>
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-
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+
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<IoStockers classType="FurnaceRT.Devices.IoStocker" assembly="FurnaceRT">
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<IoStocker id="Stocker17" display="EX1" schematicId="Stocker17" unit="" doValExtend="" doValBack="" doFlowOpen="" diBackDetect="" diExtendedDetect="" diFlowDetect1="" diFlowDetect2="" diInPosition1="DI_LAFrontFOUPBuffer1InPosition" aioType="float"/>
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<IoStocker id="Stocker18" display="EX2" schematicId="Stocker18" unit="" doValExtend="" doValBack="" doFlowOpen="" diBackDetect="" diExtendedDetect="" diFlowDetect1="" diFlowDetect2="" diInPosition1="DI_LAFrontFOUPBuffer2InPosition" aioType="float"/>
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@@ -973,7 +973,7 @@
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<IoAlarmSignal id="AlarmSignalPS17ValueLowLimitAlarm2" diSignalsplay="PS17ValueLowLimitAlarm2" diSignal="DI_PS17ValueLowLimitAlarm2" alarmTrigValue="true"/>
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-
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+
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<IoAlarmSignal id="AlarmSignalForelineHeaterJacketLightAlarm" diSignalsplay="ForelineHeaterJacketLightAlarm" diSignal="DI_ForelineHeaterJacketLightAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalForelineHeaterJacketHeavyAlarm" diSignalsplay="ForelineHeaterJacketHeavyAlarm" diSignal="DI_ForelineHeaterJacketHeavyAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalScrubberWarning" diSignalsplay="ScrubberWarning" diSignal="DI_ScrubberWarning" alarmTrigValue="true"/>
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@@ -992,8 +992,9 @@
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<IoAlarmSignal id="AlarmSignaWaferRobotAlarm" diSignalsplay="WaferRobotAlarm" diSignal="DI_WaferRobotAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignaFOUPRobotAlarm" diSignalsplay="FOUP RobotAlarm" diSignal="DI_FOUPRobotAlarmSignal" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning" diSignalsplay="FOUPRobotTPStatusWarning" diSignal="DI_FOUPRobotTPStatus" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning" diSignalsplay="WaferRobotTPStatusWarning" diSignal="DI_WaferRobotTPStatus" alarmTrigValue="true"/>
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+
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+ <IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning" diSignalsplay="FOUPRobotTPStatusWarning" diSignal="DI_FOUPRobotIsTPStatus" alarmTrigValue="false"/>
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+ <IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning" diSignalsplay="WaferRobotTPStatusWarning" diSignal="DI_WaferRobotIsTPStatus" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT1Alarm" diSignalsplay="Gas box PG7 CNT1 alarm" diSignal="DI_GLBoxPG7CNT1Alarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT2Alarm" diSignalsplay="Gas box PG7 CNT2 alarm" diSignal="DI_GLBoxPG7CNT2Alarm" alarmTrigValue="true"/>
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@@ -1022,7 +1023,7 @@
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<IoAlarmSignal id="AlarmSignalVaccum1PumpAlarm" diSignalsplay="Vaccum1 Pump Alarm" diSignal="DI_Vaccum1PumpAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalVaccum2PumpWarning" diSignalsplay="Vaccum2 Pump Warning" diSignal="DI_Vaccum2PumpWarning" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalVaccum2PumpAlarm" diSignalsplay="Vaccum2 Pump Alarm" diSignal="DI_Vaccum2PumpAlarm" alarmTrigValue="true"/>
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-
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+
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<IoAlarmSignal id="AlarmSignalLDS1MajorAlarm" diSignalsplay="LDS1 major alarm" diSignal="DI_LDS1MajorAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalLDS1MinorWarning" diSignalsplay="LDS1 minor warning" diSignal="DI_LDS1MinorWarning" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalLDS1liquidLowWarning" diSignalsplay="LDS1 liquid low warning" diSignal="DI_LDS1liquidLowWarning" alarmTrigValue="true"/>
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@@ -1034,7 +1035,7 @@
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<IoAlarmSignal id="AlarmSignalPOD1FOUPVacuumSuckingAlarm" diSignalsplay="POD1 FOUP vacuum sucking alarm" diSignal="DI_POD1FOUPVacuumSuckingAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalPOD2FOUPVacuumSuckingAlarm" diSignalsplay="POD2 FOUP vacuum sucking alarm" diSignal="DI_POD2FOUPVacuumSuckingAlarm" alarmTrigValue="true"/>
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-
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+
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</IoAlarmSignals>
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<IoSensors>
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<IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
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@@ -1137,7 +1138,7 @@
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<IoSensor id="SensorO2DetectSideFIMS2" display="Transfer Room FIMS2" di="DI_O2_Detect_Side_FIMS2"/>
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<IoSensor id="SensorLADoorSw1" display="LA door sw1" di="DI_SL05001LAdoorsw1"/>
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-
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+
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</IoSensors>
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@@ -1178,7 +1179,7 @@
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<IoTrigger id="TrigExhaustOmmanBoxFanPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustOmmanBoxFanPowerOn"/>
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<IoTrigger id="TrigHPMValveOutStatus" display="" schematicId="" unit="" doTrigger="DO_HPMValveOutStatus"/>
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<IoTrigger id="TrigForlineHeaterOn" display="" schematicId="" unit="" doTrigger="DO_ForlineHeaterOn"/>
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-
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+
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<IoTrigger id="TrigCapHeaterPowerOnEnable" display="" schematicId="" unit="" doTrigger="DO_CapHeaterPowerOnEnable"/>
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<IoTrigger id="TrigMechaStopRed" display="" schematicId="" unit="" doTrigger="DO_MechaStopRed"/>
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<IoTrigger id="TrigMechaPause" display="" schematicId="" unit="" doTrigger="DO_MechaPause"/>
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@@ -1260,7 +1261,7 @@
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doRed="DO_TowerRed" doYellow="DO_TowerOrange" doGreen="DO_TowerGreen" doBlue=""
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doBuzzer1="DO_TowerBuzzle"/>
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</IoSignalTowers>
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-
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+
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<IoMFCs classType="FurnaceRT.Equipments.PMs.Devices.IoMFC" assembly="FurnaceRT">
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<IoMFC id="MFC1" display="MFC1" schematicId="MFC1" unit="sccm" aiFlow="AI_MFC1AirFlowPV" aoFlow="AO_MFC1AirFlowSV" aoRamp="AO_MFC1RampTime" aioType="float" scBasePath="PM1.MFC"/>
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<IoMFC id="MFC2" display="MFC2" schematicId="MFC2" unit="sccm" aiFlow="AI_MFC2AirFlowPV" aoFlow="AO_MFC2AirFlowSV" aoRamp="AO_MFC2RampTime" aioType="float" scBasePath="PM1.MFC"/>
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@@ -1685,7 +1686,7 @@
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<IoValve id="ValveSV62" doOpen="DO_SV62Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
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<IoValve id="ValveSV63" doOpen="DO_SV63Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
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<IoValve id="ValveSV64" doOpen="DO_SV64Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
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-
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+
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<IoValve id="ValveSV227" doOpen="DO_circulationfanisturnedopen" doClose="DO_circulationfanisturnedClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
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