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@@ -787,28 +787,60 @@
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<configs name="RfMatch">
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</configs>
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- <configs name="N2Purge">
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- <config default="1" name="TransferRoomArrivalWaitTime" description="Transfer Room O2-Density Arrival Wait Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="TransferRoomStableWaitTime" description=" Transfer Room O2_Density Stable Wait Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="FOUPOpenerArrivalWaitTime" description="FOUP Opener O2-Density Arrival Wait Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="FOUPOpenerStableWaitTime" description="FOUP Opener O2_Density Stable Wait Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="O2DetectorTransferRoomToFOUPTime" description="O2 Detector Transfer Room To FOUP Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="O2DetectorFOUPToTransferRoomTime" description="O2 Detector FOUP To Transfer Room Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="O2DetectorFOUPToFOUPTime" description="O2 Detector FOUP To FOUP Time" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <configs name="WaferCharge">
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- <config default="true" name="TransferRoomN2PurgeEnable" description="Transfer Room N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- <config default="true" name="TransferRoomO2DensityCheckEnable" description="Transfer Room O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- <config default="true" name="TransferRoomO2DensityKeepEnable" description="Transfer Room O2 Density Keep Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- </configs>
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- <configs name="WaferDischarge">
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- <config default="true" name="TransferRoomN2PurgeEnable" description="Transfer Room N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- <config default="true" name="TransferRoomO2DensityCheckEnable" description="Transfer Room O2 Density Check Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- <config default="true" name="TransferRoomO2DensityKeepEnable" description="Transfer Room O2 Density Keep Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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- </configs>
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- </configs>
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- <configs name="Boat" visible="false">
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+ <configs name="N2Purge">
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+ <config default="1" name="TransferRoomArrivalWaitTime" description="LA O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="1" name="TransferRoomStableWaitTime" description="LA O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="1" name="FOUPOpenerArrivalWaitTime" description="FOUP O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="1" name="FOUPOpenerStableWaitTime" description="FOUP O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="1" name="O2DetectorTransferRoomToFOUPTime" description="Exchange LA TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="1" name="O2DetectorFOUPToTransferRoomTime" description="Exchange FOUP TO LA WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="1" name="O2DetectorFOUPToFOUPTime" description="FOUP TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config default="0" name="N2PurgeFOUPO2CheckSV" description="FOUP O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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+ <config default="0" name="N2PurgeLAO2CheckSV" description=" LA O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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+
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+ <configs name="FoupEnter">
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+ <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="FOUPN2PurgeCancelEnable" description="FOUP N2 Purge Cancel Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ </configs>
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+
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+ <configs name="WaferCharge">
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+ <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ </configs>
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+ <configs name="WaferDischarge">
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+ <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ </configs>
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+
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+ <configs name="BoatLoad">
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+ <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="EAxisInhibitEnable" description="E Axis Inhibit Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When boatloading" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep boatloading Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ </configs>
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+ <configs name="FoupInhibit">
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+ <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable After BoatLoad" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="1" name="FoupInhibitTime" description="FOUP TO FOUP WaitTime After BoatLoad" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ </configs>
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+ <configs name="BoatUnLoad">
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+ <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable Before Boat Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable Before Boat Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="EAxisInhibitEnable" description="E Axis Inhibit Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When boatUnloading" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep boatloading Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ </configs>
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+ <configs name="WaferCooling">
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+ <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When Wafer Cooling" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ </configs>
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+ </configs>
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+ <configs name="Boat" visible="false">
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<config default="10" name="BoatMoveTimeout" description="Boat Move Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="WaferCycleTime">
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Xiongbing