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@@ -23,7 +23,7 @@ namespace FurnaceRT.Equipments.FIMSs
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private FIMSModule _fimsModule;
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private PMModule _pmModule;
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private bool _isNeedN2Purge;
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-
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+ private int _fimsDelayTime = 3;
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public FIMSLoadRoutine(FIMSModule fimsModule)
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{
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Module = fimsModule.Module.ToString();
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@@ -43,6 +43,10 @@ namespace FurnaceRT.Equipments.FIMSs
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Reset();
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_timeout = SC.GetValue<int>($"FIMS.{Module}.MotionTimeout");
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+ if (SC.ContainsItem("System.FimsDelayTime"))
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+ {
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+ _fimsDelayTime = SC.GetValue<int>($"System.FimsDelayTime");
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+ }
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if (!Singleton<EquipmentManager>.Instance.IsAutoMode && !Singleton<EquipmentManager>.Instance.IsReturnWafer)
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{
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@@ -94,7 +98,7 @@ namespace FurnaceRT.Equipments.FIMSs
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Load((int)RoutineStep.Load, _timeout);
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- Delay((int)RoutineStep.Delay, 3);
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+ Delay((int)RoutineStep.Delay, _fimsDelayTime);
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CheckLoadFinish((int)RoutineStep.CheckLoadFinish, _timeout);
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}
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