update

Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -408,7 +408,7 @@
 					diFIMS2WaferOnRobot="DI_POD2WaferOnRobot"
 					diTPEmo="DI_WaferRobotTPEMOButtonStatus"
 					diServoOn="DI_WaferRobotTPServoOn"
-					diTPStatus="DI_WaferRobotIsTPStatus"
+					diTPStatus="DI_WaferRobotIsHostStatus"
 					diRobotPowerOn="DI_WaferRobotPowerOn"
 					diAlarm="DI_WaferRobotAlarm"
 					diBlade1WaferPresent="DI_WaferRobotWafer1Checked"
@@ -994,7 +994,7 @@
 		<IoAlarmSignal id="AlarmSignaFOUPRobotAlarm"		diSignalsplay="FOUP RobotAlarm"			diSignal="DI_FOUPRobotAlarmSignal"		alarmTrigValue="true"/>
 
 		<IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning"		diSignalsplay="FOUPRobotTPStatusWarning"			diSignal="DI_FOUPRobotIsTPStatus"		alarmTrigValue="false"/>
-		<IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning"		diSignalsplay="WaferRobotTPStatusWarning"			diSignal="DI_WaferRobotIsTPStatus"		alarmTrigValue="true"/>
+		<IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning"		diSignalsplay="WaferRobotTPStatusWarning"			diSignal="DI_WaferRobotIsHostStatus"		alarmTrigValue="false"/>
 
 		<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT1Alarm"		diSignalsplay="Gas box PG7 CNT1 alarm"			diSignal="DI_GLBoxPG7CNT1Alarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT2Alarm"		diSignalsplay="Gas box PG7 CNT2 alarm"			diSignal="DI_GLBoxPG7CNT2Alarm"		alarmTrigValue="true"/>
@@ -1299,24 +1299,24 @@
 	</IoMFMs>
 	<IoFFUs classType="FurnaceRT.Devices.IoFFU" assembly="FurnaceRT">
 		<IoFFU id="FFU4" display="FFU4" schematicId="FFU4" unit=""
-					diDataWriteDone="DI_FFU201DataWriteDone"
-					diDataWriteError="DI_FFU201DataWriteError"
-					diDataReadError="DI_FFU201DataReadError"
-			    
-					aiGroupNumber="AI_FFU4GroupNumber"
-					aiAddressNumber="AI_FFU4AddressNumber"
-					aiSwitch="AI_FFU4Switch"
-					aiSetSpeed="AI_FFU4SetSpeed"
-					aiMaxSpeed="AI_FFU4MaxSpeed"
-					aiReset="AI_FFU4Reset"
-					aiErrorTimer="AI_FFU4ErrorTimer"
+					diDataWriteDone=""
+					diDataWriteError=""
+					diDataReadError=""
+					aiGroupNumber=""
+					aiAddressNumber=""
+					aiSwitch=""
+					aiSetSpeed=""
+					aiMaxSpeed=""
+					aiReset=""
+					aiErrorTimer=""
 					aiCurrentSpeed="AI_FFU4CurrentSpeed"
-					aiVoltage="AI_FFU4Voltage"
-					aiCurrent="AI_FFU4Current"
+					aiVoltage=""
+					aiCurrent=""
+					aiStatus="AI_FFU4Status"
 			   
-					aoSwitch="AO_FFU4Switch"
+					aoSwitch=""
 					aoSetSpeed="AO_FFU4SetSpeed"
-					aoReset="AO_FFU4Reset"
+					aoReset=""
 				
 					doEnable=""
 					doWriteCommand="DO_FFU4WriteCommand"
@@ -1324,112 +1324,87 @@
 					aioType="float"
 				/>
 		<IoFFU id="FFU5" display="FFU5" schematicId="FFU5" unit=""
-					diDataWriteDone="DI_FFU202DataWriteDone"
-					diDataWriteError="DI_FFU202DataWriteError"
-					diDataReadError="DI_FFU202DataReadError"
-			    
-					aiGroupNumber="AI_FFU5GroupNumber"
-					aiAddressNumber="AI_FFU5AddressNumber"
-					aiSwitch="AI_FFU5Switch"
-					aiSetSpeed="AI_FFU5SetSpeed"
-					aiMaxSpeed="AI_FFU5MaxSpeed"
-					aiReset="AI_FFU5Reset"
-					aiErrorTimer="AI_FFU5ErrorTimer"
-					aiCurrentSpeed="AI_FFU5CurrentSpeed"
-					aiVoltage="AI_FFU5Voltage"
-					aiCurrent="AI_FFU5Current"
-			   
-					aoSwitch="AO_FFU5Switch"
-					aoSetSpeed="AO_FFU5SetSpeed"
-					aoReset="AO_FFU5Reset"
-				
-					doEnable=""
-					doWriteCommand="DO_FFU5WriteCommand"
-			   
-					aioType="float"
-				/>
+				diDataWriteDone=""
+				diDataWriteError=""
+				diDataReadError=""
+				aiGroupNumber=""
+				aiAddressNumber=""
+				aiSwitch=""
+				aiSetSpeed=""
+				aiMaxSpeed=""
+				aiReset=""
+				aiErrorTimer=""
+				aiCurrentSpeed="AI_FFU5CurrentSpeed"
+				aiVoltage=""
+				aiCurrent=""
+				aiStatus="AI_FFU5Status"
+	   
+				aoSwitch=""
+				aoSetSpeed="AO_FFU5SetSpeed"
+				aoReset=""
+		
+				doEnable=""
+				doWriteCommand="DO_FFU5WriteCommand"
+	   
+				aioType="float"
+		/>
 		<IoFFU id="FFU6" display="FFU6" schematicId="FFU6" unit=""
-					diDataWriteDone="DI_FFU203DataWriteDone"
-					diDataWriteError="DI_FFU203DataWriteError"
-					diDataReadError="DI_FFU203DataReadError"
-			    
-					aiGroupNumber="AI_FFU6GroupNumber"
-					aiAddressNumber="AI_FFU6AddressNumber"
-					aiSwitch="AI_FFU6Switch"
-					aiSetSpeed="AI_FFU6SetSpeed"
-					aiMaxSpeed="AI_FFU6MaxSpeed"
-					aiReset="AI_FFU6Reset"
-					aiErrorTimer="AI_FFU6ErrorTimer"
-					aiCurrentSpeed="AI_FFU6CurrentSpeed"
-					aiVoltage="AI_FFU6Voltage"
-					aiCurrent="AI_FFU6Current"
-			   
-					aoSwitch="AO_FFU6Switch"
-					aoSetSpeed="AO_FFU6SetSpeed"
-					aoReset="AO_FFU6Reset"
-				
-					doEnable=""
-					doWriteCommand="DO_FFU6WriteCommand"
-			   
-					aioType="float"
-				/>
+				diDataWriteDone=""
+				diDataWriteError=""
+				diDataReadError=""
+				aiGroupNumber=""
+				aiAddressNumber=""
+				aiSwitch=""
+				aiSetSpeed=""
+				aiMaxSpeed=""
+				aiReset=""
+				aiErrorTimer=""
+				aiCurrentSpeed="AI_FFU6CurrentSpeed"
+				aiVoltage=""
+				aiCurrent=""
+				aiStatus="AI_FFU6Status"
+	   
+				aoSwitch=""
+				aoSetSpeed="AO_FFU6SetSpeed"
+				aoReset=""
+		
+				doEnable=""
+				doWriteCommand="DO_FFU6WriteCommand"
+	   
+				aioType="float"
+		/>
 		<IoFFU id="FFU7" display="FFU7" schematicId="FFU7" unit=""
-					diDataWriteDone="DI_FFU204DataWriteDone"
-					diDataWriteError="DI_FFU204DataWriteError"
-					diDataReadError="DI_FFU204DataReadError"
-			    
-					aiGroupNumber="AI_FFU7GroupNumber"
-					aiAddressNumber="AI_FFU7AddressNumber"
-					aiSwitch="AI_FFU7Switch"
-					aiSetSpeed="AI_FFU7SetSpeed"
-					aiMaxSpeed="AI_FFU7MaxSpeed"
-					aiReset="AI_FFU7Reset"
-					aiErrorTimer="AI_FFU7ErrorTimer"
-					aiCurrentSpeed="AI_FFU7CurrentSpeed"
-					aiVoltage="AI_FFU7Voltage"
-					aiCurrent="AI_FFU7Current"
-			   
-					aoSwitch="AO_FFU7Switch"
-					aoSetSpeed="AO_FFU7SetSpeed"
-					aoReset="AO_FFU7Reset"
-				
-					doEnable=""
-					doWriteCommand="DO_FFU7WriteCommand"
-			   
-					aioType="float"
-				/>
-		<IoFFU id="FFU8" display="FFU8" schematicId="FFU8" unit=""
-					diDataWriteDone="DI_FFU205DataWriteDone"
-					diDataWriteError="DI_FFU205DataWriteError"
-					diDataReadError="DI_FFU205DataReadError"
-			    
-					aiGroupNumber="AI_FFU8GroupNumber"
-					aiAddressNumber="AI_FFU8AddressNumber"
-					aiSwitch="AI_FFU8Switch"
-					aiSetSpeed="AI_FFU8SetSpeed"
-					aiMaxSpeed="AI_FFU8MaxSpeed"
-					aiReset="AI_FFU8Reset"
-					aiErrorTimer="AI_FFU8ErrorTimer"
-					aiCurrentSpeed="AI_FFU8CurrentSpeed"
-					aiVoltage="AI_FFU8Voltage"
-					aiCurrent="AI_FFU8Current"
-			   
-					aoSwitch="AO_FFU8Switch"
-					aoSetSpeed="AO_FFU8SetSpeed"
-					aoReset="AO_FFU8Reset"
-				
-					doEnable=""
-					doWriteCommand="DO_FFU8WriteCommand"
-			   
-					aioType="float"
-				/>
+				diDataWriteDone=""
+				diDataWriteError=""
+				diDataReadError=""
+				aiGroupNumber=""
+				aiAddressNumber=""
+				aiSwitch=""
+				aiSetSpeed=""
+				aiMaxSpeed=""
+				aiReset=""
+				aiErrorTimer=""
+				aiCurrentSpeed="AI_FFU7CurrentSpeed"
+				aiVoltage=""
+				aiCurrent=""
+				aiStatus="AI_FFU7Status"
+	   
+				aoSwitch=""
+				aoSetSpeed="AO_FFU7SetSpeed"
+				aoReset=""
+		
+				doEnable=""
+				doWriteCommand="DO_FFU7WriteCommand"
+	   
+				aioType="float"
+		/>
 	</IoFFUs>
 	<IoValves>
-		<IoValve id="ValveAV1" diOpen="" doOpen="DO_ValveAV1" display="ValveAV1" schematicId="" isNc="false" ILKDi="DI_AV1ILK" isDefaultOpen="false"/>
-		<IoValve id="ValveAV2" diOpen="" doOpen="DO_ValveAV2" display="ValveAV2" schematicId="" isNc="false" ILKDi="DI_AV2ILK"  isDefaultOpen="false"/>
+		<IoValve id="ValveAV1" diOpen="" doOpen="DO_ValveAV1" display="ValveAV1" schematicId="" isNc="true" ILKDi="DI_AV1ILK" isDefaultOpen="false"/>
+		<IoValve id="ValveAV2" diOpen="" doOpen="DO_ValveAV2" display="ValveAV2" schematicId="" isNc="true" ILKDi="DI_AV2ILK"  isDefaultOpen="false"/>
 		<IoValve id="ValveAV3" diOpen="" doOpen="DO_ValveAV3" display="ValveAV3" schematicId="" isNc="true" ILKDi="DI_AV3ILK"  isDefaultOpen="false"/>
 		<IoValve id="ValveAV4" diOpen="" doOpen="DO_ValveAV4" display="ValveAV4" schematicId="" isNc="true" ILKDi="DI_AV4ILK"  isDefaultOpen="false"/>
-		<IoValve id="ValveAV5" diOpen="" doOpen="DO_ValveAV5" display="ValveAV5" schematicId="" isNc="false" ILKDi="DI_AV5ILK"  isDefaultOpen="false"/>
+		<IoValve id="ValveAV5" diOpen="" doOpen="DO_ValveAV5" display="ValveAV5" schematicId="" isNc="true" ILKDi="DI_AV5ILK"  isDefaultOpen="false"/>
 		<IoValve id="ValveAV6" diOpen="" doOpen="DO_ValveAV6" display="ValveAV6" schematicId="" isNc="true" ILKDi="DI_AV6ILK"  isDefaultOpen="false"/>
 		<IoValve id="ValveAV7" diOpen="" doOpen="DO_ValveAV7" display="ValveAV7" schematicId="" isNc="true" ILKDi="DI_AV7ILK"  isDefaultOpen="false"/>
 		<IoValve id="ValveAV8" diOpen="" doOpen="DO_ValveAV8" display="ValveAV8" schematicId="" isNc="true" ILKDi="DI_AV8ILK"  isDefaultOpen="false"/>
@@ -1451,8 +1426,8 @@
 		<IoValve id="ValveAV22" diOpen="" doOpen="DO_ValveAV22" display="ValveAV22" schematicId="" ILKDi="DI_AV22ILK"  isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV23" diOpen="" doOpen="DO_ValveAV23" display="ValveAV23" schematicId="" ILKDi="DI_AV23ILK"  isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV24" diOpen="" doOpen="DO_ValveAV24" display="ValveAV24" schematicId="" ILKDi="DI_AV24ILK"  isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV25" diOpen="" doOpen="DO_ValveAV25" display="ValveAV25" schematicId="" ILKDi="DI_AV25ILK"  isNc="false" isDefaultOpen="false"/>
-		<IoValve id="ValveAV26" diOpen="" doOpen="DO_ValveAV26" display="ValveAV26" schematicId="" ILKDi="DI_AV26ILK"  isNc="false" isDefaultOpen="false"/>
+		<IoValve id="ValveAV25" diOpen="" doOpen="DO_ValveAV25" display="ValveAV25" schematicId="" ILKDi="DI_AV25ILK"  isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV26" diOpen="" doOpen="DO_ValveAV26" display="ValveAV26" schematicId="" ILKDi="DI_AV26ILK"  isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV27" diOpen="" doOpen="DO_ValveAV27" display="ValveAV27" schematicId="" ILKDi="DI_AV27ILK"  isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV28" diOpen="" doOpen="DO_ValveAV28" display="ValveAV28" schematicId="" ILKDi="DI_AV28ILK"  isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV29" diOpen="" doOpen="DO_ValveAV29" display="ValveAV29" schematicId="" ILKDi="DI_AV29ILK"  isNc="true" isDefaultOpen="false"/>
@@ -1466,7 +1441,7 @@
 		<IoValve id="ValveAV36" diOpen="" doOpen="DO_ValveAV36" display="ValveAV36" schematicId="" ILKDi="DI_AV36ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV37" diOpen="" doOpen="DO_ValveAV37" display="ValveAV37" schematicId="" ILKDi="DI_AV37ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV38" diOpen="" doOpen="DO_ValveAV38" display="ValveAV38" schematicId="" ILKDi="DI_AV38ILK" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV39" diOpen="" doOpen="DO_ValveAV39" display="ValveAV39" schematicId="" ILKDi="DI_AV39ILK" isNc="false" isDefaultOpen="false"/>
+		<IoValve id="ValveAV39" diOpen="" doOpen="DO_ValveAV39" display="ValveAV39" schematicId="" ILKDi="DI_AV39ILK" isNc="true" isDefaultOpen="false"/>
 
 		<IoValve id="ValveAV40" diOpen="" doOpen="DO_ValveAV40" display="ValveAV40" schematicId="" ILKDi="DI_AV40ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV41" diOpen="" doOpen="DO_ValveAV41" display="ValveAV41" schematicId="" ILKDi="DI_AV41ILK" isNc="true" isDefaultOpen="false"/>
@@ -1493,8 +1468,10 @@
 		<IoValve id="ValveAV60" diOpen="DI_AV60ILK" doOpen="" display="ValveAV60" schematicId="" ILKDi="DI_AV60ILK" isNc="true" diCloseSensor="" isDefaultOpen="false"/>
 		<IoValve id="ValveAV61" diOpen="" doOpen="DO_ValveAV61" display="ValveAV61" schematicId="" ILKDi="DI_AV61ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV62" diOpen="" doOpen="DO_ValveAV62" display="ValveAV62" schematicId="" ILKDi="DI_AV62ILK" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV63" diOpen="" doOpen="DO_ValveAV63" display="ValveAV63" schematicId="" ILKDi="DI_AV63ILK" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV64" diOpen="" doOpen="DO_ValveAV64" display="ValveAV64" schematicId="" ILKDi="DI_AV64ILK" isNc="true" isDefaultOpen="false"/>
+
+		<IoValve id="ValveAV63" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV64" doOpen="DO_FIMS2N2PurgeValveOpen" doClose="DO_FIMS2N2PurgeValveClose" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>
+
 		<IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose" diOpenSensor="DI_AV65FFUAirInOpened" diCloseSensor="DI_AV65FFUAirInClosed" display="ValveAV65" schematicId="" ILKDi="DI_AV65ILK"  isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV66" diOpenSensor="DI_AV66CommonExhaustOpened" diCloseSensor="DI_AV66CommonExhaustClosed"  doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="ValveAV66" ILKDi="DI_AV66ILK" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV67" diOpen="" doOpen="DO_ValveAV67" display="ValveAV67" schematicId="" ILKDi="DI_AV67ILK" isNc="true" isDefaultOpen="false"/>
@@ -1508,8 +1485,8 @@
 		<IoValve id="ValveAV74" diOpen="DI_AV74ILK"   doOpen="" display="ValveAV74" schematicId="" ILKDi="DI_AV74ILK" isNc="true"   isDefaultOpen="false"/>
 		<IoValve id="ValveAV75" diOpen="" doOpen="DO_ValveAV75" display="ValveAV75" schematicId="" ILKDi="DI_AV75ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV76" diOpen="" doOpen="DO_ValveAV76" display="ValveAV76" schematicId="" ILKDi="DI_AV76ILK" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV77" diOpen="" doOpen="DO_ValveAV77" display="ValveAV77" schematicId="" ILKDi="DI_AV77ILK" isNc="false"   isDefaultOpen="false"/>
-		<IoValve id="ValveAV78" diOpen="" doOpen="DO_ValveAV78" display="ValveAV78" schematicId="" ILKDi="DI_AV78ILK" isNc="false" isDefaultOpen="false"/>
+		<IoValve id="ValveAV77" diOpen="" doOpen="DO_ValveAV77" display="ValveAV77" schematicId="" ILKDi="DI_AV77ILK" isNc="true"   isDefaultOpen="false"/>
+		<IoValve id="ValveAV78" diOpen="" doOpen="DO_ValveAV78" display="ValveAV78" schematicId="" ILKDi="DI_AV78ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV79" diOpen="" doOpen="DO_ValveAV79" display="ValveAV79" schematicId="" ILKDi="DI_AV79ILK" isNc="true" isDefaultOpen="false"/>
 
 		<IoValve id="ValveAV80" diOpen="DI_AV80ILK" doOpen="" display="ValveAV80" schematicId="" ILKDi="DI_AV80ILK" isNc="true" isDefaultOpen="false"/>
@@ -1535,11 +1512,11 @@
 		<IoValve id="ValveAV99" diOpen="" doOpen="DO_ValveAV99" display="ValveAV99" schematicId="" ILKDi="DI_AV99ILK" isNc="true" isDefaultOpen="false"/>
 
 		<IoValve id="ValveAV100" diOpen="" doOpen="DO_ValveAV100" display="ValveAV100" schematicId="" ILKDi="DI_AV100ILK" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV101" diOpen="" doOpen="DO_ValveAV101" display="ValveAV101" schematicId="" ILKDi="DI_AV101ILK" isNc="false" isDefaultOpen="false"/>
+		<IoValve id="ValveAV101" diOpen="" doOpen="DO_ValveAV101" display="ValveAV101" schematicId="" ILKDi="DI_AV101ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV102" diOpen="" doOpen="DO_ValveAV102" display="ValveAV102" schematicId="" ILKDi="DI_AV102ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV103" diOpen="" doOpen="DO_ValveAV103" display="ValveAV103" schematicId="" ILKDi="DI_AV103ILK" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV104" diOpen="" doOpen="DO_ValveAV104" display="ValveAV104" schematicId="" ILKDi="DI_AV104ILK" isNc="false" isDefaultOpen="false"/>
-		<IoValve id="ValveAV105" diOpen="" doOpen="DO_ValveAV105" display="ValveAV105" schematicId="" ILKDi="DI_AV105ILK" isNc="false" isDefaultOpen="false"/>
+		<IoValve id="ValveAV104" diOpen="" doOpen="DO_ValveAV104" display="ValveAV104" schematicId="" ILKDi="DI_AV104ILK" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV105" diOpen="" doOpen="DO_ValveAV105" display="ValveAV105" schematicId="" ILKDi="DI_AV105ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV106" diOpen="" doOpen="DO_ValveAV106" display="ValveAV106" schematicId="" ILKDi="DI_AV106ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV107" diOpen="" doOpen="DO_ValveAV107" display="ValveAV107" schematicId="" ILKDi="DI_AV107ILK" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV108" diOpen="" doOpen="DO_ValveAV108" display="ValveAV108" schematicId="" ILKDi="DI_AV108ILK" isNc="true" isDefaultOpen="false"/>

Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

@@ -372,8 +372,7 @@
 		<DI_ITEM Index="1838"   Name="DI_POD2FOUPVacuumSuckingAlarm"                                      BufferOffset="1838"                                      Addr="D114.14"                      Description="POD2 FOUP vacuum sucking alarm"                       />
 		<DI_ITEM Index="1840"   Name="DI_POD1WaferOnRobot"                                      BufferOffset="1840"                                      Addr="D115.0"                      Description="POD1 wafer on robot"                       />
 		<DI_ITEM Index="1841"   Name="DI_POD2WaferOnRobot"                                      BufferOffset="1841"                                      Addr="D115.1"                      Description="POD2 wafer on robot"                       />
-		<!--ELK02上 DI_WaferRobotIsTPStatus true是TP模式 ，false是host模式-->
-		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsTPStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
+		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsHostStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
 		<DI_ITEM Index="1843"   Name="DI_WaferRobotPowerOn"                                      BufferOffset="1843"                                      Addr="D115.3"                      Description="Wafer Robot Power On"                       />
 		<DI_ITEM Index="1844"   Name="DI_WaferRobotAlarm"                                      BufferOffset="1844"                                      Addr="D115.4"                      Description="Wafer Robot Alarm"                       />
 		<DI_ITEM Index="1845"   Name="DI_WaferRobotWafer1Checked"                                      BufferOffset="1845"                                      Addr="D115.5"                      Description="Wafer Robot Wafer1 Checked"                       />
@@ -497,33 +496,7 @@
 		<DI_ITEM Index="3295"   Name="DI_AutoTeachingErr1Alm"                                      BufferOffset="3295"                                      Addr="D205.15"                      Description="Auto Teaching Err1 Alm"                       />
 
 		<DI_ITEM Index="3296"   Name="DI_AutoTeachingErr2Alm"                                      BufferOffset="3296"                                      Addr="D206.0"                      Description="Auto Teaching Err2 Alm"                       />
-		<DI_ITEM Index="3312"   Name="DI_FFU801DataWriteDone"                                      BufferOffset="3312"                                      Addr="D207.0"                      Description="FFU801 data write done"                       />
-		<DI_ITEM Index="3313"   Name="DI_FFU802DataWriteDone"                                      BufferOffset="3313"                                      Addr="D207.1"                      Description="FFU802 data write done"                       />
-		<DI_ITEM Index="3314"   Name="DI_FFU803DataWriteDone"                                      BufferOffset="3314"                                      Addr="D207.2"                      Description="FFU803 data write done"                       />
-		<DI_ITEM Index="3315"   Name="DI_FFU201DataWriteDone"                                      BufferOffset="3315"                                      Addr="D207.3"                      Description="FFU201 data write done"                       />
-		<DI_ITEM Index="3316"   Name="DI_FFU202DataWriteDone"                                      BufferOffset="3316"                                      Addr="D207.4"                      Description="FFU202 data write done"                       />
-		<DI_ITEM Index="3317"   Name="DI_FFU203DataWriteDone"                                      BufferOffset="3317"                                      Addr="D207.5"                      Description="FFU203 data write done"                       />
-		<DI_ITEM Index="3318"   Name="DI_FFU204DataWriteDone"                                      BufferOffset="3318"                                      Addr="D207.6"                      Description="FFU204 data write done"                       />
-		<DI_ITEM Index="3319"   Name="DI_FFU205DataWriteDone"                                      BufferOffset="3319"                                      Addr="D207.7"                      Description="FFU205 data write done"                       />
-		<DI_ITEM Index="3320"   Name="DI_FFU206DataWriteDone"                                      BufferOffset="3320"                                      Addr="D207.8"                      Description="FFU206 data write done"                       />
-		<DI_ITEM Index="3328"   Name="DI_FFU801DataWriteError"                                      BufferOffset="3328"                                      Addr="D208.0"                      Description="FFU801 data write error"                       />
-		<DI_ITEM Index="3329"   Name="DI_FFU802DataWriteError"                                      BufferOffset="3329"                                      Addr="D208.1"                      Description="FFU802 data write error"                       />
-		<DI_ITEM Index="3330"   Name="DI_FFU803DataWriteError"                                      BufferOffset="3330"                                      Addr="D208.2"                      Description="FFU803 data write error"                       />
-		<DI_ITEM Index="3331"   Name="DI_FFU201DataWriteError"                                      BufferOffset="3331"                                      Addr="D208.3"                      Description="FFU201 data write error"                       />
-		<DI_ITEM Index="3332"   Name="DI_FFU202DataWriteError"                                      BufferOffset="3332"                                      Addr="D208.4"                      Description="FFU202 data write error"                       />
-		<DI_ITEM Index="3333"   Name="DI_FFU203DataWriteError"                                      BufferOffset="3333"                                      Addr="D208.5"                      Description="FFU203 data write error"                       />
-		<DI_ITEM Index="3334"   Name="DI_FFU204DataWriteError"                                      BufferOffset="3334"                                      Addr="D208.6"                      Description="FFU204 data write error"                       />
-		<DI_ITEM Index="3335"   Name="DI_FFU205DataWriteError"                                      BufferOffset="3335"                                      Addr="D208.7"                      Description="FFU205 data write error"                       />
-		<DI_ITEM Index="3336"   Name="DI_FFU206DataWriteError"                                      BufferOffset="3336"                                      Addr="D208.8"                      Description="FFU206 data write error"                       />
-		<DI_ITEM Index="3360"   Name="DI_FFU801DataReadError"                                      BufferOffset="3360"                                      Addr="D210.0"                      Description="FFU801 data read error"                       />
-		<DI_ITEM Index="3361"   Name="DI_FFU802DataReadError"                                      BufferOffset="3361"                                      Addr="D210.1"                      Description="FFU802 data read error"                       />
-		<DI_ITEM Index="3362"   Name="DI_FFU803DataReadError"                                      BufferOffset="3362"                                      Addr="D210.2"                      Description="FFU803 data read error"                       />
-		<DI_ITEM Index="3363"   Name="DI_FFU201DataReadError"                                      BufferOffset="3363"                                      Addr="D210.3"                      Description="FFU201 data read error"                       />
-		<DI_ITEM Index="3364"   Name="DI_FFU202DataReadError"                                      BufferOffset="3364"                                      Addr="D210.4"                      Description="FFU202 data read error"                       />
-		<DI_ITEM Index="3365"   Name="DI_FFU203DataReadError"                                      BufferOffset="3365"                                      Addr="D210.5"                      Description="FFU203 data read error"                       />
-		<DI_ITEM Index="3366"   Name="DI_FFU204DataReadError"                                      BufferOffset="3366"                                      Addr="D210.6"                      Description="FFU204 data read error"                       />
-		<DI_ITEM Index="3367"   Name="DI_FFU205DataReadError"                                      BufferOffset="3367"                                      Addr="D210.7"                      Description="FFU205 data read error"                       />
-		<DI_ITEM Index="3368"   Name="DI_FFU206DataReadError"                                      BufferOffset="3368"                                      Addr="D210.8"                      Description="FFU206 data read error"                       />
+	
 		<DI_ITEM Index="5216"   Name="DI_FIMS1LoadComplete"                                      BufferOffset="5216"                                      Addr="D326.0"                      Description="FIMS1 Load Complete"                       />
 		<DI_ITEM Index="5217"   Name="DI_FIMS1UnloadComplete"                                      BufferOffset="5217"                                      Addr="D326.1"                      Description="FIMS1 Unload Complete"                       />
 		<DI_ITEM Index="5218"   Name="DI_FIMS1HomeComplete"                                      BufferOffset="5218"                                      Addr="D326.2"                      Description="FIMS1 Home Complete"                       />
@@ -1287,8 +1260,8 @@
 		<DO_ITEM Index="2785"   Name="DO_FIMS1N2PurgeValveClose"                                      BufferOffset="2785"                                      Addr="D1174.1"                      Description="AV63 close(FIMS1 N2 Purge Valve)"                       />
 		<DO_ITEM Index="2786"   Name="DO_FIMS2N2PurgeValveOpen"                                      BufferOffset="2786"                                      Addr="D1174.2"                      Description="AV64 opne(FIMS2 N2 Purge Valve)"                       />
 		<DO_ITEM Index="2787"   Name="DO_FIMS2N2PurgeValveClose"                                      BufferOffset="2787"                                      Addr="D1174.3"                      Description="AV65 close(FIMS2 N2 Purge Valve)"                       />
-		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 vaccum valve open"                       />
-		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 vaccum valve close"                       />
+		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 AV217-A (vacuum pumping)"                       />
+		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 AV217-B (Breaking the vacuum)"                       />
 		<DO_ITEM Index="2914"   Name="DO_FIMS2VaccumValveOpen"                                      BufferOffset="2914"                                      Addr="D1182.2"                      Description="AV218 open(FIMS2 vaccum valve)"                       />
 		<DO_ITEM Index="2915"   Name="DO_FIMS2VaccumValveClose"                                      BufferOffset="2915"                                      Addr="D1182.3"                      Description="AV218 close(FIMS2 vaccum valve)"                       />
 		<DO_ITEM Index="2976"   Name="DO_FIMS1Latch1Off"                                      BufferOffset="2976"                                      Addr="D1186.0"                      Description="FIMS1 Latch1 Off"                       />
@@ -1315,15 +1288,6 @@
 		<DO_ITEM Index="3013"   Name="DO_FIMS1Dock"                                      BufferOffset="3013"                                      Addr="D1188.5"                      Description="FIMS1 Dock"                       />
 		<DO_ITEM Index="3014"   Name="DO_FIMS2Undock"                                      BufferOffset="3014"                                      Addr="D1188.6"                      Description="FIMS2 Undock"                       />
 		<DO_ITEM Index="3015"   Name="DO_FIMS2Dock"                                      BufferOffset="3015"                                      Addr="D1188.7"                      Description="FIMS2 Dock"                       />
-		<DO_ITEM Index="3056"   Name="DO_FFU1WriteCommand"                                      BufferOffset="3056"                                      Addr="D1191.0"                      Description="FFU1 write command"                       />
-		<DO_ITEM Index="3057"   Name="DO_FFU2WriteCommand"                                      BufferOffset="3057"                                      Addr="D1191.1"                      Description="FFU2 write command"                       />
-		<DO_ITEM Index="3058"   Name="DO_FFU3WriteCommand"                                      BufferOffset="3058"                                      Addr="D1191.2"                      Description="FFU3 write command"                       />
-		<DO_ITEM Index="3059"   Name="DO_FFU4WriteCommand"                                      BufferOffset="3059"                                      Addr="D1191.3"                      Description="FFU4 write command"                       />
-		<DO_ITEM Index="3060"   Name="DO_FFU5WriteCommand"                                      BufferOffset="3060"                                      Addr="D1191.4"                      Description="FFU5 write command"                       />
-		<DO_ITEM Index="3061"   Name="DO_FFU6WriteCommand"                                      BufferOffset="3061"                                      Addr="D1191.5"                      Description="FFU6 write command"                       />
-		<DO_ITEM Index="3062"   Name="DO_FFU7WriteCommand"                                      BufferOffset="3062"                                      Addr="D1191.6"                      Description="FFU7 write command"                       />
-		<DO_ITEM Index="3063"   Name="DO_FFU8WriteCommand"                                      BufferOffset="3063"                                      Addr="D1191.7"                      Description="FFU8 write command"                       />
-		<DO_ITEM Index="3064"   Name="DO_FFU9WriteCommand"                                      BufferOffset="3064"                                      Addr="D1191.8"                      Description="FFU9 write command"                       />
 		<DO_ITEM Index="3200"   Name="DO_HTR1"                                      BufferOffset="3200"                                      Addr="D1200.0"                      Description="HTR1"                       />
 		<DO_ITEM Index="3201"   Name="DO_HTR2"                                      BufferOffset="3201"                                      Addr="D1200.1"                      Description="HTR2"                       />
 		<DO_ITEM Index="3202"   Name="DO_HTR3"                                      BufferOffset="3202"                                      Addr="D1200.2"                      Description="HTR3"                       />
@@ -1454,96 +1418,19 @@
 		<AI_ITEM Index="342"    Name="AI_VG13Pressure"                                      BufferOffset="342"                                      Addr="D5684"                      Description="VG13 Pressure"                       />
 		<AI_ITEM Index="344"    Name="AI_VG32Pressure"                                      BufferOffset="344"                                      Addr="D5688"                      Description="VG32 Pressure"                       />
 		<AI_ITEM Index="345"    Name="AI_VG33Pressure"                                      BufferOffset="345"                                      Addr="D5690"                      Description="VG33 Pressure"                       />
-		<AI_ITEM Index="350"    Name="AI_FFU1GroupNumber"                                      BufferOffset="350"                                      Addr="D5700"                      Description="FFU1 group number"                       />
-		<AI_ITEM Index="351"    Name="AI_FFU1AddressNumber"                                      BufferOffset="351"                                      Addr="D5702"                      Description="FFU1 Address Number"                       />
-		<AI_ITEM Index="352"    Name="AI_FFU1Switch"                                      BufferOffset="352"                                      Addr="D5704"                      Description="FFU1 switch"                       />
-		<AI_ITEM Index="353"    Name="AI_FFU1SetSpeed"                                      BufferOffset="353"                                      Addr="D5706"                      Description="FFU1 Set speed"                       />
-		<AI_ITEM Index="354"    Name="AI_FFU1MaxSpeed"                                      BufferOffset="354"                                      Addr="D5708"                      Description="FFU1 Max speed"                       />
-		<AI_ITEM Index="355"    Name="AI_FFU1Reset"                                      BufferOffset="355"                                      Addr="D5710"                      Description="FFU1 Maximum speed reset"                       />
-		<AI_ITEM Index="356"    Name="AI_FFU1ErrorTimer"                                      BufferOffset="356"                                      Addr="D5712"                      Description="FFU1 Error Timer"                       />
-		<AI_ITEM Index="357"    Name="AI_FFU1CurrentSpeed"                                      BufferOffset="357"                                      Addr="D5714"                      Description="FFU1 Current speed"                       />
-		<AI_ITEM Index="358"    Name="AI_FFU1Voltage"                                      BufferOffset="358"                                      Addr="D5716"                      Description="FFU1 voltage"                       />
-		<AI_ITEM Index="359"    Name="AI_FFU1Current"                                      BufferOffset="359"                                      Addr="D5718"                      Description="FFU1 current"                       />
-		<AI_ITEM Index="360"    Name="AI_FFU2GroupNumber"                                      BufferOffset="360"                                      Addr="D5720"                      Description="FFU2 group number"                       />
-		<AI_ITEM Index="361"    Name="AI_FFU2AddressNumber"                                      BufferOffset="361"                                      Addr="D5722"                      Description="FFU2 Address Number"                       />
-		<AI_ITEM Index="362"    Name="AI_FFU2Switch"                                      BufferOffset="362"                                      Addr="D5724"                      Description="FFU2 switch"                       />
-		<AI_ITEM Index="363"    Name="AI_FFU2SetSpeed"                                      BufferOffset="363"                                      Addr="D5726"                      Description="FFU2 Set speed"                       />
-		<AI_ITEM Index="364"    Name="AI_FFU2MaxSpeed"                                      BufferOffset="364"                                      Addr="D5728"                      Description="FFU2 Max speed"                       />
-		<AI_ITEM Index="365"    Name="AI_FFU2Reset"                                      BufferOffset="365"                                      Addr="D5730"                      Description="FFU2 Maximum speed reset"                       />
-		<AI_ITEM Index="366"    Name="AI_FFU2ErrorTimer"                                      BufferOffset="366"                                      Addr="D5732"                      Description="FFU2 Error Timer"                       />
-		<AI_ITEM Index="367"    Name="AI_FFU2CurrentSpeed"                                      BufferOffset="367"                                      Addr="D5734"                      Description="FFU2 Current speed"                       />
-		<AI_ITEM Index="368"    Name="AI_FFU2Voltage"                                      BufferOffset="368"                                      Addr="D5736"                      Description="FFU2 voltage"                       />
-		<AI_ITEM Index="369"    Name="AI_FFU2Current"                                      BufferOffset="369"                                      Addr="D5738"                      Description="FFU2 current"                       />
-		<AI_ITEM Index="370"    Name="AI_FFU3GroupNumber"                                      BufferOffset="370"                                      Addr="D5740"                      Description="FFU3 group number"                       />
-		<AI_ITEM Index="371"    Name="AI_FFU3AddressNumber"                                      BufferOffset="371"                                      Addr="D5742"                      Description="FFU3 Address Number"                       />
-		<AI_ITEM Index="372"    Name="AI_FFU3Switch"                                      BufferOffset="372"                                      Addr="D5744"                      Description="FFU3 switch"                       />
-		<AI_ITEM Index="373"    Name="AI_FFU3SetSpeed"                                      BufferOffset="373"                                      Addr="D5746"                      Description="FFU3 Set speed"                       />
-		<AI_ITEM Index="374"    Name="AI_FFU3MaxSpeed"                                      BufferOffset="374"                                      Addr="D5748"                      Description="FFU3 Max speed"                       />
-		<AI_ITEM Index="375"    Name="AI_FFU3Reset"                                      BufferOffset="375"                                      Addr="D5750"                      Description="FFU3 Maximum speed reset"                       />
-		<AI_ITEM Index="376"    Name="AI_FFU3ErrorTimer"                                      BufferOffset="376"                                      Addr="D5752"                      Description="FFU3 Error Timer"                       />
-		<AI_ITEM Index="377"    Name="AI_FFU3CurrentSpeed"                                      BufferOffset="377"                                      Addr="D5754"                      Description="FFU3 Current speed"                       />
-		<AI_ITEM Index="378"    Name="AI_FFU3Voltage"                                      BufferOffset="378"                                      Addr="D5756"                      Description="FFU3 voltage"                       />
-		<AI_ITEM Index="379"    Name="AI_FFU3Current"                                      BufferOffset="379"                                      Addr="D5758"                      Description="FFU3 current"                       />
-		<AI_ITEM Index="380"    Name="AI_FFU4GroupNumber"                                      BufferOffset="380"                                      Addr="D5760"                      Description="FFU4 group number"                       />
-		<AI_ITEM Index="381"    Name="AI_FFU4AddressNumber"                                      BufferOffset="381"                                      Addr="D5762"                      Description="FFU4 Address Number"                       />
-		<AI_ITEM Index="382"    Name="AI_FFU4Switch"                                      BufferOffset="382"                                      Addr="D5764"                      Description="FFU4 switch"                       />
-		<AI_ITEM Index="383"    Name="AI_FFU4SetSpeed"                                      BufferOffset="383"                                      Addr="D5766"                      Description="FFU4 Set speed"                       />
-		<AI_ITEM Index="384"    Name="AI_FFU4MaxSpeed"                                      BufferOffset="384"                                      Addr="D5768"                      Description="FFU4 Max speed"                       />
-		<AI_ITEM Index="385"    Name="AI_FFU4Reset"                                      BufferOffset="385"                                      Addr="D5770"                      Description="FFU4 Maximum speed reset"                       />
-		<AI_ITEM Index="386"    Name="AI_FFU4ErrorTimer"                                      BufferOffset="386"                                      Addr="D5772"                      Description="FFU4 Error Timer"                       />
+		
 		<AI_ITEM Index="387"    Name="AI_FFU4CurrentSpeed"                                      BufferOffset="387"                                      Addr="D5774"                      Description="FFU4 Current speed"                       />
-		<AI_ITEM Index="388"    Name="AI_FFU4Voltage"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />
-		<AI_ITEM Index="389"    Name="AI_FFU4Current"                                      BufferOffset="389"                                      Addr="D5778"                      Description="FFU4 current"                       />
-		<AI_ITEM Index="390"    Name="AI_FFU5GroupNumber"                                      BufferOffset="390"                                      Addr="D5780"                      Description="FFU5 group number"                       />
-		<AI_ITEM Index="391"    Name="AI_FFU5AddressNumber"                                      BufferOffset="391"                                      Addr="D5782"                      Description="FFU5 Address Number"                       />
-		<AI_ITEM Index="392"    Name="AI_FFU5Switch"                                      BufferOffset="392"                                      Addr="D5784"                      Description="FFU5 switch"                       />
-		<AI_ITEM Index="393"    Name="AI_FFU5SetSpeed"                                      BufferOffset="393"                                      Addr="D5786"                      Description="FFU5 Set speed"                       />
-		<AI_ITEM Index="394"    Name="AI_FFU5MaxSpeed"                                      BufferOffset="394"                                      Addr="D5788"                      Description="FFU5 Max speed"                       />
-		<AI_ITEM Index="395"    Name="AI_FFU5Reset"                                      BufferOffset="395"                                      Addr="D5790"                      Description="FFU5 Maximum speed reset"                       />
-		<AI_ITEM Index="396"    Name="AI_FFU5ErrorTimer"                                      BufferOffset="396"                                      Addr="D5792"                      Description="FFU5 Error Timer"                       />
+		<AI_ITEM Index="388"    Name="AI_FFU4Status"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />
+		
 		<AI_ITEM Index="397"    Name="AI_FFU5CurrentSpeed"                                      BufferOffset="397"                                      Addr="D5794"                      Description="FFU5 Current speed"                       />
-		<AI_ITEM Index="398"    Name="AI_FFU5Voltage"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />
-		<AI_ITEM Index="399"    Name="AI_FFU5Current"                                      BufferOffset="399"                                      Addr="D5798"                      Description="FFU5 current"                       />
-		<AI_ITEM Index="400"    Name="AI_FFU6GroupNumber"                                      BufferOffset="400"                                      Addr="D5800"                      Description="FFU6 group number"                       />
-		<AI_ITEM Index="401"    Name="AI_FFU6AddressNumber"                                      BufferOffset="401"                                      Addr="D5802"                      Description="FFU6 Address Number"                       />
-		<AI_ITEM Index="402"    Name="AI_FFU6Switch"                                      BufferOffset="402"                                      Addr="D5804"                      Description="FFU6 switch"                       />
-		<AI_ITEM Index="403"    Name="AI_FFU6SetSpeed"                                      BufferOffset="403"                                      Addr="D5806"                      Description="FFU6 Set speed"                       />
-		<AI_ITEM Index="404"    Name="AI_FFU6MaxSpeed"                                      BufferOffset="404"                                      Addr="D5808"                      Description="FFU6 Max speed"                       />
-		<AI_ITEM Index="405"    Name="AI_FFU6Reset"                                      BufferOffset="405"                                      Addr="D5810"                      Description="FFU6 Maximum speed reset"                       />
-		<AI_ITEM Index="406"    Name="AI_FFU6ErrorTimer"                                      BufferOffset="406"                                      Addr="D5812"                      Description="FFU6 Error Timer"                       />
+		<AI_ITEM Index="398"    Name="AI_FFU5Status"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />
+		
 		<AI_ITEM Index="407"    Name="AI_FFU6CurrentSpeed"                                      BufferOffset="407"                                      Addr="D5814"                      Description="FFU6 Current speed"                       />
-		<AI_ITEM Index="408"    Name="AI_FFU6Voltage"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />
-		<AI_ITEM Index="409"    Name="AI_FFU6Current"                                      BufferOffset="409"                                      Addr="D5818"                      Description="FFU6 current"                       />
-		<AI_ITEM Index="410"    Name="AI_FFU7GroupNumber"                                      BufferOffset="410"                                      Addr="D5820"                      Description="FFU7 group number"                       />
-		<AI_ITEM Index="411"    Name="AI_FFU7AddressNumber"                                      BufferOffset="411"                                      Addr="D5822"                      Description="FFU7 Address Number"                       />
-		<AI_ITEM Index="412"    Name="AI_FFU7Switch"                                      BufferOffset="412"                                      Addr="D5824"                      Description="FFU7 switch"                       />
-		<AI_ITEM Index="413"    Name="AI_FFU7SetSpeed"                                      BufferOffset="413"                                      Addr="D5826"                      Description="FFU7 Set speed"                       />
-		<AI_ITEM Index="414"    Name="AI_FFU7MaxSpeed"                                      BufferOffset="414"                                      Addr="D5828"                      Description="FFU7 Max speed"                       />
-		<AI_ITEM Index="415"    Name="AI_FFU7Reset"                                      BufferOffset="415"                                      Addr="D5830"                      Description="FFU7 Maximum speed reset"                       />
-		<AI_ITEM Index="416"    Name="AI_FFU7ErrorTimer"                                      BufferOffset="416"                                      Addr="D5832"                      Description="FFU7 Error Timer"                       />
+		<AI_ITEM Index="408"    Name="AI_FFU6Status"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />
+	    
 		<AI_ITEM Index="417"    Name="AI_FFU7CurrentSpeed"                                      BufferOffset="417"                                      Addr="D5834"                      Description="FFU7 Current speed"                       />
-		<AI_ITEM Index="418"    Name="AI_FFU7Voltage"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
-		<AI_ITEM Index="419"    Name="AI_FFU7Current"                                      BufferOffset="419"                                      Addr="D5838"                      Description="FFU7 current"                       />
-		<AI_ITEM Index="420"    Name="AI_FFU8GroupNumber"                                      BufferOffset="420"                                      Addr="D5840"                      Description="FFU8 group number"                       />
-		<AI_ITEM Index="421"    Name="AI_FFU8AddressNumber"                                      BufferOffset="421"                                      Addr="D5842"                      Description="FFU8 Address Number"                       />
-		<AI_ITEM Index="422"    Name="AI_FFU8Switch"                                      BufferOffset="422"                                      Addr="D5844"                      Description="FFU8 switch"                       />
-		<AI_ITEM Index="423"    Name="AI_FFU8SetSpeed"                                      BufferOffset="423"                                      Addr="D5846"                      Description="FFU8 Set speed"                       />
-		<AI_ITEM Index="424"    Name="AI_FFU8MaxSpeed"                                      BufferOffset="424"                                      Addr="D5848"                      Description="FFU8 Max speed"                       />
-		<AI_ITEM Index="425"    Name="AI_FFU8Reset"                                      BufferOffset="425"                                      Addr="D5850"                      Description="FFU8 Maximum speed reset"                       />
-		<AI_ITEM Index="426"    Name="AI_FFU8ErrorTimer"                                      BufferOffset="426"                                      Addr="D5852"                      Description="FFU8 Error Timer"                       />
-		<AI_ITEM Index="427"    Name="AI_FFU8CurrentSpeed"                                      BufferOffset="427"                                      Addr="D5854"                      Description="FFU8 Current speed"                       />
-		<AI_ITEM Index="428"    Name="AI_FFU8Voltage"                                      BufferOffset="428"                                      Addr="D5856"                      Description="FFU8 voltage"                       />
-		<AI_ITEM Index="429"    Name="AI_FFU8Current"                                      BufferOffset="429"                                      Addr="D5858"                      Description="FFU8 current"                       />
-		<AI_ITEM Index="430"    Name="AI_FFU9GroupNumber"                                      BufferOffset="430"                                      Addr="D5860"                      Description="FFU9 group number"                       />
-		<AI_ITEM Index="431"    Name="AI_FFU9AddressNumber"                                      BufferOffset="431"                                      Addr="D5862"                      Description="FFU9 Address Number"                       />
-		<AI_ITEM Index="432"    Name="AI_FFU9Switch"                                      BufferOffset="432"                                      Addr="D5864"                      Description="FFU9 switch"                       />
-		<AI_ITEM Index="433"    Name="AI_FFU9SetSpeed"                                      BufferOffset="433"                                      Addr="D5866"                      Description="FFU9 Set speed"                       />
-		<AI_ITEM Index="434"    Name="AI_FFU9MaxSpeed"                                      BufferOffset="434"                                      Addr="D5868"                      Description="FFU9 Max speed"                       />
-		<AI_ITEM Index="435"    Name="AI_FFU9Reset"                                      BufferOffset="435"                                      Addr="D5870"                      Description="FFU9 Maximum speed reset"                       />
-		<AI_ITEM Index="436"    Name="AI_FFU9ErrorTimer"                                      BufferOffset="436"                                      Addr="D5872"                      Description="FFU9 Error Timer"                       />
-		<AI_ITEM Index="437"    Name="AI_FFU9CurrentSpeed"                                      BufferOffset="437"                                      Addr="D5874"                      Description="FFU9 Current speed"                       />
-		<AI_ITEM Index="438"    Name="AI_FFU9Voltage"                                      BufferOffset="438"                                      Addr="D5876"                      Description="FFU9 voltage"                       />
-		<AI_ITEM Index="439"    Name="AI_FFU9Current"                                      BufferOffset="439"                                      Addr="D5878"                      Description="FFU9 current"                       />
+		<AI_ITEM Index="418"    Name="AI_FFU7Status"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
+		
 		<AI_ITEM Index="450"    Name="AI_MFC1AirFlowPV"                                      BufferOffset="450"                                      Addr="D5900"                      Description="MFC1 air flow PV"                       />
 		<AI_ITEM Index="451"    Name="AI_MFC2AirFlowPV"                                      BufferOffset="451"                                      Addr="D5902"                      Description="MFC2 air flow PV"                       />
 		<AI_ITEM Index="452"    Name="AI_MFC3AirFlowPV"                                      BufferOffset="452"                                      Addr="D5904"                      Description="MFC3 air flow PV"                       />
@@ -1734,33 +1621,12 @@
 		<AO_ITEM Index="111"    Name="AO_ExchangeFOUPTOFOUPWaitTime"                                      BufferOffset="111"                                      Addr="D10222"                      Description="Exchange FOUP TO FOUP WaitTime"                       />
 		<AO_ITEM Index="112"    Name="AO_LAO2checkSV"                                      BufferOffset="112"                                      Addr="D10224"                      Description="LA O2 check SV"                       />
 		<AO_ITEM Index="113"    Name="AO_FOUPO2CheckSV"                                      BufferOffset="113"                                      Addr="D10226"                      Description="FOUP O2 Check SV"                       />
-		<AO_ITEM Index="157"    Name="AO_FFU1Switch"                                      BufferOffset="157"                                      Addr="D10314"                      Description="FFU1 switch"                       />
-		<AO_ITEM Index="158"    Name="AO_FFU1SetSpeed"                                      BufferOffset="158"                                      Addr="D10316"                      Description="FFU1 Set speed"                       />
-		<AO_ITEM Index="160"    Name="AO_FFU1Reset"                                      BufferOffset="160"                                      Addr="D10320"                      Description="FFU1 Maximum speed reset"                       />
-		<AO_ITEM Index="163"    Name="AO_FFU2Switch"                                      BufferOffset="163"                                      Addr="D10326"                      Description="FFU2 switch"                       />
-		<AO_ITEM Index="164"    Name="AO_FFU2SetSpeed"                                      BufferOffset="164"                                      Addr="D10328"                      Description="FFU2 Set speed"                       />
-		<AO_ITEM Index="166"    Name="AO_FFU2Reset"                                      BufferOffset="166"                                      Addr="D10332"                      Description="FFU2 Maximum speed reset"                       />
-		<AO_ITEM Index="169"    Name="AO_FFU3Switch"                                      BufferOffset="169"                                      Addr="D10338"                      Description="FFU3 switch"                       />
-		<AO_ITEM Index="170"    Name="AO_FFU3SetSpeed"                                      BufferOffset="170"                                      Addr="D10340"                      Description="FFU3 Set speed"                       />
-		<AO_ITEM Index="172"    Name="AO_FFU3Reset"                                      BufferOffset="172"                                      Addr="D10344"                      Description="FFU3 Maximum speed reset"                       />
-		<AO_ITEM Index="175"    Name="AO_FFU4Switch"                                      BufferOffset="175"                                      Addr="D10350"                      Description="FFU4 switch"                       />
+		
 		<AO_ITEM Index="176"    Name="AO_FFU4SetSpeed"                                      BufferOffset="176"                                      Addr="D10352"                      Description="FFU4 Set speed"                       />
-		<AO_ITEM Index="178"    Name="AO_FFU4Reset"                                      BufferOffset="178"                                      Addr="D10356"                      Description="FFU4 Maximum speed reset"                       />
-		<AO_ITEM Index="181"    Name="AO_FFU5Switch"                                      BufferOffset="181"                                      Addr="D10362"                      Description="FFU5 switch"                       />
 		<AO_ITEM Index="182"    Name="AO_FFU5SetSpeed"                                      BufferOffset="182"                                      Addr="D10364"                      Description="FFU5 Set speed"                       />
-		<AO_ITEM Index="184"    Name="AO_FFU5Reset"                                      BufferOffset="184"                                      Addr="D10368"                      Description="FFU5 Maximum speed reset"                       />
-		<AO_ITEM Index="187"    Name="AO_FFU6Switch"                                      BufferOffset="187"                                      Addr="D10374"                      Description="FFU6 switch"                       />
 		<AO_ITEM Index="188"    Name="AO_FFU6SetSpeed"                                      BufferOffset="188"                                      Addr="D10376"                      Description="FFU6 Set speed"                       />
-		<AO_ITEM Index="190"    Name="AO_FFU6Reset"                                      BufferOffset="190"                                      Addr="D10380"                      Description="FFU6 Maximum speed reset"                       />
-		<AO_ITEM Index="193"    Name="AO_FFU7Switch"                                      BufferOffset="193"                                      Addr="D10386"                      Description="FFU7 switch"                       />
 		<AO_ITEM Index="194"    Name="AO_FFU7SetSpeed"                                      BufferOffset="194"                                      Addr="D10388"                      Description="FFU7 Set speed"                       />
-		<AO_ITEM Index="196"    Name="AO_FFU7Reset"                                      BufferOffset="196"                                      Addr="D10392"                      Description="FFU7 Maximum speed reset"                       />
-		<AO_ITEM Index="199"    Name="AO_FFU8Switch"                                      BufferOffset="199"                                      Addr="D10398"                      Description="FFU8 switch"                       />
-		<AO_ITEM Index="200"    Name="AO_FFU8SetSpeed"                                      BufferOffset="200"                                      Addr="D10400"                      Description="FFU8 Set speed"                       />
-		<AO_ITEM Index="202"    Name="AO_FFU8Reset"                                      BufferOffset="202"                                      Addr="D10404"                      Description="FFU8 Maximum speed reset"                       />
-		<AO_ITEM Index="205"    Name="AO_FFU9Switch"                                      BufferOffset="205"                                      Addr="D10410"                      Description="FFU9 switch"                       />
-		<AO_ITEM Index="206"    Name="AO_FFU9SetSpeed"                                      BufferOffset="206"                                      Addr="D10412"                      Description="FFU9 Set speed"                       />
-		<AO_ITEM Index="208"    Name="AO_FFU9Reset"                                      BufferOffset="208"                                      Addr="D10416"                      Description="FFU9 Maximum speed reset"                       />
+		
 		<AO_ITEM Index="215"    Name="AO_MFC1AirFlowSV"                                      BufferOffset="215"                                      Addr="D10430"                      Description="MFC1 air flow SV"                       />
 		<AO_ITEM Index="216"    Name="AO_MFC2AirFlowSV"                                      BufferOffset="216"                                      Addr="D10432"                      Description="MFC2 air flow SV"                       />
 		<AO_ITEM Index="217"    Name="AO_MFC3AirFlowSV"                                      BufferOffset="217"                                      Addr="D10434"                      Description="MFC3 air flow SV"                       />

Furnace/FurnaceRT/Devices/IoFFU.cs

@@ -33,6 +33,7 @@ namespace FurnaceRT.Devices
         private AIAccessor _aiCurrentSpeed;
         private AIAccessor _aiVoltage;
         private AIAccessor _aiCurrent;
+        private AIAccessor _aiStatus;
 
         private AOAccessor _aoSwitch;
         private AOAccessor _aoSetSpeed;
@@ -214,14 +215,23 @@ namespace FurnaceRT.Devices
 
         private FFUStatusEnum GetFFUStatusEnum()
         {
-            if (_aiSwitch == null)
-                return FFUStatusEnum.Unknown;
 
-            if (_aiSwitch.FloatValue == 1)
+
+            if (_aiSwitch != null && _aiSwitch.FloatValue == 1)
                 return FFUStatusEnum.OFF;
 
-            if (_aiSwitch.FloatValue == 2)
+            if (_aiSwitch != null && _aiSwitch.FloatValue == 2)
+                return FFUStatusEnum.ON;
+
+            if (_aiStatus != null && (_aiStatus.FloatValue == 2 || _aiStatus.FloatValue == 3))
+            {
+                return FFUStatusEnum.OFF;
+            }
+            if (_aiStatus != null && (_aiStatus.FloatValue == 0))
+            {
                 return FFUStatusEnum.ON;
+            }
+
 
             return FFUStatusEnum.Unknown;
 
@@ -250,6 +260,8 @@ namespace FurnaceRT.Devices
             _aiVoltage = ParseAiNode("aiVoltage", node, ioModule);
             _aiCurrent = ParseAiNode("aiCurrent", node, ioModule);
 
+            _aiStatus = ParseAiNode("aiStatus", node, ioModule);
+
             _aoSwitch = ParseAoNode("aoSwitch", node, ioModule);
             _aoSetSpeed = ParseAoNode("aoSetSpeed", node, ioModule);
             _aoReset = ParseAoNode("aoReset", node, ioModule);
@@ -293,20 +305,23 @@ namespace FurnaceRT.Devices
             {
                 float.TryParse(param[0].ToString(), out float value);
 
-                if (_aoSetSpeed != null)
-                {
-
-                    _aoSetSpeed.FloatValue = value;
-                    if (_scSetSpeed != null)
-                        SC.SetItemValue(_scSetSpeed.PathName, param[0].ToString());
-
-                }
-
+                SetSpeedMethods(value);
             }
             return true;
 
         }
+        private void SetSpeedMethods(float value)
+        {
+
+            if (_aoSetSpeed != null)
+            {
 
+                _aoSetSpeed.FloatValue = value;
+                if (_scSetSpeed != null)
+                    SC.SetItemValue(_scSetSpeed.PathName, value.ToString());
+
+            }
+        }
         public void Monitor()
         {
         }
@@ -345,6 +360,18 @@ namespace FurnaceRT.Devices
             {
                 _aoSwitch.FloatValue = isSwitch ? 1 : 0;
             }
+            if (_aoSwitch == null)
+            {
+                if (isSwitch)
+                {
+                    SetSpeedMethods(float.Parse(SC.GetStringValue(_scSetSpeed.PathName)));
+                }
+                else
+                {
+                    SetSpeedMethods(0);
+
+                }
+            }
         }
     }
 }

Furnace/FurnaceSimulator/Config/ELK/_ioDefinePM.xml

@@ -372,8 +372,7 @@
 		<DI_ITEM Index="1838"   Name="DI_POD2FOUPVacuumSuckingAlarm"                                      BufferOffset="1838"                                      Addr="D114.14"                      Description="POD2 FOUP vacuum sucking alarm"                       />
 		<DI_ITEM Index="1840"   Name="DI_POD1WaferOnRobot"                                      BufferOffset="1840"                                      Addr="D115.0"                      Description="POD1 wafer on robot"                       />
 		<DI_ITEM Index="1841"   Name="DI_POD2WaferOnRobot"                                      BufferOffset="1841"                                      Addr="D115.1"                      Description="POD2 wafer on robot"                       />
-		<!--ELK02上 DI_WaferRobotIsTPStatus true是TP模式 ，false是host模式-->
-		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsTPStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
+		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsHostStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
 		<DI_ITEM Index="1843"   Name="DI_WaferRobotPowerOn"                                      BufferOffset="1843"                                      Addr="D115.3"                      Description="Wafer Robot Power On"                       />
 		<DI_ITEM Index="1844"   Name="DI_WaferRobotAlarm"                                      BufferOffset="1844"                                      Addr="D115.4"                      Description="Wafer Robot Alarm"                       />
 		<DI_ITEM Index="1845"   Name="DI_WaferRobotWafer1Checked"                                      BufferOffset="1845"                                      Addr="D115.5"                      Description="Wafer Robot Wafer1 Checked"                       />
@@ -497,33 +496,7 @@
 		<DI_ITEM Index="3295"   Name="DI_AutoTeachingErr1Alm"                                      BufferOffset="3295"                                      Addr="D205.15"                      Description="Auto Teaching Err1 Alm"                       />
 
 		<DI_ITEM Index="3296"   Name="DI_AutoTeachingErr2Alm"                                      BufferOffset="3296"                                      Addr="D206.0"                      Description="Auto Teaching Err2 Alm"                       />
-		<DI_ITEM Index="3312"   Name="DI_FFU801DataWriteDone"                                      BufferOffset="3312"                                      Addr="D207.0"                      Description="FFU801 data write done"                       />
-		<DI_ITEM Index="3313"   Name="DI_FFU802DataWriteDone"                                      BufferOffset="3313"                                      Addr="D207.1"                      Description="FFU802 data write done"                       />
-		<DI_ITEM Index="3314"   Name="DI_FFU803DataWriteDone"                                      BufferOffset="3314"                                      Addr="D207.2"                      Description="FFU803 data write done"                       />
-		<DI_ITEM Index="3315"   Name="DI_FFU201DataWriteDone"                                      BufferOffset="3315"                                      Addr="D207.3"                      Description="FFU201 data write done"                       />
-		<DI_ITEM Index="3316"   Name="DI_FFU202DataWriteDone"                                      BufferOffset="3316"                                      Addr="D207.4"                      Description="FFU202 data write done"                       />
-		<DI_ITEM Index="3317"   Name="DI_FFU203DataWriteDone"                                      BufferOffset="3317"                                      Addr="D207.5"                      Description="FFU203 data write done"                       />
-		<DI_ITEM Index="3318"   Name="DI_FFU204DataWriteDone"                                      BufferOffset="3318"                                      Addr="D207.6"                      Description="FFU204 data write done"                       />
-		<DI_ITEM Index="3319"   Name="DI_FFU205DataWriteDone"                                      BufferOffset="3319"                                      Addr="D207.7"                      Description="FFU205 data write done"                       />
-		<DI_ITEM Index="3320"   Name="DI_FFU206DataWriteDone"                                      BufferOffset="3320"                                      Addr="D207.8"                      Description="FFU206 data write done"                       />
-		<DI_ITEM Index="3328"   Name="DI_FFU801DataWriteError"                                      BufferOffset="3328"                                      Addr="D208.0"                      Description="FFU801 data write error"                       />
-		<DI_ITEM Index="3329"   Name="DI_FFU802DataWriteError"                                      BufferOffset="3329"                                      Addr="D208.1"                      Description="FFU802 data write error"                       />
-		<DI_ITEM Index="3330"   Name="DI_FFU803DataWriteError"                                      BufferOffset="3330"                                      Addr="D208.2"                      Description="FFU803 data write error"                       />
-		<DI_ITEM Index="3331"   Name="DI_FFU201DataWriteError"                                      BufferOffset="3331"                                      Addr="D208.3"                      Description="FFU201 data write error"                       />
-		<DI_ITEM Index="3332"   Name="DI_FFU202DataWriteError"                                      BufferOffset="3332"                                      Addr="D208.4"                      Description="FFU202 data write error"                       />
-		<DI_ITEM Index="3333"   Name="DI_FFU203DataWriteError"                                      BufferOffset="3333"                                      Addr="D208.5"                      Description="FFU203 data write error"                       />
-		<DI_ITEM Index="3334"   Name="DI_FFU204DataWriteError"                                      BufferOffset="3334"                                      Addr="D208.6"                      Description="FFU204 data write error"                       />
-		<DI_ITEM Index="3335"   Name="DI_FFU205DataWriteError"                                      BufferOffset="3335"                                      Addr="D208.7"                      Description="FFU205 data write error"                       />
-		<DI_ITEM Index="3336"   Name="DI_FFU206DataWriteError"                                      BufferOffset="3336"                                      Addr="D208.8"                      Description="FFU206 data write error"                       />
-		<DI_ITEM Index="3360"   Name="DI_FFU801DataReadError"                                      BufferOffset="3360"                                      Addr="D210.0"                      Description="FFU801 data read error"                       />
-		<DI_ITEM Index="3361"   Name="DI_FFU802DataReadError"                                      BufferOffset="3361"                                      Addr="D210.1"                      Description="FFU802 data read error"                       />
-		<DI_ITEM Index="3362"   Name="DI_FFU803DataReadError"                                      BufferOffset="3362"                                      Addr="D210.2"                      Description="FFU803 data read error"                       />
-		<DI_ITEM Index="3363"   Name="DI_FFU201DataReadError"                                      BufferOffset="3363"                                      Addr="D210.3"                      Description="FFU201 data read error"                       />
-		<DI_ITEM Index="3364"   Name="DI_FFU202DataReadError"                                      BufferOffset="3364"                                      Addr="D210.4"                      Description="FFU202 data read error"                       />
-		<DI_ITEM Index="3365"   Name="DI_FFU203DataReadError"                                      BufferOffset="3365"                                      Addr="D210.5"                      Description="FFU203 data read error"                       />
-		<DI_ITEM Index="3366"   Name="DI_FFU204DataReadError"                                      BufferOffset="3366"                                      Addr="D210.6"                      Description="FFU204 data read error"                       />
-		<DI_ITEM Index="3367"   Name="DI_FFU205DataReadError"                                      BufferOffset="3367"                                      Addr="D210.7"                      Description="FFU205 data read error"                       />
-		<DI_ITEM Index="3368"   Name="DI_FFU206DataReadError"                                      BufferOffset="3368"                                      Addr="D210.8"                      Description="FFU206 data read error"                       />
+
 		<DI_ITEM Index="5216"   Name="DI_FIMS1LoadComplete"                                      BufferOffset="5216"                                      Addr="D326.0"                      Description="FIMS1 Load Complete"                       />
 		<DI_ITEM Index="5217"   Name="DI_FIMS1UnloadComplete"                                      BufferOffset="5217"                                      Addr="D326.1"                      Description="FIMS1 Unload Complete"                       />
 		<DI_ITEM Index="5218"   Name="DI_FIMS1HomeComplete"                                      BufferOffset="5218"                                      Addr="D326.2"                      Description="FIMS1 Home Complete"                       />
@@ -1287,8 +1260,8 @@
 		<DO_ITEM Index="2785"   Name="DO_FIMS1N2PurgeValveClose"                                      BufferOffset="2785"                                      Addr="D1174.1"                      Description="AV63 close(FIMS1 N2 Purge Valve)"                       />
 		<DO_ITEM Index="2786"   Name="DO_FIMS2N2PurgeValveOpen"                                      BufferOffset="2786"                                      Addr="D1174.2"                      Description="AV64 opne(FIMS2 N2 Purge Valve)"                       />
 		<DO_ITEM Index="2787"   Name="DO_FIMS2N2PurgeValveClose"                                      BufferOffset="2787"                                      Addr="D1174.3"                      Description="AV65 close(FIMS2 N2 Purge Valve)"                       />
-		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 vaccum valve open"                       />
-		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 vaccum valve close"                       />
+		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 AV217-A (vacuum pumping)"                       />
+		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 AV217-B (Breaking the vacuum)"                       />
 		<DO_ITEM Index="2914"   Name="DO_FIMS2VaccumValveOpen"                                      BufferOffset="2914"                                      Addr="D1182.2"                      Description="AV218 open(FIMS2 vaccum valve)"                       />
 		<DO_ITEM Index="2915"   Name="DO_FIMS2VaccumValveClose"                                      BufferOffset="2915"                                      Addr="D1182.3"                      Description="AV218 close(FIMS2 vaccum valve)"                       />
 		<DO_ITEM Index="2976"   Name="DO_FIMS1Latch1Off"                                      BufferOffset="2976"                                      Addr="D1186.0"                      Description="FIMS1 Latch1 Off"                       />
@@ -1315,15 +1288,6 @@
 		<DO_ITEM Index="3013"   Name="DO_FIMS1Dock"                                      BufferOffset="3013"                                      Addr="D1188.5"                      Description="FIMS1 Dock"                       />
 		<DO_ITEM Index="3014"   Name="DO_FIMS2Undock"                                      BufferOffset="3014"                                      Addr="D1188.6"                      Description="FIMS2 Undock"                       />
 		<DO_ITEM Index="3015"   Name="DO_FIMS2Dock"                                      BufferOffset="3015"                                      Addr="D1188.7"                      Description="FIMS2 Dock"                       />
-		<DO_ITEM Index="3056"   Name="DO_FFU1WriteCommand"                                      BufferOffset="3056"                                      Addr="D1191.0"                      Description="FFU1 write command"                       />
-		<DO_ITEM Index="3057"   Name="DO_FFU2WriteCommand"                                      BufferOffset="3057"                                      Addr="D1191.1"                      Description="FFU2 write command"                       />
-		<DO_ITEM Index="3058"   Name="DO_FFU3WriteCommand"                                      BufferOffset="3058"                                      Addr="D1191.2"                      Description="FFU3 write command"                       />
-		<DO_ITEM Index="3059"   Name="DO_FFU4WriteCommand"                                      BufferOffset="3059"                                      Addr="D1191.3"                      Description="FFU4 write command"                       />
-		<DO_ITEM Index="3060"   Name="DO_FFU5WriteCommand"                                      BufferOffset="3060"                                      Addr="D1191.4"                      Description="FFU5 write command"                       />
-		<DO_ITEM Index="3061"   Name="DO_FFU6WriteCommand"                                      BufferOffset="3061"                                      Addr="D1191.5"                      Description="FFU6 write command"                       />
-		<DO_ITEM Index="3062"   Name="DO_FFU7WriteCommand"                                      BufferOffset="3062"                                      Addr="D1191.6"                      Description="FFU7 write command"                       />
-		<DO_ITEM Index="3063"   Name="DO_FFU8WriteCommand"                                      BufferOffset="3063"                                      Addr="D1191.7"                      Description="FFU8 write command"                       />
-		<DO_ITEM Index="3064"   Name="DO_FFU9WriteCommand"                                      BufferOffset="3064"                                      Addr="D1191.8"                      Description="FFU9 write command"                       />
 		<DO_ITEM Index="3200"   Name="DO_HTR1"                                      BufferOffset="3200"                                      Addr="D1200.0"                      Description="HTR1"                       />
 		<DO_ITEM Index="3201"   Name="DO_HTR2"                                      BufferOffset="3201"                                      Addr="D1200.1"                      Description="HTR2"                       />
 		<DO_ITEM Index="3202"   Name="DO_HTR3"                                      BufferOffset="3202"                                      Addr="D1200.2"                      Description="HTR3"                       />
@@ -1454,96 +1418,19 @@
 		<AI_ITEM Index="342"    Name="AI_VG13Pressure"                                      BufferOffset="342"                                      Addr="D5684"                      Description="VG13 Pressure"                       />
 		<AI_ITEM Index="344"    Name="AI_VG32Pressure"                                      BufferOffset="344"                                      Addr="D5688"                      Description="VG32 Pressure"                       />
 		<AI_ITEM Index="345"    Name="AI_VG33Pressure"                                      BufferOffset="345"                                      Addr="D5690"                      Description="VG33 Pressure"                       />
-		<AI_ITEM Index="350"    Name="AI_FFU1GroupNumber"                                      BufferOffset="350"                                      Addr="D5700"                      Description="FFU1 group number"                       />
-		<AI_ITEM Index="351"    Name="AI_FFU1AddressNumber"                                      BufferOffset="351"                                      Addr="D5702"                      Description="FFU1 Address Number"                       />
-		<AI_ITEM Index="352"    Name="AI_FFU1Switch"                                      BufferOffset="352"                                      Addr="D5704"                      Description="FFU1 switch"                       />
-		<AI_ITEM Index="353"    Name="AI_FFU1SetSpeed"                                      BufferOffset="353"                                      Addr="D5706"                      Description="FFU1 Set speed"                       />
-		<AI_ITEM Index="354"    Name="AI_FFU1MaxSpeed"                                      BufferOffset="354"                                      Addr="D5708"                      Description="FFU1 Max speed"                       />
-		<AI_ITEM Index="355"    Name="AI_FFU1Reset"                                      BufferOffset="355"                                      Addr="D5710"                      Description="FFU1 Maximum speed reset"                       />
-		<AI_ITEM Index="356"    Name="AI_FFU1ErrorTimer"                                      BufferOffset="356"                                      Addr="D5712"                      Description="FFU1 Error Timer"                       />
-		<AI_ITEM Index="357"    Name="AI_FFU1CurrentSpeed"                                      BufferOffset="357"                                      Addr="D5714"                      Description="FFU1 Current speed"                       />
-		<AI_ITEM Index="358"    Name="AI_FFU1Voltage"                                      BufferOffset="358"                                      Addr="D5716"                      Description="FFU1 voltage"                       />
-		<AI_ITEM Index="359"    Name="AI_FFU1Current"                                      BufferOffset="359"                                      Addr="D5718"                      Description="FFU1 current"                       />
-		<AI_ITEM Index="360"    Name="AI_FFU2GroupNumber"                                      BufferOffset="360"                                      Addr="D5720"                      Description="FFU2 group number"                       />
-		<AI_ITEM Index="361"    Name="AI_FFU2AddressNumber"                                      BufferOffset="361"                                      Addr="D5722"                      Description="FFU2 Address Number"                       />
-		<AI_ITEM Index="362"    Name="AI_FFU2Switch"                                      BufferOffset="362"                                      Addr="D5724"                      Description="FFU2 switch"                       />
-		<AI_ITEM Index="363"    Name="AI_FFU2SetSpeed"                                      BufferOffset="363"                                      Addr="D5726"                      Description="FFU2 Set speed"                       />
-		<AI_ITEM Index="364"    Name="AI_FFU2MaxSpeed"                                      BufferOffset="364"                                      Addr="D5728"                      Description="FFU2 Max speed"                       />
-		<AI_ITEM Index="365"    Name="AI_FFU2Reset"                                      BufferOffset="365"                                      Addr="D5730"                      Description="FFU2 Maximum speed reset"                       />
-		<AI_ITEM Index="366"    Name="AI_FFU2ErrorTimer"                                      BufferOffset="366"                                      Addr="D5732"                      Description="FFU2 Error Timer"                       />
-		<AI_ITEM Index="367"    Name="AI_FFU2CurrentSpeed"                                      BufferOffset="367"                                      Addr="D5734"                      Description="FFU2 Current speed"                       />
-		<AI_ITEM Index="368"    Name="AI_FFU2Voltage"                                      BufferOffset="368"                                      Addr="D5736"                      Description="FFU2 voltage"                       />
-		<AI_ITEM Index="369"    Name="AI_FFU2Current"                                      BufferOffset="369"                                      Addr="D5738"                      Description="FFU2 current"                       />
-		<AI_ITEM Index="370"    Name="AI_FFU3GroupNumber"                                      BufferOffset="370"                                      Addr="D5740"                      Description="FFU3 group number"                       />
-		<AI_ITEM Index="371"    Name="AI_FFU3AddressNumber"                                      BufferOffset="371"                                      Addr="D5742"                      Description="FFU3 Address Number"                       />
-		<AI_ITEM Index="372"    Name="AI_FFU3Switch"                                      BufferOffset="372"                                      Addr="D5744"                      Description="FFU3 switch"                       />
-		<AI_ITEM Index="373"    Name="AI_FFU3SetSpeed"                                      BufferOffset="373"                                      Addr="D5746"                      Description="FFU3 Set speed"                       />
-		<AI_ITEM Index="374"    Name="AI_FFU3MaxSpeed"                                      BufferOffset="374"                                      Addr="D5748"                      Description="FFU3 Max speed"                       />
-		<AI_ITEM Index="375"    Name="AI_FFU3Reset"                                      BufferOffset="375"                                      Addr="D5750"                      Description="FFU3 Maximum speed reset"                       />
-		<AI_ITEM Index="376"    Name="AI_FFU3ErrorTimer"                                      BufferOffset="376"                                      Addr="D5752"                      Description="FFU3 Error Timer"                       />
-		<AI_ITEM Index="377"    Name="AI_FFU3CurrentSpeed"                                      BufferOffset="377"                                      Addr="D5754"                      Description="FFU3 Current speed"                       />
-		<AI_ITEM Index="378"    Name="AI_FFU3Voltage"                                      BufferOffset="378"                                      Addr="D5756"                      Description="FFU3 voltage"                       />
-		<AI_ITEM Index="379"    Name="AI_FFU3Current"                                      BufferOffset="379"                                      Addr="D5758"                      Description="FFU3 current"                       />
-		<AI_ITEM Index="380"    Name="AI_FFU4GroupNumber"                                      BufferOffset="380"                                      Addr="D5760"                      Description="FFU4 group number"                       />
-		<AI_ITEM Index="381"    Name="AI_FFU4AddressNumber"                                      BufferOffset="381"                                      Addr="D5762"                      Description="FFU4 Address Number"                       />
-		<AI_ITEM Index="382"    Name="AI_FFU4Switch"                                      BufferOffset="382"                                      Addr="D5764"                      Description="FFU4 switch"                       />
-		<AI_ITEM Index="383"    Name="AI_FFU4SetSpeed"                                      BufferOffset="383"                                      Addr="D5766"                      Description="FFU4 Set speed"                       />
-		<AI_ITEM Index="384"    Name="AI_FFU4MaxSpeed"                                      BufferOffset="384"                                      Addr="D5768"                      Description="FFU4 Max speed"                       />
-		<AI_ITEM Index="385"    Name="AI_FFU4Reset"                                      BufferOffset="385"                                      Addr="D5770"                      Description="FFU4 Maximum speed reset"                       />
-		<AI_ITEM Index="386"    Name="AI_FFU4ErrorTimer"                                      BufferOffset="386"                                      Addr="D5772"                      Description="FFU4 Error Timer"                       />
+
 		<AI_ITEM Index="387"    Name="AI_FFU4CurrentSpeed"                                      BufferOffset="387"                                      Addr="D5774"                      Description="FFU4 Current speed"                       />
-		<AI_ITEM Index="388"    Name="AI_FFU4Voltage"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />
-		<AI_ITEM Index="389"    Name="AI_FFU4Current"                                      BufferOffset="389"                                      Addr="D5778"                      Description="FFU4 current"                       />
-		<AI_ITEM Index="390"    Name="AI_FFU5GroupNumber"                                      BufferOffset="390"                                      Addr="D5780"                      Description="FFU5 group number"                       />
-		<AI_ITEM Index="391"    Name="AI_FFU5AddressNumber"                                      BufferOffset="391"                                      Addr="D5782"                      Description="FFU5 Address Number"                       />
-		<AI_ITEM Index="392"    Name="AI_FFU5Switch"                                      BufferOffset="392"                                      Addr="D5784"                      Description="FFU5 switch"                       />
-		<AI_ITEM Index="393"    Name="AI_FFU5SetSpeed"                                      BufferOffset="393"                                      Addr="D5786"                      Description="FFU5 Set speed"                       />
-		<AI_ITEM Index="394"    Name="AI_FFU5MaxSpeed"                                      BufferOffset="394"                                      Addr="D5788"                      Description="FFU5 Max speed"                       />
-		<AI_ITEM Index="395"    Name="AI_FFU5Reset"                                      BufferOffset="395"                                      Addr="D5790"                      Description="FFU5 Maximum speed reset"                       />
-		<AI_ITEM Index="396"    Name="AI_FFU5ErrorTimer"                                      BufferOffset="396"                                      Addr="D5792"                      Description="FFU5 Error Timer"                       />
+		<AI_ITEM Index="388"    Name="AI_FFU4Status"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />
+
 		<AI_ITEM Index="397"    Name="AI_FFU5CurrentSpeed"                                      BufferOffset="397"                                      Addr="D5794"                      Description="FFU5 Current speed"                       />
-		<AI_ITEM Index="398"    Name="AI_FFU5Voltage"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />
-		<AI_ITEM Index="399"    Name="AI_FFU5Current"                                      BufferOffset="399"                                      Addr="D5798"                      Description="FFU5 current"                       />
-		<AI_ITEM Index="400"    Name="AI_FFU6GroupNumber"                                      BufferOffset="400"                                      Addr="D5800"                      Description="FFU6 group number"                       />
-		<AI_ITEM Index="401"    Name="AI_FFU6AddressNumber"                                      BufferOffset="401"                                      Addr="D5802"                      Description="FFU6 Address Number"                       />
-		<AI_ITEM Index="402"    Name="AI_FFU6Switch"                                      BufferOffset="402"                                      Addr="D5804"                      Description="FFU6 switch"                       />
-		<AI_ITEM Index="403"    Name="AI_FFU6SetSpeed"                                      BufferOffset="403"                                      Addr="D5806"                      Description="FFU6 Set speed"                       />
-		<AI_ITEM Index="404"    Name="AI_FFU6MaxSpeed"                                      BufferOffset="404"                                      Addr="D5808"                      Description="FFU6 Max speed"                       />
-		<AI_ITEM Index="405"    Name="AI_FFU6Reset"                                      BufferOffset="405"                                      Addr="D5810"                      Description="FFU6 Maximum speed reset"                       />
-		<AI_ITEM Index="406"    Name="AI_FFU6ErrorTimer"                                      BufferOffset="406"                                      Addr="D5812"                      Description="FFU6 Error Timer"                       />
+		<AI_ITEM Index="398"    Name="AI_FFU5Status"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />
+
 		<AI_ITEM Index="407"    Name="AI_FFU6CurrentSpeed"                                      BufferOffset="407"                                      Addr="D5814"                      Description="FFU6 Current speed"                       />
-		<AI_ITEM Index="408"    Name="AI_FFU6Voltage"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />
-		<AI_ITEM Index="409"    Name="AI_FFU6Current"                                      BufferOffset="409"                                      Addr="D5818"                      Description="FFU6 current"                       />
-		<AI_ITEM Index="410"    Name="AI_FFU7GroupNumber"                                      BufferOffset="410"                                      Addr="D5820"                      Description="FFU7 group number"                       />
-		<AI_ITEM Index="411"    Name="AI_FFU7AddressNumber"                                      BufferOffset="411"                                      Addr="D5822"                      Description="FFU7 Address Number"                       />
-		<AI_ITEM Index="412"    Name="AI_FFU7Switch"                                      BufferOffset="412"                                      Addr="D5824"                      Description="FFU7 switch"                       />
-		<AI_ITEM Index="413"    Name="AI_FFU7SetSpeed"                                      BufferOffset="413"                                      Addr="D5826"                      Description="FFU7 Set speed"                       />
-		<AI_ITEM Index="414"    Name="AI_FFU7MaxSpeed"                                      BufferOffset="414"                                      Addr="D5828"                      Description="FFU7 Max speed"                       />
-		<AI_ITEM Index="415"    Name="AI_FFU7Reset"                                      BufferOffset="415"                                      Addr="D5830"                      Description="FFU7 Maximum speed reset"                       />
-		<AI_ITEM Index="416"    Name="AI_FFU7ErrorTimer"                                      BufferOffset="416"                                      Addr="D5832"                      Description="FFU7 Error Timer"                       />
+		<AI_ITEM Index="408"    Name="AI_FFU6Status"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />
+
 		<AI_ITEM Index="417"    Name="AI_FFU7CurrentSpeed"                                      BufferOffset="417"                                      Addr="D5834"                      Description="FFU7 Current speed"                       />
-		<AI_ITEM Index="418"    Name="AI_FFU7Voltage"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
-		<AI_ITEM Index="419"    Name="AI_FFU7Current"                                      BufferOffset="419"                                      Addr="D5838"                      Description="FFU7 current"                       />
-		<AI_ITEM Index="420"    Name="AI_FFU8GroupNumber"                                      BufferOffset="420"                                      Addr="D5840"                      Description="FFU8 group number"                       />
-		<AI_ITEM Index="421"    Name="AI_FFU8AddressNumber"                                      BufferOffset="421"                                      Addr="D5842"                      Description="FFU8 Address Number"                       />
-		<AI_ITEM Index="422"    Name="AI_FFU8Switch"                                      BufferOffset="422"                                      Addr="D5844"                      Description="FFU8 switch"                       />
-		<AI_ITEM Index="423"    Name="AI_FFU8SetSpeed"                                      BufferOffset="423"                                      Addr="D5846"                      Description="FFU8 Set speed"                       />
-		<AI_ITEM Index="424"    Name="AI_FFU8MaxSpeed"                                      BufferOffset="424"                                      Addr="D5848"                      Description="FFU8 Max speed"                       />
-		<AI_ITEM Index="425"    Name="AI_FFU8Reset"                                      BufferOffset="425"                                      Addr="D5850"                      Description="FFU8 Maximum speed reset"                       />
-		<AI_ITEM Index="426"    Name="AI_FFU8ErrorTimer"                                      BufferOffset="426"                                      Addr="D5852"                      Description="FFU8 Error Timer"                       />
-		<AI_ITEM Index="427"    Name="AI_FFU8CurrentSpeed"                                      BufferOffset="427"                                      Addr="D5854"                      Description="FFU8 Current speed"                       />
-		<AI_ITEM Index="428"    Name="AI_FFU8Voltage"                                      BufferOffset="428"                                      Addr="D5856"                      Description="FFU8 voltage"                       />
-		<AI_ITEM Index="429"    Name="AI_FFU8Current"                                      BufferOffset="429"                                      Addr="D5858"                      Description="FFU8 current"                       />
-		<AI_ITEM Index="430"    Name="AI_FFU9GroupNumber"                                      BufferOffset="430"                                      Addr="D5860"                      Description="FFU9 group number"                       />
-		<AI_ITEM Index="431"    Name="AI_FFU9AddressNumber"                                      BufferOffset="431"                                      Addr="D5862"                      Description="FFU9 Address Number"                       />
-		<AI_ITEM Index="432"    Name="AI_FFU9Switch"                                      BufferOffset="432"                                      Addr="D5864"                      Description="FFU9 switch"                       />
-		<AI_ITEM Index="433"    Name="AI_FFU9SetSpeed"                                      BufferOffset="433"                                      Addr="D5866"                      Description="FFU9 Set speed"                       />
-		<AI_ITEM Index="434"    Name="AI_FFU9MaxSpeed"                                      BufferOffset="434"                                      Addr="D5868"                      Description="FFU9 Max speed"                       />
-		<AI_ITEM Index="435"    Name="AI_FFU9Reset"                                      BufferOffset="435"                                      Addr="D5870"                      Description="FFU9 Maximum speed reset"                       />
-		<AI_ITEM Index="436"    Name="AI_FFU9ErrorTimer"                                      BufferOffset="436"                                      Addr="D5872"                      Description="FFU9 Error Timer"                       />
-		<AI_ITEM Index="437"    Name="AI_FFU9CurrentSpeed"                                      BufferOffset="437"                                      Addr="D5874"                      Description="FFU9 Current speed"                       />
-		<AI_ITEM Index="438"    Name="AI_FFU9Voltage"                                      BufferOffset="438"                                      Addr="D5876"                      Description="FFU9 voltage"                       />
-		<AI_ITEM Index="439"    Name="AI_FFU9Current"                                      BufferOffset="439"                                      Addr="D5878"                      Description="FFU9 current"                       />
+		<AI_ITEM Index="418"    Name="AI_FFU7Status"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
+
 		<AI_ITEM Index="450"    Name="AI_MFC1AirFlowPV"                                      BufferOffset="450"                                      Addr="D5900"                      Description="MFC1 air flow PV"                       />
 		<AI_ITEM Index="451"    Name="AI_MFC2AirFlowPV"                                      BufferOffset="451"                                      Addr="D5902"                      Description="MFC2 air flow PV"                       />
 		<AI_ITEM Index="452"    Name="AI_MFC3AirFlowPV"                                      BufferOffset="452"                                      Addr="D5904"                      Description="MFC3 air flow PV"                       />
@@ -1734,33 +1621,12 @@
 		<AO_ITEM Index="111"    Name="AO_ExchangeFOUPTOFOUPWaitTime"                                      BufferOffset="111"                                      Addr="D10222"                      Description="Exchange FOUP TO FOUP WaitTime"                       />
 		<AO_ITEM Index="112"    Name="AO_LAO2checkSV"                                      BufferOffset="112"                                      Addr="D10224"                      Description="LA O2 check SV"                       />
 		<AO_ITEM Index="113"    Name="AO_FOUPO2CheckSV"                                      BufferOffset="113"                                      Addr="D10226"                      Description="FOUP O2 Check SV"                       />
-		<AO_ITEM Index="157"    Name="AO_FFU1Switch"                                      BufferOffset="157"                                      Addr="D10314"                      Description="FFU1 switch"                       />
-		<AO_ITEM Index="158"    Name="AO_FFU1SetSpeed"                                      BufferOffset="158"                                      Addr="D10316"                      Description="FFU1 Set speed"                       />
-		<AO_ITEM Index="160"    Name="AO_FFU1Reset"                                      BufferOffset="160"                                      Addr="D10320"                      Description="FFU1 Maximum speed reset"                       />
-		<AO_ITEM Index="163"    Name="AO_FFU2Switch"                                      BufferOffset="163"                                      Addr="D10326"                      Description="FFU2 switch"                       />
-		<AO_ITEM Index="164"    Name="AO_FFU2SetSpeed"                                      BufferOffset="164"                                      Addr="D10328"                      Description="FFU2 Set speed"                       />
-		<AO_ITEM Index="166"    Name="AO_FFU2Reset"                                      BufferOffset="166"                                      Addr="D10332"                      Description="FFU2 Maximum speed reset"                       />
-		<AO_ITEM Index="169"    Name="AO_FFU3Switch"                                      BufferOffset="169"                                      Addr="D10338"                      Description="FFU3 switch"                       />
-		<AO_ITEM Index="170"    Name="AO_FFU3SetSpeed"                                      BufferOffset="170"                                      Addr="D10340"                      Description="FFU3 Set speed"                       />
-		<AO_ITEM Index="172"    Name="AO_FFU3Reset"                                      BufferOffset="172"                                      Addr="D10344"                      Description="FFU3 Maximum speed reset"                       />
-		<AO_ITEM Index="175"    Name="AO_FFU4Switch"                                      BufferOffset="175"                                      Addr="D10350"                      Description="FFU4 switch"                       />
+
 		<AO_ITEM Index="176"    Name="AO_FFU4SetSpeed"                                      BufferOffset="176"                                      Addr="D10352"                      Description="FFU4 Set speed"                       />
-		<AO_ITEM Index="178"    Name="AO_FFU4Reset"                                      BufferOffset="178"                                      Addr="D10356"                      Description="FFU4 Maximum speed reset"                       />
-		<AO_ITEM Index="181"    Name="AO_FFU5Switch"                                      BufferOffset="181"                                      Addr="D10362"                      Description="FFU5 switch"                       />
 		<AO_ITEM Index="182"    Name="AO_FFU5SetSpeed"                                      BufferOffset="182"                                      Addr="D10364"                      Description="FFU5 Set speed"                       />
-		<AO_ITEM Index="184"    Name="AO_FFU5Reset"                                      BufferOffset="184"                                      Addr="D10368"                      Description="FFU5 Maximum speed reset"                       />
-		<AO_ITEM Index="187"    Name="AO_FFU6Switch"                                      BufferOffset="187"                                      Addr="D10374"                      Description="FFU6 switch"                       />
 		<AO_ITEM Index="188"    Name="AO_FFU6SetSpeed"                                      BufferOffset="188"                                      Addr="D10376"                      Description="FFU6 Set speed"                       />
-		<AO_ITEM Index="190"    Name="AO_FFU6Reset"                                      BufferOffset="190"                                      Addr="D10380"                      Description="FFU6 Maximum speed reset"                       />
-		<AO_ITEM Index="193"    Name="AO_FFU7Switch"                                      BufferOffset="193"                                      Addr="D10386"                      Description="FFU7 switch"                       />
 		<AO_ITEM Index="194"    Name="AO_FFU7SetSpeed"                                      BufferOffset="194"                                      Addr="D10388"                      Description="FFU7 Set speed"                       />
-		<AO_ITEM Index="196"    Name="AO_FFU7Reset"                                      BufferOffset="196"                                      Addr="D10392"                      Description="FFU7 Maximum speed reset"                       />
-		<AO_ITEM Index="199"    Name="AO_FFU8Switch"                                      BufferOffset="199"                                      Addr="D10398"                      Description="FFU8 switch"                       />
-		<AO_ITEM Index="200"    Name="AO_FFU8SetSpeed"                                      BufferOffset="200"                                      Addr="D10400"                      Description="FFU8 Set speed"                       />
-		<AO_ITEM Index="202"    Name="AO_FFU8Reset"                                      BufferOffset="202"                                      Addr="D10404"                      Description="FFU8 Maximum speed reset"                       />
-		<AO_ITEM Index="205"    Name="AO_FFU9Switch"                                      BufferOffset="205"                                      Addr="D10410"                      Description="FFU9 switch"                       />
-		<AO_ITEM Index="206"    Name="AO_FFU9SetSpeed"                                      BufferOffset="206"                                      Addr="D10412"                      Description="FFU9 Set speed"                       />
-		<AO_ITEM Index="208"    Name="AO_FFU9Reset"                                      BufferOffset="208"                                      Addr="D10416"                      Description="FFU9 Maximum speed reset"                       />
+
 		<AO_ITEM Index="215"    Name="AO_MFC1AirFlowSV"                                      BufferOffset="215"                                      Addr="D10430"                      Description="MFC1 air flow SV"                       />
 		<AO_ITEM Index="216"    Name="AO_MFC2AirFlowSV"                                      BufferOffset="216"                                      Addr="D10432"                      Description="MFC2 air flow SV"                       />
 		<AO_ITEM Index="217"    Name="AO_MFC3AirFlowSV"                                      BufferOffset="217"                                      Addr="D10434"                      Description="MFC3 air flow SV"                       />

Furnace/FurnaceSimulator/Config/_ioDefinePM.xml

@@ -372,8 +372,7 @@
 		<DI_ITEM Index="1838"   Name="DI_POD2FOUPVacuumSuckingAlarm"                                      BufferOffset="1838"                                      Addr="D114.14"                      Description="POD2 FOUP vacuum sucking alarm"                       />
 		<DI_ITEM Index="1840"   Name="DI_POD1WaferOnRobot"                                      BufferOffset="1840"                                      Addr="D115.0"                      Description="POD1 wafer on robot"                       />
 		<DI_ITEM Index="1841"   Name="DI_POD2WaferOnRobot"                                      BufferOffset="1841"                                      Addr="D115.1"                      Description="POD2 wafer on robot"                       />
-		<!--ELK02上 DI_WaferRobotIsTPStatus true是TP模式 ，false是host模式-->
-		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsTPStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
+		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsHostStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
 		<DI_ITEM Index="1843"   Name="DI_WaferRobotPowerOn"                                      BufferOffset="1843"                                      Addr="D115.3"                      Description="Wafer Robot Power On"                       />
 		<DI_ITEM Index="1844"   Name="DI_WaferRobotAlarm"                                      BufferOffset="1844"                                      Addr="D115.4"                      Description="Wafer Robot Alarm"                       />
 		<DI_ITEM Index="1845"   Name="DI_WaferRobotWafer1Checked"                                      BufferOffset="1845"                                      Addr="D115.5"                      Description="Wafer Robot Wafer1 Checked"                       />
@@ -497,33 +496,7 @@
 		<DI_ITEM Index="3295"   Name="DI_AutoTeachingErr1Alm"                                      BufferOffset="3295"                                      Addr="D205.15"                      Description="Auto Teaching Err1 Alm"                       />
 
 		<DI_ITEM Index="3296"   Name="DI_AutoTeachingErr2Alm"                                      BufferOffset="3296"                                      Addr="D206.0"                      Description="Auto Teaching Err2 Alm"                       />
-		<DI_ITEM Index="3312"   Name="DI_FFU801DataWriteDone"                                      BufferOffset="3312"                                      Addr="D207.0"                      Description="FFU801 data write done"                       />
-		<DI_ITEM Index="3313"   Name="DI_FFU802DataWriteDone"                                      BufferOffset="3313"                                      Addr="D207.1"                      Description="FFU802 data write done"                       />
-		<DI_ITEM Index="3314"   Name="DI_FFU803DataWriteDone"                                      BufferOffset="3314"                                      Addr="D207.2"                      Description="FFU803 data write done"                       />
-		<DI_ITEM Index="3315"   Name="DI_FFU201DataWriteDone"                                      BufferOffset="3315"                                      Addr="D207.3"                      Description="FFU201 data write done"                       />
-		<DI_ITEM Index="3316"   Name="DI_FFU202DataWriteDone"                                      BufferOffset="3316"                                      Addr="D207.4"                      Description="FFU202 data write done"                       />
-		<DI_ITEM Index="3317"   Name="DI_FFU203DataWriteDone"                                      BufferOffset="3317"                                      Addr="D207.5"                      Description="FFU203 data write done"                       />
-		<DI_ITEM Index="3318"   Name="DI_FFU204DataWriteDone"                                      BufferOffset="3318"                                      Addr="D207.6"                      Description="FFU204 data write done"                       />
-		<DI_ITEM Index="3319"   Name="DI_FFU205DataWriteDone"                                      BufferOffset="3319"                                      Addr="D207.7"                      Description="FFU205 data write done"                       />
-		<DI_ITEM Index="3320"   Name="DI_FFU206DataWriteDone"                                      BufferOffset="3320"                                      Addr="D207.8"                      Description="FFU206 data write done"                       />
-		<DI_ITEM Index="3328"   Name="DI_FFU801DataWriteError"                                      BufferOffset="3328"                                      Addr="D208.0"                      Description="FFU801 data write error"                       />
-		<DI_ITEM Index="3329"   Name="DI_FFU802DataWriteError"                                      BufferOffset="3329"                                      Addr="D208.1"                      Description="FFU802 data write error"                       />
-		<DI_ITEM Index="3330"   Name="DI_FFU803DataWriteError"                                      BufferOffset="3330"                                      Addr="D208.2"                      Description="FFU803 data write error"                       />
-		<DI_ITEM Index="3331"   Name="DI_FFU201DataWriteError"                                      BufferOffset="3331"                                      Addr="D208.3"                      Description="FFU201 data write error"                       />
-		<DI_ITEM Index="3332"   Name="DI_FFU202DataWriteError"                                      BufferOffset="3332"                                      Addr="D208.4"                      Description="FFU202 data write error"                       />
-		<DI_ITEM Index="3333"   Name="DI_FFU203DataWriteError"                                      BufferOffset="3333"                                      Addr="D208.5"                      Description="FFU203 data write error"                       />
-		<DI_ITEM Index="3334"   Name="DI_FFU204DataWriteError"                                      BufferOffset="3334"                                      Addr="D208.6"                      Description="FFU204 data write error"                       />
-		<DI_ITEM Index="3335"   Name="DI_FFU205DataWriteError"                                      BufferOffset="3335"                                      Addr="D208.7"                      Description="FFU205 data write error"                       />
-		<DI_ITEM Index="3336"   Name="DI_FFU206DataWriteError"                                      BufferOffset="3336"                                      Addr="D208.8"                      Description="FFU206 data write error"                       />
-		<DI_ITEM Index="3360"   Name="DI_FFU801DataReadError"                                      BufferOffset="3360"                                      Addr="D210.0"                      Description="FFU801 data read error"                       />
-		<DI_ITEM Index="3361"   Name="DI_FFU802DataReadError"                                      BufferOffset="3361"                                      Addr="D210.1"                      Description="FFU802 data read error"                       />
-		<DI_ITEM Index="3362"   Name="DI_FFU803DataReadError"                                      BufferOffset="3362"                                      Addr="D210.2"                      Description="FFU803 data read error"                       />
-		<DI_ITEM Index="3363"   Name="DI_FFU201DataReadError"                                      BufferOffset="3363"                                      Addr="D210.3"                      Description="FFU201 data read error"                       />
-		<DI_ITEM Index="3364"   Name="DI_FFU202DataReadError"                                      BufferOffset="3364"                                      Addr="D210.4"                      Description="FFU202 data read error"                       />
-		<DI_ITEM Index="3365"   Name="DI_FFU203DataReadError"                                      BufferOffset="3365"                                      Addr="D210.5"                      Description="FFU203 data read error"                       />
-		<DI_ITEM Index="3366"   Name="DI_FFU204DataReadError"                                      BufferOffset="3366"                                      Addr="D210.6"                      Description="FFU204 data read error"                       />
-		<DI_ITEM Index="3367"   Name="DI_FFU205DataReadError"                                      BufferOffset="3367"                                      Addr="D210.7"                      Description="FFU205 data read error"                       />
-		<DI_ITEM Index="3368"   Name="DI_FFU206DataReadError"                                      BufferOffset="3368"                                      Addr="D210.8"                      Description="FFU206 data read error"                       />
+
 		<DI_ITEM Index="5216"   Name="DI_FIMS1LoadComplete"                                      BufferOffset="5216"                                      Addr="D326.0"                      Description="FIMS1 Load Complete"                       />
 		<DI_ITEM Index="5217"   Name="DI_FIMS1UnloadComplete"                                      BufferOffset="5217"                                      Addr="D326.1"                      Description="FIMS1 Unload Complete"                       />
 		<DI_ITEM Index="5218"   Name="DI_FIMS1HomeComplete"                                      BufferOffset="5218"                                      Addr="D326.2"                      Description="FIMS1 Home Complete"                       />
@@ -1287,8 +1260,8 @@
 		<DO_ITEM Index="2785"   Name="DO_FIMS1N2PurgeValveClose"                                      BufferOffset="2785"                                      Addr="D1174.1"                      Description="AV63 close(FIMS1 N2 Purge Valve)"                       />
 		<DO_ITEM Index="2786"   Name="DO_FIMS2N2PurgeValveOpen"                                      BufferOffset="2786"                                      Addr="D1174.2"                      Description="AV64 opne(FIMS2 N2 Purge Valve)"                       />
 		<DO_ITEM Index="2787"   Name="DO_FIMS2N2PurgeValveClose"                                      BufferOffset="2787"                                      Addr="D1174.3"                      Description="AV65 close(FIMS2 N2 Purge Valve)"                       />
-		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 vaccum valve open"                       />
-		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 vaccum valve close"                       />
+		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 AV217-A (vacuum pumping)"                       />
+		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 AV217-B (Breaking the vacuum)"                       />
 		<DO_ITEM Index="2914"   Name="DO_FIMS2VaccumValveOpen"                                      BufferOffset="2914"                                      Addr="D1182.2"                      Description="AV218 open(FIMS2 vaccum valve)"                       />
 		<DO_ITEM Index="2915"   Name="DO_FIMS2VaccumValveClose"                                      BufferOffset="2915"                                      Addr="D1182.3"                      Description="AV218 close(FIMS2 vaccum valve)"                       />
 		<DO_ITEM Index="2976"   Name="DO_FIMS1Latch1Off"                                      BufferOffset="2976"                                      Addr="D1186.0"                      Description="FIMS1 Latch1 Off"                       />
@@ -1315,15 +1288,6 @@
 		<DO_ITEM Index="3013"   Name="DO_FIMS1Dock"                                      BufferOffset="3013"                                      Addr="D1188.5"                      Description="FIMS1 Dock"                       />
 		<DO_ITEM Index="3014"   Name="DO_FIMS2Undock"                                      BufferOffset="3014"                                      Addr="D1188.6"                      Description="FIMS2 Undock"                       />
 		<DO_ITEM Index="3015"   Name="DO_FIMS2Dock"                                      BufferOffset="3015"                                      Addr="D1188.7"                      Description="FIMS2 Dock"                       />
-		<DO_ITEM Index="3056"   Name="DO_FFU1WriteCommand"                                      BufferOffset="3056"                                      Addr="D1191.0"                      Description="FFU1 write command"                       />
-		<DO_ITEM Index="3057"   Name="DO_FFU2WriteCommand"                                      BufferOffset="3057"                                      Addr="D1191.1"                      Description="FFU2 write command"                       />
-		<DO_ITEM Index="3058"   Name="DO_FFU3WriteCommand"                                      BufferOffset="3058"                                      Addr="D1191.2"                      Description="FFU3 write command"                       />
-		<DO_ITEM Index="3059"   Name="DO_FFU4WriteCommand"                                      BufferOffset="3059"                                      Addr="D1191.3"                      Description="FFU4 write command"                       />
-		<DO_ITEM Index="3060"   Name="DO_FFU5WriteCommand"                                      BufferOffset="3060"                                      Addr="D1191.4"                      Description="FFU5 write command"                       />
-		<DO_ITEM Index="3061"   Name="DO_FFU6WriteCommand"                                      BufferOffset="3061"                                      Addr="D1191.5"                      Description="FFU6 write command"                       />
-		<DO_ITEM Index="3062"   Name="DO_FFU7WriteCommand"                                      BufferOffset="3062"                                      Addr="D1191.6"                      Description="FFU7 write command"                       />
-		<DO_ITEM Index="3063"   Name="DO_FFU8WriteCommand"                                      BufferOffset="3063"                                      Addr="D1191.7"                      Description="FFU8 write command"                       />
-		<DO_ITEM Index="3064"   Name="DO_FFU9WriteCommand"                                      BufferOffset="3064"                                      Addr="D1191.8"                      Description="FFU9 write command"                       />
 		<DO_ITEM Index="3200"   Name="DO_HTR1"                                      BufferOffset="3200"                                      Addr="D1200.0"                      Description="HTR1"                       />
 		<DO_ITEM Index="3201"   Name="DO_HTR2"                                      BufferOffset="3201"                                      Addr="D1200.1"                      Description="HTR2"                       />
 		<DO_ITEM Index="3202"   Name="DO_HTR3"                                      BufferOffset="3202"                                      Addr="D1200.2"                      Description="HTR3"                       />
@@ -1454,96 +1418,19 @@
 		<AI_ITEM Index="342"    Name="AI_VG13Pressure"                                      BufferOffset="342"                                      Addr="D5684"                      Description="VG13 Pressure"                       />
 		<AI_ITEM Index="344"    Name="AI_VG32Pressure"                                      BufferOffset="344"                                      Addr="D5688"                      Description="VG32 Pressure"                       />
 		<AI_ITEM Index="345"    Name="AI_VG33Pressure"                                      BufferOffset="345"                                      Addr="D5690"                      Description="VG33 Pressure"                       />
-		<AI_ITEM Index="350"    Name="AI_FFU1GroupNumber"                                      BufferOffset="350"                                      Addr="D5700"                      Description="FFU1 group number"                       />
-		<AI_ITEM Index="351"    Name="AI_FFU1AddressNumber"                                      BufferOffset="351"                                      Addr="D5702"                      Description="FFU1 Address Number"                       />
-		<AI_ITEM Index="352"    Name="AI_FFU1Switch"                                      BufferOffset="352"                                      Addr="D5704"                      Description="FFU1 switch"                       />
-		<AI_ITEM Index="353"    Name="AI_FFU1SetSpeed"                                      BufferOffset="353"                                      Addr="D5706"                      Description="FFU1 Set speed"                       />
-		<AI_ITEM Index="354"    Name="AI_FFU1MaxSpeed"                                      BufferOffset="354"                                      Addr="D5708"                      Description="FFU1 Max speed"                       />
-		<AI_ITEM Index="355"    Name="AI_FFU1Reset"                                      BufferOffset="355"                                      Addr="D5710"                      Description="FFU1 Maximum speed reset"                       />
-		<AI_ITEM Index="356"    Name="AI_FFU1ErrorTimer"                                      BufferOffset="356"                                      Addr="D5712"                      Description="FFU1 Error Timer"                       />
-		<AI_ITEM Index="357"    Name="AI_FFU1CurrentSpeed"                                      BufferOffset="357"                                      Addr="D5714"                      Description="FFU1 Current speed"                       />
-		<AI_ITEM Index="358"    Name="AI_FFU1Voltage"                                      BufferOffset="358"                                      Addr="D5716"                      Description="FFU1 voltage"                       />
-		<AI_ITEM Index="359"    Name="AI_FFU1Current"                                      BufferOffset="359"                                      Addr="D5718"                      Description="FFU1 current"                       />
-		<AI_ITEM Index="360"    Name="AI_FFU2GroupNumber"                                      BufferOffset="360"                                      Addr="D5720"                      Description="FFU2 group number"                       />
-		<AI_ITEM Index="361"    Name="AI_FFU2AddressNumber"                                      BufferOffset="361"                                      Addr="D5722"                      Description="FFU2 Address Number"                       />
-		<AI_ITEM Index="362"    Name="AI_FFU2Switch"                                      BufferOffset="362"                                      Addr="D5724"                      Description="FFU2 switch"                       />
-		<AI_ITEM Index="363"    Name="AI_FFU2SetSpeed"                                      BufferOffset="363"                                      Addr="D5726"                      Description="FFU2 Set speed"                       />
-		<AI_ITEM Index="364"    Name="AI_FFU2MaxSpeed"                                      BufferOffset="364"                                      Addr="D5728"                      Description="FFU2 Max speed"                       />
-		<AI_ITEM Index="365"    Name="AI_FFU2Reset"                                      BufferOffset="365"                                      Addr="D5730"                      Description="FFU2 Maximum speed reset"                       />
-		<AI_ITEM Index="366"    Name="AI_FFU2ErrorTimer"                                      BufferOffset="366"                                      Addr="D5732"                      Description="FFU2 Error Timer"                       />
-		<AI_ITEM Index="367"    Name="AI_FFU2CurrentSpeed"                                      BufferOffset="367"                                      Addr="D5734"                      Description="FFU2 Current speed"                       />
-		<AI_ITEM Index="368"    Name="AI_FFU2Voltage"                                      BufferOffset="368"                                      Addr="D5736"                      Description="FFU2 voltage"                       />
-		<AI_ITEM Index="369"    Name="AI_FFU2Current"                                      BufferOffset="369"                                      Addr="D5738"                      Description="FFU2 current"                       />
-		<AI_ITEM Index="370"    Name="AI_FFU3GroupNumber"                                      BufferOffset="370"                                      Addr="D5740"                      Description="FFU3 group number"                       />
-		<AI_ITEM Index="371"    Name="AI_FFU3AddressNumber"                                      BufferOffset="371"                                      Addr="D5742"                      Description="FFU3 Address Number"                       />
-		<AI_ITEM Index="372"    Name="AI_FFU3Switch"                                      BufferOffset="372"                                      Addr="D5744"                      Description="FFU3 switch"                       />
-		<AI_ITEM Index="373"    Name="AI_FFU3SetSpeed"                                      BufferOffset="373"                                      Addr="D5746"                      Description="FFU3 Set speed"                       />
-		<AI_ITEM Index="374"    Name="AI_FFU3MaxSpeed"                                      BufferOffset="374"                                      Addr="D5748"                      Description="FFU3 Max speed"                       />
-		<AI_ITEM Index="375"    Name="AI_FFU3Reset"                                      BufferOffset="375"                                      Addr="D5750"                      Description="FFU3 Maximum speed reset"                       />
-		<AI_ITEM Index="376"    Name="AI_FFU3ErrorTimer"                                      BufferOffset="376"                                      Addr="D5752"                      Description="FFU3 Error Timer"                       />
-		<AI_ITEM Index="377"    Name="AI_FFU3CurrentSpeed"                                      BufferOffset="377"                                      Addr="D5754"                      Description="FFU3 Current speed"                       />
-		<AI_ITEM Index="378"    Name="AI_FFU3Voltage"                                      BufferOffset="378"                                      Addr="D5756"                      Description="FFU3 voltage"                       />
-		<AI_ITEM Index="379"    Name="AI_FFU3Current"                                      BufferOffset="379"                                      Addr="D5758"                      Description="FFU3 current"                       />
-		<AI_ITEM Index="380"    Name="AI_FFU4GroupNumber"                                      BufferOffset="380"                                      Addr="D5760"                      Description="FFU4 group number"                       />
-		<AI_ITEM Index="381"    Name="AI_FFU4AddressNumber"                                      BufferOffset="381"                                      Addr="D5762"                      Description="FFU4 Address Number"                       />
-		<AI_ITEM Index="382"    Name="AI_FFU4Switch"                                      BufferOffset="382"                                      Addr="D5764"                      Description="FFU4 switch"                       />
-		<AI_ITEM Index="383"    Name="AI_FFU4SetSpeed"                                      BufferOffset="383"                                      Addr="D5766"                      Description="FFU4 Set speed"                       />
-		<AI_ITEM Index="384"    Name="AI_FFU4MaxSpeed"                                      BufferOffset="384"                                      Addr="D5768"                      Description="FFU4 Max speed"                       />
-		<AI_ITEM Index="385"    Name="AI_FFU4Reset"                                      BufferOffset="385"                                      Addr="D5770"                      Description="FFU4 Maximum speed reset"                       />
-		<AI_ITEM Index="386"    Name="AI_FFU4ErrorTimer"                                      BufferOffset="386"                                      Addr="D5772"                      Description="FFU4 Error Timer"                       />
+
 		<AI_ITEM Index="387"    Name="AI_FFU4CurrentSpeed"                                      BufferOffset="387"                                      Addr="D5774"                      Description="FFU4 Current speed"                       />
-		<AI_ITEM Index="388"    Name="AI_FFU4Voltage"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />
-		<AI_ITEM Index="389"    Name="AI_FFU4Current"                                      BufferOffset="389"                                      Addr="D5778"                      Description="FFU4 current"                       />
-		<AI_ITEM Index="390"    Name="AI_FFU5GroupNumber"                                      BufferOffset="390"                                      Addr="D5780"                      Description="FFU5 group number"                       />
-		<AI_ITEM Index="391"    Name="AI_FFU5AddressNumber"                                      BufferOffset="391"                                      Addr="D5782"                      Description="FFU5 Address Number"                       />
-		<AI_ITEM Index="392"    Name="AI_FFU5Switch"                                      BufferOffset="392"                                      Addr="D5784"                      Description="FFU5 switch"                       />
-		<AI_ITEM Index="393"    Name="AI_FFU5SetSpeed"                                      BufferOffset="393"                                      Addr="D5786"                      Description="FFU5 Set speed"                       />
-		<AI_ITEM Index="394"    Name="AI_FFU5MaxSpeed"                                      BufferOffset="394"                                      Addr="D5788"                      Description="FFU5 Max speed"                       />
-		<AI_ITEM Index="395"    Name="AI_FFU5Reset"                                      BufferOffset="395"                                      Addr="D5790"                      Description="FFU5 Maximum speed reset"                       />
-		<AI_ITEM Index="396"    Name="AI_FFU5ErrorTimer"                                      BufferOffset="396"                                      Addr="D5792"                      Description="FFU5 Error Timer"                       />
+		<AI_ITEM Index="388"    Name="AI_FFU4Status"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />
+
 		<AI_ITEM Index="397"    Name="AI_FFU5CurrentSpeed"                                      BufferOffset="397"                                      Addr="D5794"                      Description="FFU5 Current speed"                       />
-		<AI_ITEM Index="398"    Name="AI_FFU5Voltage"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />
-		<AI_ITEM Index="399"    Name="AI_FFU5Current"                                      BufferOffset="399"                                      Addr="D5798"                      Description="FFU5 current"                       />
-		<AI_ITEM Index="400"    Name="AI_FFU6GroupNumber"                                      BufferOffset="400"                                      Addr="D5800"                      Description="FFU6 group number"                       />
-		<AI_ITEM Index="401"    Name="AI_FFU6AddressNumber"                                      BufferOffset="401"                                      Addr="D5802"                      Description="FFU6 Address Number"                       />
-		<AI_ITEM Index="402"    Name="AI_FFU6Switch"                                      BufferOffset="402"                                      Addr="D5804"                      Description="FFU6 switch"                       />
-		<AI_ITEM Index="403"    Name="AI_FFU6SetSpeed"                                      BufferOffset="403"                                      Addr="D5806"                      Description="FFU6 Set speed"                       />
-		<AI_ITEM Index="404"    Name="AI_FFU6MaxSpeed"                                      BufferOffset="404"                                      Addr="D5808"                      Description="FFU6 Max speed"                       />
-		<AI_ITEM Index="405"    Name="AI_FFU6Reset"                                      BufferOffset="405"                                      Addr="D5810"                      Description="FFU6 Maximum speed reset"                       />
-		<AI_ITEM Index="406"    Name="AI_FFU6ErrorTimer"                                      BufferOffset="406"                                      Addr="D5812"                      Description="FFU6 Error Timer"                       />
+		<AI_ITEM Index="398"    Name="AI_FFU5Status"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />
+
 		<AI_ITEM Index="407"    Name="AI_FFU6CurrentSpeed"                                      BufferOffset="407"                                      Addr="D5814"                      Description="FFU6 Current speed"                       />
-		<AI_ITEM Index="408"    Name="AI_FFU6Voltage"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />
-		<AI_ITEM Index="409"    Name="AI_FFU6Current"                                      BufferOffset="409"                                      Addr="D5818"                      Description="FFU6 current"                       />
-		<AI_ITEM Index="410"    Name="AI_FFU7GroupNumber"                                      BufferOffset="410"                                      Addr="D5820"                      Description="FFU7 group number"                       />
-		<AI_ITEM Index="411"    Name="AI_FFU7AddressNumber"                                      BufferOffset="411"                                      Addr="D5822"                      Description="FFU7 Address Number"                       />
-		<AI_ITEM Index="412"    Name="AI_FFU7Switch"                                      BufferOffset="412"                                      Addr="D5824"                      Description="FFU7 switch"                       />
-		<AI_ITEM Index="413"    Name="AI_FFU7SetSpeed"                                      BufferOffset="413"                                      Addr="D5826"                      Description="FFU7 Set speed"                       />
-		<AI_ITEM Index="414"    Name="AI_FFU7MaxSpeed"                                      BufferOffset="414"                                      Addr="D5828"                      Description="FFU7 Max speed"                       />
-		<AI_ITEM Index="415"    Name="AI_FFU7Reset"                                      BufferOffset="415"                                      Addr="D5830"                      Description="FFU7 Maximum speed reset"                       />
-		<AI_ITEM Index="416"    Name="AI_FFU7ErrorTimer"                                      BufferOffset="416"                                      Addr="D5832"                      Description="FFU7 Error Timer"                       />
+		<AI_ITEM Index="408"    Name="AI_FFU6Status"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />
+
 		<AI_ITEM Index="417"    Name="AI_FFU7CurrentSpeed"                                      BufferOffset="417"                                      Addr="D5834"                      Description="FFU7 Current speed"                       />
-		<AI_ITEM Index="418"    Name="AI_FFU7Voltage"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
-		<AI_ITEM Index="419"    Name="AI_FFU7Current"                                      BufferOffset="419"                                      Addr="D5838"                      Description="FFU7 current"                       />
-		<AI_ITEM Index="420"    Name="AI_FFU8GroupNumber"                                      BufferOffset="420"                                      Addr="D5840"                      Description="FFU8 group number"                       />
-		<AI_ITEM Index="421"    Name="AI_FFU8AddressNumber"                                      BufferOffset="421"                                      Addr="D5842"                      Description="FFU8 Address Number"                       />
-		<AI_ITEM Index="422"    Name="AI_FFU8Switch"                                      BufferOffset="422"                                      Addr="D5844"                      Description="FFU8 switch"                       />
-		<AI_ITEM Index="423"    Name="AI_FFU8SetSpeed"                                      BufferOffset="423"                                      Addr="D5846"                      Description="FFU8 Set speed"                       />
-		<AI_ITEM Index="424"    Name="AI_FFU8MaxSpeed"                                      BufferOffset="424"                                      Addr="D5848"                      Description="FFU8 Max speed"                       />
-		<AI_ITEM Index="425"    Name="AI_FFU8Reset"                                      BufferOffset="425"                                      Addr="D5850"                      Description="FFU8 Maximum speed reset"                       />
-		<AI_ITEM Index="426"    Name="AI_FFU8ErrorTimer"                                      BufferOffset="426"                                      Addr="D5852"                      Description="FFU8 Error Timer"                       />
-		<AI_ITEM Index="427"    Name="AI_FFU8CurrentSpeed"                                      BufferOffset="427"                                      Addr="D5854"                      Description="FFU8 Current speed"                       />
-		<AI_ITEM Index="428"    Name="AI_FFU8Voltage"                                      BufferOffset="428"                                      Addr="D5856"                      Description="FFU8 voltage"                       />
-		<AI_ITEM Index="429"    Name="AI_FFU8Current"                                      BufferOffset="429"                                      Addr="D5858"                      Description="FFU8 current"                       />
-		<AI_ITEM Index="430"    Name="AI_FFU9GroupNumber"                                      BufferOffset="430"                                      Addr="D5860"                      Description="FFU9 group number"                       />
-		<AI_ITEM Index="431"    Name="AI_FFU9AddressNumber"                                      BufferOffset="431"                                      Addr="D5862"                      Description="FFU9 Address Number"                       />
-		<AI_ITEM Index="432"    Name="AI_FFU9Switch"                                      BufferOffset="432"                                      Addr="D5864"                      Description="FFU9 switch"                       />
-		<AI_ITEM Index="433"    Name="AI_FFU9SetSpeed"                                      BufferOffset="433"                                      Addr="D5866"                      Description="FFU9 Set speed"                       />
-		<AI_ITEM Index="434"    Name="AI_FFU9MaxSpeed"                                      BufferOffset="434"                                      Addr="D5868"                      Description="FFU9 Max speed"                       />
-		<AI_ITEM Index="435"    Name="AI_FFU9Reset"                                      BufferOffset="435"                                      Addr="D5870"                      Description="FFU9 Maximum speed reset"                       />
-		<AI_ITEM Index="436"    Name="AI_FFU9ErrorTimer"                                      BufferOffset="436"                                      Addr="D5872"                      Description="FFU9 Error Timer"                       />
-		<AI_ITEM Index="437"    Name="AI_FFU9CurrentSpeed"                                      BufferOffset="437"                                      Addr="D5874"                      Description="FFU9 Current speed"                       />
-		<AI_ITEM Index="438"    Name="AI_FFU9Voltage"                                      BufferOffset="438"                                      Addr="D5876"                      Description="FFU9 voltage"                       />
-		<AI_ITEM Index="439"    Name="AI_FFU9Current"                                      BufferOffset="439"                                      Addr="D5878"                      Description="FFU9 current"                       />
+		<AI_ITEM Index="418"    Name="AI_FFU7Status"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
+
 		<AI_ITEM Index="450"    Name="AI_MFC1AirFlowPV"                                      BufferOffset="450"                                      Addr="D5900"                      Description="MFC1 air flow PV"                       />
 		<AI_ITEM Index="451"    Name="AI_MFC2AirFlowPV"                                      BufferOffset="451"                                      Addr="D5902"                      Description="MFC2 air flow PV"                       />
 		<AI_ITEM Index="452"    Name="AI_MFC3AirFlowPV"                                      BufferOffset="452"                                      Addr="D5904"                      Description="MFC3 air flow PV"                       />
@@ -1734,33 +1621,12 @@
 		<AO_ITEM Index="111"    Name="AO_ExchangeFOUPTOFOUPWaitTime"                                      BufferOffset="111"                                      Addr="D10222"                      Description="Exchange FOUP TO FOUP WaitTime"                       />
 		<AO_ITEM Index="112"    Name="AO_LAO2checkSV"                                      BufferOffset="112"                                      Addr="D10224"                      Description="LA O2 check SV"                       />
 		<AO_ITEM Index="113"    Name="AO_FOUPO2CheckSV"                                      BufferOffset="113"                                      Addr="D10226"                      Description="FOUP O2 Check SV"                       />
-		<AO_ITEM Index="157"    Name="AO_FFU1Switch"                                      BufferOffset="157"                                      Addr="D10314"                      Description="FFU1 switch"                       />
-		<AO_ITEM Index="158"    Name="AO_FFU1SetSpeed"                                      BufferOffset="158"                                      Addr="D10316"                      Description="FFU1 Set speed"                       />
-		<AO_ITEM Index="160"    Name="AO_FFU1Reset"                                      BufferOffset="160"                                      Addr="D10320"                      Description="FFU1 Maximum speed reset"                       />
-		<AO_ITEM Index="163"    Name="AO_FFU2Switch"                                      BufferOffset="163"                                      Addr="D10326"                      Description="FFU2 switch"                       />
-		<AO_ITEM Index="164"    Name="AO_FFU2SetSpeed"                                      BufferOffset="164"                                      Addr="D10328"                      Description="FFU2 Set speed"                       />
-		<AO_ITEM Index="166"    Name="AO_FFU2Reset"                                      BufferOffset="166"                                      Addr="D10332"                      Description="FFU2 Maximum speed reset"                       />
-		<AO_ITEM Index="169"    Name="AO_FFU3Switch"                                      BufferOffset="169"                                      Addr="D10338"                      Description="FFU3 switch"                       />
-		<AO_ITEM Index="170"    Name="AO_FFU3SetSpeed"                                      BufferOffset="170"                                      Addr="D10340"                      Description="FFU3 Set speed"                       />
-		<AO_ITEM Index="172"    Name="AO_FFU3Reset"                                      BufferOffset="172"                                      Addr="D10344"                      Description="FFU3 Maximum speed reset"                       />
-		<AO_ITEM Index="175"    Name="AO_FFU4Switch"                                      BufferOffset="175"                                      Addr="D10350"                      Description="FFU4 switch"                       />
+
 		<AO_ITEM Index="176"    Name="AO_FFU4SetSpeed"                                      BufferOffset="176"                                      Addr="D10352"                      Description="FFU4 Set speed"                       />
-		<AO_ITEM Index="178"    Name="AO_FFU4Reset"                                      BufferOffset="178"                                      Addr="D10356"                      Description="FFU4 Maximum speed reset"                       />
-		<AO_ITEM Index="181"    Name="AO_FFU5Switch"                                      BufferOffset="181"                                      Addr="D10362"                      Description="FFU5 switch"                       />
 		<AO_ITEM Index="182"    Name="AO_FFU5SetSpeed"                                      BufferOffset="182"                                      Addr="D10364"                      Description="FFU5 Set speed"                       />
-		<AO_ITEM Index="184"    Name="AO_FFU5Reset"                                      BufferOffset="184"                                      Addr="D10368"                      Description="FFU5 Maximum speed reset"                       />
-		<AO_ITEM Index="187"    Name="AO_FFU6Switch"                                      BufferOffset="187"                                      Addr="D10374"                      Description="FFU6 switch"                       />
 		<AO_ITEM Index="188"    Name="AO_FFU6SetSpeed"                                      BufferOffset="188"                                      Addr="D10376"                      Description="FFU6 Set speed"                       />
-		<AO_ITEM Index="190"    Name="AO_FFU6Reset"                                      BufferOffset="190"                                      Addr="D10380"                      Description="FFU6 Maximum speed reset"                       />
-		<AO_ITEM Index="193"    Name="AO_FFU7Switch"                                      BufferOffset="193"                                      Addr="D10386"                      Description="FFU7 switch"                       />
 		<AO_ITEM Index="194"    Name="AO_FFU7SetSpeed"                                      BufferOffset="194"                                      Addr="D10388"                      Description="FFU7 Set speed"                       />
-		<AO_ITEM Index="196"    Name="AO_FFU7Reset"                                      BufferOffset="196"                                      Addr="D10392"                      Description="FFU7 Maximum speed reset"                       />
-		<AO_ITEM Index="199"    Name="AO_FFU8Switch"                                      BufferOffset="199"                                      Addr="D10398"                      Description="FFU8 switch"                       />
-		<AO_ITEM Index="200"    Name="AO_FFU8SetSpeed"                                      BufferOffset="200"                                      Addr="D10400"                      Description="FFU8 Set speed"                       />
-		<AO_ITEM Index="202"    Name="AO_FFU8Reset"                                      BufferOffset="202"                                      Addr="D10404"                      Description="FFU8 Maximum speed reset"                       />
-		<AO_ITEM Index="205"    Name="AO_FFU9Switch"                                      BufferOffset="205"                                      Addr="D10410"                      Description="FFU9 switch"                       />
-		<AO_ITEM Index="206"    Name="AO_FFU9SetSpeed"                                      BufferOffset="206"                                      Addr="D10412"                      Description="FFU9 Set speed"                       />
-		<AO_ITEM Index="208"    Name="AO_FFU9Reset"                                      BufferOffset="208"                                      Addr="D10416"                      Description="FFU9 Maximum speed reset"                       />
+
 		<AO_ITEM Index="215"    Name="AO_MFC1AirFlowSV"                                      BufferOffset="215"                                      Addr="D10430"                      Description="MFC1 air flow SV"                       />
 		<AO_ITEM Index="216"    Name="AO_MFC2AirFlowSV"                                      BufferOffset="216"                                      Addr="D10432"                      Description="MFC2 air flow SV"                       />
 		<AO_ITEM Index="217"    Name="AO_MFC3AirFlowSV"                                      BufferOffset="217"                                      Addr="D10434"                      Description="MFC3 air flow SV"                       />

Furnace/FurnaceSimulator/Instances/SimulatorSystem.cs

@@ -115,7 +115,7 @@ namespace FurnaceSimulator.Instances
         private void SetDefaultValue()
         {
             IO.DI[$"PM1.DI_FOUPRobotIsTPStatus"].Value = true;
-            IO.DI[$"PM1.DI_WaferRobotIsTPStatus"].Value = true;
+            IO.DI[$"PM1.DI_WaferRobotIsHostStatus"].Value = true;
             IO.DI[$"PM1.DI_PwrBusyBoatZAxis"].Value = true;
 
             IO.DI[$"PM1.DI_LP1FOUPInPosition1"].Value = true;
@@ -716,7 +716,7 @@ namespace FurnaceSimulator.Instances
                 {
                     IO.AI[$"PM1.AI_O2Concentration"].FloatValue = i;
 
-                    // System.Threading.Thread.Sleep(300); // 延迟500毫秒以便观察输出
+                  System.Threading.Thread.Sleep(300); // 延迟500毫秒以便观察输出
                 }
                 increasing = false; // 切换方向
             }
@@ -725,7 +725,7 @@ namespace FurnaceSimulator.Instances
                 for (int i = end; i >= start; i--)
                 {
                     IO.AI[$"PM1.AI_O2Concentration"].FloatValue = i;
-                    //  System.Threading.Thread.Sleep(300);// 延迟500毫秒以便观察输出
+                    System.Threading.Thread.Sleep(300);// 延迟500毫秒以便观察输出
                 }
                 increasing = true; // 切换方向
             }

Furnace/FurnaceUI/Views/Operations/Maintenances/N2PurgeStatusView.xaml

@@ -1472,13 +1472,13 @@
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="325"
                                 Canvas.Top="194"
-                               Command="{Binding CmdSetValve}"
+                                
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV66}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Horizontal"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="325"
@@ -1486,10 +1486,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV64}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Horizontal"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="285"
@@ -1497,10 +1497,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV63}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Horizontal"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="508"
@@ -1508,10 +1508,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV65}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Horizontal"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="322"
@@ -1519,10 +1519,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV68}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Vertical"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="321"
@@ -1530,10 +1530,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV59}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Vertical"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="368"
@@ -1541,10 +1541,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV58}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Vertical"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="403"
@@ -1552,10 +1552,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV57}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Vertical"/>
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="443"
@@ -1563,10 +1563,10 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV56}"
-                                   Command="{Binding CmdSetValve}"
+                                    
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
-                                IsShowSwitchDialog="False"
+                                IsShowSwitchDialog="True"
                                 ValveOpenOrientation="Vertical"/>
                         </Canvas>