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@@ -15,6 +15,7 @@
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<config default="0" name="TotalCycledWafer" description="Total Cycled Wafer" max="10000000" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="Release" name="RunningMode" description="" max="" min="" paramter="Debug,Release" tag="" unit="" type="String" visible="false" />
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+ <config default="true" name="IsScheduleMaintenance" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsServiceControlMode" description="Is Service Control Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="EnableMinics" description="" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
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@@ -414,6 +415,12 @@
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<config default="30" name="TP6" description="TP6 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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</configs>
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+ <configs name="Minics">
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+ <config default="1" name="config1" description="config1" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="2" name="config2" description="config2" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="3" name="config3" description="config3" max="" min="" paramter="" tag="" unit="" type="String" />
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+
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+ </configs>
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<configs name="FFU" visible="false">
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<config default="350" name="LSPEED" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="2500" name="HSPEED" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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@@ -8528,6 +8535,18 @@
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</configs>
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</configs>
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</configs>
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+ <configs name="StepGroup">
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+ <config default="" name="Group1" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group2" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group3" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group4" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group5" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group6" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group7" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group8" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group9" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="" name="Group10" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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+ </configs>
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<configs name="StepName">
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<config default="" name="1" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="" name="2" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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