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@@ -110,7 +110,7 @@
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<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.5" Description="safe module:Power box interlock button led(D10.5)" />
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<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.6" Description="safe module:Gas box interlock button led(D10.6)" />
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<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.7" Description="safe module:Frontbody interlock button led(D10.7)" />
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<DI_ITEM Index="176" Name="DI_FIMS1LoadRunningError" BufferOffset="176" Addr="D11.0" Description="E0000）FIMS1 Load Running Error(D11.0)" />
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<DI_ITEM Index="177" Name="DI_FIMS1UnloadRunningError" BufferOffset="177" Addr="D11.1" Description="E0001）FIMS1 Unload Running Error(D11.1)" />
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<DI_ITEM Index="178" Name="DI_FIMS1InitRunningError" BufferOffset="178" Addr="D11.2" Description="E0002）FIMS1 Init Running Error(D11.2)" />
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@@ -145,7 +145,7 @@
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<DI_ITEM Index="207" Name="DI_FIMS2LatchKeyOffRunningError" BufferOffset="207" Addr="D12.15" Description="E0031）FIMS2 Latch Key Off Running Error(D12.15)" />
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<DI_ITEM Index="208" Name="DI_FIMS2N2ReleaseRunningError" BufferOffset="208" Addr="D13.0" Description="E0032）FIMS2 N2 Release Running Error(D13.0)" />
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<DI_ITEM Index="209" Name="DI_FIMS2N2SealRunningError" BufferOffset="209" Addr="D13.1" Description="E0033）FIMS2 N2 Seal Running Error(D13.1)" />
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<DI_ITEM Index="224" Name="DI_BufferA1N2LowPressureError" BufferOffset="224" Addr="D14.0" Description="E0070)Buffer A1 N2 Low Pressure Error(D14.0)" />
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<DI_ITEM Index="225" Name="DI_BufferB1N2LowPressureError" BufferOffset="225" Addr="D14.1" Description="E0071)Buffer B1 N2 Low Pressure Error(D14.1)" />
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<DI_ITEM Index="226" Name="DI_BufferC1N2LowPressureError" BufferOffset="226" Addr="D14.2" Description="E0072)Buffer C1 N2 Low Pressure Error(D14.2)" />
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@@ -162,10 +162,10 @@
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<DI_ITEM Index="237" Name="DI_BufferB4N2LowPressureError" BufferOffset="237" Addr="D14.13" Description="E0083)Buffer B4 N2 Low Pressure Error(D14.13)" />
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<DI_ITEM Index="238" Name="DI_BufferC4N2LowPressureError" BufferOffset="238" Addr="D14.14" Description="E0084)Buffer C4 N2 Low Pressure Error(D14.14)" />
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<DI_ITEM Index="239" Name="DI_BufferD4N2LowPressureError" BufferOffset="239" Addr="D14.15" Description="E0085)Buffer D4 N2 Low Pressure Error(D14.15)" />
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<DI_ITEM Index="960" Name="DI_GLBoxPG1CNT1Alarm" BufferOffset="960" Addr="D60.0" Description="Gas box PG1 CNT1 alarm(D60.0)" />
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<DI_ITEM Index="961" Name="DI_GLBoxPG1CNT2Alarm" BufferOffset="961" Addr="D60.1" Description="Gas box PG1 CNT2 alarm(D60.1)" />
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<DI_ITEM Index="962" Name="DI_GLBoxPG2CNT1Alarm" BufferOffset="962" Addr="D60.2" Description="Gas box PG2 CNT1 alarm(D60.2)" />
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@@ -452,12 +452,12 @@
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<DI_ITEM Index="1861" Name="DI_LP1FOUPInPosition2" BufferOffset="1861" Addr="D116.5" Description="AGV loadport1 FOUP in position2(D116.5)" />
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<DI_ITEM Index="1862" Name="DI_LP1FOUPInPosition3" BufferOffset="1862" Addr="D116.6" Description="AGV loadport1 FOUP in position3(D116.6)" />
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<DI_ITEM Index="1863" Name="DI_LP1FOUPDetect" BufferOffset="1863" Addr="D116.7" Description="AGV loadport1 FOUP detect(D116.7)" />
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<DI_ITEM Index="1864" Name="DI_FTRHome1" BufferOffset="1864" Addr="D116.8" Description="FTR Home1(D116.8)" />
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<DI_ITEM Index="1865" Name="DI_FTRHome1" BufferOffset="1865" Addr="D116.9" Description="FTR Home2(D116.9)" />
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<DI_ITEM Index="1866" Name="DI_FTRHome1" BufferOffset="1866" Addr="D116.10" Description="FTR Home3(D116.10)" />
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<DI_ITEM Index="1872" Name="DI_LP2FOUPLeftClamp" BufferOffset="1872" Addr="D117.0" Description="AGV loadport2 FOUP left clamp(D117.0)" />
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<DI_ITEM Index="1873" Name="DI_LP2FOUPRightClamp" BufferOffset="1873" Addr="D117.1" Description="AGV loadport2 FOUP right clamp(D117.1)" />
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<DI_ITEM Index="1874" Name="DI_LP2FOUPLeftRelease" BufferOffset="1874" Addr="D117.2" Description="AGV loadport2 FOUP left release(D117.2)" />
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@@ -1706,7 +1706,7 @@
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<AO_ITEM Index="112" Name="AO_LAO2checkSV" BufferOffset="112" Addr="D10224" Description="LA O2 check SV(D10224)" />
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<AO_ITEM Index="113" Name="AO_FOUPO2CheckSV" BufferOffset="113" Addr="D10226" Description="FOUP O2 Check SV(D10226)" />
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<AO_ITEM Index="114" Name="AO_BufferPurgeTimeSV" BufferOffset="114" Addr="D10228" Description="Buffer Purge Time SV(D10228)" />
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<AO_ITEM Index="114" Name="AO_BufferFFU1SV" BufferOffset="155" Addr="D10310" Description="Buffer FFU1 SV(D10310)" />
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<AO_ITEM Index="114" Name="AO_BufferFFU2SV" BufferOffset="156" Addr="D10312" Description="Buffer FFU2 SV(D10312)" />
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<AO_ITEM Index="114" Name="AO_BufferFFU3SV" BufferOffset="157" Addr="D10314" Description="Buffer FFU3 SV(D10314)" />
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@@ -1719,8 +1719,8 @@
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<AO_ITEM Index="114" Name="AO_BufferFFU4Switch" BufferOffset="164" Addr="D10328" Description="Buffer FFU4 Switch(D10328)" />
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<AO_ITEM Index="114" Name="AO_BufferFFU5Switch" BufferOffset="165" Addr="D10330" Description="Buffer FFU5 Switch(D10330)" />
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<AO_ITEM Index="114" Name="AO_BufferFFU6Switch" BufferOffset="166" Addr="D10332" Description="Buffer FFU6 Switch(D10332)" />
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<AO_ITEM Index="176" Name="AO_FFU1SetSpeed" BufferOffset="176" Addr="D10352" Description="FFU1 Set speed(D10352)" />
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<AO_ITEM Index="182" Name="AO_FFU2SetSpeed" BufferOffset="182" Addr="D10364" Description="FFU2 Set speed(D10364)" />
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<AO_ITEM Index="188" Name="AO_FFU3SetSpeed" BufferOffset="188" Addr="D10376" Description="FFU3 Set speed(D10376)" />
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jiangjy