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@@ -20,7 +20,7 @@
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<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="AC100V transformer power switch"/>
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<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="Power box interlock reset button"/>
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<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="VFD01001 EDM"/>
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-
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+
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<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="Gas box interlock reset button"/>
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<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="SCR ON/OFF SWITCH"/>
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<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="Gas box exhaust pressure alarm 1st"/>
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@@ -86,28 +86,31 @@
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<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="SL05001 LA door sw1"/>
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<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="SL05002 LA door sw2"/>
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<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="SL05004 LA furnace door sw"/>
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-
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- <DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D8.15" Description="Furnace power on/off"/>
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- <DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.0" Description="Blower power on/off"/>
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- <DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.1" Description="100V transformer power on"/>
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- <DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.2" Description="VFD enable"/>
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- <DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.4" Description="HPM valve power on/off"/>
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- <DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.5" Description="Axis-CR motor enable1"/>
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- <DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.6" Description="Axis-CR motor enable2"/>
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- <DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.7" Description="Axis-E motor enable1"/>
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- <DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.8" Description="Axis-E motor enable2"/>
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- <DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.11" Description="FTR enable1"/>
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- <DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.12" Description="FTR enable2"/>
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- <DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.13" Description="FTR interlock reset"/>
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- <DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.14" Description="WTR enable1"/>
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- <DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D9.15" Description="WTR enable2"/>
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- <DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.0" Description="WTR interlock reset"/>
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- <DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.1" Description="Cap heater enable"/>
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- <DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.3" Description="Light curtain idel"/>
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- <DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.4" Description="Power box interlock button led"/>
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- <DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.5" Description="Gas box interlock button led"/>
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- <DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.6" Description="Frontbody interlock button led"/>
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-
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+
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+ <DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D9.0" Description="Furnace power on/off"/>
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+ <DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.1" Description="Blower power on/off"/>
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+ <DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.2" Description="100V transformer power on"/>
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+ <DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.3" Description="VFD enable"/>
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+
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+ <DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.5" Description="HPM valve power on/off"/>
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+ <DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.6" Description="Axis-CR motor enable1"/>
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+ <DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.7" Description="Axis-CR motor enable2"/>
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+ <DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.8" Description="Axis-E motor enable1"/>
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+ <DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.9" Description="Axis-E motor enable2"/>
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+
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+ <DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.12" Description="FTR enable1"/>
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+ <DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.13" Description="FTR enable2"/>
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+ <DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.14" Description="FTR interlock reset"/>
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+ <DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.15" Description="WTR enable1"/>
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+ <DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D10.0" Description="WTR enable2"/>
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+ <DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.1" Description="WTR interlock reset"/>
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+ <DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.2" Description="Cap heater enable"/>
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+
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+ <DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.4" Description="Light curtain idel"/>
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+ <DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.5" Description="Power box interlock button led"/>
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+ <DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.6" Description="Gas box interlock button led"/>
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+ <DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.7" Description="Frontbody interlock button led"/>
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+
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<DI_ITEM Index="288" Name="DI_MachineEMO1" BufferOffset="288" Addr="D18.0" Description="Machine EMO 1" />
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<DI_ITEM Index="289" Name="DI_MachineEMO2" BufferOffset="289" Addr="D18.1" Description="Machine EMO 2" />
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<DI_ITEM Index="290" Name="DI_EMOReset" BufferOffset="290" Addr="D18.2" Description="EMO reset" />
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@@ -167,12 +170,12 @@
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<DI_ITEM Index="971" Name="DI_GLBoxPG8CNT2Alarm" BufferOffset="974" Addr="D60.14" Description="Gas box PG8 CNT1 alarm" />
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<DI_ITEM Index="971" Name="DI_GLBoxPG9CNT2Alarm" BufferOffset="975" Addr="D60.15" Description="Gas box PG8 CNT2 alarm" />
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- <DI_ITEM Index="976" Name="DI_GLBoxVG32Status" BufferOffset="976" Addr="D61.0" Description="GL box VG32 status" />
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+ <!--<DI_ITEM Index="976" Name="DI_GLBoxVG32Status" BufferOffset="976" Addr="D61.0" Description="GL box VG32 status" />
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<DI_ITEM Index="977" Name="DI_GLBoxVG32Output1" BufferOffset="977" Addr="D61.1" Description="GL box VG32 output1" />
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<DI_ITEM Index="977" Name="DI_GLBoxVG32Output2" BufferOffset="978" Addr="D61.2" Description="GL box VG32 output2" />
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<DI_ITEM Index="979" Name="DI_GLBoxVG33Status" BufferOffset="979" Addr="D61.3" Description="GL box VG33 status" />
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<DI_ITEM Index="980" Name="DI_GLBoxVG33Output1" BufferOffset="980" Addr="D61.4" Description="GL box VG33 output1" />
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- <DI_ITEM Index="981" Name="DI_GLBoxVG33Output2" BufferOffset="981" Addr="D61.5" Description="GL box VG33 output2" />
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+ <DI_ITEM Index="981" Name="DI_GLBoxVG33Output2" BufferOffset="981" Addr="D61.5" Description="GL box VG33 output2" />-->
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<DI_ITEM Index="992" Name="DI_AV93_1RHCAirInOpened" BufferOffset="992" Addr="D62.0" Description="AV93_1 RHC air in opened" />
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<DI_ITEM Index="993" Name="DI_AV93_1RHCAirInClosed" BufferOffset="993" Addr="D62.1" Description="AV93_1 RHC air in closed" />
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@@ -415,7 +418,7 @@
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<DI_ITEM Index="1770" Name="DI_LADamperOpen" BufferOffset="1770" Addr="D110.10" Description="LA Damper Open" />
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<DI_ITEM Index="1771" Name="DI_LADamperClose" BufferOffset="1771" Addr="D110.11" Description="LA Damper Close" />
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- <DI_ITEM Index="1792" Name="DI_BufferRotationConvDetectSensor" BufferOffset="1792" Addr="D112.0" Description="buffer rotation conv. detect sensor" />
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+ <DI_ITEM Index="1792" Name="DI_BufferRotationConvDetectSensor" BufferOffset="1792" Addr="D112.0" Description="buffer rotation conv detect sensor" />
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<DI_ITEM Index="1793" Name="DI_BoatLiftMotorUpPosition" BufferOffset="1793" Addr="D112.1" Description="boat lift motor up position" />
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<DI_ITEM Index="1794" Name="DI_BoatLiftMotorDownPosition" BufferOffset="1794" Addr="D112.2" Description="boat lift motor down position" />
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<DI_ITEM Index="1795" Name="DI_WaferRobotAtPOD1Area" BufferOffset="1795" Addr="D112.3" Description="Wafer Robot At POD1 Area" />
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@@ -1455,9 +1458,7 @@
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<DO_ITEM Index="153" Name="DO_HeaterE911Enable" BufferOffset="1370" Addr="D1085.10" Description="Heater E911 power on Enable"/>
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<DO_ITEM Index="154" Name="DO_CapHeaterPowerOnEnable" BufferOffset="1371" Addr="D1085.11" Description="Cap heater power on Enable"/>
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<DO_ITEM Index="155" Name="DO_HeaterE912Enable" BufferOffset="1372" Addr="D1085.12" Description="Heater E912 power on Enable"/>
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- -->
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- <!--<DO_ITEM Index="155" Name="DO_SPARE" BufferOffset="1373" Addr="D1085.13" Description="SPARE"/>-->
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- <!--
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+ --><!--<DO_ITEM Index="155" Name="DO_SPARE" BufferOffset="1373" Addr="D1085.13" Description="SPARE"/>--><!--
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<DO_ITEM Index="155" Name="DO_AV71ExternalHeater" BufferOffset="1374" Addr="D1085.14" Description="AV71 External heater"/>
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<DO_ITEM Index="155" Name="DO_AV71RingHeater" BufferOffset="1375" Addr="D1085.15" Description="AV71 Ring heater"/>-->
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@@ -1666,15 +1667,15 @@
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<DO_ITEM Index="346" Name="DO_ValveAV133" BufferOffset="2581" Addr="D1161.5" Description="Valve AV133"/>
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<DO_ITEM Index="347" Name="DO_ValveAV136" BufferOffset="2582" Addr="D1161.6" Description="Valve AV136"/>
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- <DO_ITEM Index="345" Name="DO_CommonBoxPressureRegulatingCylinderValveOpen" BufferOffset="2592" Addr="D1162.0" Description="Common box pressure regulating cylinder valve open"/>
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- <DO_ITEM Index="346" Name="DO_CommonBoxPressureRegulatingCylinderValveClose" BufferOffset="2593" Addr="D1162.1" Description="Common box pressure regulating cylinder valve close"/>
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- <DO_ITEM Index="347" Name="DO_FFUAirInValveClose" BufferOffset="2594" Addr="D1162.2" Description="FFU air in valve Close"/>
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- <DO_ITEM Index="348" Name="DO_FFUAirInValveOpen" BufferOffset="2595" Addr="D1162.3" Description="FFU air in valve Open"/>
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- <DO_ITEM Index="349" Name="DO_LABacksideDoorCylinderControlValveOpen" BufferOffset="2596" Addr="D1162.4" Description="LA backside door cylinder control valve open"/>
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- <DO_ITEM Index="350" Name="DO_LABacksideDoorCylinderControlValveClose" BufferOffset="2597" Addr="D1162.5" Description="LA backside door cylinder control valve close"/>
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+ <DO_ITEM Index="345" Name="DO_CommonBoxPressureRegulatingCylinderValveOpen" BufferOffset="2592" Addr="D1162.0" Description="ValveAV201 open"/>
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+ <DO_ITEM Index="346" Name="DO_CommonBoxPressureRegulatingCylinderValveClose" BufferOffset="2593" Addr="D1162.1" Description="ValveAV201 close"/>
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+ <DO_ITEM Index="347" Name="DO_FFUAirInValveClose" BufferOffset="2594" Addr="D1162.2" Description="FFU air in valve Close(AV65 close)"/>
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+ <DO_ITEM Index="348" Name="DO_FFUAirInValveOpen" BufferOffset="2595" Addr="D1162.3" Description="FFU air in valve Open(AV65 open)"/>
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+ <DO_ITEM Index="349" Name="DO_LABacksideDoorCylinderControlValveOpen" BufferOffset="2596" Addr="D1162.4" Description="ValveAV202 open"/>
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+ <DO_ITEM Index="350" Name="DO_LABacksideDoorCylinderControlValveClose" BufferOffset="2597" Addr="D1162.5" Description="ValveAV202 close"/>
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<DO_ITEM Index="351" Name="DO_LAExhaustValveOpen" BufferOffset="2598" Addr="D1162.6" Description="LA exhaust damper valve open"/>
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<DO_ITEM Index="352" Name="DO_LAExhaustValveClose" BufferOffset="2599" Addr="D1162.7" Description="LA exhaust damper valve close"/>
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-
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+
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<DO_ITEM Index="352" Name="DO_circulationfanisturnedopen" BufferOffset="2612" Addr="D1163.4" Description="AV227 open"/>
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<DO_ITEM Index="352" Name="DO_circulationfanisturnedClose" BufferOffset="2613" Addr="D1163.5" Description="AV227 close"/>
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<DO_ITEM Index="352" Name="DO_MS501" BufferOffset="2614" Addr="D1163.6" Description="MS501"/>
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