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@@ -20,7 +20,7 @@
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<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="AC100V transformer power switch"/>
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<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="Power box interlock reset button"/>
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<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="VFD01001 EDM"/>
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-
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+
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<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="Gas box interlock reset button"/>
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<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="SCR ON/OFF SWITCH"/>
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<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="Gas box exhaust pressure alarm 1st"/>
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@@ -86,18 +86,18 @@
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<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="SL05001 LA door sw1"/>
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<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="SL05002 LA door sw2"/>
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<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="SL05004 LA furnace door sw"/>
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-
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+
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<DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D9.0" Description="Furnace power on/off"/>
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<DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.1" Description="Blower power on/off"/>
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<DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.2" Description="100V transformer power on"/>
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<DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.3" Description="VFD enable"/>
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-
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+
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<DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.5" Description="HPM valve power on/off"/>
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<DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.6" Description="Axis-CR motor enable1"/>
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<DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.7" Description="Axis-CR motor enable2"/>
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<DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.8" Description="Axis-E motor enable1"/>
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<DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.9" Description="Axis-E motor enable2"/>
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-
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+
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<DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.12" Description="FTR enable1"/>
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<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.13" Description="FTR enable2"/>
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<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.14" Description="FTR interlock reset"/>
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@@ -105,52 +105,11 @@
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<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D10.0" Description="WTR enable2"/>
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<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.1" Description="WTR interlock reset"/>
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<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.2" Description="Cap heater enable"/>
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-
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+
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<DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.4" Description="Light curtain idel"/>
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<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.5" Description="Power box interlock button led"/>
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<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.6" Description="Gas box interlock button led"/>
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<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.7" Description="Frontbody interlock button led"/>
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-
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- <!--<DI_ITEM Index="288" Name="DI_MachineEMO1" BufferOffset="288" Addr="D18.0" Description="Machine EMO 1" />
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- <DI_ITEM Index="289" Name="DI_MachineEMO2" BufferOffset="289" Addr="D18.1" Description="Machine EMO 2" />
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- <DI_ITEM Index="290" Name="DI_EMOReset" BufferOffset="290" Addr="D18.2" Description="EMO reset" />
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- <DI_ITEM Index="291" Name="DI_T101TempStatus" BufferOffset="291" Addr="D18.3" Description="T101 Temp. status" />
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- <DI_ITEM Index="292" Name="DI_T102TempStatus" BufferOffset="292" Addr="D18.4" Description="T102 Temp. status" />
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- <DI_ITEM Index="293" Name="DI_T103TempStatus" BufferOffset="293" Addr="D18.5" Description="T103 Temp. status" />
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- <DI_ITEM Index="294" Name="DI_RFPowerOn" BufferOffset="294" Addr="D18.6" Description="RF power on button" />
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-
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- <DI_ITEM Index="295" Name="DI_MachineExternalEMO" BufferOffset="295" Addr="D18.7" Description="Machine external EMO" />
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- <DI_ITEM Index="296" Name="DI_FurnacePowerOnButton" BufferOffset="296" Addr="D18.8" Description="Furnace power on button" />
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- <DI_ITEM Index="297" Name="DI_GasLineHeaterPowerOnButton" BufferOffset="297" Addr="D18.9" Description="Gas line heater power on button" />
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- <DI_ITEM Index="298" Name="DI_ExhaustHeaterPowerOnButton" BufferOffset="298" Addr="D18.10" Description="Exhaust heater power on button" />
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- <DI_ITEM Index="299" Name="DI_FrontbodyPowerOnButton" BufferOffset="299" Addr="D18.11" Description="Frontbody power on button" />
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- <DI_ITEM Index="300" Name="DI_BlowerMotorPowerOnButton" BufferOffset="300" Addr="D18.12" Description="Blower motor power on button" />
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- <DI_ITEM Index="301" Name="DI_FFUPowerOnButton" BufferOffset="301" Addr="D18.13" Description="FFU power on button" />
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- <DI_ITEM Index="302" Name="DI_T102PowerOnButton" BufferOffset="302" Addr="D18.14" Description="T102 power on button" />
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- <DI_ITEM Index="303" Name="DI_T103PowerOnButton" BufferOffset="303" Addr="D18.15" Description="T103 power on button" />
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-
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-
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- <DI_ITEM Index="1338" Name="DI_ToFurnaceTransformer" BufferOffset="304" Addr="D19.0" Description="To Furnace Transformer" />
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- <DI_ITEM Index="1338" Name="DI_GasLineHeater" BufferOffset="305" Addr="D19.1" Description="Gas Line Heater" />
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- <DI_ITEM Index="1338" Name="DI_ExhaustLineHeater" BufferOffset="306" Addr="D19.2" Description="Exhaust Line Heater" />
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- <DI_ITEM Index="1338" Name="DI_Tofrontbodybox" BufferOffset="307" Addr="D19.3" Description="To frontbody box" />
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- <DI_ITEM Index="1338" Name="DI_BlowerMotorSupply" BufferOffset="308" Addr="D19.4" Description="Blower Motor Supply" />
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- <DI_ITEM Index="1338" Name="DI_FFUPowerSupply" BufferOffset="309" Addr="D19.5" Description="FFU Power Supply" />
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- <DI_ITEM Index="1338" Name="" BufferOffset="310" Addr="D19.6" Description="" />
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- <DI_ITEM Index="1338" Name="DI_HEXPowersupply" BufferOffset="311" Addr="D19.7" Description="H-EX Power supply" />
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-
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- <DI_ITEM Index="336" Name="DI_BufferMotorEDMEAlarm" BufferOffset="336" Addr="D21.0" Description="Buffer motor EDM alarm" />
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- <DI_ITEM Index="337" Name="DI_BoatLiftMotorEDMAlarm" BufferOffset="337" Addr="D21.1" Description="Boat lift motor EDM alarm" />
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-
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- <DI_ITEM Index="343" Name="DI_MachineEMS1" BufferOffset="342" Addr="D21.6" Description="Machine EMS1" />
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- <DI_ITEM Index="344" Name="DI_MachineEMS2" BufferOffset="343" Addr="D21.7" Description="Machine EMS2" />
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-
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- <DI_ITEM Index="384" Name="DI_FBLightCurtainFault" BufferOffset="384" Addr="D24.0" Description="FB light curtain fault" />
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- <DI_ITEM Index="385" Name="DI_FBLightCurtainOSSD1" BufferOffset="385" Addr="D24.1" Description="FB light curtain OSSD1" />
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- <DI_ITEM Index="386" Name="DI_FBLightCurtainOSSD2" BufferOffset="386" Addr="D24.2" Description="FB light curtain OSSD2" />
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- <DI_ITEM Index="387" Name="DI_FBFrontDoorSwitch" BufferOffset="387" Addr="D24.3" Description="FB front door switch" />
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- <DI_ITEM Index="388" Name="DI_FBEMO1" BufferOffset="388" Addr="D24.4" Description="FB EMO1" />
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- <DI_ITEM Index="389" Name="DI_FBEMO2" BufferOffset="389" Addr="D24.5" Description="FB EMO2" />-->
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<DI_ITEM Index="960" Name="DI_GLBoxPG1CNT1Alarm" BufferOffset="960" Addr="D60.0" Description="Gas box PG1 CNT1 alarm" />
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<DI_ITEM Index="961" Name="DI_GLBoxPG1CNT2Alarm" BufferOffset="961" Addr="D60.1" Description="Gas box PG1 CNT2 alarm" />
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@@ -170,11 +129,11 @@
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<DI_ITEM Index="971" Name="DI_GLBoxPG9CNT2Alarm" BufferOffset="975" Addr="D60.15" Description="Gas box PG8 CNT2 alarm" />
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<DI_ITEM Index="976" Name="DI_GLBoxVG32Status" BufferOffset="976" Addr="D61.0" Description="GL box VG32 status" />
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- <!--<DI_ITEM Index="977" Name="DI_GLBoxVG32Output1" BufferOffset="977" Addr="D61.1" Description="GL box VG32 output1" />
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+ <DI_ITEM Index="977" Name="DI_GLBoxVG32Output1" BufferOffset="977" Addr="D61.1" Description="GL box VG32 output1" />
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<DI_ITEM Index="977" Name="DI_GLBoxVG32Output2" BufferOffset="978" Addr="D61.2" Description="GL box VG32 output2" />
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<DI_ITEM Index="979" Name="DI_GLBoxVG33Status" BufferOffset="979" Addr="D61.3" Description="GL box VG33 status" />
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<DI_ITEM Index="980" Name="DI_GLBoxVG33Output1" BufferOffset="980" Addr="D61.4" Description="GL box VG33 output1" />
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- <DI_ITEM Index="981" Name="DI_GLBoxVG33Output2" BufferOffset="981" Addr="D61.5" Description="GL box VG33 output2" />-->
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+ <DI_ITEM Index="981" Name="DI_GLBoxVG33Output2" BufferOffset="981" Addr="D61.5" Description="GL box VG33 output2" />
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<DI_ITEM Index="992" Name="DI_AV93_1RHCAirInOpened" BufferOffset="992" Addr="D62.0" Description="AV93_1 RHC air in opened" />
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<DI_ITEM Index="993" Name="DI_AV93_1RHCAirInClosed" BufferOffset="993" Addr="D62.1" Description="AV93_1 RHC air in closed" />
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@@ -205,7 +164,7 @@
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<DI_ITEM Index="1338" Name="DI_LSC1HLEVEL" BufferOffset="1040" Addr="D65.0" Description="LSC1-H LEVEL" />
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<DI_ITEM Index="1338" Name="DI_LSC1MLEVEL" BufferOffset="1041" Addr="D65.1" Description="LSC1-M LEVEL" />
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<DI_ITEM Index="1338" Name="DI_LSC1LLEVEL" BufferOffset="1042" Addr="D65.2" Description="LSC1-L LEVEL" />
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-
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+
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<DI_ITEM Index="1338" Name="DI_LSC2HLEVEL" BufferOffset="1044" Addr="D65.4" Description="LSC2-H LEVEL" />
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<DI_ITEM Index="1338" Name="DI_LSC2MLEVEL" BufferOffset="1045" Addr="D65.5" Description="LSC2-M LEVEL" />
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<DI_ITEM Index="1338" Name="DI_LSC2LLEVEL" BufferOffset="1046" Addr="D65.6" Description="LSC2-L LEVEL" />
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@@ -219,7 +178,7 @@
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<DI_ITEM Index="1191" Name="DI_ValveBoxExhaust2ndAlarmMS4" BufferOffset="1191" Addr="D74.7" Description="valve box exhaust 2nd alarm MS4" />
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<DI_ITEM Index="1192" Name="DI_LoadingAreaExhaust1stAlarmMS5" BufferOffset="1192" Addr="D74.8" Description="loading area exhaust 1st alarm MS5" />
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<DI_ITEM Index="1193" Name="DI_LoadingAreaExhaust2ndAlarmMS5" BufferOffset="1193" Addr="D74.9" Description="loading area exhaust 2nd alarm MS5" />
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-
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+
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<DI_ITEM Index="1196" Name="DI_LAExhaust1stAlarmMS7" BufferOffset="1196" Addr="D74.12" Description="common exhaust 1st alarm MS7" />
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<DI_ITEM Index="1197" Name="DI_LAExhaust2ndAlarmMS7" BufferOffset="1197" Addr="D74.13" Description="common exhaust 2nd alarm MS7" />
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<DI_ITEM Index="1198" Name="DI_RHC1stAlarmMS8" BufferOffset="1198" Addr="D74.14" Description="RHC 1st alarm MS8" />
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@@ -258,20 +217,23 @@
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<DI_ITEM Index="1301" Name="DI_DG1Output1" BufferOffset="1304" Addr="D81.8" Description="DG1 output-1" />
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<DI_ITEM Index="1301" Name="DI_DG1Output2" BufferOffset="1305" Addr="D81.9" Description="DG1 output-2" />
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-
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- <DI_ITEM Index="1301" Name="DI_PS13LStatus" BufferOffset="1306" Addr="D81.10" Description="PS13 L status" />
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+
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+ <DI_ITEM Index="1301" Name="DI_PS13LStatus" BufferOffset="1306" Addr="D81.10" Description="ATM" />
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+ <DI_ITEM Index="1301" Name="DI_PS13HStatus" BufferOffset="1307" Addr="D81.11" Description="PS13 H status" />
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<DI_ITEM Index="1312" Name="DI_VG11Status" BufferOffset="1312" Addr="D82.0" Description="VG11 status" />
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- <!--<DI_ITEM Index="1313" Name="DI_VG11LowAlarm" BufferOffset="1313" Addr="D82.1" Description="VG11 LowAlarm" />
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+ <DI_ITEM Index="1313" Name="DI_VG11LowAlarm" BufferOffset="1313" Addr="D82.1" Description="VG11 LowAlarm" />
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<DI_ITEM Index="1314" Name="DI_VG11HighAlarm" BufferOffset="1314" Addr="D82.2" Description="VG11 HighAlarm" />
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+
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+
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<DI_ITEM Index="1315" Name="DI_VG12Status" BufferOffset="1315" Addr="D82.3" Description="VG12 status" />
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<DI_ITEM Index="1316" Name="DI_VG12LowAlarm" BufferOffset="1316" Addr="D82.4" Description="VG12 LowAlarm" />
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- <DI_ITEM Index="1317" Name="DI_VG12HighAlarm" BufferOffset="1317" Addr="D82.5" Description="VG12 HighAlarm" />-->
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-
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+ <DI_ITEM Index="1317" Name="DI_VG12HighAlarm" BufferOffset="1317" Addr="D82.5" Description="VG12 HighAlarm" />
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+
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<DI_ITEM Index="1318" Name="DI_VG13Status" BufferOffset="1318" Addr="D82.6" Description="VG13 status" />
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- <!--<DI_ITEM Index="1319" Name="DI_VG13LowAlarm" BufferOffset="1319" Addr="D82.7" Description="VG13 LowAlarm" />
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- <DI_ITEM Index="1320" Name="DI_VG13HighAlarm" BufferOffset="1320" Addr="D82.8" Description="VG13 HighAlarm" />-->
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-
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+ <DI_ITEM Index="1319" Name="DI_VG13LowAlarm" BufferOffset="1319" Addr="D82.7" Description="VG13 LowAlarm" />
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+ <DI_ITEM Index="1320" Name="DI_VG13HighAlarm" BufferOffset="1320" Addr="D82.8" Description="VG13 HighAlarm" />
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+
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<DI_ITEM Index="1321" Name="DI_PG12CNT1Alarm" BufferOffset="1321" Addr="D82.9" Description="PG12 CNT1 alarm" />
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<DI_ITEM Index="1322" Name="DI_PG12CNT2Alarm" BufferOffset="1322" Addr="D82.10" Description="PG12 CNT2 alarm" />
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<DI_ITEM Index="1323" Name="DI_PG13CNT1Alarm" BufferOffset="1323" Addr="D82.11" Description="PG13 CNT1 alarm" />
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@@ -285,7 +247,7 @@
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<DI_ITEM Index="1331" Name="DI_AV96CommonExhaustCylinderClosed" BufferOffset="1331" Addr="D83.3" Description="AV96 common exhaust cylinder closed" />
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<DI_ITEM Index="1332" Name="DI_CoolingWaterPressureOut1" BufferOffset="1332" Addr="D83.4" Description="cooling water pressure Out1" />
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<DI_ITEM Index="1333" Name="DI_CoolingWaterPressureOut2" BufferOffset="1333" Addr="D83.5" Description="cooling water pressure Out2" />
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-
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+
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<!--<DI_ITEM Index="1334" Name="DI_AirFlowFL70" BufferOffset="1334" Addr="D83.6" Description="air flow FL70" />
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<DI_ITEM Index="1335" Name="DI_AirFlowFL71" BufferOffset="1335" Addr="D83.7" Description="air flow FL71" />-->
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<DI_ITEM Index="1336" Name="DI_AirFlowFL72" BufferOffset="1336" Addr="D83.8" Description="air flow FL72" />
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@@ -302,7 +264,7 @@
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<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON4LAM2" BufferOffset="1351" Addr="D84.7" Description="SWITCHING FUNCTUON4 LAM2" />
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<DI_ITEM Index="1338" Name="DI_ERRORLAM1" BufferOffset="1352" Addr="D84.8" Description="ERROR LAM1" />
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<DI_ITEM Index="1338" Name="DI_ERRORLAM2" BufferOffset="1353" Addr="D84.9" Description="ERROR LAM2" />
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-
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+
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<!--<DI_ITEM Index="1520" Name="DI_RFSetPowerReached" BufferOffset="1520" Addr="D95.0" Description="RF set power reached" />
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<DI_ITEM Index="1521" Name="DI_RFAlarm" BufferOffset="1521" Addr="D95.1" Description="RF alarm" />
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@@ -340,7 +302,7 @@
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<DI_ITEM Index="1660" Name="DI_Vaccum2PumpAlarm" BufferOffset="1660" Addr="D103.12" Description="Vaccum2 Pump Alarm"/>
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<DI_ITEM Index="1661" Name="DI_N2PurgeBOXPG13CNT1" BufferOffset="1661" Addr="D103.13" Description="N2 Purge BOX PG13 CNT1"/>
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<DI_ITEM Index="1662" Name="DI_N2PurgeBOXPG13CNT2" BufferOffset="1662" Addr="D103.14" Description="N2 Purge BOX PG13 CNT2"/>
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-
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+
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<DI_ITEM Index="1664" Name="DI_ForelineHeaterJacketLightAlarm" BufferOffset="1664" Addr="D104.0" Description="Foreline heater jacket light alarm"/>
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<DI_ITEM Index="1665" Name="DI_ForelineHeaterJacketHeavyAlarm" BufferOffset="1665" Addr="D104.1" Description="Foreline heater jacket heavy alarm"/>
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<DI_ITEM Index="1666" Name="DI_ScrubberWarning" BufferOffset="1666" Addr="D104.2" Description="Scrubber warning"/>
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@@ -472,7 +434,7 @@
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<DI_ITEM Index="1853" Name="DI_WaferRobotEX2AxisHomePosition" BufferOffset="1853" Addr="D115.13" Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)" />
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<DI_ITEM Index="1854" Name="DI_WaferRobotVAxisHomePosition" BufferOffset="1854" Addr="D115.14" Description="Wafer Robot Axis-P Home Hosition (Axis-V)" />
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<DI_ITEM Index="1855" Name="DI_WaferRobotRunning" BufferOffset="1855" Addr="D115.15" Description="Wafer Robot Running" />
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-
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+
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<DI_ITEM Index="1856" Name="DI_LP1FOUPLeftClamp" BufferOffset="1856" Addr="D116.0" Description="AGV loadport1 FOUP left clamp" />
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<DI_ITEM Index="1857" Name="DI_LP1FOUPRightClamp" BufferOffset="1857" Addr="D116.1" Description="AGV loadport1 FOUP right clamp" />
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<DI_ITEM Index="1858" Name="DI_LP1FOUPLeftRelease" BufferOffset="1858" Addr="D116.2" Description="AGV loadport1 FOUP left release" />
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@@ -528,7 +490,7 @@
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<DI_ITEM Index="1920" Name="DI_Loadport1E84Valid" BufferOffset="1920" Addr="D120.0" Description="Loadport1 E84 Valid" />
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<DI_ITEM Index="1921" Name="DI_Loadport1E84CS0" BufferOffset="1921" Addr="D120.1" Description="Loadport1 E84 CS_0" />
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<DI_ITEM Index="1922" Name="DI_Loadport1E84CS1" BufferOffset="1922" Addr="D120.2" Description="Loadport1 E84 CS_1" />
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-
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+
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<DI_ITEM Index="1924" Name="DI_Loadport1E84TRREQ" BufferOffset="1924" Addr="D120.4" Description="Loadport1 E84 TR_REQ" />
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<DI_ITEM Index="1925" Name="DI_Loadport1E84busy" BufferOffset="1925" Addr="D120.5" Description="Loadport1 E84 busy" />
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<DI_ITEM Index="1926" Name="DI_Loadport1E84COMPT" BufferOffset="1926" Addr="D120.6" Description="Loadport1 E84 COMPT" />
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@@ -536,7 +498,7 @@
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<DI_ITEM Index="1928" Name="DI_Loadport2E84Valid" BufferOffset="1928" Addr="D120.8" Description="Loadport2 E84 Valid" />
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<DI_ITEM Index="1929" Name="DI_Loadport2E84CS0" BufferOffset="1929" Addr="D120.9" Description="Loadport2 E84 CS_0" />
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<DI_ITEM Index="1930" Name="DI_Loadport2E84CS1" BufferOffset="1930" Addr="D120.10" Description="Loadport2 E84 CS_1" />
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-
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+
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<DI_ITEM Index="1932" Name="DI_Loadport2E84TRREQ" BufferOffset="1932" Addr="D120.12" Description="Loadport2 E84 TR_REQ" />
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<DI_ITEM Index="1933" Name="DI_Loadport2E84busy" BufferOffset="1933" Addr="D120.13" Description="Loadport2 E84 busy" />
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<DI_ITEM Index="1934" Name="DI_Loadport2E84COMPT" BufferOffset="1934" Addr="D120.14" Description="Loadport2 E84 COMPT" />
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@@ -569,7 +531,7 @@
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<!--<DI_ITEM Index="3232" Name="DI_HmPosBufferAxis" BufferOffset="3232" Addr="D202.0" Description="Buffer servo home position" />-->
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<DI_ITEM Index="3233" Name="DI_NegLmtAlmBufferAxis" BufferOffset="3233" Addr="D202.1" Description="Buffer servo negative limit alarm" />
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<DI_ITEM Index="3234" Name="DI_PotLmtAlmbBufferAxis" BufferOffset="3234" Addr="D202.2" Description="Buffer servo positive limit alarm" />
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-
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+
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<!--<DI_ITEM Index="3235" Name="DI_ConveyRelaxAlmBufferAxis" BufferOffset="3235" Addr="D202.3" Description="Buffer convey relax alarm" />
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<DI_ITEM Index="3236" Name="DI_ReadytoSwitchOnBufferAxis" BufferOffset="3236" Addr="D202.4" Description="Buffer servo ready to switch on" />
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<DI_ITEM Index="3237" Name="DI_SwitchedOnBufferAxis" BufferOffset="3237" Addr="D202.5" Description="Buffer servo switched on" />-->
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@@ -597,7 +559,7 @@
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<DI_ITEM Index="3269" Name="DI_SwitchedOnBoatZAxis" BufferOffset="3269" Addr="D204.5" Description="Boat Z servo switched on" />-->
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<DI_ITEM Index="3270" Name="DI_BoatWarningBoatZAxis" BufferOffset="3270" Addr="D204.6" Description="Boat Z servo warning" />
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<DI_ITEM Index="3271" Name="DI_BoatFaultBoatZAxis" BufferOffset="3271" Addr="D204.7" Description="Boat Z servo fault" />
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-
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+
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<DI_ITEM Index="3273" Name="DI_MiddlePos1BoatZAxis" BufferOffset="3273" Addr="D204.9" Description="Boat Z servo Middle Position" />
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<DI_ITEM Index="3274" Name="DI_MiddlePos2BoatZAxis" BufferOffset="3274" Addr="D204.10" Description="Boat Z servo Cap Position" />
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<DI_ITEM Index="3274" Name="DI_MiddlePos3BoatZAxis" BufferOffset="3275" Addr="D204.11" Description="Boat Z servo Charge Position" />
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@@ -663,7 +625,9 @@
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<DI_ITEM Index="3530" Name="DI_ForelineHeater11ControlDoing" BufferOffset="3530" Addr="D220.10" Description="Foreline heater-11 control doing" />
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<DI_ITEM Index="3531" Name="DI_CapHeaterControlDoing" BufferOffset="3531" Addr="D220.11" Description="Cap heater control doing" />
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<DI_ITEM Index="3532" Name="DI_ForelineHeater12ControlDoing" BufferOffset="3532" Addr="D220.12" Description="Foreline heater-12 control doing" />
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- --><!--<DI_ITEM Index="3533" Name="DI_SPARE" BufferOffset="3533" Addr="D220.13" Description="SPARE" />--><!--
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+ -->
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+ <!--<DI_ITEM Index="3533" Name="DI_SPARE" BufferOffset="3533" Addr="D220.13" Description="SPARE" />-->
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+ <!--
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<DI_ITEM Index="3534" Name="DI_APCExternalHeaterControlDoing" BufferOffset="3534" Addr="D220.14" Description="APC external heater control doing" />
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<DI_ITEM Index="3534" Name="DI_APCRingHeaterControlDoing" BufferOffset="3535" Addr="D220.15" Description="APC ring heater control doing" />
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@@ -917,39 +881,39 @@
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<DI_ITEM Index="5550" Name="DI_AV135ILK" BufferOffset="5750" Addr="D359.6" Description="AV135 ILK" />
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<DI_ITEM Index="5550" Name="DI_AV136ILK" BufferOffset="5751" Addr="D359.7" Description="AV136 ILK" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock4A" BufferOffset="5942" Addr="D371.6" Description="Buffer Stock 4-A"/>
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock4D" BufferOffset="5949" Addr="D371.13" Description="Buffer Stock 4-D" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock4C" BufferOffset="5958" Addr="D372.6" Description="Buffer Stock 4-C" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock4B" BufferOffset="5965" Addr="D372.13" Description="Buffer Stock 4-B" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock3A" BufferOffset="5974" Addr="D373.6" Description="Buffer Stock 3-A" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock3D" BufferOffset="5981" Addr="D373.13" Description="Buffer Stock 3-D" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock3C" BufferOffset="5990" Addr="D374.6" Description="Buffer Stock 3-C" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock3B" BufferOffset="5997" Addr="D374.13" Description="Buffer Stock 3-B" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock2A" BufferOffset="6006" Addr="D375.6" Description="Buffer Stock 2-A" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock2D" BufferOffset="6013" Addr="D375.13" Description="Buffer Stock 2-D" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock2C" BufferOffset="6022" Addr="D376.6" Description="Buffer Stock 2-C" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock2B" BufferOffset="6029" Addr="D376.13" Description="Buffer Stock 2-B" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock1A" BufferOffset="6038" Addr="D377.6" Description="Buffer Stock 1-A" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock1D" BufferOffset="6045" Addr="D377.13" Description="Buffer Stock 1-D" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock1C" BufferOffset="6054" Addr="D378.6" Description="Buffer Stock 1-C" />
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-
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+
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<DI_ITEM Index="5555" Name="DI_BufferStock1B" BufferOffset="6061" Addr="D378.13" Description="Buffer Stock 1-B" />
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-
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+
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<DI_ITEM Index="6064" Name="DI_PCONNTILK" BufferOffset="6064" Addr="D379.0" Description="PCONNT_ILK" />
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<DI_ITEM Index="6065" Name="DI_DGZEROILK" BufferOffset="6065" Addr="D379.1" Description="DGZERO_ILK" />
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@@ -981,7 +945,7 @@
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<DI_ITEM Index="6091" Name="DI_CSOURCETANKL" BufferOffset="6091" Addr="D380.11" Description="C_SOURCE_TANK_L" />
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<DI_ITEM Index="6092" Name="DI_HCDREFACT" BufferOffset="6092" Addr="D380.12" Description="HCD_REF_ACT" />
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<DI_ITEM Index="6093" Name="DI_CSourCeREFACT" BufferOffset="6093" Addr="D380.13" Description="C_SourCe_REF_ACT" />
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-
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+
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<DI_ITEM Index="6400" Name="DI_AV1Status" BufferOffset="6400" Addr="D400.0" Description="AV1 Status" />
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<DI_ITEM Index="6401" Name="DI_AV2Status" BufferOffset="6401" Addr="D400.1" Description="AV2 Status" />
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<DI_ITEM Index="6402" Name="DI_AV3Status" BufferOffset="6402" Addr="D400.2" Description="AV3 Status" />
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@@ -1271,7 +1235,7 @@
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<DO_ITEM Index="0" Name="DO_HPMValveOnOff" BufferOffset="48" Addr="D1003.0" Description="HPM valve on/off"/>
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<DO_ITEM Index="1" Name="DO_O2ANALYZERPUMPOFF" BufferOffset="49" Addr="D1003.1" Description="O2_ANALYZER PUMP OFF"/>
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|
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|
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-
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+
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<!--<DO_ITEM Index="18" Name="DO_WaferRobotReset" BufferOffset="342" Addr="D1021.6" Description="Wafer robot reset"/>-->
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<DO_ITEM Index="26" Name="DO_LADamperOpen" BufferOffset="962" Addr="D1060.2" Description="AV227 opne (LA Damper)"/>
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@@ -1285,7 +1249,7 @@
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<DO_ITEM Index="71" Name="DO_AutoOrManualKnob" BufferOffset="1108" Addr="D1069.4" Description="auto/manual knob"/>
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<DO_ITEM Index="72" Name="DO_NormalOrMaintainKnob" BufferOffset="1109" Addr="D1069.5" Description="normal/maintain knob"/>
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<DO_ITEM Index="73" Name="DO_HeaterPowerOnOffKnob" BufferOffset="1110" Addr="D1069.6" Description="heater power on/off knob"/>
|
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-
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+
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@@ -1335,8 +1299,8 @@
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<DO_ITEM Index="155" Name="DO_HeaterE925Enable" BufferOffset="1384" Addr="D1086.8" Description="Heater E925 power on Enable"/>
|
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<DO_ITEM Index="155" Name="DO_HeaterE926Enable" BufferOffset="1385" Addr="D1086.9" Description="Heater E926 power on Enable"/>
|
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|
<DO_ITEM Index="155" Name="DO_HeaterExchangeEnable" BufferOffset="1386" Addr="D1086.10" Description="Heater Exchange Enable"/>-->
|
|
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-
|
|
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-
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|
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+
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+
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<DO_ITEM Index="173" Name="DO_BoatRAxisDriverStart" BufferOffset="1408" Addr="D1088.0" Description="Boat R Axis driver start"/>
|
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<DO_ITEM Index="174" Name="DO_BoatRAxisAlarmReset" BufferOffset="1409" Addr="D1088.1" Description="Boat R Axis alarm reset"/>
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@@ -1387,7 +1351,7 @@
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<DO_ITEM Index="217" Name="DO_FOUPRobotActionHold" BufferOffset="1485" Addr="D1092.13" Description="FOUP Robot Action Hold"/>
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<DO_ITEM Index="218" Name="DO_FOUPRobotTPEnable" BufferOffset="1486" Addr="D1092.14" Description="FOUP Robot TP Enable"/>
|
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<DO_ITEM Index="219" Name="DO_FOUPRobotBufferInterlock" BufferOffset="1487" Addr="D1092.15" Description="FOUP Robot BuffeInterlock"/>
|
|
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-
|
|
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+
|
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|
<DO_ITEM Index="220" Name="DO_LP1FOUPPresence" BufferOffset="1488" Addr="D1093.0" Description="Load Port1 FOUP presence"/>
|
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|
<DO_ITEM Index="221" Name="DO_LP1FOUPPlacement" BufferOffset="1489" Addr="D1093.1" Description="Load Port1 FOUP placement"/>
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<DO_ITEM Index="222" Name="DO_LP1FOUPLoad" BufferOffset="1490" Addr="D1093.2" Description="Load Port1 FOUP load"/>
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@@ -1416,8 +1380,8 @@
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<DO_ITEM Index="300" Name="DO_loadport2E84HOAVBL" BufferOffset="1513" Addr="D1094.14" Description="loadport 2 E84 HO_AVBL"/>
|
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<DO_ITEM Index="300" Name="DO_loadport2E84ES" BufferOffset="1514" Addr="D1094.15" Description="loadport 2 E84 ES"/>
|
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|
|
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-
|
|
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-
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|
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+
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+
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<DO_ITEM Index="307" Name="DO_FORELINEHEATERON/OFF" BufferOffset="1616" Addr="D1101.0" Description="FORELINE HEATER ON/OFF"/>
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<DO_ITEM Index="307" Name="DO_EXTERNALBMOOUT" BufferOffset="1620" Addr="D1101.4" Description="EXTERNAL EMO OUT"/>
|
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<DO_ITEM Index="307" Name="DO_AUTOREFILL1REQUESTOrVALVEOPEN" BufferOffset="1621" Addr="D1101.5" Description="AUTOREFILL-1 REQUEST Or VALVE OPEN"/>
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@@ -1464,7 +1428,7 @@
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<DO_ITEM Index="292" Name="DO_ValveAV6" BufferOffset="2469" Addr="D1154.5" Description="AV6"/>
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<DO_ITEM Index="293" Name="DO_ValveAV7" BufferOffset="2470" Addr="D1154.6" Description="AV7"/>
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<DO_ITEM Index="294" Name="DO_ValveAV8" BufferOffset="2471" Addr="D1154.7" Description="AV8"/>
|
|
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-
|
|
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+
|
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|
<DO_ITEM Index="295" Name="DO_ValveAV33" BufferOffset="2480" Addr="D1155.0" Description="AV33"/>
|
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<DO_ITEM Index="296" Name="DO_ValveAV10" BufferOffset="2481" Addr="D1155.1" Description="AV10"/>
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<DO_ITEM Index="297" Name="DO_ValveAV11" BufferOffset="2482" Addr="D1155.2" Description="AV11"/>
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@@ -1473,7 +1437,7 @@
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<DO_ITEM Index="300" Name="DO_ValveAV14" BufferOffset="2485" Addr="D1155.5" Description="AV14"/>
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<DO_ITEM Index="301" Name="DO_ValveAV15" BufferOffset="2486" Addr="D1155.6" Description="AV15"/>
|
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<DO_ITEM Index="302" Name="DO_ValveAV16" BufferOffset="2487" Addr="D1155.7" Description="AV16"/>
|
|
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-
|
|
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+
|
|
|
<DO_ITEM Index="303" Name="DO_ValveAV35" BufferOffset="2496" Addr="D1156.0" Description="AV35"/>
|
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<DO_ITEM Index="304" Name="DO_ValveAV18" BufferOffset="2497" Addr="D1156.1" Description="AV18"/>
|
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<DO_ITEM Index="305" Name="DO_ValveAV19" BufferOffset="2498" Addr="D1156.2" Description="AV19"/>
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@@ -1482,7 +1446,7 @@
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<DO_ITEM Index="308" Name="DO_ValveAV22" BufferOffset="2501" Addr="D1156.5" Description="AV22"/>
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<DO_ITEM Index="309" Name="DO_ValveAV23" BufferOffset="2502" Addr="D1156.6" Description="AV23"/>
|
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<DO_ITEM Index="310" Name="DO_ValveAV24" BufferOffset="2503" Addr="D1156.7" Description="AV24"/>
|
|
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-
|
|
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+
|
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|
<DO_ITEM Index="311" Name="DO_ValveAV25" BufferOffset="2512" Addr="D1157.0" Description="AV25"/>
|
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|
<DO_ITEM Index="312" Name="DO_ValveAV26" BufferOffset="2513" Addr="D1157.1" Description="AV26"/>
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<DO_ITEM Index="313" Name="DO_ValveAV27" BufferOffset="2514" Addr="D1157.2" Description="AV27"/>
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@@ -1499,7 +1463,7 @@
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<DO_ITEM Index="323" Name="DO_ValveAV104" BufferOffset="2533" Addr="D1158.5" Description="AV104"/>
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<DO_ITEM Index="324" Name="DO_ValveAV105" BufferOffset="2534" Addr="D1158.6" Description="AV105"/>
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|
<DO_ITEM Index="325" Name="DO_ValveAV106" BufferOffset="2535" Addr="D1158.7" Description="AV106"/>
|
|
|
-
|
|
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+
|
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|
<DO_ITEM Index="326" Name="DO_ValveAV107" BufferOffset="2544" Addr="D1159.0" Description="AV107"/>
|
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|
<DO_ITEM Index="327" Name="DO_ValveAV108" BufferOffset="2545" Addr="D1159.1" Description="AV108"/>
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<DO_ITEM Index="328" Name="DO_ValveAV110" BufferOffset="2547" Addr="D1159.3" Description="AV110"/>
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@@ -1507,7 +1471,7 @@
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<DO_ITEM Index="330" Name="DO_ValveAV112" BufferOffset="2549" Addr="D1159.5" Description="AV112"/>
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<DO_ITEM Index="331" Name="DO_ValveAV113" BufferOffset="2550" Addr="D1159.6" Description="AV113"/>
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|
<DO_ITEM Index="332" Name="DO_ValveAV114" BufferOffset="2551" Addr="D1159.7" Description="AV114"/>
|
|
|
-
|
|
|
+
|
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|
<DO_ITEM Index="333" Name="DO_ValveAV115" BufferOffset="2560" Addr="D1160.0" Description="AV115"/>
|
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|
<DO_ITEM Index="334" Name="DO_ValveAV116" BufferOffset="2561" Addr="D1160.1" Description="AV116"/>
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<DO_ITEM Index="335" Name="DO_ValveAV117" BufferOffset="2562" Addr="D1160.2" Description="AV117"/>
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@@ -1516,7 +1480,7 @@
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<DO_ITEM Index="338" Name="DO_ValveAV120" BufferOffset="2565" Addr="D1160.5" Description="AV120"/>
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<DO_ITEM Index="339" Name="DO_ValveAV121" BufferOffset="2566" Addr="D1160.6" Description="AV121"/>
|
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|
<DO_ITEM Index="340" Name="DO_ValveAV122" BufferOffset="2567" Addr="D1160.7" Description="AV122"/>
|
|
|
-
|
|
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+
|
|
|
<DO_ITEM Index="341" Name="DO_ValveAV123" BufferOffset="2576" Addr="D1161.0" Description="AV123"/>
|
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|
<DO_ITEM Index="342" Name="DO_ValveAV124" BufferOffset="2577" Addr="D1161.1" Description="AV124"/>
|
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|
<DO_ITEM Index="343" Name="DO_ValveAV125" BufferOffset="2578" Addr="D1161.2" Description="AV125"/>
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|
@@ -1533,7 +1497,7 @@
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|
<DO_ITEM Index="350" Name="DO_LABacksideDoorCylinderControlValveClose" BufferOffset="2597" Addr="D1162.5" Description="AV202 close(LA backside door cylinder control)"/>
|
|
|
<DO_ITEM Index="351" Name="DO_LAExhaustValveOpen" BufferOffset="2598" Addr="D1162.6" Description="AV66 Open(LA exhaust damper)"/>
|
|
|
<DO_ITEM Index="352" Name="DO_LAExhaustValveClose" BufferOffset="2599" Addr="D1162.7" Description="AV66 Clone(LA exhaust damper)"/>
|
|
|
-
|
|
|
+
|
|
|
<DO_ITEM Index="352" Name="DO_circulationfanisturnedopen" BufferOffset="2612" Addr="D1163.4" Description="AV227 open"/>
|
|
|
<DO_ITEM Index="352" Name="DO_circulationfanisturnedClose" BufferOffset="2613" Addr="D1163.5" Description="AV227 close"/>
|
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|
<DO_ITEM Index="352" Name="DO_MS501" BufferOffset="2614" Addr="D1163.6" Description="MS501"/>
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|
@@ -1550,7 +1514,7 @@
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|
<DO_ITEM Index="357" Name="DO_ValveAV75" BufferOffset="2661" Addr="D1166.5" Description="AV75"/>
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|
<DO_ITEM Index="358" Name="DO_ValveAV77" BufferOffset="2662" Addr="D1166.6" Description="AV77"/>
|
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|
<DO_ITEM Index="359" Name="DO_ValveAV78" BufferOffset="2663" Addr="D1166.7" Description="AV78"/>
|
|
|
-
|
|
|
+
|
|
|
<DO_ITEM Index="360" Name="DO_ValveAV80" BufferOffset="2672" Addr="D1167.0" Description="AV80"/>
|
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|
<DO_ITEM Index="361" Name="DO_ValveAV81" BufferOffset="2673" Addr="D1167.1" Description="AV81"/>
|
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|
<DO_ITEM Index="362" Name="DO_ValveAV85" BufferOffset="2674" Addr="D1167.2" Description="AV85"/>
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|
@@ -1559,12 +1523,12 @@
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|
<DO_ITEM Index="365" Name="DO_ValveAV88" BufferOffset="2677" Addr="D1167.5" Description="AV88"/>
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|
<DO_ITEM Index="366" Name="DO_ValveAV91" BufferOffset="2678" Addr="D1167.6" Description="AV91"/>
|
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|
<DO_ITEM Index="367" Name="DO_ValveAV92" BufferOffset="2679" Addr="D1167.7" Description="AV92"/>
|
|
|
-
|
|
|
+
|
|
|
<DO_ITEM Index="368" Name="DO_ValveAV71" BufferOffset="2688" Addr="D1168.0" Description="AV71"/>
|
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|
<DO_ITEM Index="369" Name="DO_ValveAV82" BufferOffset="2690" Addr="D1168.2" Description="AV82"/>
|
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|
<DO_ITEM Index="370" Name="DO_ValveAV83" BufferOffset="2691" Addr="D1168.3" Description="AV83"/>
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<DO_ITEM Index="371" Name="DO_ValveAV93" BufferOffset="2692" Addr="D1168.4" Description="AV93"/>
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-
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+
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<DO_ITEM Index="372" Name="DO_ValveAV54" BufferOffset="2720" Addr="D1170.0" Description="AV54"/>
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<DO_ITEM Index="373" Name="DO_ValveAV55" BufferOffset="2721" Addr="D1170.1" Description="AV55"/>
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<DO_ITEM Index="374" Name="DO_ValveAV56" BufferOffset="2722" Addr="D1170.2" Description="AV56"/>
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@@ -1651,7 +1615,7 @@
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<DO_ITEM Index="3848" Name="DO_APCAoDataWriteSysConfig" BufferOffset="3848" Addr="D1240.8" Description="APC AO DATA WRITE SYSCONFIG"/>
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<DO_ITEM Index="3849" Name="DO_APCAoDataReadCusConfig" BufferOffset="3849" Addr="D1240.9" Description="APC DATA READ_CUSCONFIG"/>
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<DO_ITEM Index="3850" Name="DO_APCAoDataWriteCusConfig" BufferOffset="3850" Addr="D1240.10" Description="APC DATA WRITE_CUSCONFIG"/>
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-
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<DO_ITEM Index="3851" Name="DO_GasLineHeaterTempalarm" BufferOffset="3851" Addr="D1240.11" Description="Gas Line Heater Temp alarm"/>
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<DO_ITEM Index="3852" Name="DO_ExhaustLineHeaterTempalarm" BufferOffset="3852" Addr="D1240.12" Description="Exhaust Line Heater Temp alarm"/>
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<DO_ITEM Index="3853" Name="DO_Abnormalsealcapheatertemp" BufferOffset="3853" Addr="D1240.13" Description="Abnormal seal cap heater temp"/>
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@@ -1662,7 +1626,7 @@
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<DO_ITEM Index="3859" Name="DO_DP2" BufferOffset="3859" Addr="D1241.3" Description="DP2"/>
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<DO_ITEM Index="3860" Name="DO_BWR" BufferOffset="3860" Addr="D1241.4" Description="BWR"/>
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<DO_ITEM Index="3861" Name="DO_DPR" BufferOffset="3861" Addr="D1241.5" Description="DPR"/>
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-
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<DO_ITEM Index="3865" Name="DO_HZERO" BufferOffset="3865" Addr="D1241.9" Description="H.ZERO"/>
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<DO_ITEM Index="3866" Name="DO_CZERO" BufferOffset="3866" Addr="D1241.10" Description="C.ZERO"/>
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<DO_ITEM Index="3867" Name="DO_WAT" BufferOffset="3867" Addr="D1241.11" Description="WAT(NO)"/>
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@@ -1670,7 +1634,7 @@
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<DO_ITEM Index="3869" Name="DO_NZERO" BufferOffset="3869" Addr="D1241.13" Description="N.ZERO"/>
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<DO_ITEM Index="3870" Name="DO_MZERO" BufferOffset="3870" Addr="D1241.14" Description="M.ZERO"/>
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<DO_ITEM Index="3871" Name="DO_NDIR" BufferOffset="3871" Addr="D1241.15" Description="NDIR"/>
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-
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<DO_ITEM Index="3872" Name="DO_HMNTAV113" BufferOffset="3872" Addr="D1242.0" Description="HMNT_AV113"/>
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<DO_ITEM Index="3873" Name="DO_HMNTAV131" BufferOffset="3873" Addr="D1242.1" Description="HMNT_AV131"/>
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<DO_ITEM Index="3874" Name="DO_HMNTAV132" BufferOffset="3874" Addr="D1242.2" Description="HMNT_AV132"/>
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@@ -1749,15 +1713,15 @@
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<AI_ITEM Index="52" Name="AI_CoolingWaterFlowOfFlangeFL905" BufferOffset="100" Addr="D5200" Description="cooling water flow of flange (FS201)"/>
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<AI_ITEM Index="53" Name="AI_CoolingWaterFlowOfLoadingAreaFL906" BufferOffset="101" Addr="D5202" Description="cooling water flow of loading area (FS116)"/>
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<AI_ITEM Index="54" Name="AI_WaterFlowREV" BufferOffset="102" Addr="D5204" Description="water flow REV."/>
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-
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<AI_ITEM Index="55" Name="AI_PS13AnalogValue" BufferOffset="103" Addr="D5206" Description="PS13 analog value"/>
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<AI_ITEM Index="55" Name="AI_VG21Pressure" BufferOffset="104" Addr="D5208" Description="VG21 pressure"/>
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<AI_ITEM Index="56" Name="AI_DG1Pressure" BufferOffset="105" Addr="D5210" Description="DG1 pressure"/>
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<AI_ITEM Index="57" Name="AI_PG12Pressure" BufferOffset="106" Addr="D5212" Description="PG12 pressure"/>
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<AI_ITEM Index="58" Name="AI_PS14Pressure" BufferOffset="109" Addr="D5218" Description="PS14 pressure"/>
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-
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<AI_ITEM Index="79" Name="AI_N24PurgePressure" BufferOffset="192" Addr="D5384" Description="N2-4 purge pressure(PG14)"/>
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<AI_ITEM Index="80" Name="AI_N25PurgePressure" BufferOffset="193" Addr="D5386" Description="N2-5 purge pressure(PG15)"/>
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<AI_ITEM Index="81" Name="AI_N26PurgePressure" BufferOffset="194" Addr="D5388" Description="N2-6 purge pressure(PG16)"/>
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@@ -2959,7 +2923,7 @@
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<AI_ITEM Index="1177" Name="AI_PG829AI" BufferOffset="2155" Addr="D9310" Description="PG829AI(1B)"/>
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<AI_ITEM Index="1177" Name="AI_PG830AI" BufferOffset="2156" Addr="D9312" Description="PG830AI(1C)"/>
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<AI_ITEM Index="1177" Name="AI_PG831AI" BufferOffset="2157" Addr="D9314" Description="PG831AI(1D)"/>
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-
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<AI_ITEM Index="2150" Name="AI_FOUPRobotActionCommand" BufferOffset="2250" Addr="D9500" Description="FOUP Robot Action Command" />
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<AI_ITEM Index="2151" Name="AI_WaferRobotActionCommand" BufferOffset="2251" Addr="D9502" Description="Wafer Robot Action Command" />
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jiangjy