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@@ -5015,6 +5015,7 @@
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<config default="false" name="EnableLogMessage" description="Enable log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="EnableLogMessage" description="Enable log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="3" name="ReconnectCount" description="MFC reconnect count" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="3" name="ReconnectCount" description="MFC reconnect count" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<configs name="MFC1" display="MFC1">
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<configs name="MFC1" display="MFC1">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5032,6 +5033,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC2" display="MFC2">
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<configs name="MFC2" display="MFC2">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5049,6 +5051,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC3" display="MFC3">
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<configs name="MFC3" display="MFC3">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5066,6 +5069,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC4" display="MFC4">
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<configs name="MFC4" display="MFC4">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5083,6 +5087,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC5" display="MFC5">
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<configs name="MFC5" display="MFC5">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5100,6 +5105,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC6" display="MFC6">
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<configs name="MFC6" display="MFC6">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5117,6 +5123,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC7" display="MFC7">
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<configs name="MFC7" display="MFC7">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5134,6 +5141,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC8" display="MFC8">
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<configs name="MFC8" display="MFC8">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5151,6 +5159,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC9" display="MFC9">
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<configs name="MFC9" display="MFC9">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5168,6 +5177,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC10" display="MFC10">
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<configs name="MFC10" display="MFC10">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5185,6 +5195,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC11" display="MFC11">
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<configs name="MFC11" display="MFC11">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="20" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="20" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5202,6 +5213,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC12" display="MFC12">
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<configs name="MFC12" display="MFC12">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5219,6 +5231,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC13" display="MFC13">
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<configs name="MFC13" display="MFC13">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="0.5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="0.5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5236,6 +5249,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC14" display="MFC14">
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<configs name="MFC14" display="MFC14">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5253,6 +5267,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC15" display="MFC15">
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<configs name="MFC15" display="MFC15">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5270,6 +5285,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC16" display="MFC16">
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<configs name="MFC16" display="MFC16">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
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@@ -5287,6 +5303,7 @@
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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</configs>
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</configs>
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<configs name="MFC17" display="MFC17">
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<configs name="MFC17" display="MFC17">
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+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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|
|
<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
@@ -5304,6 +5321,7 @@
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|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
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|
</configs>
|
|
</configs>
|
|
|
<configs name="MFC31" display="MFC31">
|
|
<configs name="MFC31" display="MFC31">
|
|
|
|
|
+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
@@ -5321,6 +5339,7 @@
|
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
|
</configs>
|
|
</configs>
|
|
|
<configs name="MFC32" display="MFC32">
|
|
<configs name="MFC32" display="MFC32">
|
|
|
|
|
+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
@@ -5338,6 +5357,7 @@
|
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
|
</configs>
|
|
</configs>
|
|
|
<configs name="MFC51" display="MFC51">
|
|
<configs name="MFC51" display="MFC51">
|
|
|
|
|
+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
@@ -5355,6 +5375,7 @@
|
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
|
|
|
</configs>
|
|
</configs>
|
|
|
<configs name="MFC57" display="MFC57">
|
|
<configs name="MFC57" display="MFC57">
|
|
|
|
|
+ <config default="0" name="DelayTime" description="DelayTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|
|
<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
|