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@@ -4661,8 +4661,8 @@
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<config visible="false" default="1" name="O2DetectorTransferRoomToFOUPTime" description="Exchange LA TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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<config visible="false" default="1" name="O2DetectorFOUPToTransferRoomTime" description="Exchange FOUP TO LA WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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<config visible="false" default="1" name="O2DetectorFOUPToFOUPTime" description="FOUP TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config visible="false" default="0" name="N2Purge.N2PurgeFOUPO2CheckSV" description="FOUP O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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- <config visible="false" default="0" name="N2Purge.N2PurgeLAO2CheckSV" description=" LA O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="0" name="N2PurgeFOUPO2CheckSV" description="FOUP O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="0" name="N2PurgeLAO2CheckSV" description=" LA O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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<configs visible="false" name="FoupEnter">
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<config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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jiangjy