bug553：去掉mfc量程单位

Furnace/FurnaceRT/Config/System.sccfg

@@ -4986,7 +4986,7 @@
 			<config default="false" name="EnableLogMessage" description="Enable log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
 			<config default="3" name="ReconnectCount" description="MFC reconnect count" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<configs name="MFC1" display="MFC1">
-				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC1" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5003,7 +5003,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC2" display="MFC2">
-				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC2" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5020,7 +5020,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC3" display="MFC3">
-				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC3" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5037,7 +5037,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC4" display="MFC4">
-				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC4" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5054,7 +5054,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC5" display="MFC5">
-				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC5" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5071,7 +5071,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC6" display="MFC6">
-				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC6" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5088,7 +5088,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC7" display="MFC7">
-				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC7" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5105,7 +5105,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC8" display="MFC8">
-				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC8" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5122,7 +5122,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC9" display="MFC9">
-				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC9" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5139,7 +5139,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC10" display="MFC10">
-				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC10" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5156,7 +5156,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC11" display="MFC11">
-				<config default="20" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="20" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC11" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5173,7 +5173,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC12" display="MFC12">
-				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC12" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5190,7 +5190,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC13" display="MFC13">
-				<config default="0.5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="0.5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC13" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5207,7 +5207,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC14" display="MFC14">
-				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC14" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5224,7 +5224,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC15" display="MFC15">
-				<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC15" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5241,7 +5241,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC16" display="MFC16">
-				<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC16" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5258,7 +5258,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC17" display="MFC17">
-				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC17" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5275,7 +5275,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC31" display="MFC31">
-				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC31" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5292,7 +5292,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC32" display="MFC32">
-				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC32" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5309,7 +5309,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC51" display="MFC51">
-				<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC51" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />
@@ -5326,7 +5326,7 @@
 				<config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
 			</configs>
 			<configs name="MFC57" display="MFC57">
-				<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
+				<config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
 				<config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
 				<config default="MFC57" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String"  />