update io

Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -156,9 +156,8 @@
 					diCollisionAvoidanceUp="DI_POD2CollisionAvoidanceForward"
 					diN2PurgeValveClosed="DI_POD2N2PurgeAV63Closed"
 					diN2PurgeValveOpened="DI_POD2N2PurgeAV63Opened"
-					diFOUPVacuumSuckingOK="DI_FIMS2FOUPVacuumSuckingOK"
-					diFOUPVacuumSuckingAlarm="DI_FIMS2FOUPVacuumSuckingAlarm"
-					diFOUPVacuumSuckingNotOK="DI_POD1FOUPVacuumSuckingAlarm"
+					diFOUPVacuumSuckingOK="DI_POD2FOUPVacuumSuckingOK"
+					diFOUPVacuumSuckingNotOK="DI_POD2FOUPVacuumSuckingAlarm"
 		
 					diWaferOnRobot="DI_POD2WaferOnRobot"
 					diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
@@ -1264,6 +1263,7 @@
 		<IoTrigger id="TrigMS520" display="" schematicId="" unit="" doTrigger="DO_MS520"/>
 		<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
 		<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>
+		<IoTrigger id="TrigBufferN2PurageEN" display="" schematicId="" unit="" doTrigger="DO_BufferN2PurageEN"/>
 
 		<IoTrigger id="TrigN2PurgeLAO2CheckFirstEnable" display="" schematicId="" unit="" doTrigger="DO_LAO2CheckFirstEN"/>
 		<IoTrigger id="TrigN2PurgeFIMS1O2CheckEnable" display="" schematicId="" unit="" doTrigger="DO_FIMS1O2CheckEN"/>

Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

@@ -1668,6 +1668,7 @@
 		<DO_ITEM Index="4049" Name="DO_BufferN2Purage1BOpen" BufferOffset="4049" Addr="D1253.1" Description="Buffer N2 Purage 1B Open"/>
 		<DO_ITEM Index="4050" Name="DO_BufferN2Purage1COpen" BufferOffset="4050" Addr="D1253.2" Description="Buffer N2 Purage 1C Open"/>
 		<DO_ITEM Index="4051" Name="DO_BufferN2Purage1DOpen" BufferOffset="4051" Addr="D1253.3" Description="Buffer N2 Purage 1D Open"/>
+		<DO_ITEM Index="4051" Name="DO_BufferN2PurageEN" BufferOffset="4052" Addr="D1253.4" Description="Buffer N2 Purage EN"/>
 
 		<!--<DO_ITEM Index="4160" Name="DO_ValveAV132" BufferOffset="4160" Addr="D1260.0" Description="Valve AV132"/>
 		<DO_ITEM Index="4161" Name="DO_ValveAV135" BufferOffset="4161" Addr="D1260.1" Description="Valve AV135"/>