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@@ -156,9 +156,8 @@
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diCollisionAvoidanceUp="DI_POD2CollisionAvoidanceForward"
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diN2PurgeValveClosed="DI_POD2N2PurgeAV63Closed"
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diN2PurgeValveOpened="DI_POD2N2PurgeAV63Opened"
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- diFOUPVacuumSuckingOK="DI_FIMS2FOUPVacuumSuckingOK"
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- diFOUPVacuumSuckingAlarm="DI_FIMS2FOUPVacuumSuckingAlarm"
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- diFOUPVacuumSuckingNotOK="DI_POD1FOUPVacuumSuckingAlarm"
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+ diFOUPVacuumSuckingOK="DI_POD2FOUPVacuumSuckingOK"
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+ diFOUPVacuumSuckingNotOK="DI_POD2FOUPVacuumSuckingAlarm"
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diWaferOnRobot="DI_POD2WaferOnRobot"
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diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
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@@ -1264,6 +1263,7 @@
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<IoTrigger id="TrigMS520" display="" schematicId="" unit="" doTrigger="DO_MS520"/>
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<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
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<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>
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+ <IoTrigger id="TrigBufferN2PurageEN" display="" schematicId="" unit="" doTrigger="DO_BufferN2PurageEN"/>
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<IoTrigger id="TrigN2PurgeLAO2CheckFirstEnable" display="" schematicId="" unit="" doTrigger="DO_LAO2CheckFirstEN"/>
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<IoTrigger id="TrigN2PurgeFIMS1O2CheckEnable" display="" schematicId="" unit="" doTrigger="DO_FIMS1O2CheckEN"/>
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