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@@ -8159,6 +8159,7 @@
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<ECID id="860010020" valueType="Ascii" logicalName="WaferRobot.TransferModeNumber" value="" min="" max="" eventTrigger="" units="" description="Transfer Mode Number" isArray="false" />
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<ECID id="860010020" valueType="Ascii" logicalName="WaferRobot.TransferModeNumber" value="" min="" max="" eventTrigger="" units="" description="Transfer Mode Number" isArray="false" />
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<ECID id="870010001" valueType="Ascii" logicalName="Boat.AutoShutter.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
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<ECID id="870010001" valueType="Ascii" logicalName="Boat.AutoShutter.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
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<ECID id="870010002" valueType="Ascii" logicalName="Boat.AutoShutter.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
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<ECID id="870010002" valueType="Ascii" logicalName="Boat.AutoShutter.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
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+ <ECID id="870010003" valueType="Ascii" logicalName="Boat.AutoShutter.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
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<ECID id="870020001" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Acc" value="" min="" max="" eventTrigger="" units="" description="Acc" isArray="false" />
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<ECID id="870020001" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Acc" value="" min="" max="" eventTrigger="" units="" description="Acc" isArray="false" />
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<ECID id="870020002" valueType="Ascii" logicalName="Boat.BoatElevatorServo.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
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<ECID id="870020002" valueType="Ascii" logicalName="Boat.BoatElevatorServo.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
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<ECID id="870020003" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Dec" value="" min="" max="" eventTrigger="" units="" description="Dec" isArray="false" />
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<ECID id="870020003" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Dec" value="" min="" max="" eventTrigger="" units="" description="Dec" isArray="false" />
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