update 标准规范

Furnace/FurnaceRT/Config/AlarmEventDefine.xml

@@ -1175,12 +1175,12 @@
       <Alarm Name="System.SDWaferTypeUseTimeAlarm" DisplayName="System.SDWaferTypeUseTimeAlarm" Id="10204033" Source="System" Description="SD wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.SDWaferTypeThicknessWarning" DisplayName="System.SDWaferTypeThicknessWarning" Id="10204032" Source="System" Description="SD wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.SDWaferTypeThicknessAlarm" DisplayName="System.SDWaferTypeThicknessAlarm" Id="10204031" Source="System" Description="SD wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.EDWaferTypeUseCountWarning" DisplayName="System.EDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.EDWaferTypeUseCountAlarm" DisplayName="System.EDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.EDWaferTypeUseTimeWarning" DisplayName="System.EDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.EDWaferTypeUseTimeAlarm" DisplayName="System.EDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.EDWaferTypeThicknessWarning" DisplayName="System.EDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-      <Alarm Name="System.EDWaferTypeThicknessAlarm" DisplayName="System.EDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+      <Alarm Name="System.FDWaferTypeUseCountWarning" DisplayName="System.FDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+      <Alarm Name="System.FDWaferTypeUseCountAlarm" DisplayName="System.FDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+      <Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+      <Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+      <Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+      <Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="System equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
       <Alarm Name="System.TransferJobStartFailedWarning" DisplayName="System.TransferJobStartFailedWarning" Id="10204024" Source="System" Description="Transfer job start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
     </AlarmCategory>

Furnace/FurnaceRT/Config/ELK/AlarmEventDefine.xml

@@ -1180,8 +1180,8 @@
 			<Alarm Name="System.DischargeWaferJobMonitorFailedAlarm" DisplayName="System.DischargeWaferJobMonitorFailedAlarm" Id="10204006" Source="System" Description="DischargeWafer job monitor start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeUseCountWarning" DisplayName="System.SDWaferTypeUseCountWarning" Id="10204021" Source="System" Description="SD wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeUseCountAlarm" DisplayName="System.SDWaferTypeUseCountAlarm" Id="10204020" Source="System" Description="SD wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountWarning" DisplayName="System.EDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountAlarm" DisplayName="System.EDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountWarning" DisplayName="System.FDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountAlarm" DisplayName="System.FDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.MWaferTypeUseCountWarning" DisplayName="System.MWaferTypeUseCountWarning" Id="10204017" Source="System" Description="M wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.MWaferTypeUseCountAlarm" DisplayName="System.MWaferTypeUseCountAlarm" Id="10204016" Source="System" Description="M wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="Equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
@@ -1191,10 +1191,10 @@
 			<Alarm Name="System.SDWaferTypeUseTimeAlarm" DisplayName="System.SDWaferTypeUseTimeAlarm" Id="10204033" Source="System" Description="SD wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessWarning" DisplayName="System.SDWaferTypeThicknessWarning" Id="10204032" Source="System" Description="SD wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessAlarm" DisplayName="System.SDWaferTypeThicknessAlarm" Id="10204031" Source="System" Description="SD wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeWarning" DisplayName="System.EDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeAlarm" DisplayName="System.EDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessWarning" DisplayName="System.EDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessAlarm" DisplayName="System.EDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>
 		<AlarmCategory Name="InterlockAlarm">
 			<Alarm Name="PM1.UserDefineInterlockAlarm" DisplayName="PM1.UserDefineInterlockAlarm" Id="460218134" Source="PM1" Description="User define interlock occure alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="InterlockAlarm" />

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -2292,6 +2292,13 @@
     <SVID id="339750001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339760001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339770001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRinterlockreset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339780001" valueType="F8" logicalName="PM1.TrigN2PurgeExchangeFOUPTOFOUPWaitTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339790001" valueType="F8" logicalName="PM1.TrigN2PurgeExchangeFOUPTOLAWaitTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339800001" valueType="F8" logicalName="PM1.TrigN2PurgeExchangeLATOFOUPWaitTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339810001" valueType="F8" logicalName="PM1.TrigN2PurgeFOUPO2CheckSV.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339820001" valueType="F8" logicalName="PM1.TrigN2PurgeFOUPO2CheckTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339830001" valueType="F8" logicalName="PM1.TrigN2PurgeFOUPO2OverTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339840001" valueType="F8" logicalName="PM1.TrigN2PurgeLAO2OverTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -10802,12 +10809,12 @@
     <ALID id="10010004" logicalName="System.CreateWaferFailedWarning" description="Create wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010004" eventClear="210010004" />
     <ALID id="10010005" logicalName="System.DeleteWaferFailedWarning" description="Delete wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010005" eventClear="210010005" />
     <ALID id="10010006" logicalName="System.DischargeWaferJobMonitorFailedAlarm" description="DischargeWafer job monitor start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010006" eventClear="210010006" />
-    <ALID id="10010007" logicalName="System.EDWaferTypeThicknessAlarm" description="ED wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010007" eventClear="210010007" />
-    <ALID id="10010008" logicalName="System.EDWaferTypeThicknessWarning" description="ED wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010008" eventClear="210010008" />
-    <ALID id="10010009" logicalName="System.EDWaferTypeUseCountAlarm" description="ED wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010009" eventClear="210010009" />
-    <ALID id="10010010" logicalName="System.EDWaferTypeUseCountWarning" description="ED wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010010" eventClear="210010010" />
-    <ALID id="10010011" logicalName="System.EDWaferTypeUseTimeAlarm" description="ED wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010011" eventClear="210010011" />
-    <ALID id="10010012" logicalName="System.EDWaferTypeUseTimeWarning" description="ED wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010012" eventClear="210010012" />
+    <ALID id="10010007" logicalName="System.FDWaferTypeThicknessAlarm" description="ED wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010007" eventClear="210010007" />
+    <ALID id="10010008" logicalName="System.FDWaferTypeThicknessWarning" description="ED wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010008" eventClear="210010008" />
+    <ALID id="10010009" logicalName="System.FDWaferTypeUseCountAlarm" description="ED wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010009" eventClear="210010009" />
+    <ALID id="10010010" logicalName="System.FDWaferTypeUseCountWarning" description="ED wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010010" eventClear="210010010" />
+    <ALID id="10010011" logicalName="System.FDWaferTypeUseTimeAlarm" description="ED wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010011" eventClear="210010011" />
+    <ALID id="10010012" logicalName="System.FDWaferTypeUseTimeWarning" description="ED wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010012" eventClear="210010012" />
     <ALID id="10010013" logicalName="System.EquipmentEmergencyStopAlarm" description="Equipment emergency stop alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010013" eventClear="210010013" />
     <ALID id="10010014" logicalName="System.ExpertChargeProcessDischargeStartFailedWarning" description="Expert ChargeProcessDischarge start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010014" eventClear="210010014" />
     <ALID id="10010015" logicalName="System.ExpertChargeProcessStartFailedWarning" description="Expert ChargeProcess start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010015" eventClear="210010015" />
@@ -10840,6 +10847,12 @@
     <ALID id="10010042" logicalName="System.RecipeThicknessWarning" description="Recipe Thickness Warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010042" eventClear="210010042" />
     <ALID id="10010043" logicalName="System.ReatorStepRunTimeAlarm" description="StepRunTime Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="110010043" eventClear="210010043" />
     <ALID id="10010044" logicalName="System.ReatorStepRunTimeWarning" description="StepRunTime Warning" category="EquipmentStatusWarning" enabled="false" eventSet="110010044" eventClear="210010044" />
+    <ALID id="10010045" logicalName="System.EDWaferTypeThicknessAlarm" description="ED wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010045" eventClear="210010045" />
+    <ALID id="10010046" logicalName="System.EDWaferTypeThicknessWarning" description="ED wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010046" eventClear="210010046" />
+    <ALID id="10010047" logicalName="System.EDWaferTypeUseCountAlarm" description="ED wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010047" eventClear="210010047" />
+    <ALID id="10010048" logicalName="System.EDWaferTypeUseCountWarning" description="ED wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010048" eventClear="210010048" />
+    <ALID id="10010049" logicalName="System.EDWaferTypeUseTimeAlarm" description="ED wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010049" eventClear="210010049" />
+    <ALID id="10010050" logicalName="System.EDWaferTypeUseTimeWarning" description="ED wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010050" eventClear="210010050" />
     <ALID id="10020001" logicalName="System.CHM.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110020001" eventClear="210020001" />
     <ALID id="10020002" logicalName="System.CHM.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110020002" eventClear="210020002" />
     <ALID id="10030001" logicalName="System.GasLine1.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110030001" eventClear="210030001" />

Furnace/FurnaceRT/Config/IO/ELK/_ioDefineHeater.xml

@@ -97,10 +97,10 @@
 		<AO_ITEM Index="5"	Name="AO_HeaterUCascade_D"				BufferOffset="20"	Addr="15540"	Description="HeaterU Cascade D" />
 		<AO_ITEM Index="6"	Name="AO_HeaterUHeater_P"					BufferOffset="22"	Addr="15542"	Description="HeaterU Heater P" />
 		<AO_ITEM Index="7"	Name="AO_HeaterUHeater_I"					BufferOffset="24"	Addr="15544"	Description="HeaterU Heater I" />
-		<AO_ITEM Index="8"	Name="AO_HeaterUHeater_D"					BufferOffset="26"	Addr="15546"	Description="HeaterU Heater D" /> 
-    <AO_ITEM Index="10"	Name="AO_HeaterUTCOpenOffset"	BufferOffset="30"	Addr="15550"	Description="HeaterU TC OPEN OFFSET" />
+		<AO_ITEM Index="8"	Name="AO_HeaterUHeater_D"					BufferOffset="26"	Addr="15546"	Description="HeaterU Heater D" />
+		<AO_ITEM Index="10"	Name="AO_HeaterUTCOpenOffset"	BufferOffset="30"	Addr="15550"	Description="HeaterU TC OPEN OFFSET" />
 
-    <AO_ITEM Index="11"	Name="AO_HeaterCUCascadeControlModeSV"						BufferOffset="32"	Addr="15552"	Description="HeaterCU Cascade Control Mode SV" />
+		<AO_ITEM Index="11"	Name="AO_HeaterCUCascadeControlModeSV"						BufferOffset="32"	Addr="15552"	Description="HeaterCU Cascade Control Mode SV" />
 		<AO_ITEM Index="12"	Name="AO_HeaterCUUpRate"					BufferOffset="34"	Addr="15554"	Description="HeaterCU Up Rate" />
 		<AO_ITEM Index="13"	Name="AO_HeaterCUDownRate"				BufferOffset="36"	Addr="15556"	Description="HeaterCU Down Rate" />
 		<AO_ITEM Index="14"	Name="AO_HeaterCUCascade_P"				BufferOffset="38"	Addr="15558"	Description="HeaterCU Cascade P" />
@@ -109,10 +109,10 @@
 		<AO_ITEM Index="17"	Name="AO_HeaterCUHeater_P"					BufferOffset="44"	Addr="15564"	Description="HeaterCU Heater P" />
 		<AO_ITEM Index="18"	Name="AO_HeaterCUHeater_I"					BufferOffset="46"	Addr="15566"	Description="HeaterCU Heater I" />
 		<AO_ITEM Index="19"	Name="AO_HeaterCUHeater_D"					BufferOffset="48"	Addr="15568"	Description="HeaterCU Heater D" />
-    <AO_ITEM Index="21"	Name="AO_HeaterCUTCOpenOffset"					BufferOffset="52"	Addr="15572"	Description="HeaterCU TC OPEN OFFSET" />
+		<AO_ITEM Index="21"	Name="AO_HeaterCUTCOpenOffset"					BufferOffset="52"	Addr="15572"	Description="HeaterCU TC OPEN OFFSET" />
 
 
-    <AO_ITEM Index="22"	Name="AO_HeaterCCascadeControlModeSV"						BufferOffset="54"	Addr="15574"	Description="HeaterC Cascade Control Mode SV" />
+		<AO_ITEM Index="22"	Name="AO_HeaterCCascadeControlModeSV"						BufferOffset="54"	Addr="15574"	Description="HeaterC Cascade Control Mode SV" />
 		<AO_ITEM Index="23"	Name="AO_HeaterCUpRate"					BufferOffset="56"	Addr="15576"	Description="HeaterC Up Rate" />
 		<AO_ITEM Index="24"	Name="AO_HeaterCDownRate"				BufferOffset="58"	Addr="15578"	Description="HeaterC Down Rate" />
 		<AO_ITEM Index="25"	Name="AO_HeaterCCascade_P"				BufferOffset="60"	Addr="15580"	Description="HeaterC Cascade P" />
@@ -121,10 +121,10 @@
 		<AO_ITEM Index="28"	Name="AO_HeaterCHeater_P"					BufferOffset="66"	Addr="15586"	Description="HeaterC Heater P" />
 		<AO_ITEM Index="29"	Name="AO_HeaterCHeater_I"					BufferOffset="68"	Addr="15588"	Description="HeaterC Heater I" />
 		<AO_ITEM Index="30"	Name="AO_HeaterCHeater_D"					BufferOffset="70"	Addr="15590"	Description="HeaterC Heater D" />
-    <AO_ITEM Index="32"	Name="AO_HeaterCTCOpenOffset"					BufferOffset="74"	Addr="15594"	Description="HeaterC TC OPEN OFFSET" />
+		<AO_ITEM Index="32"	Name="AO_HeaterCTCOpenOffset"					BufferOffset="74"	Addr="15594"	Description="HeaterC TC OPEN OFFSET" />
 
 
-    <AO_ITEM Index="33"	Name="AO_HeaterCLCascadeControlModeSV"						BufferOffset="76"	Addr="15596"	Description="HeaterCL Cascade Control Mode SV" />
+		<AO_ITEM Index="33"	Name="AO_HeaterCLCascadeControlModeSV"						BufferOffset="76"	Addr="15596"	Description="HeaterCL Cascade Control Mode SV" />
 		<AO_ITEM Index="34"	Name="AO_HeaterCLUpRate"					BufferOffset="78"	Addr="15598"	Description="HeaterCL Up Rate" />
 		<AO_ITEM Index="35"	Name="AO_HeaterCLDownRate"				BufferOffset="80"	Addr="15600"	Description="HeaterCL Down Rate" />
 		<AO_ITEM Index="36"	Name="AO_HeaterCLCascade_P"				BufferOffset="82"	Addr="15602"	Description="HeaterCL Cascade P" />
@@ -133,9 +133,9 @@
 		<AO_ITEM Index="39"	Name="AO_HeaterCLHeater_P"					BufferOffset="88"	Addr="15608"	Description="HeaterCL Heater P" />
 		<AO_ITEM Index="40"	Name="AO_HeaterCLHeater_I"					BufferOffset="90"	Addr="15610"	Description="HeaterCL Heater I" />
 		<AO_ITEM Index="41"	Name="AO_HeaterCLHeater_D"					BufferOffset="92"	Addr="15612"	Description="HeaterCL Heater D" />
-    <AO_ITEM Index="43"	Name="AO_HeaterCLTCOpenOffset"					BufferOffset="96"	Addr="15616"	Description="HeaterCL TC OPEN OFFSET" />
+		<AO_ITEM Index="43"	Name="AO_HeaterCLTCOpenOffset"					BufferOffset="96"	Addr="15616"	Description="HeaterCL TC OPEN OFFSET" />
 
-    <AO_ITEM Index="44"	Name="AO_HeaterLCascadeControlModeSV"						BufferOffset="98"	Addr="15618"	Description="HeaterL Cascade Control Mode SV" />
+		<AO_ITEM Index="44"	Name="AO_HeaterLCascadeControlModeSV"						BufferOffset="98"	Addr="15618"	Description="HeaterL Cascade Control Mode SV" />
 		<AO_ITEM Index="45"	Name="AO_HeaterLUpRate"					BufferOffset="100"	Addr="15620"	Description="HeaterL Up Rate" />
 		<AO_ITEM Index="46"	Name="AO_HeaterLDownRate"				BufferOffset="102"	Addr="15622"	Description="HeaterL Down Rate" />
 		<AO_ITEM Index="47"	Name="AO_HeaterLCascade_P"				BufferOffset="104"	Addr="15624"	Description="HeaterL Cascade P" />
@@ -144,8 +144,8 @@
 		<AO_ITEM Index="50"	Name="AO_HeaterLHeater_P"					BufferOffset="110"	Addr="15630"	Description="HeaterL Heater P" />
 		<AO_ITEM Index="51"	Name="AO_HeaterLHeater_I"					BufferOffset="112"	Addr="15632"	Description="HeaterL Heater I" />
 		<AO_ITEM Index="52"	Name="AO_HeaterLHeater_D"					BufferOffset="114"	Addr="15634"	Description="HeaterL Heater D" />
-    <AO_ITEM Index="54"	Name="AO_HeaterLTCOpenOffset"					BufferOffset="118"	Addr="15638"	Description="HeaterL TC OPEN OFFSET" />
+		<AO_ITEM Index="54"	Name="AO_HeaterLTCOpenOffset"					BufferOffset="118"	Addr="15638"	Description="HeaterL TC OPEN OFFSET" />
 
 
-  </Ana_Out>
+	</Ana_Out>
 </IO_DEFINE>

Furnace/FurnaceRT/Config/NTP/AlarmEventDefine.xml

@@ -1180,8 +1180,8 @@
 			<Alarm Name="System.DischargeWaferJobMonitorFailedAlarm" DisplayName="System.DischargeWaferJobMonitorFailedAlarm" Id="10204006" Source="System" Description="DischargeWafer job monitor start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeUseCountWarning" DisplayName="System.SDWaferTypeUseCountWarning" Id="10204021" Source="System" Description="SD wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeUseCountAlarm" DisplayName="System.SDWaferTypeUseCountAlarm" Id="10204020" Source="System" Description="SD wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountWarning" DisplayName="System.EDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountAlarm" DisplayName="System.EDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountWarning" DisplayName="System.FDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountAlarm" DisplayName="System.FDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.MWaferTypeUseCountWarning" DisplayName="System.MWaferTypeUseCountWarning" Id="10204017" Source="System" Description="M wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.MWaferTypeUseCountAlarm" DisplayName="System.MWaferTypeUseCountAlarm" Id="10204016" Source="System" Description="M wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="Equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
@@ -1191,10 +1191,10 @@
 			<Alarm Name="System.SDWaferTypeUseTimeAlarm" DisplayName="System.SDWaferTypeUseTimeAlarm" Id="10204033" Source="System" Description="SD wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessWarning" DisplayName="System.SDWaferTypeThicknessWarning" Id="10204032" Source="System" Description="SD wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessAlarm" DisplayName="System.SDWaferTypeThicknessAlarm" Id="10204031" Source="System" Description="SD wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeWarning" DisplayName="System.EDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeAlarm" DisplayName="System.EDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessWarning" DisplayName="System.EDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessAlarm" DisplayName="System.EDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>
 		<AlarmCategory Name="InterlockAlarm">
 			<Alarm Name="PM1.UserDefineInterlockAlarm" DisplayName="PM1.UserDefineInterlockAlarm" Id="460218134" Source="PM1" Description="User define interlock occure alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="InterlockAlarm" />

Furnace/FurnaceRT/Config/SiBCN/AlarmEventDefine.xml

@@ -1174,12 +1174,12 @@
 			<Alarm Name="System.SDWaferTypeUseTimeAlarm" DisplayName="System.SDWaferTypeUseTimeAlarm" Id="10204033" Source="System" Description="SD wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessWarning" DisplayName="System.SDWaferTypeThicknessWarning" Id="10204032" Source="System" Description="SD wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessAlarm" DisplayName="System.SDWaferTypeThicknessAlarm" Id="10204031" Source="System" Description="SD wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountWarning" DisplayName="System.EDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountAlarm" DisplayName="System.EDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeWarning" DisplayName="System.EDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeAlarm" DisplayName="System.EDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessWarning" DisplayName="System.EDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessAlarm" DisplayName="System.EDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountWarning" DisplayName="System.FDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountAlarm" DisplayName="System.FDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="System equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.TransferJobStartFailedWarning" DisplayName="System.TransferJobStartFailedWarning" Id="10204024" Source="System" Description="Transfer job start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>

Furnace/FurnaceRT/Config/TiN/AlarmEventDefine.xml

@@ -1174,12 +1174,12 @@
 			<Alarm Name="System.SDWaferTypeUseTimeAlarm" DisplayName="System.SDWaferTypeUseTimeAlarm" Id="10204033" Source="System" Description="SD wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessWarning" DisplayName="System.SDWaferTypeThicknessWarning" Id="10204032" Source="System" Description="SD wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.SDWaferTypeThicknessAlarm" DisplayName="System.SDWaferTypeThicknessAlarm" Id="10204031" Source="System" Description="SD wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountWarning" DisplayName="System.EDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseCountAlarm" DisplayName="System.EDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeWarning" DisplayName="System.EDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeUseTimeAlarm" DisplayName="System.EDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessWarning" DisplayName="System.EDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
-			<Alarm Name="System.EDWaferTypeThicknessAlarm" DisplayName="System.EDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountWarning" DisplayName="System.FDWaferTypeUseCountWarning" Id="10204008" Source="System" Description="ED wafer type use count warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseCountAlarm" DisplayName="System.FDWaferTypeUseCountAlarm" Id="10204007" Source="System" Description="ED wafer type use count alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeWarning" DisplayName="System.FDWaferTypeUseTimeWarning" Id="10204028" Source="System" Description="ED wafer type use time warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeUseTimeAlarm" DisplayName="System.FDWaferTypeUseTimeAlarm" Id="10204027" Source="System" Description="ED wafer type use time alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessWarning" DisplayName="System.FDWaferTypeThicknessWarning" Id="10204026" Source="System" Description="ED wafer type thickness warning " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
+			<Alarm Name="System.FDWaferTypeThicknessAlarm" DisplayName="System.FDWaferTypeThicknessAlarm" Id="10204025" Source="System" Description="ED wafer type thickness alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.EquipmentEmergencyStopAlarm" DisplayName="System.EquipmentEmergencyStopAlarm" Id="10204009" Source="System" Description="System equipment emergency stop alarm " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Alarm" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 			<Alarm Name="System.TransferJobStartFailedWarning" DisplayName="System.TransferJobStartFailedWarning" Id="10204024" Source="System" Description="Transfer job start failed " Solution="No information available. Press[Clear] to delete alarm message." Explaination="No information available." Action="Clear" Bypass="False" Group="Group0" AutoRecovery="False" Level="Warning" Editable="True" Type="EventUI_Notify" Category="SystemAlarm" />
 		</AlarmCategory>

Furnace/FurnaceRT/Equipments/Jobs/AutoTransfer.cs

@@ -6080,7 +6080,7 @@ namespace FurnaceRT.Equipments.Jobs
                             if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                             {
                                 var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountWarning.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
                             }
                         }
 
@@ -6094,7 +6094,7 @@ namespace FurnaceRT.Equipments.Jobs
                                 var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.LimitValue.ToString());
                                 var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferUserTime, true, currentValue, minValue, maxValue);
 
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeWarning.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
                             }
 
                         }
@@ -6104,7 +6104,7 @@ namespace FurnaceRT.Equipments.Jobs
                             if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                             {
                                 var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessWarning.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
                             }
                         }
 
@@ -6117,7 +6117,7 @@ namespace FurnaceRT.Equipments.Jobs
                             if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                             {
                                 var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
                                 return false;
                             }
                             else if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
@@ -6126,10 +6126,10 @@ namespace FurnaceRT.Equipments.Jobs
 
                                 if (string.IsNullOrEmpty(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName))
                                 {
-                                    Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set(msg);
+                                    Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
                                     return false;
                                 }
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
                                 pm.TriggerJobAutoStart(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName);
                                 LOG.Info($"{msg} Trigger {maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName}");
                                 return false;
@@ -6149,7 +6149,7 @@ namespace FurnaceRT.Equipments.Jobs
 
                             if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                             {
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
                                 return false;
                             }
                             else if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
@@ -6157,11 +6157,11 @@ namespace FurnaceRT.Equipments.Jobs
 
                                 if (string.IsNullOrEmpty(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName))
                                 {
-                                    Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set(msg);
+                                    Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
                                     return false;
                                 }
 
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
                                 pm.TriggerJobAutoStart(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName);
                                 LOG.Info($"{msg} Trigger {maintenanceItemEDWaferUserTime.AssociationProcessRecipeName}");
                                 return false;
@@ -6179,7 +6179,7 @@ namespace FurnaceRT.Equipments.Jobs
                             if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                             {
                                 var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
                                 return false;
                             }
                             else if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
@@ -6188,10 +6188,10 @@ namespace FurnaceRT.Equipments.Jobs
 
                                 if (string.IsNullOrEmpty(maintenanceItemEDWaferThickness.AssociationProcessRecipeName))
                                 {
-                                    Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set(msg);
+                                    Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
                                     return false;
                                 }
-                                Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set(msg);
+                                Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
                                 pm.TriggerJobAutoStart(maintenanceItemEDWaferThickness.AssociationProcessRecipeName);
                                 LOG.Info($"{msg} Trigger {maintenanceItemEDWaferThickness.AssociationProcessRecipeName}");
                                 return false;
@@ -6242,36 +6242,36 @@ namespace FurnaceRT.Equipments.Jobs
                         // Extra Dummy
                         if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
                         {
-                            Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning")} 次");
+                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning")} 次");
                         }
 
                         if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
                         {
-                            Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning")} hour");
+                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning")} hour");
                         }
 
                         if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
                         {
-                            Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning")} nm");
+                            Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning")} nm");
                         }
 
                         if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
                         {
-                            Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm")} 次");
+                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm")} 次");
 
                             return false;
                         }
 
                         if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
                         {
-                            Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm")} hour");
+                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm")} hour");
 
                             return false;
                         }
 
                         if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
                         {
-                            Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm")} nm");
+                            Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm")} nm");
 
                             return false;
                         }

Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/PreProcess.cs

@@ -229,7 +229,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
                                     if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                                     {
                                         var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountWarning.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
                                     }
                                 }
 
@@ -243,7 +243,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
                                         var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.LimitValue.ToString());
                                         var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferUserTime, true, currentValue, minValue, maxValue);
 
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeWarning.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
                                     }
 
                                 }
@@ -253,7 +253,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
                                     if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                                     {
                                         var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessWarning.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
                                     }
                                 }
 
@@ -266,7 +266,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
                                     if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                                     {
                                         var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
                                            return Result.FAIL;
                                     }
                                     else if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
@@ -275,10 +275,10 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
 
                                         if (string.IsNullOrEmpty(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName))
                                         {
-                                            Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set(msg);
+                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
                                                return Result.FAIL;
                                         }
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeUseCountAlarm.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
                                         pm.TriggerJobAutoStart(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName);
                                         LOG.Info($"{msg} Trigger {maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName}");
                                            return Result.FAIL;
@@ -298,7 +298,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
 
                                     if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                                     {
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
                                            return Result.FAIL;
                                     }
                                     else if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
@@ -306,11 +306,11 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
 
                                         if (string.IsNullOrEmpty(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName))
                                         {
-                                            Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set(msg);
+                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
                                                return Result.FAIL;
                                         }
 
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeUseTimeAlarm.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
                                         pm.TriggerJobAutoStart(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName);
                                         LOG.Info($"{msg} Trigger {maintenanceItemEDWaferUserTime.AssociationProcessRecipeName}");
                                            return Result.FAIL;
@@ -328,7 +328,7 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
                                     if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
                                     {
                                         var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
                                            return Result.FAIL;
                                     }
                                     else if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
@@ -337,10 +337,10 @@ namespace FurnaceRT.Equipments.PMs.RecipeExecutions
 
                                         if (string.IsNullOrEmpty(maintenanceItemEDWaferThickness.AssociationProcessRecipeName))
                                         {
-                                            Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set(msg);
+                                            Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
                                             return Result.FAIL;
                                         }
-                                        Singleton<EquipmentManager>.Instance.EDWaferTypeThicknessAlarm.Set(msg);
+                                        Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
                                         pm.TriggerJobAutoStart(maintenanceItemEDWaferThickness.AssociationProcessRecipeName);
                                         LOG.Info($"{msg} Trigger {maintenanceItemEDWaferThickness.AssociationProcessRecipeName}");
                                         return Result.FAIL;

Furnace/FurnaceRT/Equipments/Systems/EquipmentManagerAlarmDefine.cs

@@ -32,12 +32,12 @@ namespace FurnaceRT.Equipments.Systems
         public AlarmEventItem SDWaferTypeUseTimeAlarm { get; set; }
         public AlarmEventItem SDWaferTypeThicknessWarning { get; set; }
         public AlarmEventItem SDWaferTypeThicknessAlarm { get; set; }
-        public AlarmEventItem EDWaferTypeUseCountWarning { get; set; }
-        public AlarmEventItem EDWaferTypeUseCountAlarm { get; set; }
-        public AlarmEventItem EDWaferTypeUseTimeWarning { get; set; }
-        public AlarmEventItem EDWaferTypeUseTimeAlarm { get; set; }
-        public AlarmEventItem EDWaferTypeThicknessWarning { get; set; }
-        public AlarmEventItem EDWaferTypeThicknessAlarm { get; set; }
+        public AlarmEventItem FDWaferTypeUseCountWarning { get; set; }
+        public AlarmEventItem FDWaferTypeUseCountAlarm { get; set; }
+        public AlarmEventItem FDWaferTypeUseTimeWarning { get; set; }
+        public AlarmEventItem FDWaferTypeUseTimeAlarm { get; set; }
+        public AlarmEventItem FDWaferTypeThicknessWarning { get; set; }
+        public AlarmEventItem FDWaferTypeThicknessAlarm { get; set; }
         public AlarmEventItem EquipmentEmergencyStopAlarm { get; set; }
         public AlarmEventItem TransferJobStartFailedWarning { get; set; }
 
@@ -461,10 +461,10 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            EDWaferTypeUseCountWarning = SubscribeAlarm(new AlarmEventItem()
+            FDWaferTypeUseCountWarning = SubscribeAlarm(new AlarmEventItem()
             {
-                EventEnum = $"{Name}.EDWaferTypeUseCountWarning",
-                Description = $"ED wafer useCount warning ",
+                EventEnum = $"{Name}.FDWaferTypeUseCountWarning",
+                Description = $"FD wafer useCount warning ",
                 Solution = "No information available. Press[Clear] to delete alarm message.",
                 Explaination = "No information available.",
                 AutoRecovery = false,
@@ -473,10 +473,10 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            EDWaferTypeUseCountAlarm = SubscribeAlarm(new AlarmEventItem()
+            FDWaferTypeUseCountAlarm = SubscribeAlarm(new AlarmEventItem()
             {
-                EventEnum = $"{Name}.EDWaferTypeUseCountAlarm",
-                Description = $"ED wafer useCount alarm ",
+                EventEnum = $"{Name}.FDWaferTypeUseCountAlarm",
+                Description = $"FD wafer useCount alarm ",
                 Solution = "No information available. Press[Clear] to delete alarm message.",
                 Explaination = "No information available.",
                 AutoRecovery = false,
@@ -485,10 +485,10 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            EDWaferTypeUseTimeWarning = SubscribeAlarm(new AlarmEventItem()
+            FDWaferTypeUseTimeWarning = SubscribeAlarm(new AlarmEventItem()
             {
-                EventEnum = $"{Name}.EDWaferTypeUseTimeWarning",
-                Description = $"ED wafer useTime warning ",
+                EventEnum = $"{Name}.FDWaferTypeUseTimeWarning",
+                Description = $"FD wafer useTime warning ",
                 Solution = "No information available. Press[Clear] to delete alarm message.",
                 Explaination = "No information available.",
                 AutoRecovery = false,
@@ -497,10 +497,10 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            EDWaferTypeUseTimeAlarm = SubscribeAlarm(new AlarmEventItem()
+            FDWaferTypeUseTimeAlarm = SubscribeAlarm(new AlarmEventItem()
             {
-                EventEnum = $"{Name}.EDWaferTypeUseTimeAlarm",
-                Description = $"ED wafer useTime alarm ",
+                EventEnum = $"{Name}.FDWaferTypeUseTimeAlarm",
+                Description = $"FD wafer useTime alarm ",
                 Solution = "No information available. Press[Clear] to delete alarm message.",
                 Explaination = "No information available.",
                 AutoRecovery = false,
@@ -509,10 +509,10 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            EDWaferTypeThicknessWarning = SubscribeAlarm(new AlarmEventItem()
+            FDWaferTypeThicknessWarning = SubscribeAlarm(new AlarmEventItem()
             {
-                EventEnum = $"{Name}.EDWaferTypeThicknessWarning",
-                Description = $"ED wafer thickness warning ",
+                EventEnum = $"{Name}.FDWaferTypeThicknessWarning",
+                Description = $"FD wafer thickness warning ",
                 Solution = "No information available. Press[Clear] to delete alarm message.",
                 Explaination = "No information available.",
                 AutoRecovery = false,
@@ -521,10 +521,10 @@ namespace FurnaceRT.Equipments.Systems
                 Category = "SystemAlarm",
             }, () => { return true; });
 
-            EDWaferTypeThicknessAlarm = SubscribeAlarm(new AlarmEventItem()
+            FDWaferTypeThicknessAlarm = SubscribeAlarm(new AlarmEventItem()
             {
-                EventEnum = $"{Name}.EDWaferTypeThicknessAlarm",
-                Description = $"ED wafer thickness alarm ",
+                EventEnum = $"{Name}.FDWaferTypeThicknessAlarm",
+                Description = $"FD wafer thickness alarm ",
                 Solution = "No information available. Press[Clear] to delete alarm message.",
                 Explaination = "No information available.",
                 AutoRecovery = false,