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@@ -1232,8 +1232,8 @@
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</Dig_In>
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<Dig_Out>
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- <DO_ITEM Index="0" Name="DO_HPMValveOnOff" BufferOffset="48" Addr="D1003.0" Description="HPM valve on/off"/>
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- <DO_ITEM Index="1" Name="DO_O2ANALYZERPUMPOFF" BufferOffset="49" Addr="D1003.1" Description="O2_ANALYZER PUMP OFF"/>
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+ <!--<DO_ITEM Index="0" Name="DO_HPMValveOnOff" BufferOffset="48" Addr="D1003.0" Description="HPM valve on/off"/>
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+ <DO_ITEM Index="1" Name="DO_O2ANALYZERPUMPOFF" BufferOffset="49" Addr="D1003.1" Description="O2_ANALYZER PUMP OFF"/>-->
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<!--<DO_ITEM Index="18" Name="DO_WaferRobotReset" BufferOffset="342" Addr="D1021.6" Description="Wafer robot reset"/>-->
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@@ -1373,8 +1373,8 @@
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<DO_ITEM Index="233" Name="DO_LP2FOUPClamp" BufferOffset="1501" Addr="D1093.13" Description="loadport 2 FOUP clamp"/>
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<!--<DO_ITEM Index="234" Name="DO_LP2FOUPRelease" BufferOffset="1502" Addr="D1093.14" Description="loadport 2 FOUP release"/>-->
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- <DO_ITEM Index="300" Name="DO_loadport1E84REQ" BufferOffset="1504" Addr="D1094.00" Description="loadport 1 E84 REQ"/>
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- <DO_ITEM Index="300" Name="DO_loadport1E84UREQ" BufferOffset="1503" Addr="D1094.01" Description="loadport 1 E84 UREQ"/>
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+ <DO_ITEM Index="300" Name="DO_loadport1E84REQ" BufferOffset="1503" Addr="D1094.00" Description="loadport 1 E84 REQ"/>
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+ <DO_ITEM Index="300" Name="DO_loadport1E84UREQ" BufferOffset="1504" Addr="D1094.01" Description="loadport 1 E84 UREQ"/>
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<DO_ITEM Index="300" Name="DO_loadport1E84Ready" BufferOffset="1505" Addr="D1094.03" Description="loadport 1 E84 ready"/>
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<DO_ITEM Index="300" Name="DO_loadport1E84HOAVBL" BufferOffset="1508" Addr="D1094.06" Description="loadport 1 E84 HO_AVBL"/>
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<DO_ITEM Index="300" Name="DO_loadport1E84ES" BufferOffset="1509" Addr="D1094.07" Description="loadport 1 E84 ES"/>
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jiangjy