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git-svn-id: http://10.4.3.168:50001/svn/Furnace@79 dbcde07d-dcf5-c148-8a84-ac3097b7778e

Xiongbing 1 month ago
parent
commit
059f1fc2a0

+ 15 - 0
FrameworkLocal/RTEquipmentLibrary/Unit/IoTrigger.cs

@@ -1,5 +1,6 @@
 using System.Xml;
 using Aitex.Core.RT.DataCenter;
+using Aitex.Core.RT.Event;
 using Aitex.Core.RT.IOCore;
 
 namespace Aitex.Core.RT.Device.Unit
@@ -26,6 +27,20 @@ namespace Aitex.Core.RT.Device.Unit
 
         }
 
+        public bool CheckAndSet(bool value, out string reason)
+        {
+            reason = "";
+            if (_doTrigger != null && !_doTrigger.Check(value, out reason))
+            {
+                EV.PostMessage(Module, EventEnum.DefaultWarning, $"{(value ? "Open" : "Close")} :Failed for interlock " + reason);
+                return false;
+            }
+            _doTrigger?.SetValue(value, out reason);
+            if (_aoTrigger != null)
+                _aoTrigger.FloatValue = value ? 1 : 0;
+            return true;
+        }
+
         public bool Value
         {
             get

File diff suppressed because it is too large
+ 10098 - 9950
Furnace/FurnaceRT/Config/ELK/System.sccfg


+ 8 - 0
Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -1038,6 +1038,14 @@
 		<IoSensor id="SensorHREFILK" display="" di="DI_HREFILK"/>
 		<IoSensor id="SensorCREFILK" display="" di="DI_CREFILK"/>
 
+    <IoSensor id="SensorO2DetectSideLA" display="LA N2" di="NDI.O2_Detect_Side_LA"/>
+    <IoSensor id="SensorO2DetectSideFIMS1" display="Transfer Room FIMS1" di="NDI.O2_Detect_Side_FIMS1"/>
+    <IoSensor id="SensorO2DetectSideFIMS2" display="Transfer Room FIMS2" di="NDI.O2_Detect_Side_FIMS2"/>
+
+    <IoSensor id="SensorLADoorSw1" display="Transfer Room FIMS2" di="SDI.SL501_LA_door_sw1"/>
+    <IoSensor id="SensorLADoorSw2" display="Transfer Room FIMS2" di="SDI.SL502_LA_door_sw2"/>
+    <IoSensor id="SensorLADoorSw3" display="Transfer Room FIMS2" di="SDI.SL503_LA_door_sw3"/>
+
 	</IoSensors>
 
 	<IoTriggers >

File diff suppressed because it is too large
+ 9507 - 9327
Furnace/FurnaceRT/Config/System.sccfg


+ 8 - 6
Furnace/FurnaceRT/Devices/IoLP.cs

@@ -59,7 +59,7 @@ namespace FurnaceRT.Devices
         {
             get
             {
-                if(_isSimulatorMode)
+                if (_isSimulatorMode)
                     return CarrierManager.Instance.CheckHasCarrier(LPModuleName.ToString(), 0);
                 if (_diInPosition1 != null && _diInPosition2 != null && _diInPosition3 != null && _doPresenceLight != null)
                 {
@@ -195,9 +195,11 @@ namespace FurnaceRT.Devices
             if (ModuleHelper.IsLoadPort(ModuleHelper.Converter(Name)))
             {
                 var lpFoupInfo = CarrierManager.Instance.GetCarrier(Name);
-
-                SetVisibility(lpFoupInfo, !lpFoupInfo.IsEmpty);
-                Singleton<EquipmentManager>.Instance.SetUIWaferCount(lpFoupInfo, ModuleHelper.Converter(Name), out var wafers);
+                if (lpFoupInfo != null)
+                {
+                    SetVisibility(lpFoupInfo, !lpFoupInfo.IsEmpty);
+                    Singleton<EquipmentManager>.Instance.SetUIWaferCount(lpFoupInfo, ModuleHelper.Converter(Name), out var wafers);
+                }
             }
             if (_e84 == null)
                 _e84 = DEVICE.GetDevice<E84Passiver>($"{Name}.Loadport{Name.Replace("LP", "")}E84");
@@ -445,12 +447,12 @@ namespace FurnaceRT.Devices
 
         public void Reset()
         {
-           
+
         }
 
         public void Terminate()
         {
-            
+
         }
         //private bool SetExtend(out string reason, int time, object[] param)
         //{

+ 15 - 137
Furnace/FurnaceRT/Equipments/PMs/PMModuleDevice.cs

@@ -723,6 +723,20 @@ namespace FurnaceRT.Equipments.PMs
         public IoSensor SensorVACHFOK { get; set; }
         [Tag("SensorVACF2OK")]
         public IoSensor SensorVACF2OK { get; set; }
+
+        [Tag("SensorO2DetectSideLA")]
+        public IoSensor SensorO2DetectSideLA { get; set; }
+        [Tag("SensorO2DetectSideFIMS1")]
+        public IoSensor SensorO2DetectSideFIMS1 { get; set; }
+        [Tag("SensorO2DetectSideFIMS2")]
+        public IoSensor SensorO2DetectSideFIMS2 { get; set; }
+        [Tag("SensorLADoorSw1")]
+        public IoSensor SensorLADoorSw1 { get; set; }
+        [Tag("SensorLADoorSw2")]
+        public IoSensor SensorLADoorSw2 { get; set; }
+        [Tag("SensorLADoorSw3")]
+        public IoSensor SensorLADoorSw3 { get; set; }
+
         //[Tag("SensorNH3PressureOK")]
         //public IoAlarmSignal SignalLeak { get; set; }
 
@@ -1600,130 +1614,6 @@ namespace FurnaceRT.Equipments.PMs
                 //  SensorTHBreakOK,
             };
             //SensorLidClosed.OnSignalChanged += SensorLidClosed_OnSignalChanged;
-            _n2PurgeSequenceAction = new Dictionary<string, Tuple<R_TRIG, List<Tuple<IoValve, bool>>>>()
-            {
-                {"N2PurgeAIRTo20PPM",Tuple.Create(new R_TRIG(),
-                          new List<Tuple<IoValve, bool>>()
-                          {
-                              Tuple.Create(ValveAV56,true), //AV56
-                              Tuple.Create(ValveAV57,true),//AV57
-                              Tuple.Create(ValveAV65,false), //AV65
-                              Tuple.Create(ValveAV66,false),//AV66
-                              Tuple.Create(ValveLADamper,true), //AV227
-                          
-                              Tuple.Create(ValveAV58,false),//AV58
-                              Tuple.Create(ValveAV59,false),//AV59
-                              Tuple.Create(ValveFIMS1N2Purge,false), //AV63
-                              Tuple.Create(ValveFIMS2N2Purge,false), //AV64
-                              Tuple.Create(ValveSV61,false),//SV61
-                              Tuple.Create(ValveSV62,false),//SV62
-                            //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201
-                              Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202
-                          })
-                },
-                {"N2PurgeUnder20PPM",Tuple.Create(new R_TRIG(),
-                          new List<Tuple<IoValve, bool>>()
-                          {
-                              Tuple.Create(ValveAV56,true),//AV56
-                              Tuple.Create(ValveAV57,false),//AV57
-                              Tuple.Create(ValveAV65,false), //AV65
-                              Tuple.Create(ValveAV66,false),//AV66
-                              Tuple.Create(ValveLADamper,true), //AV227
-                           
-                              Tuple.Create(ValveAV58,false),//AV58
-                              Tuple.Create(ValveAV59,false),//AV59
-                              Tuple.Create(ValveFIMS1N2Purge,false), //AV63
-                              Tuple.Create(ValveFIMS2N2Purge,false), //AV64
-                              Tuple.Create(ValveSV61,false),//SV61
-                              Tuple.Create(ValveSV62,false),//SV62
-                            //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201
-                              Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202
-                          })
-                },
-                {"AIR",Tuple.Create(new R_TRIG(),
-                          new List<Tuple<IoValve, bool>>()
-                          {
-                              Tuple.Create(ValveAV56,false),
-                              Tuple.Create(ValveAV57,false),
-                              Tuple.Create(ValveAV65,true), //AV65
-                              Tuple.Create(ValveAV66,true),
-                              Tuple.Create(ValveLADamper,true), //AV227
-                          
-                              Tuple.Create(ValveAV58,false),
-                              Tuple.Create(ValveAV59,false),
-                              Tuple.Create(ValveFIMS1N2Purge,false), //AV63
-                              Tuple.Create(ValveFIMS2N2Purge,false), //AV64
-                              Tuple.Create(ValveSV61,false),
-                              Tuple.Create(ValveSV62,false),
-                              //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,true), //AV201
-                              Tuple.Create(ValveLABacksideDoorCylinderControl,true),//V202
-                          })
-                },
-                {"DoorOpen",Tuple.Create(new R_TRIG(),
-                          new List<Tuple<IoValve, bool>>()
-                          {
-                              Tuple.Create(ValveAV56,false),
-                              Tuple.Create(ValveAV57,false),
-                              Tuple.Create(ValveAV65,true), //AV65
-                              Tuple.Create(ValveAV66,true),
-                              Tuple.Create(ValveLADamper,false), //AV227
-                              Tuple.Create(ValveAV58,false),
-                              Tuple.Create(ValveAV59,false),
-                              Tuple.Create(ValveFIMS1N2Purge,false), //AV63
-                              Tuple.Create(ValveFIMS2N2Purge,false), //AV64
-                              Tuple.Create(ValveSV61,false),
-                              Tuple.Create(ValveSV62,false),
-                              //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,true), //AV201
-                              Tuple.Create(ValveLABacksideDoorCylinderControl,true),//V202
-                          })
-                },
-                {"Foup1",Tuple.Create(new R_TRIG(),
-                          new List<Tuple<IoValve, bool>>()
-                          {
-                              Tuple.Create(ValveAV56,true),
-                              Tuple.Create(ValveAV57,false),
-                              Tuple.Create(ValveAV65,false), //AV65
-                              Tuple.Create(ValveAV66,false),
-                              Tuple.Create(ValveLADamper,true), //AV227
-                              Tuple.Create(ValveAV58,true),
-                              Tuple.Create(ValveAV59,false),
-                              Tuple.Create(ValveFIMS1N2Purge,true), //AV63
-                              Tuple.Create(ValveFIMS2N2Purge,false), //AV64
-                              Tuple.Create(ValveSV61,true),
-                              Tuple.Create(ValveSV62,false),
-                              //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201
-                              Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202
-                          })
-                },
-                {"Foup2",Tuple.Create(new R_TRIG(),
-                          new List<Tuple<IoValve, bool>>()
-                          {
-                              Tuple.Create(ValveAV56,true),
-                              Tuple.Create(ValveAV57,false),
-                              Tuple.Create(ValveAV65,false), //AV65
-                              Tuple.Create(ValveAV66,false),
-                              Tuple.Create(ValveLADamper,true), //AV227
-                           
-                              Tuple.Create(ValveAV58,false),
-                              Tuple.Create(ValveAV59,true),
-                              Tuple.Create(ValveFIMS1N2Purge,false), //AV63
-                              Tuple.Create(ValveFIMS2N2Purge,true), //AV64
-                              Tuple.Create(ValveSV61,true),
-                              Tuple.Create(ValveSV62,true),
-                              //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201
-                              Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202
-                          })
-                },
-            };
-            _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
-            {
-                {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
-                {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
-                {"AIR",()=> GetN2PurgeAIRStatus()},
-                {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
-                {"Foup1",()=> GetN2PurgeFoup1Status()},
-                {"Foup2",()=> GetN2PurgeFoup2Status()},
-            };
 
             TrigFurnaceUZoneHeatingEnable.SetTrigger(true, out _);
             TrigFurnaceCUZoneHeatingEnable.SetTrigger(true, out _);
@@ -1732,6 +1622,7 @@ namespace FurnaceRT.Equipments.PMs
             TrigFurnaceLZoneHeatingEnable.SetTrigger(true, out _);
             MINI8AlarmReset?.Reset();
             PLCCPUReset?.Reset();
+            InitN2PurgeConfigData();
         }
 
         private void SensorLidClosed_OnSignalChanged(IoSensor sender, bool isTriggered)
@@ -2452,19 +2343,6 @@ namespace FurnaceRT.Equipments.PMs
 
         //#endregion
 
-        private bool SetN2PurgeMode(out string reason, int time, object[] param)
-        {
-            reason = string.Empty;
-            var mode = param[0].ToString();
-            _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
-
-            if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
-            {
-                SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
-            }
-
-            return true;
-        }
         private void SetHeaterControlParameters(object[] param)
         {
             //Mode参数;Correct Table;PID Table

+ 250 - 47
Furnace/FurnaceRT/Equipments/PMs/PMN2Purge.cs

@@ -1,51 +1,251 @@
-using Aitex.Core.Common.DeviceData;
+using Aitex.Core.RT.DataCenter;
 using Aitex.Core.RT.Device;
 using Aitex.Core.RT.Device.Unit;
-using Aitex.Core.RT.Event;
+using Aitex.Core.RT.Log;
+using Aitex.Core.RT.SCCore;
 using Aitex.Core.Util;
-using Aitex.Core.Utilities;
-using MECF.Framework.Common.Event;
-using System;
-using System.Collections.Generic;
-using System.Linq;
-using System.Reflection;
-using MECF.Framework.Common.SubstrateTrackings;
-using Aitex.Core.Common;
-using FurnaceRT.Equipments.Systems;
-using Aitex.Core.RT.IOCore;
-using MECF.Framework.Common.Equipment;
-using MECF.Framework.RT.Core.IoProviders;
-using MECF.Framework.Common.Device.Bases;
-using FurnaceRT.Equipments.Boats;
-using IoHeater = FurnaceRT.Devices.IoHeater;
-using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;
 using FurnaceRT.Devices;
-using Aitex.Core.RT.Log;
 using FurnaceRT.Equipments.PMs.Devices;
-using Aitex.Core.RT.SCCore;
+using FurnaceRT.Extraction;
 using MECF.Framework.Common.CommonData.SorterDefines;
+using MECF.Framework.Common.Equipment;
+using System;
+using System.Collections.Generic;
 
 namespace FurnaceRT.Equipments.PMs
 {
+    /// <summary>
+    /// 分布类 定义N2Purge的执行逻辑
+    /// </summary>
     public partial class PMModule
     {
+        private R_TRIG _trigN2UpRD = new R_TRIG();
+        private R_TRIG _trigN2DownRD = new R_TRIG();
+        private R_TRIG _trigN2AirUpRD = new R_TRIG();
+        private R_TRIG _trigN2AirDownRD = new R_TRIG();
+        private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
 
-
-        private Dictionary<string, Tuple<R_TRIG, List<Tuple<IoValve, bool>>>> _n2PurgeSequenceAction;
+        private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
         private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
         private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
+        private double _n2PurgeData = 20;
+        private double _n2ToAirData = 185000;
+        private void InitN2PurgeData()
+        {
+            DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
+            DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
+            DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
+
+            DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : ""); 
+        }
+        private void InitN2PurgeConfigData()
+        {
+            _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
+            _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
+
+            _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
+            _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
+            {
+                {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
+                {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
+                {"AIR",()=> GetN2PurgeAIRStatus()},
+                {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
+                {"Foup1",()=> GetN2PurgeFoup1Status()},
+                {"Foup2",()=> GetN2PurgeFoup2Status()},
+
+                {N2PurgeModeEnum.Manual_phase1.ToString(),()=>  GetN2PurgePhase1() },
+                {N2PurgeModeEnum.Manual_phase2.ToString(),()=>  GetN2PurgePhase2()},
+                {N2PurgeModeEnum.Manual_phase3.ToString(),()=>  GetN2PurgePhase3() },
+                {N2PurgeModeEnum.Manual_phase4.ToString(),()=>  GetN2PurgePhase4() },
+
+            };
+        }
+        private void MonitorN2Purge()
+        {
+            var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
+            if (string.IsNullOrEmpty(selectN2PurgeMode))
+            {
+                return;
+            }
+            SetN2PurgeModeAction(selectN2PurgeMode);
+        }
+
+        private void SetN2PurgeModeAction(string selectN2PurgeMode)
+        {
+            _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
+
+            switch (_N2PurgeMode)
+            {
+                case N2PurgeModeEnum.Auto:
+                    // 自动模式下的操作
+                    break;
+                case N2PurgeModeEnum.ManualMode:
+                    break;
+                case N2PurgeModeEnum.N2PurgeMode:
+
+                    ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
+                    ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString());
+                    break;
+                case N2PurgeModeEnum.ATMMode:
+
+                    ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
+                    ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString());
+                    break;
+            }
+
+        }
+
+        private void ProcessPhase(R_TRIG r_TRIG, string modeKey)
+        {
+            r_TRIG.CLK = _n2PurgeSequenceStatus[modeKey].Invoke();
+            if (r_TRIG.Q)
+            {
+                LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()}");
+                SetN2PurgeValveData(modeKey);
+            }
+
+        }
+        public void RestAllN2PrugeRD()
+        {
+            _trigN2AirDownRD.RST = false;
+            _trigN2AirUpRD.RST = false;
+            _trigN2DownRD.RST = false;
+            _trigN2UpRD.RST = false;
+        }
+        private void SetN2PurgeValveData(string mode)
+        {
+            var value = _n2PurgeSequenceAction[mode];
+
+            foreach (var operateItem in value.Item2)
+            {
+                if (operateItem.Item1 is IoMFC)
+                {
+                    var ioMFc = (operateItem.Item1 as IoMFC);
+                    ioMFc.SetPoint = float.Parse(operateItem.Item2.ToString());
+                }
+
+                if (operateItem.Item1 is IoValve)
+                {
+                    var ioValve = (operateItem.Item1 as IoValve);
+
+                    ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
+                }
+                if (operateItem.Item1 is IoTrigger)
+                {
+                    var ioTrigger = (operateItem.Item1 as IoTrigger);
+
+                    ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
+                }
+            }
+
+
+        }
+
+        private bool SetN2PurgeMode(out string reason, int time, object[] param)
+        {
+            reason = string.Empty;
+            var mode = param[0].ToString();
+            _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
+
+            if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
+            {
+                SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
+            }
+            RestAllN2PrugeRD();
+            return true;
+        }
+
+        /// <summary>
+        /// 获取当前O2检测位置的设定值
+        /// </summary>
+        /// <returns></returns>
+        private string GetO2SetCheckSetPoint()
+        {
+            if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
+            {
+                var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
+                if (SC.ContainsItem(key))
+                    return SC.GetValue<double>(key).ToString("f3");
+            }
+
+            if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
+            {
+                var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
+                if (SC.ContainsItem(key))
+                    return SC.GetValue<double>(key).ToString("f3");
+            }
+            return "";
+        }
+        /// <summary>
+        /// 获取当前O2检测位置
+        /// </summary>
+        /// <returns></returns>
+        private string GetCheckO2Location()
+        {
+            if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
+                return SensorO2DetectSideLA.Display;
+
+            if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
+                return SensorO2DetectSideFIMS1.Display;
+
+            if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
+                return SensorO2DetectSideFIMS2.Display;
+
+            return "";
+        }
+        /// <summary>
+        /// 获取当前O2浓度
+        /// </summary>
+        /// <returns></returns>
+        private string GetO2DensityData()
+        {
+            var result = "";
+
+            result = ConcentrationO2.FeedBack.ToString("f3");
+            return result;
+        }
+        private double GetO2Density()
+        {
+
+            return ConcentrationO2.FeedBack;
+        }
+        private bool GetN2PurgePhase1()
+        {
+            return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
+        }
+        private bool GetN2PurgePhase2()
+        {
+            return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
+        }
+        private bool GetN2PurgePhase3()
+        {
+            return GetLADoorOpenStatus();
+        }
+        private bool GetN2PurgePhase5()
+        {
+            return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
+        }
+        private bool GetN2PurgePhase4()
+        {
+            return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
+        }
         private bool GetN2PurgeAIRTo20PPMStatus()
         {
             return ValveLABacksideDoorCylinderControl.DOOpen.Value;
         }
-        private bool GetN2PurgeUnder20PPMStatus()
+        private bool GetN2PurgeUnder20PPMStatus(double value = 20)
         {
-            return ConcentrationO2.Value < 20;
+
+            return ConcentrationO2.Value < value;
         }
         private bool GetN2PurgeAIRStatus()
         {
             return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
         }
+        private bool GetLADoorOpenStatus()
+        {
+            return (bool)(SensorLADoorSw1?.Value) && (bool)(SensorLADoorSw2?.Value) && (bool)(SensorLADoorSw3?.Value);
+        }
         private bool GetN2PurgeDoorOpenStatus()
         {
             return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
@@ -58,46 +258,34 @@ namespace FurnaceRT.Equipments.PMs
         {
             return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
         }
-        private void MonitorN2Purge()
-        {
-            if (_N2PurgeMode !=  N2PurgeModeEnum.Auto)
-                return;
-            if (_n2PurgeSequenceAction != null && _n2PurgeSequenceStatus != null)
-            {
-                foreach (var key in _n2PurgeSequenceAction.Keys)
-                {
-                    var value = _n2PurgeSequenceAction[key];
-                    value.Item1.CLK = _n2PurgeSequenceStatus[key].Invoke();
-                    if (value.Item1.Q && value.Item2 != null)
-                    {
-                        LOG.Write($"N2 purge sequence trig: {key}");
-                        //EV.PostWarningLog("System",$"N2 purge sequence trig: {key}");
-                        foreach (var valve in value.Item2)
-                        {
-                            if (valve.Item1.Status != valve.Item2)
-                                valve.Item1.TurnValve(valve.Item2, out _);
-                        }
-                    }
-                }
-            }
-        }
+
+
         public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
         {
             if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
+            {
                 TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
+            }
         }
         public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
         {
             if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
+            {
                 TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
+            }
 
             if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
+            {
                 TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
+
+            }
         }
         public void SetN2PurgeProcess(bool isEable)
         {
             if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
+            {
                 TrigN2PurgeProcess.SetTrigger(isEable, out _);
+            }
         }
         public void SetN2PurgeLAO2CheckSV(float value)
         {
@@ -110,6 +298,21 @@ namespace FurnaceRT.Equipments.PMs
                 TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
         }
 
+        public void SetAVParameter(ModuleName fims, bool isEable)
+        {
+            if (fims == ModuleName.FIMS1)
+            {
+                var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
+                avValve58?.TurnValve(isEable, out _);
+            }
+
+            if (fims == ModuleName.FIMS2)
+            {
+                var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
+                avValve59?.TurnValve(isEable, out _);
+            }
+
+        }
         /// <summary>
         /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
         /// </summary>

+ 201 - 0
Furnace/FurnaceRT/Extraction/ExtractionMethods.cs

@@ -0,0 +1,201 @@
+using Aitex.Common.Util;
+using Aitex.Core.Common.DeviceData;
+using Aitex.Core.RT.Device;
+using Aitex.Core.RT.Device.Unit;
+using Aitex.Core.RT.Routine;
+using Aitex.Core.Util;
+using FurnaceRT.Equipments.PMs.Devices;
+using FurnaceRT.Instances;
+using HslCommunication.Profinet.Panasonic;
+using System;
+using System.Collections.Generic;
+using System.IO;
+using System.Linq;
+using System.Text;
+using System.Threading.Tasks;
+using System.Xml;
+using System.Xml.Linq;
+
+namespace FurnaceRT.Extraction
+{
+    /// <summary>
+    /// RT模块中重复方法抽离
+    /// </summary>
+    public class ExtractionMethods
+    {
+        public static string systemSCFile = PathManager.GetCfgDir() + $"System.sccfg";       
+        public static Dictionary<string, List<string>> AllNameKeyDict = new Dictionary<string, List<string>>();
+        public static Dictionary<string, IoValve> RecipeExecIoValve = new Dictionary<string, IoValve>() { };
+        public static Dictionary<string, IoMFC> RecipeExecIoMFC = new Dictionary<string, IoMFC>() { };
+
+        /// <summary>
+        /// 解析DeviceModelDefine文件 指定类型节点下的ids
+        /// </summary>
+        /// <returns></returns>
+        public static Dictionary<string, List<string>> GetNameKeyDict(List<string> typeNames)
+        {
+            Dictionary<string, List<string>> result = new Dictionary<string, List<string>>();
+            foreach (string name in typeNames)
+            {
+                if (result.ContainsKey(name)) continue;
+                result.Add(name, new List<string>());
+            }
+
+            GetXmlElement("DeviceModelPM", result);
+            GetXmlElement("DeviceModelHeater", result, true);
+            GetXmlElement("DeviceModelGasLine", result);
+            return result;
+        }
+        public static void GetXmlElement(string fileName, Dictionary<string, List<string>> result, bool isSystem = false)
+        {
+            XmlDocument xmlDoc = new XmlDocument();
+            var cfDirPath = PathManager.GetCfgDir();
+            var path = cfDirPath + $"IO\\{fileName}.xml";
+            if (!File.Exists(path)) return;
+            xmlDoc.Load(path);
+            XmlNode node = xmlDoc.SelectSingleNode("DeviceModelDefine");
+            foreach (XmlNode item in node.ChildNodes)
+            {
+                if (item.NodeType != XmlNodeType.Element) continue;
+                var element = item as XmlElement;
+                var classType = element.GetAttribute("classType");
+                if (classType == null) continue;
+                classType = classType.Split('.').LastOrDefault();
+                if (!result.Keys.Contains(classType)) continue;
+                foreach (XmlNode children in item.ChildNodes)
+                {
+                    if (children is XmlElement childElement)
+                    {
+                        if (result[classType].Contains(childElement.GetAttribute("id"))) continue;
+                        var key = isSystem ? $"System.{childElement.GetAttribute("id")}.DeviceData" : $"PM1.{childElement.GetAttribute("id")}.DeviceData";
+                        result[classType].Add(key);
+                    }
+                }
+            }
+
+        }
+        public static void InitRecipeIoValve()
+        {
+            XmlDocument xmlDoc = new XmlDocument();
+            var cfDirPath = PathManager.GetCfgDir();
+            var path = cfDirPath + $"GasXml\\GasViewXml.xml";
+            if (!File.Exists(path))
+            {
+                return;
+            }
+            xmlDoc.Load(path);
+            XmlNodeList boolConditions = xmlDoc.SelectNodes("//BoolCondition");
+
+            if (boolConditions == null)
+                return;
+
+            foreach (XmlNode condition in boolConditions)
+            {
+                if (string.IsNullOrEmpty(condition.InnerText) || !condition.InnerText.Contains("Valve") || condition.InnerText.Contains("ILKValue"))
+                    continue;
+                var cleanedString = new string(condition.InnerText.Where(c => !char.IsWhiteSpace(c)).ToArray());
+
+                var valveName = cleanedString.Replace("return", "").Trim().Split('.')[1];
+
+                if (RecipeExecIoValve.ContainsKey(valveName))
+                    continue;
+
+                IDevice device = DEVICE.GetDevice<IDevice>($"PM1.{valveName}");
+                if (device == null)
+                    continue;
+
+                RecipeExecIoValve.Add(valveName, device as IoValve);
+            }
+
+        }
+        public static void InitRecipeIoMFC()
+        {
+            XmlDocument xmlDoc = new XmlDocument();
+            var cfDirPath = PathManager.GetCfgDir();
+            var path = cfDirPath + $"GasXml\\GasViewXml.xml";
+            if (!File.Exists(path))
+            {
+                return;
+            }
+            XDocument doc = XDocument.Load(path);
+
+            // 查找Analogs节点下的所有Analog节点
+            var analogs = doc.Descendants("Analog");
+            foreach (var analog in analogs)
+            {
+                // 检查Analog节点的Enable属性是否为True
+                if (analog.Attribute("Enable")?.Value == "True")
+                {
+                    var topButton = analog.Element("TopButton");
+                    if (topButton != null)
+                    {
+                        var innerText = topButton.Element("InnerText");
+                        if (innerText != null)
+                        {
+                            string textContent = innerText.Attribute("Text")?.Value;
+                            var mfcName = $"MFC{textContent}";
+                            if (RecipeExecIoMFC.ContainsKey(mfcName))
+                            {
+                                continue;
+                            }
+                            IDevice device = DEVICE.GetDevice<IDevice>($"PM1.{mfcName}");
+                            if (device == null)
+                                continue;
+
+                            RecipeExecIoMFC.Add(mfcName, device as IoMFC);
+                        }
+                    }
+                }
+            }
+
+        }
+        /// <summary>
+        /// 根据xml配置获取N2PurgeSequenceAction配置
+        /// </summary>
+        /// <returns></returns>
+        public static Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> GetN2PurgeSequenceAction()
+        {
+            Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> result = new Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>>();
+
+            XDocument doc = XDocument.Load(ExtractionMethods.systemSCFile);
+            var pmNode = doc.Root.Elements("configs")
+                .Where(x => (string)x.Attribute("name") == "PM1")
+                .FirstOrDefault();
+            var nameGroup = pmNode.Elements("configs")
+                .Where(x => (string)x.Attribute("name") == "N2Purge")
+                .FirstOrDefault()
+                .Elements("configs")
+                .GroupBy(a => (string)a.Attribute("name"));
+            var pM1N2PurgeNodeChildren = nameGroup.ToDictionary(a => a.Key, a => a.ToList().FirstOrDefault());
+            foreach (var xmlItem in pM1N2PurgeNodeChildren)
+            {
+                var configElements = xmlItem.Value.Elements("config").ToList();
+                var resultItem = new List<Tuple<IDevice, string>>();
+
+                foreach (var valveConfig in configElements)
+                {
+                    if (valveConfig != null &&
+                        valveConfig.Attribute("name") != null &&
+                        valveConfig.Attribute("default") != null)
+                    {
+                        string name = (string)valveConfig.Attribute("name");
+                        var defaultValue = (string)valveConfig.Attribute("default");
+
+                        var deviceItem = DEVICE.GetDevice<IDevice>($"PM1.{name}");
+                        if (deviceItem == null)
+                            continue;
+
+                        var item = Tuple.Create(deviceItem, defaultValue);
+                        resultItem.Add(item);
+
+
+                    }
+                }
+
+                result.Add(xmlItem.Key, Tuple.Create(new R_TRIG(), resultItem));
+            }
+            return result;
+        }
+
+    }
+}

+ 1 - 0
Furnace/FurnaceRT/FurnaceRT.csproj

@@ -249,6 +249,7 @@
     <Compile Include="Equipments\WaferRobots\WaferRobotSwap.cs" />
     <Compile Include="Equipments\WaferRobots\WaferRobotPick.cs" />
     <Compile Include="Equipments\WaferRobots\WaferRobotPlace.cs" />
+    <Compile Include="Extraction\ExtractionMethods.cs" />
     <Compile Include="FAs\VIDMap.cs" />
     <Compile Include="Properties\Annotations.cs" />
     <Compile Include="Equipments\PMs\RecipeExecutions\FurnaceRecipeFileContext.cs" />