Electrical/TIN001/PLC/DUTs/_01_DUTs_PMC_PLC/dut_Interlock.TcDUT

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <DUT Name="dut_Interlock" Id="{c0c9242d-05f2-4d52-b8f3-3b0e8e4e08ce}">
    <Declaration><![CDATA[TYPE dut_Interlock :
STRUCT
	Alarm1		: BOOL;	// N2-8 pressure low
	Alarm2		: BOOL;	// N2-1 pressure low or high
	Alarm3		: BOOL;	// NH3-1 pressure low or high
	Alarm4		: BOOL;	// NH3-2 pressure low or high
	Alarm5		: BOOL;	// SiH4 pressure low or high
	Alarm6		: BOOL;	// N2-2 pressure low or high
	Alarm7		: BOOL;	// NF3 pressure low or high
	Alarm8		: BOOL;	// 20%F2/N2 pressure low or high
	Alarm9		: BOOL;	// N2-9 pressure low or high
	Alarm10		: BOOL;	// N2-10 pressure low or high
	Alarm11		: BOOL;	// N2-11 pressure low or high
	Alarm12		: BOOL;	// N2-13 pressure low or high
	Alarm13		: BOOL;	// LSC tank over pressure
	Alarm14		: BOOL;	// TI tank over pressure
	Alarm15		: BOOL;	// NH3-1 tank over pressure
	Alarm16		: BOOL;	// Vacuum pressure low
	Alarm17		: BOOL;	// air/N2-1 pressure low
	Alarm18		: BOOL;	// N2-4 pressure low
	Alarm19		: BOOL;	// N2-5 pressure low
	Alarm20		: BOOL;	// N2-6 pressure low
	Alarm21		: BOOL;	// NH3-2 tank over pressure
	Alarm22		: BOOL;	// gas box lower and upper exhaust pressure low
	Alarm23		: BOOL;	// Scavenger exhaust pressure low
	Alarm24		: BOOL;	// Heater exhaust pressure low
	Alarm25		: BOOL;	// RHC pressure low
	Alarm26		: BOOL;	// Z purge in LSC-1 pressure
	Alarm27		: BOOL;	// Gas box lower an upper exhaust pressure low
	Alarm28		: BOOL;	// Abnormal diaphragm sensor reading value
	Alarm29		: BOOL;	// spare
	Alarm30		: BOOL;	// Abnormal furnace port cap seal level
	Alarm31		: BOOL;	// Heater exceeds the upper limit
	Alarm32		: BOOL;	// Heater room temperature high
	Alarm33		: BOOL;	// spare
	Alarm34		: BOOL;	// Heater transformer temperature high
	Alarm35		: BOOL;	// spare
	Alarm36		: BOOL;   // AC100V transformer temperature high
	Alarm37		: BOOL;   // spare
	Alarm38		: BOOL;	// spare
	Alarm39		: BOOL;	// N2 does not flow in each foup
	Alarm40		: BOOL;	// Exhaust pressure high
	Alarm41		: BOOL;	// Power down detected
	Alarm42		: BOOL;	// Front door kept open
	Alarm43		: BOOL;	// Transfer room door kept open
	Alarm44		: BOOL;	// Heater room door kept open
	Alarm45		: BOOL;	// Heater power down
	Alarm46		: BOOL;	// spare
	Alarm47		: BOOL;	// Pump down
	Alarm48		: BOOL;	// Pump alarm
	Alarm49		: BOOL;	// Pump warning
	Alarm50		: BOOL;	// spare
	Alarm51		: BOOL;	// NH3 leak detection
	Alarm52		: BOOL;	// SiH4 leak detection
	Alarm53		: BOOL;	// HCL leak detection
	Alarm54		: BOOL;	// Diaphgram sensor-VG11 negative value
	Alarm55		: BOOL;	// Diaphgram sensor-VG13 negative value
	Alarm56		: BOOL;	// Diaphgram sensor-VG14 negative value
	Alarm57		: BOOL;	// APC alarm
	Alarm58		: BOOL;	// Too high furnace pressure
	Alarm59		: BOOL;	// Main cooling water flow low
	Alarm60		: BOOL;	// Cooling water flow low
	Alarm61		: BOOL;	// NF3 gas leak detection
	Alarm62		: BOOL;	// 20%F2/N2 leak detection
	Alarm63		: BOOL;	// scrubber NG DEPO
	Alarm64		: BOOL;	// scrubber NG CLN
	Alarm65		: BOOL;	// FFU stop
	Alarm66		: BOOL;	// SPARE
	Alarm67		: BOOL;	// Loading area differential pressure abnormal
	Alarm68		: BOOL;	// Clean unit temperature high
	Alarm69		: BOOL;	// Differential pressure NG-DG1
	Alarm70		: BOOL; // RHC flow low
	Alarm71		: BOOL;	// RHC damper abnormal position
	Alarm72		: BOOL;	// Blower overload
	Alarm73		: BOOL;	// RHC cooling water bypass line flow low/damper position abnormal in energy-saving mode
	Alarm74		: BOOL;	// Cooling water pressure low
	Alarm75		: BOOL;	// TI tank refll incorrect
	Alarm76		: BOOL;	// Abnormal float sw position in TI tank
	Alarm77		: BOOL;	// N2-7 pressure low or high
	Alarm78		: BOOL;	// N2-70 pressure low or high
	Alarm79		: BOOL;	// Vent exhaust pressure high
	Alarm80		: BOOL;	// Gas box door kept open
	Alarm81		: BOOL;	// Magnetic leak
	Alarm82		: BOOL;	// Heater room leak
	Alarm83		: BOOL;	// Loading area leak
	Alarm84		: BOOL;	// Exhaust box main leak
	Alarm85		: BOOL;	// SPARE
	Alarm86		: BOOL;	// RHC leak
	Alarm87		: BOOL;	// Exhaust box sup leak
	Alarm88		: BOOL;	// O2 analyzer fault
	Alarm89		: BOOL;	// Heater contactor tripped
	Alarm90		: BOOL;	// AC100V transformer contactor tripped
	Alarm91		: BOOL;	// gas box door kept open
	Alarm92		: BOOL;	// spare
	Alarm93		: BOOL;	// spare
	Alarm94		: BOOL;	// failure of exhaust pressure sensor
	Alarm95		: BOOL;	// Transfer room EMS
	Alarm96		: BOOL;	// Furnace pressure is below ATM pressure
	Alarm97		: BOOL; // Front body exhaust pressure low
	Alarm98		: BOOL;	// Gage valve position error
	Alarm99		: BOOL;	// LSC heater temperature abnormal
	Alarm100	: BOOL;	// Gas line heater temperature abnormal
	Alarm101	: BOOL;	// Exhaust line heater temperature abnormal
	Alarm102	: BOOL;	// VG11/13/14 heater temperature abnormal
	Alarm103	: BOOL;	// Seal cap heater temperature high
	Alarm104	: BOOL;	// spare
	Alarm105	: BOOL;	// Furnace & exhaust line heater temperature beyond a preset value
	Alarm106	: BOOL;	// Intake damper position abnormal
	Alarm107	: BOOL;	// ATM damper position abnormal
	Alarm108	: BOOL;	// Cycle damper position abnormal
	Alarm109	: BOOL;	// LSC tank level HH
	Alarm110	: BOOL;	// LSC tank level H
	Alarm111	: BOOL;	// LSC tank level M
	Alarm112	: BOOL;	// LSC tank level L
	Alarm113	: BOOL;	// LSC leak
	Alarm114	: BOOL;	// spare
	Alarm115	: BOOL;	// sspare
	Alarm116	: BOOL;	// HPM interlock
	Alarm117	: BOOL;	// Scrubber alarm
	Alarm118	: BOOL;	// Foreline heater alarm
	Alarm119	: BOOL;	// Scrubber warning
	Alarm120	: BOOL;	// spare
	Alarm121	: BOOL;	// Customer's auto refill alarm
	Alarm122	: BOOL;	// Customer's auto refill warning
	Alarm123	: BOOL;	// Customer's auto refill bulk empty(not ready)
	Alarm124	: BOOL;	// Gas detector trouble
	Alarm125	: BOOL;	// External EMO in
	Alarm126	: BOOL;	// spare
	Alarm127	: BOOL;	// spare
	Alarm128	: BOOL;	// spare
	Alarm129	: BOOL;	// spare
	Alarm130	: BOOL;	// spare
	Alarm131	: BOOL;	// spare
	Alarm132	: BOOL;	// spare
	Alarm133	: BOOL;	// spare
	Alarm134	: BOOL;	// spare
	Alarm135	: BOOL;	// spare
	Alarm136	: BOOL;	// spare
	Alarm137	: BOOL;	// spare
	Alarm138	: BOOL;	// spare
	Alarm139	: BOOL;	// spare
	Alarm140	: BOOL;	// spare
	Alarm141	: BOOL;	// spare
	Alarm142	: BOOL;	// spare
	Alarm143	: BOOL;	// spare
	Alarm144	: BOOL;	// spare
	Alarm145	: BOOL;	// spare
	Alarm146	: BOOL;	// spare
	Alarm147	: BOOL;	// spare
	Alarm148	: BOOL;	// spare
	Alarm149	: BOOL;	// spare
	Alarm150	: BOOL;	// spare
	
END_STRUCT
END_TYPE
]]></Declaration>
  </DUT>
</TcPlcObject>