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-<?xml version="1.0" encoding="utf-8"?>
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-<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
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- <DUT Name="dut_PMC_to_PLC" Id="{1cd26958-5996-4385-8531-55448b6ad03a}">
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- <Declaration><![CDATA[TYPE dut_PMC_to_PLC :
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-STRUCT
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- bHeartBeatMonitor : BOOL;
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-
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- // UI switch
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- DP_sw ,
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- BWR_sw ,
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- DPR1_sw ,
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- DPR2_sw ,
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- WAT_R_sw ,
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- WAT_F_sw ,
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- HTR1_sw ,
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- HTR2_sw ,
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- HTR3_sw ,
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- HTR4_sw ,
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- HTR5_sw ,
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- AGV_sw ,
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- DEPO_sw ,
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- CLN_sw ,
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- T_MNT_sw ,
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- T_REF_sw ,
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- Pump1_ECO_sw ,
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- SP1_sw ,
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- PZ_sw ,
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- P_CONT_sw ,
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- DGZERO_sw ,
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- C_EXH_sw ,
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- F2_CLN_sw ,
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- F_N_sw ,
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- GV_AV79_Open ,
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- GV_AV79_Close ,
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- APC_AV71_Open ,
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- APC_AV71_Close
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- : BOOL;
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-
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- aAV : ARRAY[1..250] OF BOOL;
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- bAV65Open : BOOL;
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- bAV65Close : BOOL;
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- bAV79Open : BOOL;
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- bAV79Close : BOOL;
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- bAV91Open : BOOL;
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- bAV91Close : BOOL;
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- bAV202Open : BOOL;
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- bAV202Close : BOOL;
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-
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- //heater
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- Furnace_Temp_abnormal : BOOL; // Furnace temp over 1000℃
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- LSC_Ht_temp_abnormal : BOOL; // LSC heater temperature beyond preset value
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- GB_Ht_temp_abnormal : BOOL; // Gas line heater temperature beyond preset value
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- EXH_Ht_temp_abnormal : BOOL; // Exhaust line heater temperature beyond preset value
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- CLN_Temp_abnormal : BOOL; // furnace&exhaust line heater temperature beyond preset value
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- R_Axis_Temp : REAL; // R axis temperature
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- Inlet_Ht_1_temp : REAL; // Inlet heater 1 temperature
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- Inlet_Ht_2_temp : REAL; // Inlet heater 2 temperature
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- Port_Ht_1_temp : REAL; // Port heater 1 temperature
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- Port_Ht_2_temp : REAL; // Port heater 2 temperature
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- Port_Ht_3_temp : REAL; // Port heater 3 temperature
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- Port_Ht_4_temp : REAL; // Port heater 4 temperature
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- Port_Ht_5_temp : REAL; // Port heater 5 temperature
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-
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- //Power box
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- I100_00 :BOOL; // UPS_Fault
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- I100_01 :BOOL; // UPS_Alarm
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- I100_02 :BOOL; // UPS_Bypass_Status
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- I100_03 :BOOL; // UPS_Battery_Voltage_Low
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- I100_04 :BOOL; // UPS_Start
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- I100_05 :BOOL; // UPS_AC_Input_Cut_Off
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- I100_06 :BOOL; // Powerbox_FrontDoor_sw1
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- I100_07 :BOOL; // Powerbox_FrontDoor_sw2
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- I100_08 :BOOL; // Powerbox_BackDoor_sw1
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- I100_09 :BOOL; // Powerbox_BackDoor_sw2
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- I100_10 :BOOL; // Spare11
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- I100_11 :BOOL; // Spare12
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- I100_12 :BOOL; // Spare13
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- I100_13 :BOOL; // Spare14
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- I100_14 :BOOL; // Spare15
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- I100_15 :BOOL; // Spare16
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- I101_00 :BOOL; // KM101_ON
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- I101_01 :BOOL; // KM201_ON
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- I101_02 :BOOL; // KM102_ON
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- I101_03 :BOOL; // KM103_ON
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- I101_04 :BOOL; // KM104_ON
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- I101_05 :BOOL; // SPARE
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- I101_06 :BOOL; // SPARE
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- I101_07 :BOOL; // Furnace_Main_Breaker_Status_Monitor
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- I101_08 :BOOL; // Blower_Breaker_Status_Feedback
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- I101_09 :BOOL; // Zone1_Circuit_Breaker_Status_Monitor
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- I101_10 :BOOL; // Zone2_Circuit_Breaker_Status_Monitor
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- I101_11 :BOOL; // Zone3_Circuit_Breaker_Status_Monitor
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- I101_12 :BOOL; // Zone4_Circuit_Breaker_Status_Monitor
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- I101_13 :BOOL; // Zone5_Circuit_Breaker_Status_Monitor
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- I101_14 :BOOL; // Zone6_Circuit_Breaker_Status_Monitor
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- I101_15 :BOOL; // Zone7_Circuit_Breaker_Status_Monitor
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- I102_00 :BOOL; // LDS1_bulk_to_process_running
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- I102_01 :BOOL; // LDS1_supply_doing
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- I102_02 :BOOL; // LDS1_system_ready
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- I102_03 :BOOL; // LDS1_major_alarm
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- I102_04 :BOOL; // LDS1_minor_alarm
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- I102_05 :BOOL; // LDS1_low_level_status
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- I102_06 :BOOL; // LDS1_process_reservoir_empty
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- I102_07 :BOOL; // LDS2_bulk_to_process_running
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- I102_08 :BOOL; // LDS2_supply_doing
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- I102_09 :BOOL; // LDS2_system_ready
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- I102_10 :BOOL; // LDS2_major_alarm
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- I102_11 :BOOL; // LDS2_minor_alarm
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- I102_12 :BOOL; // LDS2_low_level_status
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- I102_13 :BOOL; // LDS2_process_reservoir_empty
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- I102_14 :BOOL; // SPARE
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- I102_15 :BOOL; // SPARE
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- I103_00 :BOOL; // Vaccum1_Pump_Both_On
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- I103_01 :BOOL; // Vaccum1_Pump_Warning
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- I103_02 :BOOL; // Vaccum1_Pump_Alarm
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- I103_03 :BOOL; // Spare19
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- I103_04 :BOOL; // Spare20
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- I103_05 :BOOL; // Spare21
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- I103_06 :BOOL; // N2_Purge_BOX_PG13_CNT1
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- I103_07 :BOOL; // N2_Purge_BOX_PG13_CNT2
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- I103_08 :BOOL; // N2_Purge_BOX_PG14_CNT1
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- I103_09 :BOOL; // N2_Purge_BOX_PG14_CNT2
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- I103_10 :BOOL; // N2_Purge_Box_PG15_CNT1
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- I103_11 :BOOL; // N2_Purge_Box_PG15_CNT2
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- I103_12 :BOOL; // N2_Purge_Box_PG16_CNT1
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- I103_13 :BOOL; // N2_Purge_Box_PG16_CNT2
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- I103_14 :BOOL; // N2_Purge_Box_PG130_CNT1
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- I103_15 :BOOL; // N2_Purge_Box_PG130_CNT2
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- I104_00 :BOOL; // PS17_Low_pressure_alarm
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- I104_01 :BOOL; // Foreline_heater_light_alarm
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- I104_02 :BOOL; // Foreline_heater_heavy_alarm
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- I104_03 :BOOL; // Scrubber_warning
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- I104_04 :BOOL; // Scrubber_alarm
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- I104_05 :BOOL; // External_HPM_alarm
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- I104_06 :BOOL; // External_EMO_In
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- I104_07 :BOOL; // SPARE
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- I104_08 :BOOL; // SPARE
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- I104_09 :BOOL; // SPARE
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- I104_10 :BOOL; // SPARE
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- I104_11 :BOOL; // SPARE
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- I104_12 :BOOL; // SPARE
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- I104_13 :BOOL; // SPARE
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- I104_14 :BOOL; // SPARE
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- I104_15 :BOOL; // SPARE
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-
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- Q100_00 :BOOL; // VFD_RES
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- Q100_01 :BOOL; // VFD_MRS
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- Q100_02 :BOOL; // VFD_RT
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- Q100_03 :BOOL; // VFD_JOG
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- Q100_04 :BOOL; // VFD_RL
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- Q100_05 :BOOL; // VFD_RM
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- Q100_06 :BOOL; // VFD_RH
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- Q100_07 :BOOL; // VFD_STP
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- Q100_08 :BOOL; // VFD_RTR
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- Q100_09 :BOOL; // VFD_RTF
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- Q100_10 :BOOL; // Spare1
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- Q100_11 :BOOL; // Spare2
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- Q100_12 :BOOL; // Spare3
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- Q100_13 :BOOL; // Spare4
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- Q100_14 :BOOL; // Spare5
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- Q100_15 :BOOL; // Spare6
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- Q101_00 :BOOL; // Furnace 1 Zone Heating Enable
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- Q101_01 :BOOL; // Furnace 2 Zone Heating Enable
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- Q101_02 :BOOL; // Furnace 3 Zone Heating Enable
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- Q101_03 :BOOL; // Furnace 4 Zone Heating Enable
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- Q101_04 :BOOL; // Furnace 5 Zone Heating Enable
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- Q101_05 :BOOL; // Furnace 6 Zone Heating Enable
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- Q101_06 :BOOL; // Furnace 7 Zone Heating Enable
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- Q101_07 :BOOL; // LSC_1_AutoRefill1 Request Or Valve Open
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- Q101_08 :BOOL; // LSC_1_External_Shutdown
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- Q101_09 :BOOL; // HPM Valve Out Status
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- Q101_10 :BOOL; // Forline Heater On
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- Q101_11 :BOOL; // Spare7
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- Q101_12 :BOOL; // Spare8
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- Q101_13 :BOOL; // Spare9
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- Q101_14 :BOOL; // Spare10
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- Q101_15 :BOOL; // Spare11
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- Q102_00 :BOOL; // Vaccum Pump Both On
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- Q102_01 :BOOL; // Vaccum Pump AUC On
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- Q102_02 :BOOL; // Vaccum Pump AGV Open
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- Q102_03 :BOOL; // LSC_2_AutoRefill1 Request Or Valve Open
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- Q102_04 :BOOL; // LSC_2_External_Shutdown
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- Q102_05 :BOOL; // Spare
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- Q102_06 :BOOL; // Spare
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- Q102_07 :BOOL; // Spare
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- Q102_08 :BOOL; // Spare
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- Q102_09 :BOOL; // Spare
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- Q102_10 :BOOL; // Spare
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- Q102_11 :BOOL; // Spare
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- Q102_12 :BOOL; // Spare
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- Q102_13 :BOOL; // Spare
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- Q102_14 :BOOL; // Spare
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- Q102_15 :BOOL; // Spare
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- Q103_00 :BOOL; // Spare
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- Q103_01 :BOOL; // Spare
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- Q103_02 :BOOL; // Spare
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- Q103_03 :BOOL; // Spare
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- Q103_04 :BOOL; // Spare
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- Q103_05 :BOOL; // Spare
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- Q103_06 :BOOL; // Spare
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- Q103_07 :BOOL; // Spare
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- Q103_08 :BOOL; // Spare
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- Q103_09 :BOOL; // Spare
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- Q103_10 :BOOL; // Spare
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- Q103_11 :BOOL; // Spare
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- Q103_12 :BOOL; // Spare
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- Q103_13 :BOOL; // Spare
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- Q103_14 :BOOL; // Spare
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- Q103_15 :BOOL; // Spare
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-
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- PS17_Pressure : REAL; // PS17_Pressure
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-
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- //Gas box
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- Q200_00 :BOOL; // OX_Pump_On
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- Q200_01 :BOOL; // Spare1
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- Q200_02 :BOOL; // Spare2
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- Q200_03 :BOOL; // Spare3
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- Q200_04 :BOOL; // Spare4
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- Q200_05 :BOOL; // Spare5
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- Q200_06 :BOOL; // Spare6
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- Q200_07 :BOOL; // Spare7
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- Q200_08 :BOOL; // Spare8
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- Q200_09 :BOOL; // Spare9
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- Q200_10 :BOOL; // Spare10
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- Q200_11 :BOOL; // Spare11
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- Q200_12 :BOOL; // Spare12
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- Q200_13 :BOOL; // Spare13
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- Q200_14 :BOOL; // Spare14
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- Q200_15 :BOOL; // Spare15
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-
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- VG31_Reading_Valid : BOOL;
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- VG31_Overrange_Exceeded : BOOL;
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- VG31_Underrange_Exceeded : BOOL;
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- VG31_Sensor_Value : REAL;
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- VG31_Active_Device_Warning_Details : UDINT;
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- VG31_Active_Device_Error_Details : UDINT;
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-
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- //Exhaust box
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- Q300_00 :BOOL; // CoolingValve1_Boat
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- Q300_01 :BOOL; // CoolingValve2_Flange
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- Q300_02 :BOOL;
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- Q300_03 :BOOL;
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- Q300_04 :BOOL;
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- Q300_05 :BOOL;
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- Q300_06 :BOOL;
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- Q300_07 :BOOL;
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- Q300_08 :BOOL; // APC_auto_close
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- Q300_09 :BOOL; // APC_pump_on
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- Q300_10 :BOOL; // BallValve_Open_Close
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- Q300_11 :BOOL;
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- Q300_12 :BOOL;
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- Q300_13 :BOOL;
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- Q300_14 :BOOL;
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- Q300_15 :BOOL;
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-
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- VG11_Reading_Valid : BOOL;
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- VG11_Overrange_Exceeded : BOOL;
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- VG11_Underrange_Exceeded : BOOL;
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- VG11_Sensor_Value : REAL;
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- VG11_Active_Device_Warning_Details : UDINT;
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- VG11_Active_Device_Error_Details : UDINT;
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-
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- VG13_Reading_Valid : BOOL;
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- VG13_Overrange_Exceeded : BOOL;
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- VG13_Underrange_Exceeded : BOOL;
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- VG13_Sensor_Value : REAL;
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- VG13_Active_Device_Warning_Details : UDINT;
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- VG13_Active_Device_Error_Details : UDINT;
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-
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- VG14_Reading_Valid : BOOL;
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- VG14_Overrange_Exceeded : BOOL;
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- VG14_Underrange_Exceeded : BOOL;
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- VG14_Sensor_Value : REAL;
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- VG14_Active_Device_Warning_Details : UDINT;
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- VG14_Active_Device_Error_Details : UDINT;
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-
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- //Frontbody box
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- FB_Buffer_N2_Press_Low : BOOL;
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-
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- //LA box
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- LA_Buffer_N2_Press_Low : BOOL;
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- Boat_at_cap_position : BOOL;
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-
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- I500_00 :BOOL; // FIMS1_FOUP_Dock
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- I500_01 :BOOL; // FIMS1_FOUP_Undock
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- I500_02 :BOOL; // FIMS1_FOUP_Exist
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- I500_03 :BOOL; // FIMS2_FOUP_Dock
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- I500_04 :BOOL; // FIMS2_FOUP_Undock
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- I500_05 :BOOL; // FIMS2_FOUP_Exist
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- I500_06 :BOOL; // FIMS1_FOUP_Wafer_Shift_Detection
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- I500_07 :BOOL; // FIMS2_FOUP_Wafer_Shift_Detection
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- I500_08 :BOOL; // FIMS1_FOUP_Negative_Pressure
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- I500_09 :BOOL; // FIMS1_FOUP_Ordinary_Pressure
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- I500_10 :BOOL; // FIMS2_FOUP_Negative_Pressure
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- I500_11 :BOOL; // FIMS2_FOUP_Ordinary_Pressure
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- I500_12 :BOOL; // BOAT_Slow_Down_Position_Detection
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- I500_13 :BOOL; // Buffer_Rotation_Conv_Detect_Sensor
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- I500_14 :BOOL; // Spare1
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- I500_15 :BOOL; // Spare2
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- I501_00 :BOOL; // LA_Internal_Cycle_Switch_Open
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- I501_01 :BOOL; // LA_Internal_Cycle_Switch_Close
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- I501_02 :BOOL; // LA_ATM_Switch_Open
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- I501_03 :BOOL; // LA_ATM_Switch_Close
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- I501_04 :BOOL; // R-Axis_Air_Cylinder_Extend_Position
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- I501_05 :BOOL; // R-Axis_Air_Cylinder_Retract_Position
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- I501_06 :BOOL; // Furnace_Shutter_Open
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- I501_07 :BOOL; // Furnace_Shutter_Close
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- I501_08 :BOOL; // FIMS1_Exhaust_Open_Position
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- I501_09 :BOOL; // FIMS1_Exhaust_Close_Position
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- I501_10 :BOOL; // FIMS2_Exhaust_Open_Position
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- I501_11 :BOOL; // FIMS2_Exhaust_Close_Position
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- I501_12 :BOOL; // Spare3
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- I501_13 :BOOL; // Spare4
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- I501_14 :BOOL; // Spare5
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- I501_15 :BOOL; // Spare6
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- I502_00 :BOOL; // FIMS1_Seal
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- I502_01 :BOOL; // FIMS1_Release
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- I502_02 :BOOL; // FIMS1_Door_Close
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- I502_03 :BOOL; // FIMS1_Door_Open
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- I502_04 :BOOL; // FIMS1_FOUP_Latch_Off
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- I502_05 :BOOL; // FIMS1_FOUP_Latch_On
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- I502_06 :BOOL; // FIMS1_Collision_Avoidance_Up
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- I502_07 :BOOL; // FIMS1_Collision_Avoidance_Down
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- I502_08 :BOOL; // FIMS2_Seal
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- I502_09 :BOOL; // FIMS2_Release
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- I502_10 :BOOL; // FIMS2_Door_Close
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- I502_11 :BOOL; // FIMS2_Door_Open
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- I502_12 :BOOL; // FIMS2_FOUP_Latch_Off
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- I502_13 :BOOL; // FIMS2_FOUP_Latch_On
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- I502_14 :BOOL; // FIMS2_Collision_Avoidance_Up
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- I502_15 :BOOL; // FIMS2_Collision_Avoidance_Down
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- I503_00 :BOOL; // Spare7
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- I503_01 :BOOL; // Spare8
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- I503_02 :BOOL; // Spare9
|
|
|
- I503_03 :BOOL; // Spare10
|
|
|
- I503_04 :BOOL; // Spare11
|
|
|
- I503_05 :BOOL; // Spare12
|
|
|
- I503_06 :BOOL; // Spare13
|
|
|
- I503_07 :BOOL; // Spare14
|
|
|
- I503_08 :BOOL; // Spare15
|
|
|
- I503_09 :BOOL; // Spare16
|
|
|
- I503_10 :BOOL; // Spare17
|
|
|
- I503_11 :BOOL; // Spare18
|
|
|
- I503_12 :BOOL; // Spare19
|
|
|
- I503_13 :BOOL; // Spare20
|
|
|
- I503_14 :BOOL; // Spare21
|
|
|
- I503_15 :BOOL; // Spare22
|
|
|
- I504_00 :BOOL; // Spare23
|
|
|
- I504_01 :BOOL; // Spare24
|
|
|
- I504_02 :BOOL; // Spare25
|
|
|
- I504_03 :BOOL; // Spare26
|
|
|
- I504_04 :BOOL; // Spare27
|
|
|
- I504_05 :BOOL; // Spare28
|
|
|
- I504_06 :BOOL; // Spare29
|
|
|
- I504_07 :BOOL; // Spare30
|
|
|
- I504_08 :BOOL; // Spare31
|
|
|
- I504_09 :BOOL; // Spare32
|
|
|
- I504_10 :BOOL; // Spare33
|
|
|
- I504_11 :BOOL; // Spare34
|
|
|
- I504_12 :BOOL; // Spare35
|
|
|
- I504_13 :BOOL; // Spare36
|
|
|
- I504_14 :BOOL; // Spare37
|
|
|
- I504_15 :BOOL; // Spare38
|
|
|
- I505_00 :BOOL; // Buffer_A1_N2_Pressure_Alarm
|
|
|
- I505_01 :BOOL; // Buffer_A1_FOUP_Detect
|
|
|
- I505_02 :BOOL; // Buffer_B1_N2_Pressure_Alarm
|
|
|
- I505_03 :BOOL; // Buffer_B1_FOUP_Detect
|
|
|
- I505_04 :BOOL; // Buffer_C1_N2_Pressure_Alarm
|
|
|
- I505_05 :BOOL; // Buffer_C1_FOUP_Detect
|
|
|
- I505_06 :BOOL; // Buffer_D1_N2_Pressure_Alarm
|
|
|
- I505_07 :BOOL; // Buffer_D1_FOUP_Detect
|
|
|
- I505_08 :BOOL; // Buffer_A2_N2_Pressure_Alarm
|
|
|
- I505_09 :BOOL; // Buffer_A2_FOUP_Detect
|
|
|
- I505_10 :BOOL; // Buffer_B2_N2_Pressure_Alarm
|
|
|
- I505_11 :BOOL; // Buffer_B2_FOUP_Detect
|
|
|
- I505_12 :BOOL; // Buffer_C2_N2_Pressure_Alarm
|
|
|
- I505_13 :BOOL; // Buffer_C2_FOUP_Detect
|
|
|
- I505_14 :BOOL; // Buffer_D2_N2_Pressure_Alarm
|
|
|
- I505_15 :BOOL; // Buffer_D2_FOUP_Detect
|
|
|
- I506_00 :BOOL; // Buffer_A3_N2_Pressure_Alarm
|
|
|
- I506_01 :BOOL; // Buffer_A3_FOUP_Detect
|
|
|
- I506_02 :BOOL; // Buffer_B3_N2_Pressure_Alarm
|
|
|
- I506_03 :BOOL; // Buffer_B3_FOUP_Detect
|
|
|
- I506_04 :BOOL; // Buffer_C3_N2_Pressure_Alarm
|
|
|
- I506_05 :BOOL; // Buffer_C3_FOUP_Detect
|
|
|
- I506_06 :BOOL; // Buffer_D3_N2_Pressure_Alarm
|
|
|
- I506_07 :BOOL; // Buffer_D3_FOUP_Detect
|
|
|
- I506_08 :BOOL; // Buffer_A4_N2_Pressure_Alarm
|
|
|
- I506_09 :BOOL; // Buffer_A4_FOUP_Detect
|
|
|
- I506_10 :BOOL; // Buffer_B4_N2_Pressure_Alarm
|
|
|
- I506_11 :BOOL; // Buffer_B4_FOUP_Detect
|
|
|
- I506_12 :BOOL; // Buffer_C4_N2_Pressure_Alarm
|
|
|
- I506_13 :BOOL; // Buffer_C4_FOUP_Detect
|
|
|
- I506_14 :BOOL; // Buffer_D4_N2_Pressure_Alarm
|
|
|
- I506_15 :BOOL; // Buffer_D4_FOUP_Detect
|
|
|
-
|
|
|
- Q500_00 :BOOL; // LA_Internal_Air_Cycle_Switch_Open
|
|
|
- Q500_01 :BOOL; // LA_Internal_Air_Cycle_Switch_Close
|
|
|
- Q500_02 :BOOL; // LA_ATM_Switch_Open
|
|
|
- Q500_03 :BOOL; // LA_ATM_Switch_Close
|
|
|
- Q500_04 :BOOL; // R_Axis_Air_Cylinder_Extend_Switch
|
|
|
- Q500_05 :BOOL; // R_Axis_Air_Cylinder_Retract_Switch
|
|
|
- Q500_06 :BOOL; // O2_Detector_Switch_LA_POD
|
|
|
- Q500_07 :BOOL; // O2_Detector_Switch_POD1_POD2
|
|
|
- Q500_08 :BOOL; // LA_Internal_Air_Cycle_Fan1_Switch
|
|
|
- Q500_09 :BOOL; // LA_Internal_Air_Cycle_Fan2_Switch
|
|
|
- Q500_10 :BOOL; // LA_Internal_Air_Cycle_Fan3_Switch
|
|
|
- Q500_11 :BOOL; // LA_Internal_Air_Cycle_Fan4_Switch
|
|
|
- Q500_12 :BOOL; // Furnace_Shutter_Open
|
|
|
- Q500_13 :BOOL; // Furnace_Shutter_Close
|
|
|
- Q500_14 :BOOL; // Spare1
|
|
|
- Q500_15 :BOOL; // Spare2
|
|
|
- Q501_00 :BOOL; // POD1_Exhaust_Switch_Open
|
|
|
- Q501_01 :BOOL; // POD1_Exhaust_Switch_Close
|
|
|
- Q501_02 :BOOL; // POD2_Exhaust_Switch_Open
|
|
|
- Q501_03 :BOOL; // POD2_Exhaust_Switch_Close
|
|
|
- Q501_04 :BOOL; // Spare3
|
|
|
- Q501_05 :BOOL; // Spare4
|
|
|
- Q501_06 :BOOL; // Spare5
|
|
|
- Q501_07 :BOOL; // Spare6
|
|
|
- Q501_08 :BOOL; // Spare7
|
|
|
- Q501_09 :BOOL; // Spare8
|
|
|
- Q501_10 :BOOL; // Spare9
|
|
|
- Q501_11 :BOOL; // Spare10
|
|
|
- Q501_12 :BOOL; // Spare11
|
|
|
- Q501_13 :BOOL; // Spare12
|
|
|
- Q501_14 :BOOL; // Spare13
|
|
|
- Q501_15 :BOOL; // Spare14
|
|
|
- Q502_00 :BOOL; // Buffer_A1_N2_Purge_Switch
|
|
|
- Q502_01 :BOOL; // Buffer_B1_N2_Purge_Switch
|
|
|
- Q502_02 :BOOL; // Buffer_C1_N2_Purge_Switch
|
|
|
- Q502_03 :BOOL; // Buffer_D1_N2_Purge_Switch
|
|
|
- Q502_04 :BOOL; // Buffer_A2_N2_Purge_Switch
|
|
|
- Q502_05 :BOOL; // Buffer_B2_N2_Purge_Switch
|
|
|
- Q502_06 :BOOL; // Buffer_C2_N2_Purge_Switch
|
|
|
- Q502_07 :BOOL; // Buffer_D2_N2_Purge_Switch
|
|
|
- Q502_08 :BOOL; // Buffer_A3_N2_Purge_Switch
|
|
|
- Q502_09 :BOOL; // Buffer_B3_N2_Purge_Switch
|
|
|
- Q502_10 :BOOL; // Buffer_C3_N2_Purge_Switch
|
|
|
- Q502_11 :BOOL; // Buffer_D3_N2_Purge_Switch
|
|
|
- Q502_12 :BOOL; // Buffer_A4_N2_Purge_Switch
|
|
|
- Q502_13 :BOOL; // Buffer_B4_N2_Purge_Switch
|
|
|
- Q502_14 :BOOL; // Buffer_C4_N2_Purge_Switch
|
|
|
- Q502_15 :BOOL; // Buffer_D4_N2_Purge_Switch
|
|
|
- Q503_00 :BOOL;
|
|
|
- Q503_01 :BOOL;
|
|
|
- Q503_02 :BOOL;
|
|
|
- Q503_03 :BOOL;
|
|
|
- Q503_04 :BOOL;
|
|
|
- Q503_05 :BOOL;
|
|
|
- Q503_06 :BOOL;
|
|
|
- Q503_07 :BOOL;
|
|
|
- Q503_08 :BOOL;
|
|
|
- Q503_09 :BOOL;
|
|
|
- Q503_10 :BOOL;
|
|
|
- Q503_11 :BOOL;
|
|
|
- Q503_12 :BOOL;
|
|
|
- Q503_13 :BOOL;
|
|
|
- Q503_14 :BOOL;
|
|
|
- Q503_15 :BOOL;
|
|
|
-
|
|
|
- //Safety box
|
|
|
- O2_analyzer_over_range_alarm ,
|
|
|
- SCR_ONOFF_SWITCH ,
|
|
|
- O2_analyzer_fault ,
|
|
|
- SMK1_detector_operator ,
|
|
|
- SMK1_detector_fault ,
|
|
|
- SMK1_detector_fire_alarm ,
|
|
|
- GD201_NF3_gas_leak_1st_alarm ,
|
|
|
- GD201_NF3_gas_leak_2nd_alarm ,
|
|
|
- GD202_SiH4_gas_leak_1st_alarm ,
|
|
|
- GD201_fault ,
|
|
|
- GD202_SiH4_gas_leak_2nd_alarm ,
|
|
|
- GD202_fault ,
|
|
|
- GD203_NH3_gas_leak_2nd_alarm ,
|
|
|
- GD203_NH3_gas_leak_1st_alarm ,
|
|
|
- GD203_fault ,
|
|
|
- GD204_HCL_gas_leak_1st_alarm ,
|
|
|
- GD204_fault ,
|
|
|
- GD204_HCL_gas_leak_2nd_alarm ,
|
|
|
- GD205_F2_gas_leak_1st_alarm ,
|
|
|
- GD205_F2_gas_leak_2nd_alarm ,
|
|
|
- GD206_NF3_gas_leak_1st_alarm ,
|
|
|
- GD205_fault ,
|
|
|
- GD206_NF3_gas_leak_2nd_alarm ,
|
|
|
- GD206_fault ,
|
|
|
- GD207_SiH4_gas_leak_2nd_alarm ,
|
|
|
- GD207_SiH4_gas_leak_1st_alarm ,
|
|
|
- GD207_fault ,
|
|
|
- GD208_NH3_gas_leak_1st_alarm ,
|
|
|
- GD208_fault ,
|
|
|
- GD208_NH3_gas_leak_2nd_alarm ,
|
|
|
- GD209_HCL_gas_leak_1st_alarm ,
|
|
|
- GD209_HCL_gas_leak_2nd_alarm ,
|
|
|
- GD210_F2_gas_leak_1st_alarm ,
|
|
|
- GD209_fault ,
|
|
|
- GD210_F2_gas_leak_2nd_alarm ,
|
|
|
- GD210_fault ,
|
|
|
- TS31_Cap_outside_temp_sw ,
|
|
|
- TS30_Cap_inside_temp_sw ,
|
|
|
- TS34_R_axis_rotation_temp_sw ,
|
|
|
- Loading_area_EMS ,
|
|
|
- SL201_gas_box_door_sw1_1 ,
|
|
|
- FFU_temp_sw ,
|
|
|
- SL201_gas_box_door_sw1_2 ,
|
|
|
- SL202_gas_box_door_sw2_1 ,
|
|
|
- SL203_gas_box_door_sw3_1 ,
|
|
|
- SL202_gas_box_door_sw2_2 ,
|
|
|
- SL203_gas_box_door_sw3_2 ,
|
|
|
- SL204_gas_box_door_sw4_1 ,
|
|
|
- SL205_gas_box_door_sw5_1 ,
|
|
|
- SL204_gas_box_door_sw4_2 ,
|
|
|
- SL205_gas_box_door_sw5_2 ,
|
|
|
- SL501_LA_door_sw1 ,
|
|
|
- SL503_LA_door_sw3 ,
|
|
|
- SL502_LA_door_sw2 ,
|
|
|
- SL504_furnace_door_sw ,
|
|
|
- Gas_box_exhaust_pressure_alarm_1st ,
|
|
|
- MS2_S_gas_box_exhaust_alarm ,
|
|
|
- Gas_box_exhaust_pressure_alarm_2nd ,
|
|
|
- MS11_S_gas_box_exhaust_alarm ,
|
|
|
- MS12_S_gas_box_exhaust_alarm ,
|
|
|
- LSC_1_leak_alarm ,
|
|
|
- LD501_Magnetic_fluid_leak ,
|
|
|
- LD502_Cooling_water_leak ,
|
|
|
- TS305_RHC_temp_sw ,
|
|
|
- LD503_RHC_leak ,
|
|
|
- TS306_Main_furnace_Temp_sw ,
|
|
|
- LD301_water_leak_alarm ,
|
|
|
- EMO301_Exhaust_box_EMO ,
|
|
|
- LD302_water_leak_alarm ,
|
|
|
- FS101_water_flow_alarm1 , //水路总流量
|
|
|
- Buffer_motor_EDM ,
|
|
|
- R_axis_motor_EDM ,
|
|
|
- E_axis_motor_EDM ,
|
|
|
- FS101_water_flow_alarm2 , //水路总流量
|
|
|
- EMO101_power_box_EMO ,
|
|
|
- Furnace_transformer_temp_sw ,
|
|
|
- Power_box_fire_detector_alarm ,
|
|
|
- AC100V_transformer_temp_sw ,
|
|
|
- Furnace_power_on_switch ,
|
|
|
- Power_box_reset_button ,
|
|
|
- AC100V_transformer_power_on_switch ,
|
|
|
- VFD_EDM ,
|
|
|
- Light_curtain_fault ,
|
|
|
- Light_curtain_OSSD2 ,
|
|
|
- Light_curtain_OSSD1 ,
|
|
|
- Gas_box_reset_button ,
|
|
|
- EMO401_frontbody_EMO ,
|
|
|
- Frontbody_IO_shutter ,
|
|
|
- Frontbody_door_sw ,
|
|
|
- Frontbody_reset_button
|
|
|
- :BOOL;
|
|
|
-
|
|
|
- //IO mapping
|
|
|
- HPM_valve_power_on_off ,
|
|
|
- Furnace_power_on ,
|
|
|
- Cap_heater_enable ,
|
|
|
- //spare
|
|
|
- AC100V_transformer_power_on ,
|
|
|
- VFD_Enable ,
|
|
|
- Blower_power_on ,
|
|
|
- Buffer_motor_enable1 ,
|
|
|
- Buffer_motor_enable2 ,
|
|
|
- Boat_motor_enable2 ,
|
|
|
- Boat_motor_enable1 ,
|
|
|
- FTR_enable1 ,
|
|
|
- FTR_enable2 ,
|
|
|
- WTR_enable1 ,
|
|
|
- FTR_interlock_reset ,
|
|
|
- WTR_enable2 ,
|
|
|
- WTR_interlock_reset ,
|
|
|
- R_axis_motor_enable2 ,
|
|
|
- R_axis_motor_enable1 ,
|
|
|
- //spare
|
|
|
- //spare
|
|
|
- Light_curtain_idle ,
|
|
|
- //spare
|
|
|
- Frontbody_interlock_indicator ,
|
|
|
- GasBox_interlock_indicator
|
|
|
- : BOOL;
|
|
|
-
|
|
|
- //FFU
|
|
|
- FFU_ALARM_EN : REAL; //报警输出使能
|
|
|
- FFU_HSPEED : REAL; //转速上限
|
|
|
- FFU_LSPEED : REAL; //转速下限
|
|
|
-
|
|
|
- FFU1_1_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU1_2_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU1_3_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU1_4_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU1_5_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU1_6_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU2_1_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU2_2_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU2_3_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU2_4_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU2_5_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU2_6_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU3_1_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU3_2_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU3_3_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU3_4_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU3_5_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
- FFU3_6_POWER_ON : REAL ; // 0:停止,1:运行
|
|
|
-
|
|
|
- FFU1_1_SPEED_SV : REAL ; // FFU1_1设定转速
|
|
|
- FFU1_2_SPEED_SV : REAL ; // FFU1_2设定转速
|
|
|
- FFU1_3_SPEED_SV : REAL ; // FFU1_3设定转速
|
|
|
- FFU1_4_SPEED_SV : REAL ; // FFU1_4设定转速
|
|
|
- FFU1_5_SPEED_SV : REAL ; // FFU1_5设定转速
|
|
|
- FFU1_6_SPEED_SV : REAL ; // FFU1_6设定转速
|
|
|
- FFU2_1_SPEED_SV : REAL ; // FFU2_1设定转速
|
|
|
- FFU2_2_SPEED_SV : REAL ; // FFU2_2设定转速
|
|
|
- FFU2_3_SPEED_SV : REAL ; // FFU2_3设定转速
|
|
|
- FFU2_4_SPEED_SV : REAL ; // FFU2_4设定转速
|
|
|
- FFU2_5_SPEED_SV : REAL ; // FFU2_5设定转速
|
|
|
- FFU2_6_SPEED_SV : REAL ; // FFU2_6设定转速
|
|
|
- FFU3_1_SPEED_SV : REAL ; // FFU3_1设定转速
|
|
|
- FFU3_2_SPEED_SV : REAL ; // FFU3_2设定转速
|
|
|
- FFU3_3_SPEED_SV : REAL ; // FFU3_3设定转速
|
|
|
- FFU3_4_SPEED_SV : REAL ; // FFU3_4设定转速
|
|
|
- FFU3_5_SPEED_SV : REAL ; // FFU3_5设定转速
|
|
|
- FFU3_6_SPEED_SV : REAL ; // FFU3_6设定转速
|
|
|
-
|
|
|
- FFU1_1_EN : REAL ; // FFU1_1使能
|
|
|
- FFU1_2_EN : REAL ; // FFU1_2使能
|
|
|
- FFU1_3_EN : REAL ; // FFU1_3使能
|
|
|
- FFU1_4_EN : REAL ; // FFU1_4使能
|
|
|
- FFU1_5_EN : REAL ; // FFU1_5使能
|
|
|
- FFU1_6_EN : REAL ; // FFU1_6使能
|
|
|
- FFU2_1_EN : REAL ; // FFU2_1使能
|
|
|
- FFU2_2_EN : REAL ; // FFU2_2使能
|
|
|
- FFU2_3_EN : REAL ; // FFU2_3使能
|
|
|
- FFU2_4_EN : REAL ; // FFU2_4使能
|
|
|
- FFU2_5_EN : REAL ; // FFU2_5使能
|
|
|
- FFU2_6_EN : REAL ; // FFU2_6使能
|
|
|
- FFU3_1_EN : REAL ; // FFU3_1使能
|
|
|
- FFU3_2_EN : REAL ; // FFU3_2使能
|
|
|
- FFU3_3_EN : REAL ; // FFU3_3使能
|
|
|
- FFU3_4_EN : REAL ; // FFU3_4使能
|
|
|
- FFU3_5_EN : REAL ; // FFU3_5使能
|
|
|
- FFU3_6_EN : REAL ; // FFU3_6使能
|
|
|
-
|
|
|
-END_STRUCT
|
|
|
-END_TYPE
|
|
|
-]]></Declaration>
|
|
|
- </DUT>
|
|
|
-</TcPlcObject>
|