检查，修改interlock程序

TIN001/TIN001/PLC/DUTs/_01_DUTs_PMC_PLC/dut_PLC_to_PMC.TcDUT

@@ -50,7 +50,12 @@ STRUCT
 	VAC2				,
 	VAC3				,
 	VAC4				,
-	VAC5				
+	VAC5				,
+	VAC6				,
+	VAC7				,
+	VAC8				,
+	VAC9				,
+	VAC10				
 	: BOOL;
 	
 
@@ -142,7 +147,7 @@ STRUCT
 	I301_09			:BOOL;	//	FS101_MainWater_Flow_Alarm-1
 	I301_10			:BOOL;	//	FS101_FMainWater_low_Alarm-2
 	I301_11			:BOOL;	//	FL301_Flow_Switch
-	I301_12			:BOOL;	//	FL72_Flow_Switch
+	I301_12			:BOOL;	//	Spare
 	I301_13			:BOOL;	//	FS116_Zaxis_Flow_Alarm
 	I301_14			:BOOL;	//	PS110_Pressure_Low_Alarm
 	I301_15			:BOOL;	//	PS110_Pressure_High_Alarm

TIN001/TIN001/PLC/DUTs/_01_DUTs_PMC_PLC/dut_PMC_to_PLC.TcDUT

@@ -36,6 +36,8 @@ STRUCT
 	APC_AV71_Close				
 	: BOOL;
 	
+	APC_Mode_Status				: REAL;
+	
 	aAV							: ARRAY[1..250] OF BOOL;	
 	bAV65Open					: BOOL;
 	bAV65Close					: BOOL;

TIN001/TIN001/TIN001/PMC.tsproj

@@ -3308,16 +3308,16 @@ External Setpoint Generation:
 				<Target BkhfOrder="01456561" CustomOrder="JETPLASMA">
 					<ManualSelect>{081AC839-28D0-49CA-9792-72680E1F3249}</ManualSelect>
 					<ManualSelect>{3EBB9639-5FF3-42B6-8847-35C70DC013C8}</ManualSelect>
-					<ManualSelect>{19E93A3D-90D1-45B9-A28A-32DD8D2A166A}</ManualSelect>
 					<ManualSelect Instances="250">{103F30C9-DF25-439E-837B-9DF80CB9356C}</ManualSelect>
-					<ManualSelect>{520DE751-9DB6-47CB-8240-BD5C466E7E64}</ManualSelect>
+					<ManualSelect>{19E93A3D-90D1-45B9-A28A-32DD8D2A166A}</ManualSelect>
 					<ManualSelect>{A1AF8A04-C08D-4853-A5A0-0E6C3A278A8C}</ManualSelect>
+					<ManualSelect>{520DE751-9DB6-47CB-8240-BD5C466E7E64}</ManualSelect>
 					<TargetSelect TargetId="2">{081AC839-28D0-49CA-9792-72680E1F3249}</TargetSelect>
 					<TargetSelect TargetId="2">{3EBB9639-5FF3-42B6-8847-35C70DC013C8}</TargetSelect>
-					<TargetSelect TargetId="2">{103F30C9-DF25-439E-837B-9DF80CB9356C}</TargetSelect>
 					<TargetSelect TargetId="2">{19E93A3D-90D1-45B9-A28A-32DD8D2A166A}</TargetSelect>
-					<TargetSelect TargetId="2">{A1AF8A04-C08D-4853-A5A0-0E6C3A278A8C}</TargetSelect>
+					<TargetSelect TargetId="2">{103F30C9-DF25-439E-837B-9DF80CB9356C}</TargetSelect>
 					<TargetSelect TargetId="2">{520DE751-9DB6-47CB-8240-BD5C466E7E64}</TargetSelect>
+					<TargetSelect TargetId="2">{A1AF8A04-C08D-4853-A5A0-0E6C3A278A8C}</TargetSelect>
 					<LicenseDevice DongleHardwareId="2" DongleDevice="#x03020002" DongleLevel="40" DongleSystemId="{432D73C0-6009-8093-3A2C-C8B028CD31F9}"/>
 				</Target>
 			</Licenses>
@@ -3788,7 +3788,7 @@ External Setpoint Generation:
 		</Motion>
 		<Plc>
 			<Project GUID="{2C84D8AE-B038-4B99-BD4C-1AA7D6CAA867}" Name="PMC" PrjFilePath="PMC\PMC.plcproj" TmcFilePath="PMC\PMC.tmc" ReloadTmc="true" AmsPort="851" TargetArchiveSettings="#x0001" FileArchiveSettings="#x000e" SymbolicMapping="true">
-				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="1" TmcPath="PMC\PMC.tmc" TmcHash="{45F7A8DA-9511-CD5D-201B-A95FCF4F1FD1}">
+				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="1" TmcPath="PMC\PMC.tmc" TmcHash="{C922084E-3617-7697-877A-EE1DC3D9126D}">
 					<Name>PMC Instance</Name>
 					<CLSID ClassFactory="TcPlc30">{08500001-0000-0000-F000-000000000064}</CLSID>
 					<Vars VarGrpType="1">

TIN001/TIN001/TIN001/PMC.tsproj.bak

@@ -3308,16 +3308,16 @@ External Setpoint Generation:
 				<Target BkhfOrder="01456561" CustomOrder="JETPLASMA">
 					<ManualSelect>{081AC839-28D0-49CA-9792-72680E1F3249}</ManualSelect>
 					<ManualSelect>{3EBB9639-5FF3-42B6-8847-35C70DC013C8}</ManualSelect>
-					<ManualSelect>{19E93A3D-90D1-45B9-A28A-32DD8D2A166A}</ManualSelect>
 					<ManualSelect Instances="250">{103F30C9-DF25-439E-837B-9DF80CB9356C}</ManualSelect>
-					<ManualSelect>{520DE751-9DB6-47CB-8240-BD5C466E7E64}</ManualSelect>
+					<ManualSelect>{19E93A3D-90D1-45B9-A28A-32DD8D2A166A}</ManualSelect>
 					<ManualSelect>{A1AF8A04-C08D-4853-A5A0-0E6C3A278A8C}</ManualSelect>
+					<ManualSelect>{520DE751-9DB6-47CB-8240-BD5C466E7E64}</ManualSelect>
 					<TargetSelect TargetId="2">{081AC839-28D0-49CA-9792-72680E1F3249}</TargetSelect>
 					<TargetSelect TargetId="2">{3EBB9639-5FF3-42B6-8847-35C70DC013C8}</TargetSelect>
-					<TargetSelect TargetId="2">{103F30C9-DF25-439E-837B-9DF80CB9356C}</TargetSelect>
 					<TargetSelect TargetId="2">{19E93A3D-90D1-45B9-A28A-32DD8D2A166A}</TargetSelect>
-					<TargetSelect TargetId="2">{A1AF8A04-C08D-4853-A5A0-0E6C3A278A8C}</TargetSelect>
+					<TargetSelect TargetId="2">{103F30C9-DF25-439E-837B-9DF80CB9356C}</TargetSelect>
 					<TargetSelect TargetId="2">{520DE751-9DB6-47CB-8240-BD5C466E7E64}</TargetSelect>
+					<TargetSelect TargetId="2">{A1AF8A04-C08D-4853-A5A0-0E6C3A278A8C}</TargetSelect>
 					<LicenseDevice DongleHardwareId="2" DongleDevice="#x03020002" DongleLevel="40" DongleSystemId="{432D73C0-6009-8093-3A2C-C8B028CD31F9}"/>
 				</Target>
 			</Licenses>
@@ -3788,7 +3788,7 @@ External Setpoint Generation:
 		</Motion>
 		<Plc>
 			<Project GUID="{2C84D8AE-B038-4B99-BD4C-1AA7D6CAA867}" Name="PMC" PrjFilePath="PMC\PMC.plcproj" TmcFilePath="PMC\PMC.tmc" ReloadTmc="true" AmsPort="851" TargetArchiveSettings="#x0001" FileArchiveSettings="#x000e" SymbolicMapping="true">
-				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="1" TmcPath="PMC\PMC.tmc" TmcHash="{CDACC184-E9C0-439E-D027-2CA419FE0BB5}">
+				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="1" TmcPath="PMC\PMC.tmc" TmcHash="{C922084E-3617-7697-877A-EE1DC3D9126D}">
 					<Name>PMC Instance</Name>
 					<CLSID ClassFactory="TcPlc30">{08500001-0000-0000-F000-000000000064}</CLSID>
 					<Vars VarGrpType="1">

TIN001/TIN001/TIN001/PMC/DUTs/_80_PMC_PLC/dut_PLC_to_PMC.TcDUT

@@ -50,7 +50,12 @@ STRUCT
 	VAC2				,
 	VAC3				,
 	VAC4				,
-	VAC5				
+	VAC5				,
+	VAC6				,
+	VAC7				,
+	VAC8				,
+	VAC9				,
+	VAC10				
 	: BOOL;
 	
 

TIN001/TIN001/TIN001/PMC/DUTs/_80_PMC_PLC/dut_PMC_to_PLC.TcDUT

@@ -36,6 +36,8 @@ STRUCT
 	APC_AV71_Close				
 	: BOOL;
 	
+	APC_Mode_Status				: REAL;
+	
 	aAV							: ARRAY[1..250] OF BOOL;	
 	bAV65Open					: BOOL;
 	bAV65Close					: BOOL;

TIN001/TIN001/TIN001/PMC/POU/IO_EXCHANGE.TcPOU

@@ -1171,6 +1171,11 @@ NDI.	VAC2			:=	GVL.stPLCtoPMC.	VAC2	;
 NDI.	VAC3			:=	GVL.stPLCtoPMC.	VAC3	;
 NDI.	VAC4			:=	GVL.stPLCtoPMC.	VAC4	;
 NDI.	VAC5			:=	GVL.stPLCtoPMC.	VAC5	;
+NDI.	VAC6			:=	GVL.stPLCtoPMC.	VAC6	;
+NDI.	VAC7			:=	GVL.stPLCtoPMC.	VAC7	;
+NDI.	VAC8			:=	GVL.stPLCtoPMC.	VAC8	;
+NDI.	VAC9			:=	GVL.stPLCtoPMC.	VAC9	;
+NDI.	VAC10			:=	GVL.stPLCtoPMC.	VAC10	;
 
 //Gas box DI
 NDI.	PG3_LOW_ALARM					:=	GVL.stPLCtoPMC.	I200_00	;
@@ -1828,6 +1833,7 @@ GVL.stPMCtoPLC.	F_N_sw						:= NDO.	F_N_sw		;
 //GVL.stPMCtoPLC.	GV_AV79_Close			:=
 //GVL.stPMCtoPLC.	APC_AV71_Open			:=
 //GVL.stPMCtoPLC.	APC_AV71_Close			:=
+GVL.stPMCtoPLC.	APC_Mode_Status				:= AI.	CKD_APC_controller_mode_select ;
 
 GVL.stPMCtoPLC.	Furnace_Temp_abnormal		:= NDO.Furnace_Temp_abnormal	;
 GVL.stPMCtoPLC.	LSC_Ht_temp_abnormal		:= NDO.LSC_Ht_temp_abnormal 	;
@@ -2949,6 +2955,7 @@ NDI.WaferRobotRunning:=LAI.I504_15;
       <LineId Id="13" Count="11" />
       <LineId Id="44" Count="0" />
       <LineId Id="25" Count="18" />
+      <LineId Id="681" Count="4" />
       <LineId Id="47" Count="0" />
       <LineId Id="46" Count="0" />
       <LineId Id="48" Count="47" />
@@ -2977,7 +2984,9 @@ NDI.WaferRobotRunning:=LAI.I504_15;
       <LineId Id="900" Count="0" />
       <LineId Id="70" Count="1" />
       <LineId Id="961" Count="0" />
-      <LineId Id="72" Count="15" />
+      <LineId Id="72" Count="9" />
+      <LineId Id="971" Count="0" />
+      <LineId Id="82" Count="5" />
       <LineId Id="962" Count="1" />
       <LineId Id="965" Count="5" />
       <LineId Id="720" Count="0" />

TIN001/TIN001/TIN001/_Boot/TwinCAT RT (x64)/Plc/Port_851.cid

@@ -1 +1 @@
-��|سVIشGs�آر¤ا­
+ظ�ص}v��{Eض4ت`ف�

TIN001/TIN001/TIN001_PLC.tsproj

@@ -329,7 +329,7 @@
 		</System>
 		<Plc>
 			<Project GUID="{DFAAB7BD-C0F0-4652-BE02-16AF7158E2F9}" Name="PLC" PrjFilePath="PLC\PLC.plcproj" TmcFilePath="PLC\PLC.tmc" ReloadTmc="true" AmsPort="851" FileArchiveSettings="#x000e" SymbolicMapping="true">
-				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="2" TmcPath="PLC\PLC.tmc" TmcHash="{0055E938-7DD1-0D31-E4BD-162CAC6951CA}">
+				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="2" TmcPath="PLC\PLC.tmc" TmcHash="{19D35207-E71F-2704-EFE1-32BF4BEB5896}">
 					<Name>PLC Instance</Name>
 					<CLSID ClassFactory="TcPlc30">{08500001-0000-0000-F000-000000000064}</CLSID>
 					<Vars VarGrpType="1">

TIN001/TIN001/TIN001_PLC.tsproj.bak

@@ -329,7 +329,7 @@
 		</System>
 		<Plc>
 			<Project GUID="{DFAAB7BD-C0F0-4652-BE02-16AF7158E2F9}" Name="PLC" PrjFilePath="PLC\PLC.plcproj" TmcFilePath="PLC\PLC.tmc" ReloadTmc="true" AmsPort="851" FileArchiveSettings="#x000e" SymbolicMapping="true">
-				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="2" TmcPath="PLC\PLC.tmc" TmcHash="{95201863-CF91-9412-310B-82A9455FD2A2}">
+				<Instance Id="#x08502000" TcSmClass="TComPlcObjDef" KeepUnrestoredLinks="2" TmcPath="PLC\PLC.tmc" TmcHash="{68697312-8C9D-B9D1-5BD1-F4D3B007B428}">
 					<Name>PLC Instance</Name>
 					<CLSID ClassFactory="TcPlc30">{08500001-0000-0000-F000-000000000064}</CLSID>
 					<Vars VarGrpType="1">

TIN001/TIN001/_Boot/TwinCAT RT (x86)/Plc/Port_851.cid

@@ -1,2 +1 @@
-6g'e›:^¼Ç«
-DŒ¼
+˜Rf¥ª£æy®Dýskèç