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@@ -68,38 +68,38 @@ I503_12 :BOOL; // Spare19
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I503_13 :BOOL; // Spare20
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I503_14 :BOOL; // Spare21
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I503_15 :BOOL; // Spare22
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-I504_00 :BOOL; // TPStatus
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-I504_01 :BOOL; // Power
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-I504_02 :BOOL; // Alarm
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-I504_03 :BOOL; // Wafer1
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-I504_04 :BOOL; // Wafer2
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-I504_05 :BOOL; // Wafer3
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-I504_06 :BOOL; // Wafer4
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-I504_07 :BOOL; // Wafer5
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-I504_08 :BOOL; // Spare31
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-I504_09 :BOOL; // Home1
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-I504_10 :BOOL; // Home2
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-I504_11 :BOOL; // Home3
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-I504_12 :BOOL; // Home4
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-I504_13 :BOOL; // Home5
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-I504_14 :BOOL; // Spare38
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-I504_15 :BOOL; // Running
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-I505_00 :BOOL; // C01Status
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-I505_01 :BOOL; // C02Status
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-I505_02 :BOOL; // C03Status
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-I505_03 :BOOL; // C04Status
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-I505_04 :BOOL; // C05Status
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-I505_05 :BOOL; // C06Status
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-I505_06 :BOOL; // C07Status
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-I505_07 :BOOL; // C08Status
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-I505_08 :BOOL; // C09Status
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-I505_09 :BOOL; // C10Status
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-I505_10 :BOOL; // C11Status
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-I505_11 :BOOL; // C12Status
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-I505_12 :BOOL; // Spare32
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-I505_13 :BOOL; // Spare33
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-I505_14 :BOOL; // Estop
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-I505_15 :BOOL; // SV_On
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+I504_00 :BOOL; // C01Status
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+I504_01 :BOOL; // C02Status
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+I504_02 :BOOL; // C03Status
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+I504_03 :BOOL; // C04Status
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+I504_04 :BOOL; // C05Status
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+I504_05 :BOOL; // C06Status
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+I504_06 :BOOL; // C07Status
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+I504_07 :BOOL; // C08Status
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+I504_08 :BOOL; // C09Status
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+I504_09 :BOOL; // C10Status
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+I504_10 :BOOL; // C11Status
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+I504_11 :BOOL; // C12Status
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+I504_12 :BOOL; // Spare32
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+I504_13 :BOOL; // Spare33
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+I504_14 :BOOL; // Estop
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+I504_15 :BOOL; // SV_On
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+I505_00 :BOOL; // TPStatus
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+I505_01 :BOOL; // Power
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+I505_02 :BOOL; // Alarm
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+I505_03 :BOOL; // Wafer1
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+I505_04 :BOOL; // Wafer2
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+I505_05 :BOOL; // Wafer3
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+I505_06 :BOOL; // Wafer4
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+I505_07 :BOOL; // Wafer5
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+I505_08 :BOOL; // Spare31
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+I505_09 :BOOL; // Home1
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+I505_10 :BOOL; // Home2
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+I505_11 :BOOL; // Home3
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+I505_12 :BOOL; // Home4
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+I505_13 :BOOL; // Home5
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+I505_14 :BOOL; // Spare38
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+I505_15 :BOOL; // Running
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I506_00 :BOOL; // Buffer_A3_N2_Pressure_Alarm
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I506_01 :BOOL; // Buffer_A3_FOUP_Detect
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