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@@ -11,9 +11,14 @@ VAR
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T1:TON;
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T2:TON;
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T3:TON;
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+ VGT1:TON;
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+ VGT2:TON;
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+ VGT3:TON;
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+ VGTrig:R_TRIG;
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i: INT;
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j: INT;
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MaxValue:LREAL;
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+ StepNo: INT;
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END_VAR
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]]></Declaration>
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<Implementation>
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@@ -27,6 +32,7 @@ Axis();
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WTR();
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N2Purge();
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RobotIL();
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+VGZero();
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//MFC/MFM
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AI.MFC1_PV:=GVL_MFC.MFC_Data[1].I_PV;
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AI.MFC2_PV:=GVL_MFC.MFC_Data[2].I_PV;
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@@ -17590,6 +17596,49 @@ PWQ. Q103_15 := ;*)]]></ST>
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</NWL>
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</Implementation>
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</Action>
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+ <Action Name="VGZero" Id="{a79283c1-1a30-4e46-b311-10e7813f3277}">
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+ <Implementation>
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+ <ST><![CDATA[//校零触发
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+ VGTrig(clk:=NDO.VG13ZeroStart AND AI.VG13_Pressure<>AO.VG13ZeroValue AND NOT NDI.VG13ZeroRuning );
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+ IF VGTrig.Q THEN
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+ NDI.VG13ZeroEnd:=0;
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+ StepNo:=100;
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+ END_IF
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+//校零流程
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+ CASE StepNo OF
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+ 100:
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+ GVL.stPMCtoPLC.Q300_15:=1;
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+ IF VGT1.Q THEN
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+ StepNo:=102;
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+ END_IF
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+ 102:
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+ GVL.stPMCtoPLC.Q300_15:=0;
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+ IF VGT2.Q THEN
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+ StepNo:=104;
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+ END_IF
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+ 104:
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+ IF AI.VG13_Pressure<>AO.VG13ZeroValue THEN
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+ StepNo:=100;
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+ ELSE
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+ StepNo:=999;
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+ NDI.VG13ZeroEnd:=1;
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+ END_IF
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+ END_CASE
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+//校零过程反馈
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+ //IF 99<StepNo AND StepNo<999 THEN
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+ // NDI.VG13ZeroRuning:=1;
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+ //END_IF
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+//校零超时
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+ IF VGT3.Q THEN
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+ StepNo:=9999;
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+ NDI.VG13ZeroEnd:=1;
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+ END_IF
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+//校零定时器
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+ VGT1(IN:= StepNo=100 AND GVL.stPMCtoPLC.Q300_15 =1 ,PT:=T#1S);
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+ VGT2(IN:= StepNo=102 AND GVL.stPMCtoPLC.Q300_15 =0 ,PT:=T#30S);
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+ //VGT3(IN:= NDI.VG13ZeroRuning =1 ,PT:=T#20S);]]></ST>
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+ </Implementation>
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+ </Action>
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<Action Name="VT101" Id="{e8e71a6b-4b0a-4393-a1dd-2ae0e88e13fe}">
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<Implementation>
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<ST><![CDATA[//VT101
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@@ -17653,6 +17702,7 @@ NDI.WaferRobotRunning:=LAI.I504_15;
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<LineId Id="825" Count="0" />
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<LineId Id="835" Count="0" />
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<LineId Id="861" Count="0" />
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+ <LineId Id="1012" Count="0" />
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<LineId Id="420" Count="61" />
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<LineId Id="908" Count="0" />
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<LineId Id="482" Count="3" />
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@@ -18057,6 +18107,10 @@ NDI.WaferRobotRunning:=LAI.I504_15;
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<LineId Id="140" Count="15" />
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<LineId Id="103" Count="33" />
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</LineIds>
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+ <LineIds Name="IO_EXCHANGE.VGZero">
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+ <LineId Id="2" Count="37" />
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+ <LineId Id="1" Count="0" />
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+ </LineIds>
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<LineIds Name="IO_EXCHANGE.VT101">
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<LineId Id="1" Count="11" />
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</LineIds>
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