ProximaPM.cs 7.1 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Reflection.Metadata.Ecma335;
  5. using System.Text;
  6. using System.Threading;
  7. using System.Threading.Tasks;
  8. namespace Test;
  9. public class PM1
  10. {
  11. public APC APC { get; set; }
  12. public Shutter Shutter { get; set; }
  13. public APCVATGV APCVATGV { get; set; }
  14. public LeakCheck LeakCheck { get; set; }
  15. public BoatElevatorServo BoatElevatorServo { get; set; }
  16. public BoatRotationServo BoatRotationServo { get; set; }
  17. public Recipe RecipeInfo { get; set; }
  18. public DataCollection<float> FS { get; set; }
  19. public DataCollection<float> VG { get; set; }
  20. public DataCollection<float> PGPS { get; set; }
  21. public DataCollection<bool> Sensor { get; set; }
  22. public DataCollection<float> AOValue { get; set; }
  23. public DataCollection<PairValue<FFU>> FFU { get; set; }
  24. public DataCollection<PairValue<MFC>> MFC { get; set; }
  25. public DataCollection<PairValue<bool>> AVValve { get; set; }
  26. public DataCollection<PairValue<float>> IoValve { get; set; }
  27. public DataCollection<PairValue<float>> GaslineHeater { get; set; }
  28. }
  29. public class APC
  30. {
  31. public bool IsError { get; set; }
  32. public float HomingStatus { get; set; }
  33. public float Interlock1 { get; set; }
  34. public float Interlock2 { get; set; }
  35. public float Interlock3 { get; set; }
  36. public float InterlockConstantOfInterlock3 { get; set; }
  37. public float ModeFeedback { get; set; }
  38. public float ModeSetPoint { get; set; }
  39. public float P1SensorOffsetSetting { get; set; }
  40. public float PositionFeedback { get; set; }
  41. public float PositionSetPoint { get; set; }
  42. public float PosMonOffsetSetting { get; set; }
  43. public float Pressure1Feedback { get; set; }
  44. public float Pressure2Feedback { get; set; }
  45. public float PressureSetPoint { get; set; }
  46. public float SelectedControllerFeedback { get; set; }
  47. public float SlowRateSetPoint { get; set; }
  48. public float SlowVacuumModeSetting { get; set; }
  49. public float ValveStatusThreshold { get; set; }
  50. }
  51. public class APCVATGV
  52. {
  53. public bool IsError { get; set; }
  54. public float InterlockConstantOfInterlock3 { get; set; }
  55. public float ModeSetPoint { get; set; }
  56. public float P1SensorOffsetSetting { get; set; }
  57. public float PositionFeedback { get; set; }
  58. public float PositionSetPoint { get; set; }
  59. public float PosMonOffsetSetting { get; set; }
  60. public float Pressure1Feedback { get; set; }
  61. public float Pressure2Feedback { get; set; }
  62. public float PressureSetPoint { get; set; }
  63. public float SlowRateSetPoint { get; set; }
  64. public float SlowVacuumModeSetting { get; set; }
  65. public float ValveStatusThreshold { get; set; }
  66. }
  67. public class BoatElevatorServo
  68. {
  69. public bool AtHomePosition { get; set; }
  70. public bool AtPosition1 { get; set; }
  71. public bool AtPosition2 { get; set; }
  72. public bool AtPosition3 { get; set; }
  73. public bool CurrentPosition { get; set; }
  74. public bool CurrentSpeed { get; set; }
  75. public bool IsAlarm { get; set; }
  76. public bool IsMoving { get; set; }
  77. public bool IsReady { get; set; }
  78. public bool IsServoOn { get; set; }
  79. public bool TargetPosition { get; set; }
  80. public bool TargetPositionFb { get; set; }
  81. }
  82. public class BoatRotationServo
  83. {
  84. public bool AtHomePosition { get; set; }
  85. public bool CurrentSpeed { get; set; }
  86. public bool IsAlarm { get; set; }
  87. public bool IsHomeDone { get; set; }
  88. public bool IsHoming { get; set; }
  89. public bool IsMoving { get; set; }
  90. public bool IsReady { get; set; }
  91. }
  92. public class BufferFoup
  93. {
  94. public float N2Flow { get; set; }
  95. public float N2Pressure { get; set; }
  96. }
  97. public class BufferServo
  98. {
  99. public bool AtPositionA1 { get; set; }
  100. public bool AtPositionA2 { get; set; }
  101. public bool AtPositionA3 { get; set; }
  102. public bool AtPositionA4 { get; set; }
  103. public bool AtPositionB1 { get; set; }
  104. public bool AtPositionB2 { get; set; }
  105. public bool AtPositionB3 { get; set; }
  106. public bool AtPositionB4 { get; set; }
  107. public bool AtPositionC1 { get; set; }
  108. public bool AtPositionC2 { get; set; }
  109. public bool AtPositionC3 { get; set; }
  110. public bool AtPositionC4 { get; set; }
  111. public bool AtPositionD1 { get; set; }
  112. public bool AtPositionD2 { get; set; }
  113. public bool AtPositionD3 { get; set; }
  114. public bool AtPositionD4 { get; set; }
  115. public float CurrentPosition { get; set; }
  116. public float CurrentSpeed { get; set; }
  117. public float CurrentTorque { get; set; }
  118. public bool IsAlarm { get; set; }
  119. public bool IsInPosition { get; set; }
  120. public bool IsMotorRun { get; set; }
  121. public bool IsReady { get; set; }
  122. public bool IsServoOn { get; set; }
  123. public bool IsServoOnBufferAxis { get; set; }
  124. public float TargetPosition { get; set; }
  125. }
  126. public class FFU
  127. {
  128. public float CurrentSpeed { get; set; }
  129. public bool IsSwitch { get; set; }
  130. public float SetSpeed { get; set; }
  131. }
  132. public class LeakCheck
  133. {
  134. public float ActualLeak { get; set; }
  135. public float BasePressure { get; set; }
  136. public float BasePressureLimit { get; set; }
  137. public float CheckTime { get; set; }
  138. public float DelayElapseTime { get; set; }
  139. public float DelayMonitorPressure { get; set; }
  140. public float DelayStartPressure { get; set; }
  141. public float DelayTime { get; set; }
  142. public float ElapseTime { get; set; }
  143. public float HighLimit { get; set; }
  144. public float LeakLimit { get; set; }
  145. public float LowLimit { get; set; }
  146. public float MonitorPressure { get; set; }
  147. public float RetryCurrentCount { get; set; }
  148. public float RetryLimit { get; set; }
  149. public float StartPressure { get; set; }
  150. }
  151. public class MFC
  152. {
  153. public float Feedback { get; set; }
  154. public float LastSetPoint { get; set; }
  155. public float MFCUnitEnum { get; set; }
  156. }
  157. public class Shutter
  158. {
  159. public bool DiClose { get; set; }
  160. public bool DiOpen { get; set; }
  161. public bool DoClose { get; set; }
  162. public bool DoOpen { get; set; }
  163. }
  164. public class Recipe
  165. {
  166. public float ChamberPressure { get; set; }
  167. public bool IsError { get; set; }
  168. public bool IsExecuteSubRecipe { get; set; }
  169. public bool IsInMaintainMode { get; set; }
  170. public bool IsLooping { get; set; }
  171. public bool IsOnline { get; set; }
  172. public bool IsProcessing { get; set; }
  173. public float LoopCountCurrent { get; set; }
  174. public float LoopCountSet { get; set; }
  175. public bool MBPEnable { get; set; }
  176. public bool NDIREnable { get; set; }
  177. public float NewShowTime { get; set; }
  178. public bool RecipeHold { get; set; }
  179. public float RecipeHolded { get; set; }
  180. public float RecipeHoldTime { get; set; }
  181. public float RecipeStepElapseTime { get; set; }
  182. public float RecipeStepNumber { get; set; }
  183. public float RecipeStepTime { get; set; }
  184. public float RecipeTotalElapseTime { get; set; }
  185. public float RecipeTotalTime { get; set; }
  186. public bool RecipeWait { get; set; }
  187. public bool SensorMini8OffLine { get; set; }
  188. public bool SP1Enable { get; set; }
  189. public float SubRecipeCurrentLoopCount { get; set; }
  190. public float SubRecipeLoopCount { get; set; }
  191. }