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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Reflection.Metadata.Ecma335;
- using System.Text;
- using System.Threading;
- using System.Threading.Tasks;
- namespace Test;
- public class PM1
- {
- public APC APC { get; set; }
- public Shutter Shutter { get; set; }
- public APCVATGV APCVATGV { get; set; }
- public LeakCheck LeakCheck { get; set; }
- public BoatElevatorServo BoatElevatorServo { get; set; }
- public BoatRotationServo BoatRotationServo { get; set; }
- public Recipe RecipeInfo { get; set; }
- public DataCollection<float> FS { get; set; }
- public DataCollection<float> VG { get; set; }
- public DataCollection<float> PGPS { get; set; }
- public DataCollection<bool> Sensor { get; set; }
- public DataCollection<float> AOValue { get; set; }
- public DataCollection<PairValue<FFU>> FFU { get; set; }
- public DataCollection<PairValue<MFC>> MFC { get; set; }
- public DataCollection<PairValue<bool>> AVValve { get; set; }
- public DataCollection<PairValue<float>> IoValve { get; set; }
- public DataCollection<PairValue<float>> GaslineHeater { get; set; }
- }
- public class APC
- {
- public bool IsError { get; set; }
- public float HomingStatus { get; set; }
- public float Interlock1 { get; set; }
- public float Interlock2 { get; set; }
- public float Interlock3 { get; set; }
- public float InterlockConstantOfInterlock3 { get; set; }
- public float ModeFeedback { get; set; }
- public float ModeSetPoint { get; set; }
- public float P1SensorOffsetSetting { get; set; }
- public float PositionFeedback { get; set; }
- public float PositionSetPoint { get; set; }
- public float PosMonOffsetSetting { get; set; }
- public float Pressure1Feedback { get; set; }
- public float Pressure2Feedback { get; set; }
- public float PressureSetPoint { get; set; }
- public float SelectedControllerFeedback { get; set; }
- public float SlowRateSetPoint { get; set; }
- public float SlowVacuumModeSetting { get; set; }
- public float ValveStatusThreshold { get; set; }
- }
- public class APCVATGV
- {
- public bool IsError { get; set; }
- public float InterlockConstantOfInterlock3 { get; set; }
- public float ModeSetPoint { get; set; }
- public float P1SensorOffsetSetting { get; set; }
- public float PositionFeedback { get; set; }
- public float PositionSetPoint { get; set; }
- public float PosMonOffsetSetting { get; set; }
- public float Pressure1Feedback { get; set; }
- public float Pressure2Feedback { get; set; }
- public float PressureSetPoint { get; set; }
- public float SlowRateSetPoint { get; set; }
- public float SlowVacuumModeSetting { get; set; }
- public float ValveStatusThreshold { get; set; }
- }
- public class BoatElevatorServo
- {
- public bool AtHomePosition { get; set; }
- public bool AtPosition1 { get; set; }
- public bool AtPosition2 { get; set; }
- public bool AtPosition3 { get; set; }
- public bool CurrentPosition { get; set; }
- public bool CurrentSpeed { get; set; }
- public bool IsAlarm { get; set; }
- public bool IsMoving { get; set; }
- public bool IsReady { get; set; }
- public bool IsServoOn { get; set; }
- public bool TargetPosition { get; set; }
- public bool TargetPositionFb { get; set; }
- }
- public class BoatRotationServo
- {
- public bool AtHomePosition { get; set; }
- public bool CurrentSpeed { get; set; }
- public bool IsAlarm { get; set; }
- public bool IsHomeDone { get; set; }
- public bool IsHoming { get; set; }
- public bool IsMoving { get; set; }
- public bool IsReady { get; set; }
- }
- public class BufferFoup
- {
- public float N2Flow { get; set; }
- public float N2Pressure { get; set; }
- }
- public class BufferServo
- {
- public bool AtPositionA1 { get; set; }
- public bool AtPositionA2 { get; set; }
- public bool AtPositionA3 { get; set; }
- public bool AtPositionA4 { get; set; }
- public bool AtPositionB1 { get; set; }
- public bool AtPositionB2 { get; set; }
- public bool AtPositionB3 { get; set; }
- public bool AtPositionB4 { get; set; }
- public bool AtPositionC1 { get; set; }
- public bool AtPositionC2 { get; set; }
- public bool AtPositionC3 { get; set; }
- public bool AtPositionC4 { get; set; }
- public bool AtPositionD1 { get; set; }
- public bool AtPositionD2 { get; set; }
- public bool AtPositionD3 { get; set; }
- public bool AtPositionD4 { get; set; }
- public float CurrentPosition { get; set; }
- public float CurrentSpeed { get; set; }
- public float CurrentTorque { get; set; }
- public bool IsAlarm { get; set; }
- public bool IsInPosition { get; set; }
- public bool IsMotorRun { get; set; }
- public bool IsReady { get; set; }
- public bool IsServoOn { get; set; }
- public bool IsServoOnBufferAxis { get; set; }
- public float TargetPosition { get; set; }
- }
- public class FFU
- {
- public float CurrentSpeed { get; set; }
- public bool IsSwitch { get; set; }
- public float SetSpeed { get; set; }
- }
- public class LeakCheck
- {
- public float ActualLeak { get; set; }
- public float BasePressure { get; set; }
- public float BasePressureLimit { get; set; }
- public float CheckTime { get; set; }
- public float DelayElapseTime { get; set; }
- public float DelayMonitorPressure { get; set; }
- public float DelayStartPressure { get; set; }
- public float DelayTime { get; set; }
- public float ElapseTime { get; set; }
- public float HighLimit { get; set; }
- public float LeakLimit { get; set; }
- public float LowLimit { get; set; }
- public float MonitorPressure { get; set; }
- public float RetryCurrentCount { get; set; }
- public float RetryLimit { get; set; }
- public float StartPressure { get; set; }
- }
- public class MFC
- {
- public float Feedback { get; set; }
- public float LastSetPoint { get; set; }
- public float MFCUnitEnum { get; set; }
- }
- public class Shutter
- {
- public bool DiClose { get; set; }
- public bool DiOpen { get; set; }
- public bool DoClose { get; set; }
- public bool DoOpen { get; set; }
- }
- public class Recipe
- {
- public float ChamberPressure { get; set; }
- public bool IsError { get; set; }
- public bool IsExecuteSubRecipe { get; set; }
- public bool IsInMaintainMode { get; set; }
- public bool IsLooping { get; set; }
- public bool IsOnline { get; set; }
- public bool IsProcessing { get; set; }
- public float LoopCountCurrent { get; set; }
- public float LoopCountSet { get; set; }
- public bool MBPEnable { get; set; }
- public bool NDIREnable { get; set; }
- public float NewShowTime { get; set; }
- public bool RecipeHold { get; set; }
- public float RecipeHolded { get; set; }
- public float RecipeHoldTime { get; set; }
- public float RecipeStepElapseTime { get; set; }
- public float RecipeStepNumber { get; set; }
- public float RecipeStepTime { get; set; }
- public float RecipeTotalElapseTime { get; set; }
- public float RecipeTotalTime { get; set; }
- public bool RecipeWait { get; set; }
- public bool SensorMini8OffLine { get; set; }
- public bool SP1Enable { get; set; }
- public float SubRecipeCurrentLoopCount { get; set; }
- public float SubRecipeLoopCount { get; set; }
- }
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