using System; using System.Collections.Generic; using System.Linq; using System.Reflection.Metadata.Ecma335; using System.Text; using System.Threading; using System.Threading.Tasks; namespace Test; public class PM1 { public APC APC { get; set; } public Shutter Shutter { get; set; } public APCVATGV APCVATGV { get; set; } public LeakCheck LeakCheck { get; set; } public BoatElevatorServo BoatElevatorServo { get; set; } public BoatRotationServo BoatRotationServo { get; set; } public Recipe RecipeInfo { get; set; } public DataCollection FS { get; set; } public DataCollection VG { get; set; } public DataCollection PGPS { get; set; } public DataCollection Sensor { get; set; } public DataCollection AOValue { get; set; } public DataCollection> FFU { get; set; } public DataCollection> MFC { get; set; } public DataCollection> AVValve { get; set; } public DataCollection> IoValve { get; set; } public DataCollection> GaslineHeater { get; set; } } public class APC { public bool IsError { get; set; } public float HomingStatus { get; set; } public float Interlock1 { get; set; } public float Interlock2 { get; set; } public float Interlock3 { get; set; } public float InterlockConstantOfInterlock3 { get; set; } public float ModeFeedback { get; set; } public float ModeSetPoint { get; set; } public float P1SensorOffsetSetting { get; set; } public float PositionFeedback { get; set; } public float PositionSetPoint { get; set; } public float PosMonOffsetSetting { get; set; } public float Pressure1Feedback { get; set; } public float Pressure2Feedback { get; set; } public float PressureSetPoint { get; set; } public float SelectedControllerFeedback { get; set; } public float SlowRateSetPoint { get; set; } public float SlowVacuumModeSetting { get; set; } public float ValveStatusThreshold { get; set; } } public class APCVATGV { public bool IsError { get; set; } public float InterlockConstantOfInterlock3 { get; set; } public float ModeSetPoint { get; set; } public float P1SensorOffsetSetting { get; set; } public float PositionFeedback { get; set; } public float PositionSetPoint { get; set; } public float PosMonOffsetSetting { get; set; } public float Pressure1Feedback { get; set; } public float Pressure2Feedback { get; set; } public float PressureSetPoint { get; set; } public float SlowRateSetPoint { get; set; } public float SlowVacuumModeSetting { get; set; } public float ValveStatusThreshold { get; set; } } public class BoatElevatorServo { public bool AtHomePosition { get; set; } public bool AtPosition1 { get; set; } public bool AtPosition2 { get; set; } public bool AtPosition3 { get; set; } public bool CurrentPosition { get; set; } public bool CurrentSpeed { get; set; } public bool IsAlarm { get; set; } public bool IsMoving { get; set; } public bool IsReady { get; set; } public bool IsServoOn { get; set; } public bool TargetPosition { get; set; } public bool TargetPositionFb { get; set; } } public class BoatRotationServo { public bool AtHomePosition { get; set; } public bool CurrentSpeed { get; set; } public bool IsAlarm { get; set; } public bool IsHomeDone { get; set; } public bool IsHoming { get; set; } public bool IsMoving { get; set; } public bool IsReady { get; set; } } public class BufferFoup { public float N2Flow { get; set; } public float N2Pressure { get; set; } } public class BufferServo { public bool AtPositionA1 { get; set; } public bool AtPositionA2 { get; set; } public bool AtPositionA3 { get; set; } public bool AtPositionA4 { get; set; } public bool AtPositionB1 { get; set; } public bool AtPositionB2 { get; set; } public bool AtPositionB3 { get; set; } public bool AtPositionB4 { get; set; } public bool AtPositionC1 { get; set; } public bool AtPositionC2 { get; set; } public bool AtPositionC3 { get; set; } public bool AtPositionC4 { get; set; } public bool AtPositionD1 { get; set; } public bool AtPositionD2 { get; set; } public bool AtPositionD3 { get; set; } public bool AtPositionD4 { get; set; } public float CurrentPosition { get; set; } public float CurrentSpeed { get; set; } public float CurrentTorque { get; set; } public bool IsAlarm { get; set; } public bool IsInPosition { get; set; } public bool IsMotorRun { get; set; } public bool IsReady { get; set; } public bool IsServoOn { get; set; } public bool IsServoOnBufferAxis { get; set; } public float TargetPosition { get; set; } } public class FFU { public float CurrentSpeed { get; set; } public bool IsSwitch { get; set; } public float SetSpeed { get; set; } } public class LeakCheck { public float ActualLeak { get; set; } public float BasePressure { get; set; } public float BasePressureLimit { get; set; } public float CheckTime { get; set; } public float DelayElapseTime { get; set; } public float DelayMonitorPressure { get; set; } public float DelayStartPressure { get; set; } public float DelayTime { get; set; } public float ElapseTime { get; set; } public float HighLimit { get; set; } public float LeakLimit { get; set; } public float LowLimit { get; set; } public float MonitorPressure { get; set; } public float RetryCurrentCount { get; set; } public float RetryLimit { get; set; } public float StartPressure { get; set; } } public class MFC { public float Feedback { get; set; } public float LastSetPoint { get; set; } public float MFCUnitEnum { get; set; } } public class Shutter { public bool DiClose { get; set; } public bool DiOpen { get; set; } public bool DoClose { get; set; } public bool DoOpen { get; set; } } public class Recipe { public float ChamberPressure { get; set; } public bool IsError { get; set; } public bool IsExecuteSubRecipe { get; set; } public bool IsInMaintainMode { get; set; } public bool IsLooping { get; set; } public bool IsOnline { get; set; } public bool IsProcessing { get; set; } public float LoopCountCurrent { get; set; } public float LoopCountSet { get; set; } public bool MBPEnable { get; set; } public bool NDIREnable { get; set; } public float NewShowTime { get; set; } public bool RecipeHold { get; set; } public float RecipeHolded { get; set; } public float RecipeHoldTime { get; set; } public float RecipeStepElapseTime { get; set; } public float RecipeStepNumber { get; set; } public float RecipeStepTime { get; set; } public float RecipeTotalElapseTime { get; set; } public float RecipeTotalTime { get; set; } public bool RecipeWait { get; set; } public bool SensorMini8OffLine { get; set; } public bool SP1Enable { get; set; } public float SubRecipeCurrentLoopCount { get; set; } public float SubRecipeLoopCount { get; set; } }