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@@ -0,0 +1,217 @@
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+namespace DB_Proxima;
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+
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+public class PM1
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+{
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+ public APC? APC { get; set; }
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+ public Shutter? Shutter { get; set; }
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+ public APCVATGV? APCVATGV { get; set; }
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+ public LeakCheck? LeakCheck { get; set; }
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+ public BoatElevatorServo? BoatElevatorServo { get; set; }
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+ public BoatRotationServo? BoatRotationServo { get; set; }
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+ public Recipe? RecipeInfo { get; set; }
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+
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+ public DataCollection<float>? FS { get; set; }
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+ public DataCollection<float>? VG { get; set; }
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+ public DataCollection<float>? PGPS { get; set; }
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+ public DataCollection<bool>? Sensor { get; set; }
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+ public DataCollection<float>? AOValue { get; set; }
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+ public DataCollection<FFU>? FFU { get; set; }
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+ public DataCollection<BufferFoup>? BufferFoup{ get; set; }
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+ public DataCollection<MFC>? MFC { get; set; }
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+ public DataCollection<PairValue<bool>>? AVValve { get; set; }
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+ public DataCollection<PairValue<float>>? IoValve { get; set; }
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+ public DataCollection<PairValue<float>>? GaslineHeater { get; set; }
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+}
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+
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+public class APC : GeneralDB
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+{
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+ public bool IsError { get; set; }
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+ public float HomingStatus { get; set; }
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+ public float Interlock1 { get; set; }
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+ public float Interlock2 { get; set; }
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+ public float Interlock3 { get; set; }
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+ public float InterlockConstantOfInterlock3 { get; set; }
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+ public float ModeFeedback { get; set; }
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+ public float ModeSetPoint { get; set; }
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+ public float P1SensorOffsetSetting { get; set; }
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+ public float PositionFeedback { get; set; }
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+ public float PositionSetPoint { get; set; }
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+ public float PosMonOffsetSetting { get; set; }
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+ public float Pressure1Feedback { get; set; }
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+ public float Pressure2Feedback { get; set; }
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+ public float PressureSetPoint { get; set; }
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+ public float SelectedControllerFeedback { get; set; }
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+ public float SlowRateSetPoint { get; set; }
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+ public float SlowVacuumModeSetting { get; set; }
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+ public float ValveStatusThreshold { get; set; }
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+
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+}
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+
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+public class APCVATGV : GeneralDB
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+{
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+ public bool IsError { get; set; }
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+ public float InterlockConstantOfInterlock3 { get; set; }
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+ public float ModeSetPoint { get; set; }
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+ public float P1SensorOffsetSetting { get; set; }
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+ public float PositionFeedback { get; set; }
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+ public float PositionSetPoint { get; set; }
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+ public float PosMonOffsetSetting { get; set; }
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+ public float Pressure1Feedback { get; set; }
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+ public float Pressure2Feedback { get; set; }
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+ public float PressureSetPoint { get; set; }
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+ public float SlowRateSetPoint { get; set; }
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+ public float SlowVacuumModeSetting { get; set; }
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+ public float ValveStatusThreshold { get; set; }
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+
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+}
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+
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+public class BoatElevatorServo : GeneralDB
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+{
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+ public bool AtHomePosition { get; set; }
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+ public bool AtPosition1 { get; set; }
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+ public bool AtPosition2 { get; set; }
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+ public bool AtPosition3 { get; set; }
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+ public bool CurrentPosition { get; set; }
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+ public bool CurrentSpeed { get; set; }
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+ public bool IsAlarm { get; set; }
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+ public bool IsMoving { get; set; }
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+ public bool IsReady { get; set; }
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+ public bool IsServoOn { get; set; }
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+ public bool TargetPosition { get; set; }
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+ public bool TargetPositionFb { get; set; }
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+
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+
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+}
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+
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+public class BoatRotationServo : GeneralDB
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+{
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+ public bool AtHomePosition { get; set; }
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+ public bool CurrentSpeed { get; set; }
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+ public bool IsAlarm { get; set; }
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+ public bool IsHomeDone { get; set; }
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+ public bool IsHoming { get; set; }
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+ public bool IsMoving { get; set; }
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+ public bool IsReady { get; set; }
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+}
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+
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+public class BufferFoup
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+{
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+ public float N2Flow { get; set; }
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+ public float N2Pressure { get; set; }
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+}
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+
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+public class BufferServo
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+{
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+ public bool AtPositionA1 { get; set; }
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+ public bool AtPositionA2 { get; set; }
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+ public bool AtPositionA3 { get; set; }
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+ public bool AtPositionA4 { get; set; }
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+ public bool AtPositionB1 { get; set; }
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+ public bool AtPositionB2 { get; set; }
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+ public bool AtPositionB3 { get; set; }
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+ public bool AtPositionB4 { get; set; }
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+ public bool AtPositionC1 { get; set; }
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+ public bool AtPositionC2 { get; set; }
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+ public bool AtPositionC3 { get; set; }
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+ public bool AtPositionC4 { get; set; }
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+ public bool AtPositionD1 { get; set; }
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+ public bool AtPositionD2 { get; set; }
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+ public bool AtPositionD3 { get; set; }
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+ public bool AtPositionD4 { get; set; }
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+ public float CurrentPosition { get; set; }
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+ public float CurrentSpeed { get; set; }
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+ public float CurrentTorque { get; set; }
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+ public bool IsAlarm { get; set; }
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+ public bool IsInPosition { get; set; }
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+ public bool IsMotorRun { get; set; }
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+ public bool IsReady { get; set; }
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+ public bool IsServoOn { get; set; }
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+ public bool IsServoOnBufferAxis { get; set; }
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+ public float TargetPosition { get; set; }
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+}
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+
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+public class FFU
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+{
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+ public float CurrentSpeed { get; set; }
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+ public bool IsSwitch { get; set; }
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+ public float SetSpeed { get; set; }
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+}
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+
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+public class LeakCheck : GeneralDB
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+{
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+ public float ActualLeak { get; set; }
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+ public float BasePressure { get; set; }
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+ public float BasePressureLimit { get; set; }
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+ public float CheckTime { get; set; }
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+ public float DelayElapseTime { get; set; }
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+ public float DelayMonitorPressure { get; set; }
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+ public float DelayStartPressure { get; set; }
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+ public float DelayTime { get; set; }
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+ public float ElapseTime { get; set; }
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+ public float HighLimit { get; set; }
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+ public float LeakLimit { get; set; }
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+ public float LowLimit { get; set; }
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+ public float MonitorPressure { get; set; }
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+ public float RetryCurrentCount { get; set; }
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+ public float RetryLimit { get; set; }
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+ public float StartPressure { get; set; }
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+
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+}
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+
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+public class MFC
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+{
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+ public float Feedback { get; set; }
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+ public float LastSetPoint { get; set; }
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+ public float MFCUnitEnum { get; set; }
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+}
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+
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+public class Shutter : GeneralDB
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+{
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+ public bool DiClose { get; set; }
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+ public bool DiOpen { get; set; }
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+ public bool DoClose { get; set; }
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+ public bool DoOpen { get; set; }
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+}
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+
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+public class Recipe : GeneralDB
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+{
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+ public bool IsError { get; set; }
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+ public bool IsExecuteSubRecipe { get; set; }
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+ public bool IsInMaintainMode { get; set; }
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+ public bool IsLooping { get; set; }
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+ public bool IsOnline { get; set; }
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+ public bool IsProcessing { get; set; }
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+
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+
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+ public bool AGVEnable { get; set; }
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+ public float DG1 { get; set; }
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+ public bool DPEnable { get; set; }
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+ public bool DPR1Enable { get; set; }
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+ public bool DPR2Enable { get; set; }
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+ public bool ECOEnable { get; set; }
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+ public bool F2ClnEnable { get; set; }
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+ public bool FNEnable { get; set; }
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+ public bool MBPEnable { get; set; }
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+ public float MP21_PS { get; set; }
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+ public bool NDIREnable { get; set; }
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+ public float NewShowTime { get; set; }
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+ public bool NF3ClnEnable { get; set; }
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+ public bool PZEROEnable { get; set; }
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+ public bool RecipeHold { get; set; }
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+ public bool RecipeHolded { get; set; }
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+ public float RecipeHoldTime { get; set; }
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+ public float RecipeStepElapseTime { get; set; }
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+ public float RecipeStepNumber { get; set; }
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+ public float RecipeStepTime { get; set; }
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+ public float RecipeTotalElapseTime { get; set; }
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+ public float RecipeTotalTime { get; set; }
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+ public bool RecipeWait { get; set; }
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+ public bool SP1Enable { get; set; }
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+ public float SubRecipeCurrentLoopCount { get; set; }
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+ public float SubRecipeLoopCount { get; set; }
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+ public bool TADJEnable { get; set; }
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+ public bool TMNTEnable { get; set; }
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+ public bool WAT1Enable { get; set; }
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+ public bool WAT2Enable { get; set; }
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+
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+}
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