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- using Aitex.Core.RT.SCCore;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Runtime.Serialization;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.Common.Equipment
- {
- /// <summary>
- /// 在框架中,Module指具备放置Wafer的单元
- /// </summary>
- [DataContract]
- [Serializable]
- public enum ModuleName
- {
- [EnumMember]
- System = 0,
- [EnumMember]
- LP1,
- [EnumMember]
- LP2,
- [EnumMember]
- LP3,
- [EnumMember]
- LP4,
- [EnumMember]
- LP5,
- [EnumMember]
- LP6,
- [EnumMember]
- LP7,
- [EnumMember]
- LP8,
- [EnumMember]
- LP9,
- [EnumMember]
- LP10,
- //robot modules
- //[EnumMember]
- //Robot,
- [EnumMember]
- VaccumRobot,
- [EnumMember]
- LoadRobot,
- [EnumMember]
- EfemRobot,
- [EnumMember]
- TMRobot,
- //upenders
- //[EnumMember]
- //Upender,
- //efem
- [EnumMember]
- EFEM,
- //aligners
- [EnumMember]
- Aligner,
- //load locks
- [EnumMember]
- LL1,
- [EnumMember]
- LL2,
- [EnumMember]
- LL3,
- [EnumMember]
- LL4,
- //load locks
- //[EnumMember]
- //LLA,
- //[EnumMember]
- //LLB,
- //[EnumMember]
- //LLC,
- //[EnumMember]
- //LLD,
- //[EnumMember]
- //LLE,
- //[EnumMember]
- //LLF,
- //[EnumMember]
- //LLG,
- //[EnumMember]
- //LLH,
- //[EnumMember]
- //VCE1,
- //[EnumMember]
- //VCE2,
- //[EnumMember]
- //VCEA,
- //transfer modules
- [EnumMember]
- TM,
- [EnumMember]
- Cooling1,
- [EnumMember]
- Cooling2,
- //buffers
- [EnumMember]
- Buffer,
- [EnumMember]
- Buffer1,
- [EnumMember]
- Buffer2,
- [EnumMember]
- Buffer3,
- [EnumMember]
- Buffer4,
- [EnumMember]
- Buffer5,
- [EnumMember]
- Buffer6,
- //PMs
- [EnumMember]
- PM,
- [EnumMember]
- PM1,
- [EnumMember]
- PM2,
- [EnumMember]
- PM3,
- [EnumMember]
- PM4,
- [EnumMember]
- PM5,
- [EnumMember]
- PM6,
- [EnumMember]
- PM7,
- [EnumMember]
- PM8,
- [EnumMember]
- PMA,
- [EnumMember]
- PMB,
- [EnumMember]
- PMC,
- [EnumMember]
- PMD,
- [EnumMember]
- Robot,
- [EnumMember]
- Handler,
- [EnumMember]
- WIDReader1,
- [EnumMember]
- WIDReader2,
- [EnumMember]
- TurnOverStation,
- [EnumMember]
- Host,
- [EnumMember]
- Cooling,
- [EnumMember]
- Cassette,
- [EnumMember]
- CassetteA,
- [EnumMember]
- CassetteB,
- [EnumMember]
- LoadLock,
- [EnumMember]
- SMIFLeft,
- [EnumMember]
- SMIFRight,
- [EnumMember]
- SMIFA,
- [EnumMember]
- SMIFB,
- [EnumMember]
- CassetteRobot,
- [EnumMember]
- SignalTower,
- [EnumMember]
- TurnStation,
- [EnumMember]
- Stocker1,
- [EnumMember]
- Stocker2,
- [EnumMember]
- Stocker3,
- [EnumMember]
- Stocker4,
- [EnumMember]
- Stocker5,
- [EnumMember]
- Stocker6,
- [EnumMember]
- Stocker7,
- [EnumMember]
- Stocker8,
- [EnumMember]
- Stocker9,
- [EnumMember]
- Stocker10,
- [EnumMember]
- Stocker11,
- [EnumMember]
- Stocker12,
- [EnumMember]
- Stocker13,
- [EnumMember]
- Stocker14,
- [EnumMember]
- Stocker15,
- [EnumMember]
- Stocker16,
- [EnumMember]
- Stocker17,
- [EnumMember]
- Stocker18,
- [EnumMember]
- Stocker19,
- [EnumMember]
- Stocker20,
- [EnumMember]
- Stocker21,
- [EnumMember]
- StageA,
- [EnumMember]
- StageB,
- [EnumMember]
- WaferRobot,
- [EnumMember]
- Boat,
- [EnumMember]
- CMB,
- [EnumMember]
- Cassette1,
- [EnumMember]
- Cassette2,
- [EnumMember]
- Cassette3,
- [EnumMember]
- Cassette4,
- [EnumMember]
- Cassette5,
- [EnumMember]
- CarrierRobot,
- [EnumMember]
- FIMS1,
- [EnumMember]
- FIMS2,
- [EnumMember]
- Stocker22,
-
- [EnumMember]
- GaslineHeater,
- [EnumMember]
- FIMS,
- [EnumMember]
- LP,
- [EnumMember]
- Stocker,
- [EnumMember]
- FFU,
- }
- public class ModuleNameString
- {
- public const string System = "System";
- public const string LDULD = "LDULD";
- public const string BufferOut = "BufferOut";
- public const string BufferIn = "BufferIn";
- public const string Dryer = "Dryer";
- public const string QDR = "QDR";
- public const string Robot = "Robot";
- public const string Handler = "Handler";
- }
- }
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