ModuleName.cs 5.3 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351
  1. using Aitex.Core.RT.SCCore;
  2. using System;
  3. using System.Collections.Generic;
  4. using System.Linq;
  5. using System.Runtime.Serialization;
  6. using System.Text;
  7. using System.Threading.Tasks;
  8. namespace MECF.Framework.Common.Equipment
  9. {
  10. /// <summary>
  11. /// 在框架中,Module指具备放置Wafer的单元
  12. /// </summary>
  13. [DataContract]
  14. [Serializable]
  15. public enum ModuleName
  16. {
  17. [EnumMember]
  18. System = 0,
  19. [EnumMember]
  20. LP1,
  21. [EnumMember]
  22. LP2,
  23. [EnumMember]
  24. LP3,
  25. [EnumMember]
  26. LP4,
  27. [EnumMember]
  28. LP5,
  29. [EnumMember]
  30. LP6,
  31. [EnumMember]
  32. LP7,
  33. [EnumMember]
  34. LP8,
  35. [EnumMember]
  36. LP9,
  37. [EnumMember]
  38. LP10,
  39. //robot modules
  40. //[EnumMember]
  41. //Robot,
  42. [EnumMember]
  43. VaccumRobot,
  44. [EnumMember]
  45. LoadRobot,
  46. [EnumMember]
  47. EfemRobot,
  48. [EnumMember]
  49. TMRobot,
  50. //upenders
  51. //[EnumMember]
  52. //Upender,
  53. //efem
  54. [EnumMember]
  55. EFEM,
  56. //aligners
  57. [EnumMember]
  58. Aligner,
  59. //load locks
  60. [EnumMember]
  61. LL1,
  62. [EnumMember]
  63. LL2,
  64. [EnumMember]
  65. LL3,
  66. [EnumMember]
  67. LL4,
  68. //load locks
  69. //[EnumMember]
  70. //LLA,
  71. //[EnumMember]
  72. //LLB,
  73. //[EnumMember]
  74. //LLC,
  75. //[EnumMember]
  76. //LLD,
  77. //[EnumMember]
  78. //LLE,
  79. //[EnumMember]
  80. //LLF,
  81. //[EnumMember]
  82. //LLG,
  83. //[EnumMember]
  84. //LLH,
  85. //[EnumMember]
  86. //VCE1,
  87. //[EnumMember]
  88. //VCE2,
  89. //[EnumMember]
  90. //VCEA,
  91. //transfer modules
  92. [EnumMember]
  93. TM,
  94. [EnumMember]
  95. Cooling1,
  96. [EnumMember]
  97. Cooling2,
  98. //buffers
  99. [EnumMember]
  100. Buffer,
  101. [EnumMember]
  102. Buffer1,
  103. [EnumMember]
  104. Buffer2,
  105. [EnumMember]
  106. Buffer3,
  107. [EnumMember]
  108. Buffer4,
  109. [EnumMember]
  110. Buffer5,
  111. [EnumMember]
  112. Buffer6,
  113. //PMs
  114. [EnumMember]
  115. PM,
  116. [EnumMember]
  117. PM1,
  118. [EnumMember]
  119. PM2,
  120. [EnumMember]
  121. PM3,
  122. [EnumMember]
  123. PM4,
  124. [EnumMember]
  125. PM5,
  126. [EnumMember]
  127. PM6,
  128. [EnumMember]
  129. PM7,
  130. [EnumMember]
  131. PM8,
  132. [EnumMember]
  133. PMA,
  134. [EnumMember]
  135. PMB,
  136. [EnumMember]
  137. PMC,
  138. [EnumMember]
  139. PMD,
  140. [EnumMember]
  141. Robot,
  142. [EnumMember]
  143. Handler,
  144. [EnumMember]
  145. WIDReader1,
  146. [EnumMember]
  147. WIDReader2,
  148. [EnumMember]
  149. TurnOverStation,
  150. [EnumMember]
  151. Host,
  152. [EnumMember]
  153. Cooling,
  154. [EnumMember]
  155. Cassette,
  156. [EnumMember]
  157. CassetteA,
  158. [EnumMember]
  159. CassetteB,
  160. [EnumMember]
  161. LoadLock,
  162. [EnumMember]
  163. SMIFLeft,
  164. [EnumMember]
  165. SMIFRight,
  166. [EnumMember]
  167. SMIFA,
  168. [EnumMember]
  169. SMIFB,
  170. [EnumMember]
  171. CassetteRobot,
  172. [EnumMember]
  173. SignalTower,
  174. [EnumMember]
  175. TurnStation,
  176. [EnumMember]
  177. Stocker1,
  178. [EnumMember]
  179. Stocker2,
  180. [EnumMember]
  181. Stocker3,
  182. [EnumMember]
  183. Stocker4,
  184. [EnumMember]
  185. Stocker5,
  186. [EnumMember]
  187. Stocker6,
  188. [EnumMember]
  189. Stocker7,
  190. [EnumMember]
  191. Stocker8,
  192. [EnumMember]
  193. Stocker9,
  194. [EnumMember]
  195. Stocker10,
  196. [EnumMember]
  197. Stocker11,
  198. [EnumMember]
  199. Stocker12,
  200. [EnumMember]
  201. Stocker13,
  202. [EnumMember]
  203. Stocker14,
  204. [EnumMember]
  205. Stocker15,
  206. [EnumMember]
  207. Stocker16,
  208. [EnumMember]
  209. Stocker17,
  210. [EnumMember]
  211. Stocker18,
  212. [EnumMember]
  213. Stocker19,
  214. [EnumMember]
  215. Stocker20,
  216. [EnumMember]
  217. Stocker21,
  218. [EnumMember]
  219. StageA,
  220. [EnumMember]
  221. StageB,
  222. [EnumMember]
  223. WaferRobot,
  224. [EnumMember]
  225. Boat,
  226. [EnumMember]
  227. CMB,
  228. [EnumMember]
  229. Cassette1,
  230. [EnumMember]
  231. Cassette2,
  232. [EnumMember]
  233. Cassette3,
  234. [EnumMember]
  235. Cassette4,
  236. [EnumMember]
  237. Cassette5,
  238. [EnumMember]
  239. CarrierRobot,
  240. [EnumMember]
  241. FIMS1,
  242. [EnumMember]
  243. FIMS2,
  244. [EnumMember]
  245. Stocker22,
  246. [EnumMember]
  247. GaslineHeater,
  248. [EnumMember]
  249. FIMS,
  250. [EnumMember]
  251. LP,
  252. [EnumMember]
  253. Stocker,
  254. [EnumMember]
  255. FFU,
  256. }
  257. public class ModuleNameString
  258. {
  259. public const string System = "System";
  260. public const string LDULD = "LDULD";
  261. public const string BufferOut = "BufferOut";
  262. public const string BufferIn = "BufferIn";
  263. public const string Dryer = "Dryer";
  264. public const string QDR = "QDR";
  265. public const string Robot = "Robot";
  266. public const string Handler = "Handler";
  267. }
  268. }