Recipe Name AAA Total Time AAA Film HTK AAA nm Alarm AAA MFC Detail Step Name AAA Step Time 00:00:00 Command AAA Abort Recipe AAA Temp Detail Mode AAA Correct AAA RHC AAA All Zone Temp Set Ramp Set Check Gas Patten AUX Set Loader Command None Speed1 0 mm/min Speed1 0 mm/min Speed1 0 mm/min Pressure Mode DUAL CKD Command None PID Set 0 Torr VAT + GV Command None Set 0 Torr Recipe Header Combination VP Data List Recipe Steps Total : 2 / 3 Append Step Override Copy Insert Copy Prev.Step OverWrite Prev.Step Insert Curr.Step Delete Multi Step Delete Save Cancel