File Name Layout1\Layout Recipe 1 Decision Method Number of Product and Fill Set Total Wafer Number Wafer Supplement All Product Top Stuffing Monitor 1 Wafer Charge Automatic Equal Layout Monitor 2 Wafer Charge Appoint between Carriers Disp Type Number Map Carrier BoatTotal Slot 0 V Axis Mode Normal Total Slot No. Upper Side Dummy Num Fill Dummy Transfer None Product Zero Not Fill None Product Transfer Position None Monitor 1 Wafer Discharge None Monitor 2 Wafer Discharge None Lower Side Dummy Num 0 Lower Side Dummy Num 0 Save Close