using Aitex.Core.RT.SCCore; using System; using System.Collections.Generic; using System.Linq; using System.Runtime.Serialization; using System.Text; using System.Threading.Tasks; namespace MECF.Framework.Common.Equipment { /// /// 在框架中,Module指具备放置Wafer的单元 /// [DataContract] [Serializable] public enum ModuleName { [EnumMember] System = 0, [EnumMember] LP1, [EnumMember] LP2, [EnumMember] LP3, [EnumMember] LP4, [EnumMember] LP5, [EnumMember] LP6, [EnumMember] LP7, [EnumMember] LP8, [EnumMember] LP9, [EnumMember] LP10, //robot modules //[EnumMember] //Robot, [EnumMember] VaccumRobot, [EnumMember] LoadRobot, [EnumMember] EfemRobot, [EnumMember] TMRobot, //upenders //[EnumMember] //Upender, //efem [EnumMember] EFEM, //aligners [EnumMember] Aligner, //load locks [EnumMember] LL1, [EnumMember] LL2, [EnumMember] LL3, [EnumMember] LL4, //load locks //[EnumMember] //LLA, //[EnumMember] //LLB, //[EnumMember] //LLC, //[EnumMember] //LLD, //[EnumMember] //LLE, //[EnumMember] //LLF, //[EnumMember] //LLG, //[EnumMember] //LLH, //[EnumMember] //VCE1, //[EnumMember] //VCE2, //[EnumMember] //VCEA, //transfer modules [EnumMember] TM, [EnumMember] Cooling1, [EnumMember] Cooling2, //buffers [EnumMember] Buffer, [EnumMember] Buffer1, [EnumMember] Buffer2, [EnumMember] Buffer3, [EnumMember] Buffer4, [EnumMember] Buffer5, [EnumMember] Buffer6, //PMs [EnumMember] PM, [EnumMember] PM1, [EnumMember] PM2, [EnumMember] PM3, [EnumMember] PM4, [EnumMember] PM5, [EnumMember] PM6, [EnumMember] PM7, [EnumMember] PM8, [EnumMember] PMA, [EnumMember] PMB, [EnumMember] PMC, [EnumMember] PMD, [EnumMember] Robot, [EnumMember] Handler, [EnumMember] WIDReader1, [EnumMember] WIDReader2, [EnumMember] TurnOverStation, [EnumMember] Host, [EnumMember] Cooling, [EnumMember] Cassette, [EnumMember] CassetteA, [EnumMember] CassetteB, [EnumMember] LoadLock, [EnumMember] SMIFLeft, [EnumMember] SMIFRight, [EnumMember] SMIFA, [EnumMember] SMIFB, [EnumMember] CassetteRobot, [EnumMember] SignalTower, [EnumMember] TurnStation, [EnumMember] Stocker1, [EnumMember] Stocker2, [EnumMember] Stocker3, [EnumMember] Stocker4, [EnumMember] Stocker5, [EnumMember] Stocker6, [EnumMember] Stocker7, [EnumMember] Stocker8, [EnumMember] Stocker9, [EnumMember] Stocker10, [EnumMember] Stocker11, [EnumMember] Stocker12, [EnumMember] Stocker13, [EnumMember] Stocker14, [EnumMember] Stocker15, [EnumMember] Stocker16, [EnumMember] Stocker17, [EnumMember] Stocker18, [EnumMember] Stocker19, [EnumMember] Stocker20, [EnumMember] Stocker21, [EnumMember] StageA, [EnumMember] StageB, [EnumMember] WaferRobot, [EnumMember] Boat, [EnumMember] CMB, [EnumMember] Cassette1, [EnumMember] Cassette2, [EnumMember] Cassette3, [EnumMember] Cassette4, [EnumMember] Cassette5, [EnumMember] CarrierRobot, [EnumMember] FIMS1, [EnumMember] FIMS2, [EnumMember] Stocker22, [EnumMember] GaslineHeater, [EnumMember] FIMS, [EnumMember] LP, [EnumMember] Stocker, [EnumMember] FFU, } public class ModuleNameString { public const string System = "System"; public const string LDULD = "LDULD"; public const string BufferOut = "BufferOut"; public const string BufferIn = "BufferIn"; public const string Dryer = "Dryer"; public const string QDR = "QDR"; public const string Robot = "Robot"; public const string Handler = "Handler"; } }