TIN_PMC/TIN001-PLC/TIN001/PMC/POU/_600_FIMS/FIMS.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="FIMS" Id="{c49a8530-954d-4021-bf6f-7b9ddd515fb8}" SpecialFunc="None">
    <Declaration><![CDATA[FUNCTION_BLOCK FIMS
VAR_INPUT
	TP_EN:BOOL;
END_VAR
VAR_OUTPUT
END_VAR
VAR
	PODManMode	:	BOOL	;
	FIMS1O2Status_b	:	BOOL	;
	FIMS1	:	FIMSSequence	;
	FIMS1VacuumStatus_b	:	BOOL	;
	FIMS2	:	FIMSSequence	;
	FIMS2VacuumStatus_b	:	BOOL	;
	FIMS1LoadCmd_b	:	BOOL	;
	FIMS1UnloadCmd_b	:	BOOL	;
	FIMS2LoadCmd_b	:	BOOL	;
	FIMS2UnloadCmd_b	:	BOOL	;
	FIMS1AlarmReset_b	:	BOOL	;
	FIMS2AlarmReset_b	:	BOOL	;
	FIMS1StopCmd_b	:	BOOL	;
	FIMS2StopCmd_b	:	BOOL	;
	FIMS1FoupCheck_b	:	BOOL	;
	FIMS2FoupCheck_b	:	BOOL	;
	FIMS1N2PurgeBypass_b	:	BOOL	;
	FIMS2N2PurgeBypass_b	:	BOOL	;
	MANUALBYPASS1	:	BOOL	;
	MANUALBYPASS2	:	BOOL	;
	TPHOST	:	R_TRIG	;
	LA_O2_Check_Done	:	BOOL	;
	FIMS1_O2_Check_Start	:	BOOL	;
	FIMS2_O2_Check_Start	:	BOOL	;
	FIMS1_O2_Check_Done	:	BOOL	;
	FIMS2_O2_Check_Done	:	BOOL	;
	UI_LA_O2_Check_First_EN	:	BOOL	;
	UI_FIMS1_O2_Check_EN	:	BOOL	;
	UI_FIMS2_O2_Check_EN	:	BOOL	;
	UI_N2_PURGE_PROCESS	:	BOOL	;
	UI_LA_O2_Over_Time	:	INT	;
	UI_LA_O2_Check_Time	:	INT	;
	UI_FOUP_O2_Over_Time	:	INT	;
	UI_FOUP_O2_Check_Time	:	INT	;
	UI_Exchange_LA_TO_FOUP_Wait_Time	:	INT	;
	UI_Exchange_FOUP_TO_LA_Wait_Time	:	INT	;
	UI_Exchange_FOUP_TO_FOUP_Wait_Time	:	INT	;
	UI_LA_O2_Check_SV	:	REAL	;
	UI_FOUP_O2_Check_SV	:	REAL	;
	TO_UI_LA_O2_Check_OT	:	BOOL	;
	TO_UI_FIMS1_O2_Check_OT	:	BOOL	;
	TO_UI_FIMS2_O2_Check_OT	:	BOOL	;
	LA_O2_Over_Time	:	TIME	;
	LA_O2_Check_Time	:	TIME	;
	FOUP_O2_Over_Time	:	TIME	;
	FOUP_O2_Check_Time	:	TIME	;
	Exchange_LA_TO_FOUP_Wait_Time	:	TIME	;
	Exchange_FOUP_TO_LA_Wait_Time	:	TIME	;
	Exchange_FOUP_TO_FOUP_Wait_Time	:	TIME	;
	LA_O2_Arrival_Timer	:	TON	;
	LA_O2_Check_Timer	:	TON	;
	LA_O2_Exchange_Wait	:	TON	;
	FIMS1_O2_Arrival_Timer	:	TON	;
	FIMS1_O2_Check_Timer	:	TON	;
	FIMS1_O2_Exchange_Wait	:	TON	;
	FIMS2_O2_Arrival_Timer	:	TON	;
	FIMS2_O2_Check_Timer	:	TON	;
	FIMS2_O2_Exchange_Wait	:	TON	;
	O2_Detect_STEP	:	INT	;
	N2_PURGE_PROCESS_Trig	:	R_TRIG	;
	N2_PURGE_UI_SV: INT;		
	P_First_RunMode:BOOL;
END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[//FIMS控制切换  上位机/操作手柄
	IF NOT TP_EN AND GVL.FIMSManualSt.AutoOrManual_b THEN
		FIMS1LoadCmd_b := GVL.FIMSManualSt.FIMS1AutoLoadCmd_b ;
		FIMS1UnloadCmd_b := GVL.FIMSManualSt.FIMS1AutoUnloadCmd_b ;
		FIMS2LoadCmd_b := GVL.FIMSManualSt.FIMS2AutoLoadCmd_b ;
		FIMS2UnloadCmd_b := GVL.FIMSManualSt.FIMS2AutoUnloadCmd_b ;
		FIMS1AlarmReset_b := ( GVL.FIMSDI[0].LoadAlarm_b OR GVL.FIMSDI[0].UnloadAlarm_b ) AND GVL.FIMSManualSt.FIMSAlarmReset_b ;
		FIMS2AlarmReset_b := ( GVL.FIMSDI[1].LoadAlarm_b OR GVL.FIMSDI[1].UnloadAlarm_b ) AND GVL.FIMSManualSt.FIMSAlarmReset_b ;
		FIMS1StopCmd_b := GVL.FIMSManualSt.FIMS1Stop_b ;
		FIMS2StopCmd_b := GVL.FIMSManualSt.FIMS2Stop_b ;
		FIMS1FoupCheck_b := NDI.FIMS1_FOUP_exist OR GVL.FIMSManualSt.FIMS1FoupBypass_b ;
		FIMS2FoupCheck_b := NDI.FIMS2_FOUP_exist OR GVL.FIMSManualSt.FIMS2FoupBypass_b ;
		FIMS1N2PurgeBypass_b := NOT GVL.FIMSManualSt.FIMS1N2PurgeBypass_b ;
		FIMS2N2PurgeBypass_b := NOT GVL.FIMSManualSt.FIMS2N2PurgeBypass_b ;
	ELSIF TP_EN THEN
		FIMS1LoadCmd_b := GVL.FIMSDO[0].LoadCommand_b ;
		FIMS1UnloadCmd_b := GVL.FIMSDO[0].UnloadCommand_b ;
		FIMS2LoadCmd_b := GVL.FIMSDO[1].LoadCommand_b ;
		FIMS2UnloadCmd_b := GVL.FIMSDO[1].UnloadCommand_b ;
		FIMS1AlarmReset_b := GVL.FIMSDO[0].AlarmReset_b ;
		FIMS2AlarmReset_b := GVL.FIMSDO[1].AlarmReset_b ;
		FIMS1StopCmd_b := GVL.FIMSDO[0].Stop_b ;
		FIMS2StopCmd_b := GVL.FIMSDO[1].Stop_b ;
		FIMS1FoupCheck_b := MANUALBYPASS1 OR NDI.FIMS1_FOUP_exist ;
		FIMS2FoupCheck_b := MANUALBYPASS2 OR NDI.FIMS2_FOUP_exist ;
		FIMS1N2PurgeBypass_b := GVL.FIMSDO[0].N2PurgeBypass_b ;
		FIMS2N2PurgeBypass_b := GVL.FIMSDO[1].N2PurgeBypass_b ;
	END_IF;
	IF NOT P_First_RunMode OR TP_EN OR ( NOT TP_EN AND ( ANY_TO_UINT(AO.TPUINumber)<> 10#191 ) ) THEN
		GVL.FIMSManualSt.FIMS1LatchOff1_b := FALSE ;
		GVL.FIMSManualSt.FIMS1LatchOn1_b := FALSE ;
		GVL.FIMSManualSt.FIMS1LatchOff2_b := FALSE ;
		GVL.FIMSManualSt.FIMS1LatchOn2_b := FALSE ;
		GVL.FIMSManualSt.FIMS2LatchOff1_b := FALSE ;
		GVL.FIMSManualSt.FIMS2LatchOn1_b := FALSE ;
		GVL.FIMSManualSt.FIMS2LatchOff2_b := FALSE ;
		GVL.FIMSManualSt.FIMS2LatchOn2_b := FALSE ;
			
		GVL.FIMSManualSt.FIMS1Seal_b := FALSE ;
		GVL.FIMSManualSt.FIMS1Release_b := FALSE ;
		GVL.FIMSManualSt.FIMS2Seal_b := FALSE ;
		GVL.FIMSManualSt.FIMS2Release_b := FALSE ;
		GVL.FIMSManualSt.FIMS1DoorClose_b := FALSE ;
		GVL.FIMSManualSt.FIMS1DoorOpen_b := FALSE ;
		GVL.FIMSManualSt.FIMS2DoorClose_b := FALSE ;
		GVL.FIMSManualSt.FIMS2DoorOpen_b := FALSE ;
			
		GVL.FIMSManualSt.FIMS1AvoidanceDown_b := FALSE ;
		GVL.FIMSManualSt.FIMS1AvoidanceUp_b := FALSE ;
		GVL.FIMSManualSt.FIMS2AvoidanceDown_b := FALSE ;
		GVL.FIMSManualSt.FIMS2AvoidanceUp_b := FALSE ;
		GVL.FIMSManualSt.FIMS1Undock_b := FALSE ;
		GVL.FIMSManualSt.FIMS1Dock_b := FALSE ;
		GVL.FIMSManualSt.FIMS2Undock_b := FALSE ;
		GVL.FIMSManualSt.FIMS2Dock_b := FALSE ;
			
		GVL.FIMSManualSt.FIMS1VacuumClose_b := FALSE ;
		GVL.FIMSManualSt.FIMS1VacuumOpen_b := FALSE ;
		GVL.FIMSManualSt.FIMS2VacuumClose_b := FALSE ;
		GVL.FIMSManualSt.FIMS2VacuumOpen_b := FALSE ;
		
		P_First_RunMode:=TRUE;

	END_IF;
	
//TP change mode from teach to host , reset all valve output
	TPHOST(Clk:=TP_EN(*, Q=>*));
	IF TPHOST.Q THEN
		GVL.FIMSValveAct.FIMS1VacuumClose_b := FALSE ;
		GVL.FIMSValveAct.FIMS1VacuumOpen_b := FALSE ;
		GVL.FIMSValveAct.FIMS2VacuumClose_b := FALSE ;
		GVL.FIMSValveAct.FIMS2VacuumOpen_b := FALSE ;
		
		GVL.FIMSValveAct.FIMS1LatchOff1_b := FALSE ;
		GVL.FIMSValveAct.FIMS1LatchOn1_b := FALSE ;
		GVL.FIMSValveAct.FIMS1LatchOff2_b := FALSE ;
		GVL.FIMSValveAct.FIMS1LatchOn2_b := FALSE ;
		GVL.FIMSValveAct.FIMS2LatchOff1_b := FALSE ;
		GVL.FIMSValveAct.FIMS2LatchOn1_b := FALSE ;
		GVL.FIMSValveAct.FIMS2LatchOff2_b := FALSE ;
		GVL.FIMSValveAct.FIMS2LatchOn2_b := FALSE ;
			
		GVL.FIMSValveAct.FIMS1Seal_b := FALSE ;
		GVL.FIMSValveAct.FIMS1Release_b := FALSE ;
		GVL.FIMSValveAct.FIMS2Seal_b := FALSE ;
		GVL.FIMSValveAct.FIMS2Release_b := FALSE ;
		GVL.FIMSValveAct.FIMS1DoorClose_b := FALSE ;
		GVL.FIMSValveAct.FIMS1DoorOpen_b := FALSE ;
		GVL.FIMSValveAct.FIMS2DoorClose_b := FALSE ;
		GVL.FIMSValveAct.FIMS2DoorOpen_b := FALSE ;
			
		GVL.FIMSValveAct.FIMS1AvoidanceDown_b := FALSE ;
		GVL.FIMSValveAct.FIMS1AvoidanceUp_b := FALSE ;
		GVL.FIMSValveAct.FIMS2AvoidanceDown_b := FALSE ;
		GVL.FIMSValveAct.FIMS2AvoidanceUp_b := FALSE ;
		GVL.FIMSValveAct.FIMS1Undock_b := FALSE ;
		GVL.FIMSValveAct.FIMS1Dock_b := FALSE ;
		//GVL.VTDO[9].Area3.BitData[6] := FALSE ;
		GVL.FIMSValveAct.FIMS2Dock_b := FALSE ;
	END_IF;
	
//N2 PURGE 
	IF NDO.Sys_LA_O2_Check_First_EN 
		THEN 
			UI_LA_O2_Check_First_EN:=TRUE; 
			ELSE 
			UI_LA_O2_Check_First_EN:=FALSE; 
	END_IF;	
	
	IF NDO.Sys_FIMS1_O2_Check_EN 
		THEN 
			UI_FIMS1_O2_Check_EN:=TRUE; 
			ELSE 
			UI_FIMS1_O2_Check_EN:=FALSE; 
	END_IF;
	
	IF NDO.Sys_FIMS2_O2_Check_EN
		THEN 
			UI_FIMS2_O2_Check_EN:=TRUE; 
			ELSE 
			UI_FIMS2_O2_Check_EN:=FALSE; 
	END_IF;
	
	IF NDO.Sys_N2_PURGE_PROCESS
		THEN 
			UI_N2_PURGE_PROCESS:=TRUE; 
			ELSE 
			UI_N2_PURGE_PROCESS:=FALSE; 
	END_IF;
	
	IF TO_UI_LA_O2_Check_OT
		THEN 
			NDI.ILK_LA_O2_Check_OT:=TRUE; 
			ELSE 
			NDI.ILK_LA_O2_Check_OT:=FALSE; 
	END_IF;
	
	IF TO_UI_FIMS1_O2_Check_OT
		THEN 
			NDI.ILK_FIMS1_O2_Check_OT:=TRUE; 
			ELSE 
			NDI.ILK_FIMS1_O2_Check_OT:=FALSE; 
	END_IF;
	
	IF TO_UI_FIMS2_O2_Check_OT
		THEN 
			NDI.ILK_FIMS2_O2_Check_OT:=TRUE; 
			ELSE 
			NDI.ILK_FIMS2_O2_Check_OT:=FALSE; 
	END_IF;
	
	
//UI 设定
	LA_O2_Over_Time:=REAL_TO_TIME(AO.UI_LA_O2_Over_Time);
	LA_O2_Check_Time:=REAL_TO_TIME(AO.UI_LA_O2_Check_Time);
	FOUP_O2_Over_Time:=REAL_TO_TIME(AO.UI_FOUP_O2_Over_Time);
	FOUP_O2_Check_Time:=REAL_TO_TIME(AO.UI_FOUP_O2_Check_Time);
	Exchange_LA_TO_FOUP_Wait_Time:=REAL_TO_TIME(AO.UI_Exchange_LA_TO_FOUP_Wait_Time);
	Exchange_FOUP_TO_LA_Wait_Time:=REAL_TO_TIME(AO.UI_Exchange_FOUP_TO_LA_Wait_Time);
	Exchange_FOUP_TO_FOUP_Wait_Time:=REAL_TO_TIME(AO.UI_Exchange_FOUP_TO_FOUP_Wait_Time);
	UI_LA_O2_Check_SV:=AO.UI_LA_O2_Check_SV;
	UI_FOUP_O2_Check_SV:=AO.UI_FOUP_O2_Check_SV;
	
	//O2 DETECT
	IF NOT NDI.FIMS1_FOUP_exist THEN FIMS1_O2_Check_Done:=FALSE;END_IF;					//FOUP1不在位, FIMS1 O2 check done复位
	IF NOT NDI.FIMS2_FOUP_exist THEN FIMS2_O2_Check_Done:=FALSE;END_IF;					//FOUP2不在位, FIMS2 O2 check done复位
	IF NOT UI_N2_PURGE_PROCESS 															//N2 PURGE过程结束, 所有O2 check done 复位
		THEN 
		LA_O2_Check_Done:=FALSE;
		FIMS1_O2_Check_Done:=FALSE;
		FIMS2_O2_Check_Done:=FALSE;
	END_IF;																													
	
	N2_PURGE_PROCESS_Trig(Clk:=UI_N2_PURGE_PROCESS);
	IF N2_PURGE_PROCESS_Trig.Q 															//N2 PURGE流程开始，初始化
		THEN 
		O2_Detect_STEP:=0; 
		TO_UI_LA_O2_Check_OT:=FALSE;
		TO_UI_FIMS1_O2_Check_OT:=FALSE;
		TO_UI_FIMS2_O2_Check_OT:=FALSE;
	END_IF;
	
	IF UI_N2_PURGE_PROCESS THEN
	CASE O2_Detect_STEP OF
		0:
		IF UI_LA_O2_Check_First_EN AND NOT LA_O2_Check_Done
			THEN O2_Detect_STEP:=10;
			ELSE
			O2_Detect_STEP:=1;
		END_IF;
		
		1:
		IF UI_FIMS1_O2_Check_EN AND NOT FIMS1_O2_Check_Done
			THEN 
			O2_Detect_STEP:=20;
			ELSIF
			UI_FIMS2_O2_Check_EN AND NOT FIMS2_O2_Check_Done
			THEN 
			O2_Detect_STEP:=30;
			ELSIF
			NOT LA_O2_Check_Done
			THEN
			O2_Detect_STEP:=10;
			ELSE
			O2_Detect_STEP:=0;
		END_IF;
		
		//LA
		10://判断
		IF NDO.POD1_exhaust_switch_open=TRUE 
			THEN 
			NDO.POD1_exhaust_switch_open:=FALSE; 
			LA_O2_Exchange_Wait.In:=TRUE;
			LA_O2_Exchange_Wait.PT:=Exchange_FOUP_TO_LA_Wait_Time;
			O2_Detect_STEP:=11;
			ELSE
			O2_Detect_STEP:=12;
		END_IF;
		
		11://阀切换等待
		LA_O2_Exchange_Wait();
		IF LA_O2_Exchange_Wait.Q
			THEN
			LA_O2_Exchange_Wait.In:=FALSE;
			O2_Detect_STEP:=12;
		END_IF;
		
		12:
			LA_O2_Arrival_Timer.In:=TRUE;
			LA_O2_Arrival_Timer.PT:=LA_O2_Over_Time;
			LA_O2_Check_Timer.In:=TRUE;
			LA_O2_Check_Timer.PT:=LA_O2_Check_Time;
			O2_Detect_STEP:=13;
		
		13://O2 DETECT确认及超时时间
		LA_O2_Arrival_Timer();
		LA_O2_Check_Timer();				
		IF LA_O2_Arrival_Timer.Q 
			THEN 
			TO_UI_LA_O2_Check_OT:=TRUE;
		END_IF;
		
		IF LA_O2_Check_Timer.Q AND GVL.O2.ActValPV_Real<=UI_LA_O2_Check_SV
			THEN
			LA_O2_Check_Done:=TRUE;		
			LA_O2_Check_Timer.In:=FALSE;
			LA_O2_Arrival_Timer.In:=FALSE;
			O2_Detect_STEP:=0;
		END_IF;
		
		//FIMS1
		20://判断	
		IF NDO.POD1_exhaust_switch_open=TRUE AND NDO.POD2_exhaust_switch_open=FALSE	//AV61开,AV62关
			THEN
			O2_Detect_STEP:=22;
		END_IF;
		IF NDO.POD1_exhaust_switch_open=FALSE AND NDO.POD2_exhaust_switch_open=FALSE	//AV61关,AV62关
			THEN
			NDO.POD1_exhaust_switch_open:=TRUE; 
			FIMS1_O2_Exchange_Wait.In:=TRUE;
			FIMS1_O2_Exchange_Wait.PT:=Exchange_LA_TO_FOUP_Wait_Time;
			O2_Detect_STEP:=21;
		END_IF;		
		IF NDO.POD1_exhaust_switch_open=FALSE AND NDO.POD2_exhaust_switch_open=TRUE	//AV61关,AV62开
			THEN
			NDO.POD1_exhaust_switch_open:=TRUE; 
			NDO.POD2_exhaust_switch_open:=FALSE;
			FIMS1_O2_Exchange_Wait.In:=TRUE;
			IF Exchange_LA_TO_FOUP_Wait_Time>Exchange_FOUP_TO_FOUP_Wait_Time		//时间选择较长者
					THEN
					FIMS1_O2_Exchange_Wait.PT:=Exchange_LA_TO_FOUP_Wait_Time;
					ELSE
					FIMS1_O2_Exchange_Wait.PT:=Exchange_FOUP_TO_FOUP_Wait_Time;
			END_IF;	
			O2_Detect_STEP:=21;
		END_IF;	
		IF NDO.POD1_exhaust_switch_open=TRUE AND NDO.POD2_exhaust_switch_open=TRUE	//AV61开,AV62开
			THEN
			NDO.POD2_exhaust_switch_open:=FALSE; 
			FIMS1_O2_Exchange_Wait.In:=TRUE;
			FIMS1_O2_Exchange_Wait.PT:=Exchange_FOUP_TO_FOUP_Wait_Time;
			O2_Detect_STEP:=21;
		END_IF;
		
		21://阀切换等待
		FIMS1_O2_Exchange_Wait();
		IF FIMS1_O2_Exchange_Wait.Q
			THEN
			FIMS1_O2_Exchange_Wait.In:=FALSE;			
			O2_Detect_STEP:=22;
		END_IF;
		
		22://O2 CHECK START
		IF FIMS1_O2_Check_Start
			THEN
			FIMS1_O2_Arrival_Timer.In:=TRUE;
			FIMS1_O2_Arrival_Timer.PT:=FOUP_O2_Over_Time;
			FIMS1_O2_Check_Timer.In:=TRUE;
			FIMS1_O2_Check_Timer.PT:=FOUP_O2_Check_Time;
			O2_Detect_STEP:=23;
		END_IF;
		
		23://O2 DETECT确认及超时时间
		FIMS1_O2_Arrival_Timer();
		FIMS1_O2_Check_Timer();
		IF FIMS1_O2_Arrival_Timer.Q 
			THEN 
			TO_UI_FIMS1_O2_Check_OT:=TRUE;
		END_IF;
		
		IF FIMS1_O2_Check_Timer.Q AND GVL.O2.ActValPV_Real<=UI_FOUP_O2_Check_SV
			THEN
			FIMS1_O2_Check_Done:=TRUE;		
			FIMS1_O2_Check_Timer.In:=FALSE;
			FIMS1_O2_Arrival_Timer.In:=FALSE;
			O2_Detect_STEP:=0;
		END_IF;
		
		
		//FIMS2
		30://判断	
		IF NDO.POD1_exhaust_switch_open=TRUE AND NDO.POD2_exhaust_switch_open=TRUE	//AV61开,AV62开
			THEN
			O2_Detect_STEP:=32;
		END_IF;
		IF NDO.POD1_exhaust_switch_open=FALSE AND NDO.POD2_exhaust_switch_open=TRUE	//AV61关,AV62开
			THEN
			NDO.POD1_exhaust_switch_open:=TRUE; 
			FIMS2_O2_Exchange_Wait.In:=TRUE;
			FIMS2_O2_Exchange_Wait.PT:=Exchange_LA_TO_FOUP_Wait_Time;
			O2_Detect_STEP:=31;
		END_IF;		
		IF NDO.POD1_exhaust_switch_open=FALSE AND NDO.POD2_exhaust_switch_open=FALSE	//AV61关,AV62关
			THEN
			NDO.POD1_exhaust_switch_open:=TRUE; 
			NDO.POD2_exhaust_switch_open:=TRUE;
			FIMS2_O2_Exchange_Wait.In:=TRUE;
			IF Exchange_LA_TO_FOUP_Wait_Time>Exchange_FOUP_TO_FOUP_Wait_Time		//时间选择较长者
					THEN
					FIMS2_O2_Exchange_Wait.PT:=Exchange_LA_TO_FOUP_Wait_Time;
					ELSE
					FIMS2_O2_Exchange_Wait.PT:=Exchange_FOUP_TO_FOUP_Wait_Time;
			END_IF;	
			O2_Detect_STEP:=31;
		END_IF;	
		IF NDO.POD1_exhaust_switch_open=TRUE AND NDO.POD2_exhaust_switch_open=FALSE	//AV61开,AV62关
			THEN
			NDO.POD2_exhaust_switch_open:=TRUE; 
			FIMS2_O2_Exchange_Wait.In:=TRUE;
			FIMS2_O2_Exchange_Wait.PT:=Exchange_FOUP_TO_FOUP_Wait_Time;
			O2_Detect_STEP:=31;
		END_IF;
		
		31://阀切换等待
		FIMS2_O2_Exchange_Wait();
		IF FIMS2_O2_Exchange_Wait.Q
			THEN
			FIMS2_O2_Exchange_Wait.In:=FALSE;
			O2_Detect_STEP:=32;
		END_IF;
		
		32://O2 CHECK START
		IF FIMS2_O2_Check_Start
			THEN
			FIMS2_O2_Arrival_Timer.In:=TRUE;
			FIMS2_O2_Arrival_Timer.PT:=FOUP_O2_Over_Time;
			FIMS2_O2_Check_Timer.In:=TRUE;
			FIMS2_O2_Check_Timer.PT:=FOUP_O2_Check_Time;
			O2_Detect_STEP:=33;
		END_IF;
		
		33://O2 DETECT确认及超时时间
		FIMS2_O2_Arrival_Timer();
		FIMS2_O2_Check_Timer();
		IF FIMS2_O2_Arrival_Timer.Q 
			THEN 
			TO_UI_FIMS2_O2_Check_OT:=TRUE;
		END_IF;
		
		IF FIMS2_O2_Check_Timer.Q AND GVL.O2.ActValPV_Real<=UI_FOUP_O2_Check_SV
			THEN
			FIMS2_O2_Check_Done:=TRUE;		
			FIMS2_O2_Check_Timer.In:=FALSE;
			FIMS2_O2_Arrival_Timer.In:=FALSE;
			O2_Detect_STEP:=0;
		END_IF;
	END_CASE;
	END_IF;		
		
//FIMS1	
	FIMS1(
	Enable:= (TP_EN AND (FIMS1LoadCmd_b OR FIMS1UnloadCmd_b)) OR (NOT TP_EN AND GVL.FIMSManualSt.AutoOrManual_b), 
	StopCmd_In_b:= FIMS1StopCmd_b, 
	LoadCmd_In_b:= FIMS1LoadCmd_b, 
	UnloadCmd_In_b:= FIMS1UnloadCmd_b, 
	Open_Close_Cmd_In_b:= 0, 
	Open_Close_Count:= 0, 
	PodSeqAlmRst_In_b:= FIMS1AlarmReset_b, 
	N2PurgeBypassEN_In_b:= FIMS1N2PurgeBypass_b, 
	FoupInPodPos_In_b:= FIMS1FoupCheck_b, 
	FoupInRetractPos_In_b:= NDI.FIMS1_FOUP_undock, 
	FoupInExtendPos_In_b:= NDI.FIMS1_FOUP_dock, 
	FoupInSealPos_In_b:= NDI.FIMS1_seal, 
	FoupInRlsPos_In_b:= NDI.FIMS1_release, 
	FoupLatchOnPos_In_b:= NDI.FIMS1_FOUP_latch_on, 
	FoupLatchOffPos_In_b:= NDI.FIMS1_FOUP_latch_off, 
	PodVacStatus_In_b:= NDI.FIMS1_FOUP_negative_Pressure, 
	PodVacATM_In_b:= NDI.FIMS1_FOUP_ordinary_Pressure, 
	O2Check_EN:= UI_FIMS1_O2_Check_EN, 
	O2Check_Done_In_b:= FIMS1_O2_Check_Done, 
	PodDrXaxisAvoidInUpPos_In_b:= NDI.FIMS1_collision_avoidance_up, 
	PodDrXaxisAvoidInDnPos_In_b:= NDI.FIMS1_collision_avoidance_down, 
	PodDrYClsPos_In_b:= NDI.FIMS1_door_close, 
	PodDrYOpPos_In_b:= NDI.FIMS1_door_open, 
	N2PurgeValOpPos_In_b:= NDI.FIMS1_exhaust_open_position, 
	N2PurgeValClPos_In_b:= NDI.FIMS1_exhaust_close_position, 
	EnableOutput=> ,  
	LoadOTAlm_Out_b=> GVL.FIMSDI[0].LoadAlarm_b, 
	UnloadOTAlm_Out_b=> GVL.FIMSDI[0].UnloadAlarm_b, 
	PodLoadDone_Out_b=> GVL.FIMSDI[0].LoadComplete_b, 
	PodUnloadDone_Out_b=> GVL.FIMSDI[0].UnloadComplete_b, 
	PodRunning_Out_b=> GVL.FIMSDI[0].Running_b, 
	PodRetractVal_Out_b=> GVL.FIMSValveAct.FIMS1Undock_b, 
	PodExtendVal_Out_b=> GVL.FIMSValveAct.FIMS1Dock_b, 
	PodVacOpVal_Out_b=> GVL.FIMSValveAct.FIMS1VacuumOpen_b, 
	PodVacClsVal_Out_b=> GVL.FIMSValveAct.FIMS1VacuumClose_b, 
	PodFoupLatchOffVal_Out_b=> GVL.FIMSValveAct.FIMS1LatchOff1_b, 
	PodFoupLatchonVal_Out_b=> GVL.FIMSValveAct.FIMS1LatchOn1_b, 
	PodSealVal_Out_b=> GVL.FIMSValveAct.FIMS1Seal_b, 
	PodRealseVal_Out_b=> GVL.FIMSValveAct.FIMS1Release_b, 
	N2PurgePodOpVal_Out_b=> , 
	N2PurgePodClsVal_Out_b=> , 
	O2CheckVal_Out_b=> FIMS1_O2_Check_Start, 
	PodDrXaxisAvoidOpVal_Out_b=> GVL.FIMSValveAct.FIMS1AvoidanceUp_b, 
	PodDrXaxisAvoidClsVal_Out_b=> GVL.FIMSValveAct.FIMS1AvoidanceDown_b, 
	PodDrYOpVal_Out_b=> GVL.FIMSValveAct.FIMS1DoorOpen_b, 
	PodDrYClsVal_Out_b=> GVL.FIMSValveAct.FIMS1DoorClose_b);
	
	
	
	IF TP_EN THEN
	GVL.FIMSValveAct.FIMS1LatchOff2_b := GVL.FIMSValveAct.FIMS1LatchOff1_b ;
	GVL.FIMSValveAct.FIMS1LatchOn2_b := GVL.FIMSValveAct.FIMS1LatchOn1_b ;
	END_IF;
	
//FIMS2	
	FIMS2(
	Enable:= (TP_EN AND (FIMS2LoadCmd_b OR FIMS2UnloadCmd_b)) OR (NOT TP_EN AND GVL.FIMSManualSt.AutoOrManual_b), 
	StopCmd_In_b:= FIMS2StopCmd_b, 
	LoadCmd_In_b:= FIMS2LoadCmd_b, 
	UnloadCmd_In_b:= FIMS2UnloadCmd_b, 
	Open_Close_Cmd_In_b:= 0, 
	Open_Close_Count:= 0, 
	PodSeqAlmRst_In_b:= FIMS2AlarmReset_b, 
	N2PurgeBypassEN_In_b:= FIMS2N2PurgeBypass_b, 
	FoupInPodPos_In_b:= FIMS2FoupCheck_b, 
	FoupInRetractPos_In_b:= NDI.FIMS2_FOUP_undock, 
	FoupInExtendPos_In_b:= NDI.FIMS2_FOUP_dock, 
	FoupInSealPos_In_b:= NDI.FIMS2_seal, 
	FoupInRlsPos_In_b:= NDI.FIMS2_release, 
	FoupLatchOnPos_In_b:= NDI.FIMS2_FOUP_latch_on, 
	FoupLatchOffPos_In_b:= NDI.FIMS2_FOUP_latch_off, 
	PodVacStatus_In_b:= NDI.FIMS2_FOUP_negative_Pressure, 
	PodVacATM_In_b:= NDI.FIMS2_FOUP_ordinary_Pressure, 
	O2Check_EN:= UI_FIMS2_O2_Check_EN, 
	O2Check_Done_In_b:= FIMS2_O2_Check_Done, 
	PodDrXaxisAvoidInUpPos_In_b:= NDI.FIMS2_collision_avoidance_up, 
	PodDrXaxisAvoidInDnPos_In_b:= NDI.FIMS2_collision_avoidance_down, 
	PodDrYClsPos_In_b:= NDI.FIMS2_door_close, 
	PodDrYOpPos_In_b:= NDI.FIMS2_door_open, 
	N2PurgeValOpPos_In_b:= NDI.FIMS2_exhaust_open_position, 
	N2PurgeValClPos_In_b:= NDI.FIMS2_exhaust_close_position, 
	EnableOutput=> , 
	LoadOTAlm_Out_b=> GVL.FIMSDI[0].LoadAlarm_b, 
	UnloadOTAlm_Out_b=> GVL.FIMSDI[0].UnloadAlarm_b, 
	PodLoadDone_Out_b=> GVL.FIMSDI[0].LoadComplete_b, 
	PodUnloadDone_Out_b=> GVL.FIMSDI[0].UnloadComplete_b, 
	PodRunning_Out_b=> GVL.FIMSDI[0].Running_b, 
	PodRetractVal_Out_b=> GVL.FIMSValveAct.FIMS2Undock_b, 
	PodExtendVal_Out_b=> GVL.FIMSValveAct.FIMS2Dock_b, 
	PodVacOpVal_Out_b=> GVL.FIMSValveAct.FIMS2VacuumOpen_b, 
	PodVacClsVal_Out_b=> GVL.FIMSValveAct.FIMS2VacuumClose_b, 
	PodFoupLatchOffVal_Out_b=> GVL.FIMSValveAct.FIMS2LatchOff1_b, 
	PodFoupLatchonVal_Out_b=> GVL.FIMSValveAct.FIMS2LatchOn1_b, 
	PodSealVal_Out_b=> GVL.FIMSValveAct.FIMS2Seal_b, 
	PodRealseVal_Out_b=> GVL.FIMSValveAct.FIMS2Release_b, 
	N2PurgePodOpVal_Out_b=> , 
	N2PurgePodClsVal_Out_b=> , 
	O2CheckVal_Out_b=> FIMS2_O2_Check_Start, 
	PodDrXaxisAvoidOpVal_Out_b=> GVL.FIMSValveAct.FIMS2AvoidanceUp_b, 
	PodDrXaxisAvoidClsVal_Out_b=> GVL.FIMSValveAct.FIMS2AvoidanceDown_b, 
	PodDrYOpVal_Out_b=> GVL.FIMSValveAct.FIMS2DoorOpen_b, 
	PodDrYClsVal_Out_b=> GVL.FIMSValveAct.FIMS2DoorClose_b);
	
	
	
	IF TP_EN THEN
	GVL.FIMSValveAct.FIMS2LatchOff2_b := GVL.FIMSValveAct.FIMS2LatchOff1_b ;
	GVL.FIMSValveAct.FIMS2LatchOn2_b := GVL.FIMSValveAct.FIMS2LatchOn1_b ;
	END_IF;
	
//????	
	IF NOT TP_EN AND NOT GVL.FIMSManualSt.AutoOrManual_b THEN
	GVL.FIMSValveAct.FIMS1LatchOff1_b := GVL.FIMSManualSt.FIMS1LatchOff1_b ;
	GVL.FIMSValveAct.FIMS1LatchOn1_b := GVL.FIMSManualSt.FIMS1LatchOn1_b ;
	GVL.FIMSValveAct.FIMS1LatchOff2_b := GVL.FIMSManualSt.FIMS1LatchOff2_b ;
	GVL.FIMSValveAct.FIMS1LatchOn2_b := GVL.FIMSManualSt.FIMS1LatchOn2_b ;
	GVL.FIMSValveAct.FIMS2LatchOff1_b := GVL.FIMSManualSt.FIMS2LatchOff1_b ;
	GVL.FIMSValveAct.FIMS2LatchOn1_b := GVL.FIMSManualSt.FIMS2LatchOn1_b ;
	GVL.FIMSValveAct.FIMS2LatchOff2_b := GVL.FIMSManualSt.FIMS2LatchOff2_b ;
	GVL.FIMSValveAct.FIMS2LatchOn2_b := GVL.FIMSManualSt.FIMS2LatchOn2_b ;
	
	GVL.FIMSValveAct.FIMS1Seal_b := GVL.FIMSManualSt.FIMS1Seal_b ;
	GVL.FIMSValveAct.FIMS1Release_b := GVL.FIMSManualSt.FIMS1Release_b ;
	GVL.FIMSValveAct.FIMS2Seal_b := GVL.FIMSManualSt.FIMS2Seal_b ;
	GVL.FIMSValveAct.FIMS2Release_b := GVL.FIMSManualSt.FIMS2Release_b ;
	GVL.FIMSValveAct.FIMS1DoorClose_b := GVL.FIMSManualSt.FIMS1DoorClose_b ;
	GVL.FIMSValveAct.FIMS1DoorOpen_b := GVL.FIMSManualSt.FIMS1DoorOpen_b ;
	GVL.FIMSValveAct.FIMS2DoorClose_b := GVL.FIMSManualSt.FIMS2DoorClose_b ;
	GVL.FIMSValveAct.FIMS2DoorOpen_b := GVL.FIMSManualSt.FIMS2DoorOpen_b ;
	
	GVL.FIMSValveAct.FIMS1AvoidanceDown_b := GVL.FIMSManualSt.FIMS1AvoidanceDown_b ;
	GVL.FIMSValveAct.FIMS1AvoidanceUp_b := GVL.FIMSManualSt.FIMS1AvoidanceUp_b ;
	GVL.FIMSValveAct.FIMS2AvoidanceDown_b := GVL.FIMSManualSt.FIMS2AvoidanceDown_b ;
	GVL.FIMSValveAct.FIMS2AvoidanceUp_b := GVL.FIMSManualSt.FIMS2AvoidanceUp_b ;
	GVL.FIMSValveAct.FIMS1Undock_b := GVL.FIMSManualSt.FIMS1Undock_b ;
	GVL.FIMSValveAct.FIMS1Dock_b := GVL.FIMSManualSt.FIMS1Dock_b ;
	GVL.FIMSValveAct.FIMS2Undock_b := GVL.FIMSManualSt.FIMS2Undock_b ;
	GVL.FIMSValveAct.FIMS2Dock_b := GVL.FIMSManualSt.FIMS2Dock_b ;
	
	GVL.FIMSValveAct.FIMS1VacuumClose_b := GVL.FIMSManualSt.FIMS1VacuumClose_b ;
	GVL.FIMSValveAct.FIMS1VacuumOpen_b := GVL.FIMSManualSt.FIMS1VacuumOpen_b ;
	GVL.FIMSValveAct.FIMS2VacuumClose_b := GVL.FIMSManualSt.FIMS2VacuumClose_b ;
	GVL.FIMSValveAct.FIMS2VacuumOpen_b := GVL.FIMSManualSt.FIMS2VacuumOpen_b ;
	END_IF;
	
	
	]]></ST>
    </Implementation>
    <LineIds Name="FIMS">
      <LineId Id="802" Count="59" />
      <LineId Id="1535" Count="1" />
      <LineId Id="862" Count="1" />
      <LineId Id="1607" Count="0" />
      <LineId Id="864" Count="33" />
      <LineId Id="901" Count="82" />
      <LineId Id="1608" Count="0" />
      <LineId Id="984" Count="351" />
      <LineId Id="1460" Count="1" />
      <LineId Id="275" Count="0" />
    </LineIds>
  </POU>
</TcPlcObject>