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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <POU Name="IO_EXCHANGE" Id="{ad4ee5b9-37d9-412d-9c8a-ff9848ac518a}" SpecialFunc="None">
- <Declaration><![CDATA[PROGRAM IO_EXCHANGE
- VAR
- END_VAR
- ]]></Declaration>
- <Implementation>
- <ST><![CDATA[//FIMS
- NDI.FIMS1_FOUP_exist := LAI.I500_02 ;
- NDI.FIMS1_FOUP_undock := LAI.I500_01 ;
- NDI.FIMS1_FOUP_dock := LAI.I500_00 ;
- NDI.FIMS1_seal := LAI.I502_00 ;
- NDI.FIMS1_release := LAI.I502_01 ;
- NDI.FIMS1_FOUP_latch_on := LAI.I502_04 ;
- NDI.FIMS1_FOUP_latch_off := LAI.I502_05 ;
- NDI.FIMS1_FOUP_negative_Pressure := LAI.I500_08 ;
- NDI.FIMS1_FOUP_ordinary_Pressure := LAI.I500_09 ;
- NDI.FIMS1_collision_avoidance_up := LAI.I502_06 ;
- NDI.FIMS1_collision_avoidance_down := LAI.I502_07 ;
- NDI.FIMS1_door_close := LAI.I502_03 ;
- NDI.FIMS1_door_open := LAI.I502_02 ;
- NDI.FIMS1_exhaust_open_position := LAI.I501_08 ;
- NDI.FIMS1_exhaust_close_position := LAI.I501_09 ;
-
-
- LAQ.Q501_00 := NDO.POD1_exhaust_switch_open ;
-
- NDI.FIMS2_FOUP_exist := LAI.I500_05 ;
- NDI.FIMS2_FOUP_undock := LAI.I500_04 ;
- NDI.FIMS2_FOUP_dock := LAI.I500_03 ;
- NDI.FIMS2_seal := LAI.I502_08 ;
- NDI.FIMS2_release := LAI.I502_09 ;
- NDI.FIMS2_FOUP_latch_on := LAI.I502_12 ;
- NDI.FIMS2_FOUP_latch_off := LAI.I502_13 ;
- NDI.FIMS2_FOUP_negative_Pressure := LAI.I500_10 ;
- NDI.FIMS2_FOUP_ordinary_Pressure := LAI.I500_11 ;
- NDI.FIMS2_collision_avoidance_up := LAI.I502_14 ;
- NDI.FIMS2_collision_avoidance_down := LAI.I502_15 ;
- NDI.FIMS2_door_close := LAI.I502_11 ;
- NDI.FIMS2_door_open := LAI.I502_10 ;
- NDI.FIMS2_exhaust_open_position := LAI.I501_10 ;
- NDI.FIMS2_exhaust_close_position := LAI.I501_11 ;
-
-
- LAQ.Q501_02 := NDO.POD2_exhaust_switch_open ;
- //VT802
-
- ECC. VT802. A . 0 := GVL. FIMSValveAct.FIMS1LatchOff1_b ;
- ECC. VT802. A . 1 := GVL. FIMSValveAct.FIMS1LatchOn1_b ;
- ECC. VT802. A . 2 := GVL. FIMSValveAct.FIMS1LatchOff2_b ;
- ECC. VT802. A . 3 := GVL. FIMSValveAct.FIMS1LatchOn2_b ;
- ECC. VT802. A . 4 := GVL. FIMSValveAct.FIMS2LatchOff1_b ;
- ECC. VT802. A . 5 := GVL. FIMSValveAct.FIMS2LatchOn1_b ;
- ECC. VT802. A . 6 := GVL. FIMSValveAct.FIMS2LatchOff2_b ;
- ECC. VT802. A . 7 := GVL. FIMSValveAct.FIMS2LatchOn2_b ;
-
- ECC. VT802. B . 0 := GVL. FIMSValveAct.FIMS1Seal_b ;
- ECC. VT802. B . 1 := GVL. FIMSValveAct.FIMS1Release_b ;
- ECC. VT802. B . 2 := GVL. FIMSValveAct.FIMS2Seal_b ;
- ECC. VT802. B . 3 := GVL. FIMSValveAct.FIMS2Release_b ;
- ECC. VT802. B . 4 := GVL. FIMSValveAct.FIMS1DoorClose_b ;
- ECC. VT802. B . 5 := GVL. FIMSValveAct.FIMS1DoorOpen_b ;
- ECC. VT802. B . 6 := GVL. FIMSValveAct.FIMS2DoorClose_b ;
- ECC. VT802. B . 7 := GVL. FIMSValveAct.FIMS2DoorOpen_b ;
-
- ECC. VT802. C . 0 := GVL. FIMSValveAct.FIMS1AvoidanceDown_b ;
- ECC. VT802. C . 1 := GVL. FIMSValveAct.FIMS1AvoidanceUp_b ;
- ECC. VT802. C . 2 := GVL. FIMSValveAct.FIMS2AvoidanceDown_b ;
- ECC. VT802. C . 3 := GVL. FIMSValveAct.FIMS2AvoidanceUp_b ;
- ECC. VT802. C . 4 := GVL. FIMSValveAct.FIMS1Undock_b ;
- ECC. VT802. C . 5 := GVL. FIMSValveAct.FIMS1Dock_b ;
- ECC. VT802. C . 6 := GVL. FIMSValveAct.FIMS2Undock_b ;
- ECC. VT802. C . 7 := GVL. FIMSValveAct.FIMS2Dock_b ;
-
-
- //VT803
-
- ECC. VT803. A . 0 := GVL. FIMSValveAct.FIMS1VacuumClose_b ;
- ECC. VT803. A . 1 := GVL. FIMSValveAct.FIMS1VacuumOpen_b ;
- ECC. VT803. A . 2 := GVL. FIMSValveAct.FIMS2VacuumClose_b ;
-
- ECC. VT803. A . 3 := GVL. FIMSValveAct.FIMS2VacuumOpen_b ;
-
-
- // ECC. VT803. A . 4 := ;
- // ECC. VT803. A . 5 := ;
- // ECC. VT803. A . 6 := ;
- // ECC. VT803. A . 7 := ;
-
- // ECC. VT803. B . 0 := ;
- // ECC. VT803. B . 1 := ;
- // ECC. VT803. B . 2 := ;
- // ECC. VT803. B . 3 := ;
-
- ]]></ST>
- </Implementation>
- <LineIds Name="IO_EXCHANGE">
- <LineId Id="49" Count="0" />
- <LineId Id="6" Count="36" />
- <LineId Id="47" Count="1" />
- <LineId Id="46" Count="0" />
- <LineId Id="294" Count="47" />
- <LineId Id="245" Count="0" />
- <LineId Id="149" Count="0" />
- <LineId Id="50" Count="0" />
- </LineIds>
- </POU>
- </TcPlcObject>
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