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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <GVL Name="SDI" Id="{4236c707-5a59-4236-943d-e13de135e295}">
- <Declaration><![CDATA[VAR_GLOBAL
- O2_analyzer_over_range_alarm ,
- SCR_ONOFF_SWITCH ,
- O2_analyzer_fault ,
- SMK1_detector_operator ,
- SMK1_detector_fault ,
- SMK1_detector_fire_alarm ,
- GD201_NF3_gas_leak_1st_alarm ,
- GD201_NF3_gas_leak_2nd_alarm ,
- GD202_SiH4_gas_leak_1st_alarm ,
- GD201_fault ,
- GD202_SiH4_gas_leak_2nd_alarm ,
- GD202_fault ,
- GD203_NH3_gas_leak_2nd_alarm ,
- GD203_NH3_gas_leak_1st_alarm ,
- GD203_fault ,
- GD204_HCL_gas_leak_1st_alarm ,
- GD204_fault ,
- GD204_HCL_gas_leak_2nd_alarm ,
- GD205_F2_gas_leak_1st_alarm ,
- GD205_F2_gas_leak_2nd_alarm ,
- GD206_NF3_gas_leak_1st_alarm ,
- GD205_fault ,
- GD206_NF3_gas_leak_2nd_alarm ,
- GD206_fault ,
- GD207_SiH4_gas_leak_2nd_alarm ,
- GD207_SiH4_gas_leak_1st_alarm ,
- GD207_fault ,
- GD208_NH3_gas_leak_1st_alarm ,
- GD208_fault ,
- GD208_NH3_gas_leak_2nd_alarm ,
- GD209_HCL_gas_leak_1st_alarm ,
- GD209_HCL_gas_leak_2nd_alarm ,
- GD210_F2_gas_leak_1st_alarm ,
- GD209_fault ,
- GD210_F2_gas_leak_2nd_alarm ,
- GD210_fault ,
- TS31_Cap_outside_temp_sw ,
- TS30_Cap_inside_temp_sw ,
- TS34_R_axis_rotation_temp_sw ,
- Loading_area_EMS ,
- SL201_gas_box_door_sw1_1 ,
- FFU_temp_sw ,
- SL201_gas_box_door_sw1_2 ,
- SL202_gas_box_door_sw2_1 ,
- SL203_gas_box_door_sw3_1 ,
- SL202_gas_box_door_sw2_2 ,
- SL203_gas_box_door_sw3_2 ,
- SL204_gas_box_door_sw4_1 ,
- SL205_gas_box_door_sw5_1 ,
- SL204_gas_box_door_sw4_2 ,
- SL205_gas_box_door_sw5_2 ,
- SL501_LA_door_sw1 ,
- SL503_LA_door_sw3 ,
- SL502_LA_door_sw2 ,
- SL504_furnace_door_sw ,
- Gas_box_exhaust_pressure_alarm_1st ,
- MS2_S_gas_box_exhaust_alarm ,
- Gas_box_exhaust_pressure_alarm_2nd ,
- MS11_S_gas_box_exhaust_alarm ,
- MS12_S_gas_box_exhaust_alarm ,
- LSC_1_leak_alarm ,
- LD501_Magnetic_fluid_leak ,
- LD502_Cooling_water_leak ,
- TS305_RHC_temp_sw ,
- LD503_RHC_leak ,
- TS306_Main_furnace_Temp_sw ,
- LD301_water_leak_alarm ,
- EMO301_Exhaust_box_EMO ,
- LD302_water_leak_alarm ,
- Buffer_motor_EDM ,
- R_axis_motor_EDM ,
- E_axis_motor_EDM ,
- EMO101_power_box_EMO ,
- Furnace_transformer_temp_sw ,
- Power_box_fire_detector_alarm ,
- AC100V_transformer_temp_sw ,
- Furnace_power_on_switch ,
- Power_box_reset_button ,
- AC100V_transformer_power_on_switch ,
- VFD_EDM ,
- Light_curtain_fault ,
- Light_curtain_OSSD2 ,
- Light_curtain_OSSD1 ,
- Gas_box_reset_button ,
- EMO401_frontbody_EMO ,
- Frontbody_IO_shutter ,
- Frontbody_door_sw ,
- Frontbody_reset_button
- :BOOL;
- END_VAR]]></Declaration>
- </GVL>
- </TcPlcObject>
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