TIN_PMC/TIN001-PLC/TIN001/PMC/GVLs/TO PMC/NDO.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="NDO" Id="{6c6dc7c8-3eec-4abf-b759-d31e388627fe}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//**************HARDWARE***********************⬇	
//PW
	VFD_RES	 AT%I*:BOOL;	//
	VFD_MRS	 AT%I*:BOOL;	//
	VFD_RT	 AT%I*:BOOL;	//
	VFD_JOG	 AT%I*:BOOL;	//
	VFD_RL	 AT%I*:BOOL;	//
	VFD_RM	 AT%I*:BOOL;	//
	VFD_RH	 AT%I*:BOOL;	//
	VFD_STP	 AT%I*:BOOL;	//
	VFD_RTR	 AT%I*:BOOL;	//
	VFD_RTF	 AT%I*:BOOL;	//
			
			
			
			
			
			
	Furnace_1_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_2_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_3_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_4_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_5_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_6_zone_heating_enable	 AT%I*:BOOL;	//
	Furnace_7_zone_heating_enable	 AT%I*:BOOL;	//
	AUTOREFILL_1_REQUEST_Or_VALVE_OPEN	 AT%I*:BOOL;	//
	AUTOREFILL_2_REQUEST_Or_VALVE_OPEN	 AT%I*:BOOL;	//
	HPM_valve_out_status	 AT%I*:BOOL;	//
	Forline_heater_on	 AT%I*:BOOL;	//
			
			
			
			
			
	Vaccum_Pump_Both_On	 AT%I*:BOOL;	//
	Vaccum_Pump_AUC_On	 AT%I*:BOOL;	//
	Vaccum_Pump_AGV_Open	 AT%I*:BOOL;	//
	

//GAS
	OX_PUMP_ON AT%I*:BOOL;

	

//EXHAUST
	Cooling_Valve1	 AT%I*:BOOL;	//	Q300.00
	Cooling_Valve2	 AT%I*:BOOL;	//	Q300.01
			//	Q300.02
			//	Q300.03
			//	Q300.04
			//	Q300.05
			//	Q300.06
			//	Q300.07
	AV71_AUTO_CLOSE	 AT%I*:BOOL;	//	Q300.08
	AV71_PUMP_ON	 AT%I*:BOOL;	//	Q300.09
	BALL_VALVE_OPEN_CLOSE	 AT%I*:BOOL;	//	Q300.10

//FB
	No1_left_Clamp_Val	 AT%I*:BOOL;	//	Q400.00
	Spare	 AT%I*:BOOL;	//	Q400.01
	No1_Right_Clamp_Val	 AT%I*:BOOL;	//	Q400.02
					//	Q400.03
	No2_left_Val_Extended	 AT%I*:BOOL;	//	Q400.04
	No2_left_Val_Back	 AT%I*:BOOL;	//	Q400.05
	No2_left_Flow_Open	 AT%I*:BOOL;	//	Q400.06
	No2_Right_Val_Extended	 AT%I*:BOOL;	//	Q400.07
	No2_Right_Val_Back	 AT%I*:BOOL;	//	Q400.08
	No2_Right_Flow_Open	 AT%I*:BOOL;	//	Q400.09
	No3_left_Val_Extended	 AT%I*:BOOL;	//	Q400.10
	No3_left_Val_Back	 AT%I*:BOOL;	//	Q400.11
	No3_left_Flow_Open	 AT%I*:BOOL;	//	Q400.12
	No3_Right_Val_Extended	 AT%I*:BOOL;	//	Q400.13
	No3_Right_Val_Back	 AT%I*:BOOL;	//	Q400.14
	No3_Right_Flow_Open	 AT%I*:BOOL;	//	Q400.15
	Tri_Color_Light_Red	 AT%I*:BOOL;	//	Q401.00
	Tri_Color_Light_YE	 AT%I*:BOOL;	//	Q401.01
	Tri_Color_Light_GN	 AT%I*:BOOL;	//	Q401.02
	Tri_Color_Light_BZ	 AT%I*:BOOL;	//	Q401.03
	Door_Up	 AT%I*:BOOL;	//	Q401.04
	DOOr_Down	 AT%I*:BOOL;	//	Q401.05
	Stop_Light	 AT%I*:BOOL;	//	Q401.06
	Pause_Light	 AT%I*:BOOL;	//	Q401.07
	Plugging_Light	 AT%I*:BOOL;	//	Q401.08
	Left_Error_Rst_Light	 AT%I*:BOOL;	//	Q401.09
	Right_Error_Rst_Light	 AT%I*:BOOL;	//	Q401.10
									//	Q401.11
									//	Q401.12
									//	Q401.13
									//	Q401.14
	Left_FOUP_Detect	 AT%I*:BOOL;	//	Q401.15
	Left_FOUP_InPos	 AT%I*:BOOL;	//	Q402.00
	Left_FOUP_Load	 AT%I*:BOOL;	//	Q402.01
	Left_FOUP_Unload	 AT%I*:BOOL;	//	Q402.02
	Left_FOUP_Manual	 AT%I*:BOOL;	//	Q402.03
	Right_FOUP_Detect	 AT%I*:BOOL;	//	Q402.04
	Right_FOUP_InPos	 AT%I*:BOOL;	//	Q402.05
	Right_FOUP_Load	 AT%I*:BOOL;	//	Q402.06
	Right_FOUP_Unload	 AT%I*:BOOL;	//	Q402.07
	Right_FOUP_Manual	 AT%I*:BOOL;	//	Q402.08
								//	Q402.09
								//	Q402.10
								//	Q402.11
								//	Q402.12
								//	Q402.13
								//	Q402.14
	Robot_loadport_1_E84_REQ	 AT%I*:BOOL;	//	Q402.15
	Robot_loadport_1_E84_UREQ	 AT%I*:BOOL;	//	Q403.00
	Robot_loadport_1_E84_ready	 AT%I*:BOOL;	//	Q403.01
	Robot_loadport_1_E84_HO_AVBL	 AT%I*:BOOL;	//	Q403.02
	Robot_loadport_1_E84_ES	 AT%I*:BOOL;	//	Q403.03
	Robot_loadport_2_E84_REQ	 AT%I*:BOOL;	//	Q403.04
	Robot_loadport_2_E84_UREQ	 AT%I*:BOOL;	//	Q403.05
	Robot_loadport_2_E84_ready	 AT%I*:BOOL;	//	Q403.06
	Robot_loadport_2_E84_HO_AVBL	 AT%I*:BOOL;	//	Q403.07
	Robot_loadport2_E84_ES	 AT%I*:BOOL;	//	Q403.08
	Robot_loadport_2_FOUP_detect	 AT%I*:BOOL;	//	Q403.09
	Robot_loadport_3_FOUP_detect	 AT%I*:BOOL;	//	Q403.10
	Robot_loadport_4_FOUP_detect	 AT%I*:BOOL;	//	Q403.11
	Robot_Extend_Buffer_1_FOUP_detect	 AT%I*:BOOL;	//	Q403.12
	Robot_Extend_Buffer_2_FOUP_detect	 AT%I*:BOOL;	//	Q403.13
	Robot_POD_1_FOUP_detect	 AT%I*:BOOL;	//	Q403.14
	Robot_POD_2_FOUP_detect	 AT%I*:BOOL;	//	Q403.15
	Robot_Spare1	 AT%I*:BOOL;	//	Q404.00
	Robot_Spare2	 AT%I*:BOOL;	//	Q404.01
	Robot_Spare3	 AT%I*:BOOL;	//	Q404.02
	Robot_Spare4	 AT%I*:BOOL;	//	Q404.03
	Robot_Spare5	 AT%I*:BOOL;	//	Q404.04
	Robot_Spare6	 AT%I*:BOOL;	//	Q404.05
	Robot_Spare7	 AT%I*:BOOL;	//	Q404.06
	Robot_Spare8	 AT%I*:BOOL;	//	Q404.07
	Robot_Spare9	 AT%I*:BOOL;	//	Q404.08
	Robot_Spare10	 AT%I*:BOOL;	//	Q404.09
	Robot_Spare11	 AT%I*:BOOL;	//	Q404.10
	Robot_Spare12	 AT%I*:BOOL;	//	Q404.11
	Robot_Spare13	 AT%I*:BOOL;	//	Q404.12
	Robot_Spare14	 AT%I*:BOOL;	//	Q404.13
	Robot_Spare15	 AT%I*:BOOL;	//	Q404.14
	
//LA	
	LA_internal_air_cycle_switch_1_open	 AT%I*:BOOL;	//	LA内循环切换1开		Q500.00
	LA_internal_air_cycle_switch_1_close	 AT%I*:BOOL;	//	LA内循环切换1关		Q500.01
	LA_internal_air_cycle_switch_2_open	 AT%I*:BOOL;	//	LA内循环切换2开		Q500.02
	LA_internal_air_cycle_switch_2_close	 AT%I*:BOOL;	//	LA内循环切换2关		Q500.03
	R_axis_air_cylinder_extend_switch	 AT%I*:BOOL;	//	CAP气缸伸		Q500.04
	R_axis_air_cylinder_retract_switch	 AT%I*:BOOL;	//	CAP气缸缩		Q500.05
	O2_detector_switch_LA_POD	 AT%I*:BOOL;	//	O2分析切换LA_POD		Q500.06
	O2_detector_switch_POD1_POD2	 AT%I*:BOOL;	//	O2分析切换POD1_POD2		Q500.07
	LA_internal_air_cycle_fan_1_switch	 AT%I*:BOOL;	//	内循环风扇1开		Q500.08
	LA_internal_air_cycle_fan_2_switch	 AT%I*:BOOL;	//	内循环风扇2开		Q500.09
	LA_internal_air_cycle_fan_3_switch	 AT%I*:BOOL;	//	内循环风扇3开		Q500.10
	LA_internal_air_cycle_fan_4_switch	 AT%I*:BOOL;	//	内循环风扇4开		Q500.11
	Furnace_shutter_open		 AT%I*:BOOL;	//	SHUTTER开		Q500.12
	Furnace_shutter_close		 AT%I*:BOOL;	//	SHUTTER关		Q500.13
										//			Q500.14
										//			Q500.15
	POD1_exhaust_switch_open	 AT%I*:BOOL;	//	POD1排气开		Q501.00
	POD1_exhaust_switch_close	 AT%I*:BOOL;	//	POD1排气关		Q501.01
	POD2_exhaust_switch_open	 AT%I*:BOOL;	//	POD2排气开		Q501.02
	POD2_exhaust_switch_close	 AT%I*:BOOL;	//	POD2排气关		Q501.03
										//			Q501.04
										//			Q501.05
										//			Q501.06
										//			Q501.07
										//			Q501.08
										//			Q501.09
										//			Q501.10
										//			Q501.11
										//			Q501.12
										//			Q501.13
										//			Q501.14
										//			Q501.15
	Buffer_A1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_1充气阀		Q502.00
	Buffer_B1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_2充气阀		Q502.01
	Buffer_C1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_3充气阀		Q502.02
	Buffer_D1_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup1_4充气阀		Q502.03
	Buffer_A2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_1充气阀		Q502.04
	Buffer_B2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_2充气阀		Q502.05
	Buffer_C2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_3充气阀		Q502.06
	Buffer_D2_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup2_4充气阀		Q502.07
	Buffer_A3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_1充气阀		Q502.08
	Buffer_B3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_2充气阀		Q502.09
	Buffer_C3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_3充气阀		Q502.10
	Buffer_D3_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup3_4充气阀		Q502.11
	Buffer_A4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_1充气阀		Q502.12
	Buffer_B4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_2充气阀		Q502.13
	Buffer_C4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_3充气阀		Q502.14
	Buffer_D4_N2_Purge_switch	 AT%I*:BOOL;	//	buffer_foup4_4充气阀		Q502.15

	
	
//**************HARDWARE***********************⬆	
	
//SystemData
//FIMS
	Sys_PLCReset_b						 AT%I*:	BOOL	;
	Sys_BlowerSwitch_b					 AT%I*:	BOOL	;
	Sys_LightCurtainBypass_b			 AT%I*:	BOOL	;
	Sys_FFUAlarmReset_b					 AT%I*:	BOOL	;
	Sys_MINI8AlarmReset_b				 AT%I*:	BOOL	;
	Sys_VGUnitConversion_b				 AT%I*:	BOOL	;
	Sys_F2_CleanSwitch_b				 AT%I*:	BOOL	;
	Sys_APC_DATA_READ_SYSCONFIG			 AT%I*:	BOOL	;
	Sys_APC_DATA_WRITE_SYSCONFIG		 AT%I*:	BOOL	;
	Sys_APC_DATA_READ_CUSCONFIG			 AT%I*:	BOOL	;
	Sys_APC_DATA_WRITE_CUSCONFIG		 AT%I*:	BOOL	;
	Sys_HTR1_Temp_alarm					 AT%I*:	BOOL	;
	Sys_HTR2_Temp_alarm					 AT%I*:	BOOL	;
	Sys_Abnormal_seal_cap_HTR_temp		 AT%I*:	BOOL	;
	Sys_Abnormal_furnace_heater_temp	 AT%I*:	BOOL	;
	Sys_HTR3_Temp_alarm					 AT%I*:	BOOL	;
	Sys_HTR1_ON							 AT%I*:	BOOL	;
	Sys_HTR2_ON							 AT%I*:	BOOL	;
	Sys_HTR3_ON							 AT%I*:	BOOL	;
	Sys_HTR1_SW_ON						 AT%I*:	BOOL	;
	Sys_HTR2_SW_ON						 AT%I*:	BOOL	;
	Sys_HTR3_SW_ON						 AT%I*:	BOOL	;
	Sys_HF_CleanSwitch					 AT%I*:	BOOL	;
	Sys_DEPO_SW							 AT%I*:	BOOL	;
	Sys_LA_O2_Check_First_EN			 AT%I*:	BOOL	;
	Sys_FIMS1_O2_Check_EN				 AT%I*:	BOOL	;
	Sys_FIMS2_O2_Check_EN				 AT%I*:	BOOL	;
	Sys_N2_PURGE_PROCESS				 AT%I*:	BOOL	;
	


END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>