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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <GVL Name="SDI" Id="{ac7ec4ae-e3ac-41c0-8e08-3241c60c5624}">
- <Declaration><![CDATA[{attribute 'qualified_only'}
- VAR_GLOBAL
-
- O2_analyzer_fault :BOOL;
- O2_analyzer_over_range_alarm :BOOL;
- SMK1_detector_fault :BOOL;
- GD201_NF3_gas_leak_1st_alarm :BOOL;
- SMK1_detector_fire_alarm :BOOL;
- SMK1_detector_operator :BOOL;
- GD201_NF3_gas_leak_2nd_alarm :BOOL;
- GD202_SiH4_gas_leak_2nd_alarm :BOOL;
- GD202_SiH4_gas_leak_1st_alarm :BOOL;
- GD201_fault :BOOL;
- GD203_fault :BOOL;
- GD203_NH3_gas_leak_2nd_alarm :BOOL;
- GD203_NH3_gas_leak_1st_alarm :BOOL;
- GD202_fault :BOOL;
- GD205_F2_gas_leak_1st_alarm :BOOL;
- GD204_fault :BOOL;
- GD204_HCL_gas_leak_2nd_alarm :BOOL;
- GD204_HCL_gas_leak_1st_alarm :BOOL;
- GD206_NF3_gas_leak_2nd_alarm :BOOL;
- GD206_NF3_gas_leak_1st_alarm :BOOL;
- GD205_fault :BOOL;
- GD205_F2_gas_leak_2nd_alarm :BOOL;
- GD207_fault :BOOL;
- GD207_SiH4_gas_leak_2nd_alarm :BOOL;
- GD207_SiH4_gas_leak_1st_alarm :BOOL;
- GD206_fault :BOOL;
- GD209_HCL_gas_leak_1st_alarm :BOOL;
- GD208_fault :BOOL;
- GD208_NH3_gas_leak_2nd_alarm :BOOL;
- GD208_NH3_gas_leak_1st_alarm :BOOL;
- GD210_F2_gas_leak_2nd_alarm :BOOL;
- GD210_F2_gas_leak_1st_alarm :BOOL;
- GD209_fault :BOOL;
- GD209_HCL_gas_leak_2nd_alarm :BOOL;
- GD210_fault :BOOL;
- TS31_Cap_outside_temp_sw :BOOL;
- TS30_Cap_inside_temp_sw :BOOL;
- TS34_R_axis_rotation_temp_sw :BOOL;
- Loading_area_EMS :BOOL;
- SL201_gas_box_door_sw1_1 :BOOL;
- SL201_gas_box_door_sw1_2 :BOOL;
- FFU_temp_sw :BOOL;
- SL202_gas_box_door_sw2_1 :BOOL;
- SL203_gas_box_door_sw3_2 :BOOL;
- SL203_gas_box_door_sw3_1 :BOOL;
- SL202_gas_box_door_sw2_2 :BOOL;
- SL204_gas_box_door_sw4_1 :BOOL;
- SL205_gas_box_door_sw5_2 :BOOL;
- SL205_gas_box_door_sw5_1 :BOOL;
- SL204_gas_box_door_sw4_2 :BOOL;
- SL501_LA_door_sw1 :BOOL;
- SL504_furnace_door_sw :BOOL;
- SL503_LA_door_sw3 :BOOL;
- SL502_LA_door_sw2 :BOOL;
- MS2_1S_gas_box_exhaust_alarm :BOOL;
- MS2_2S_gas_box_exhaust_alarm :BOOL;
- Gas_box_exhaust_Pressure_alarm_2nd :BOOL;
- Gas_box_exhaust_Pressure_alarm_1st :BOOL;
- LD501_Magnetic_fluid_leak :BOOL;
- MS2_3S_gas_box_exhaust_alarm :BOOL;
- LSC_1_leak_alarm :BOOL;
- LD502_Cooling_water_leak :BOOL;
- LD503_RHC_leak :BOOL;
- TS305_RHC_temp_sw :BOOL;
- TS306_Main_furnace_Temp_sw :BOOL;
- LD301_water_leak_alarm :BOOL;
- EMO301_Exhaust_box_EMO :BOOL;
- LD302_water_leak_alarm :BOOL;
- Buffer_motor_EDM :BOOL;
- R_axis_motor_EDM :BOOL;
- Boat_motor_EDM :BOOL;
- AC100V_transformer_power_on_switch :BOOL;
- Power_box_fire_detector_alarm :BOOL;
- Furnace_transformer_temp_sw :BOOL;
- EMO101_power_box_EMO :BOOL;
- Furnace_power_on_switch :BOOL;
- VFD_EDM :BOOL;
- Reset_button :BOOL;
- Light_curtain_OSSD2 :BOOL;
- Light_curtain_OSSD1 :BOOL;
- Light_curtain_fault :BOOL;
- Frontbody_IO_shutter :BOOL;
- Frontbody_reset_button :BOOL;
- EMO401_frontbody_EMO :BOOL;
- Frontbody_door_sw :BOOL;
- END_VAR]]></Declaration>
- </GVL>
- </TcPlcObject>
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