TIN_PMC/TIN001-PLC/TIN001/PMC/POU/_600_FIMS/FIMSSEQUENCE.TcPOU

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <POU Name="FIMSSEQUENCE" Id="{ccd53ff0-004a-4e41-8b19-d824f47f7c88}" SpecialFunc="None">
    <Declaration><![CDATA[FUNCTION_BLOCK FIMSSEQUENCE
VAR_INPUT
	Enable	:BOOL;
	StopCmd_In_b	:BOOL;
	LoadCmd_In_b	:BOOL;
	UnloadCmd_In_b	:BOOL;
	Open_Close_Cmd_In_b	:BOOL;
	Open_Close_Count	:BOOL;
	PodSeqAlmRst_In_b	:BOOL;
	N2PurgeBypassEN_In_b	:BOOL;
	FoupInPodPos_In_b	:BOOL;
	FoupInRetractPos_In_b	:BOOL;
	FoupInExtendPos_In_b	:BOOL;
	FoupInSealPos_In_b	:BOOL;
	FoupInRlsPos_In_b	:BOOL;
	FoupLatchOnPos_In_b	:BOOL;
	FoupLatchOffPos_In_b	:BOOL;
	PodVacStatus_In_b	:BOOL;
	PodVacATM_In_b	:BOOL;
	O2Check_EN	:BOOL;
	O2Check_Done_In_b	:BOOL;
	PodDrXaxisAvoidInUpPos_In_b	:BOOL;
	PodDrXaxisAvoidInDnPos_In_b	:BOOL;
	PodDrYClsPos_In_b	:BOOL;
	PodDrYOpPos_In_b	:BOOL;
	N2PurgeValOpPos_In_b	:BOOL;
	N2PurgeValClPos_In_b	:BOOL;

END_VAR
VAR_OUTPUT
	EnableOutput	:BOOL;
	LoadOTAlm_Out_b	:BOOL;
	UnloadOTAlm_Out_b	:BOOL;
	PodLoadDone_Out_b	:BOOL;
	PodUnloadDone_Out_b	:BOOL;
	PodRunning_Out_b	:BOOL;
	PodRetractVal_Out_b	:BOOL;
	PodExtendVal_Out_b	:BOOL;
	PodVacOpVal_Out_b	:BOOL;
	PodVacClsVal_Out_b	:BOOL;
	PodFoupLatchOffVal_Out_b	:BOOL;
	PodFoupLatchonVal_Out_b	:BOOL;
	PodSealVal_Out_b	:BOOL;
	PodRealseVal_Out_b	:BOOL;
	N2PurgePodOpVal_Out_b	:BOOL;
	N2PurgePodClsVal_Out_b	:BOOL;
	O2CheckVal_Out_b	:BOOL;
	PodDrXaxisAvoidOpVal_Out_b	:BOOL;
	PodDrXaxisAvoidClsVal_Out_b	:BOOL;
	PodDrYOpVal_Out_b	:BOOL;
	PodDrYClsVal_Out_b	:BOOL;

END_VAR
VAR
	UnloadStage	:	INT	;
	FIMSUnloadTrig	:	R_TRIG	;
	UnloadOTAlm	:	TON	;
	LoadStage	:	INT	;
	FIMSLoadTrig	:	R_TRIG	;
	LoadOTAlm	:	TON	;
	FIMSTrigDleyOn	:	TON	;
	FIMSUnloadDlyOn	:	TON	;
	PodLoadRunning_b	:	BOOL	;
	PodUnloadRunning_b	:	BOOL	;
	loadottime	:	TIME	;
	unloadottime	:	TIME	;
	KeyStatusTON	:	TON	;
	KeyStatusTON1	:	TON	;
	UnloadVacOffDly	:	TON	;
	UNLOAD_STEP_DELAY_EN	:	BOOL	;
	UNLOAD_STEP_NEXT	:	INT	;
	UNLOAD_STEP_DELAY	:	TON	;
	UNLOAD_STEP_DELAY_TIME	:	TIME	;
	LOAD_STEP_DELAY_EN	:	BOOL	;
	LOAD_STEP_NEXT	:	INT	;
	LOAD_STEP_DELAY	:	TON	;
	LOAD_STEP_DELAY_TIME	:	TIME	;

END_VAR
]]></Declaration>
    <Implementation>
      <ST><![CDATA[	IF NOT LoadCmd_In_b OR ( LoadOTAlm_Out_b AND PodSeqAlmRst_In_b ) OR StopCmd_In_b THEN
		LoadOTAlm(	In:= FALSE , PT:= T#60s , Q=> LoadOTAlm_Out_b , ET=>loadottime );
		LoadStage := 0 ;
		PodLoadRunning_b := FALSE ;
		LOAD_STEP_DELAY_EN:=FALSE;
		LOAD_STEP_NEXT:=0;
	END_IF ;
	
	IF NOT UnloadCmd_In_b OR ( UnloadOTAlm_Out_b AND PodSeqAlmRst_In_b ) OR StopCmd_In_b THEN
		UnloadOTAlm(	In:= FALSE , PT:= T#60s , Q=> UnloadOTAlm_Out_b , ET=>unloadottime );
		UnloadStage := 0 ;
		PodUnloadRunning_b := FALSE ;
		UNLOAD_STEP_DELAY_EN:=FALSE;
		UNLOAD_STEP_NEXT:=0;
	END_IF;
	
	IF Enable THEN
	//Alarm
	IF LoadCmd_In_b AND NOT StopCmd_In_b AND LoadStage>0 THEN 
		LoadOTAlm(	In:= TRUE , PT:= T#60s , Q=> LoadOTAlm_Out_b , ET=>loadottime );
	(*ELSIF NOT LoadCmd_In_b OR ( LoadOTAlm_Out_b AND PodSeqAlmRst_In_b ) OR StopCmd_In_b THEN
		LoadOTAlm(	In:= FALSE , PT:= T#60s , Q=> LoadOTAlm_Out_b , ET=>loadottime );
		LoadStage := 0 ;
		PodLoadRunning_b := FALSE ;*)
	END_IF;
	
	IF UnloadCmd_In_b AND NOT StopCmd_In_b AND UnloadStage>0 THEN 
		UnloadOTAlm(	In:= TRUE , PT:= T#60s , Q=> UnloadOTAlm_Out_b , ET=>unloadottime );
	(*ELSIF NOT UnloadCmd_In_b OR ( UnloadOTAlm_Out_b AND PodSeqAlmRst_In_b ) OR StopCmd_In_b THEN
		UnloadOTAlm(	In:= FALSE , PT:= T#60s , Q=> UnloadOTAlm_Out_b , ET=>unloadottime );
		UnloadStage := 0 ;
		PodUnloadRunning_b := FALSE ;*)
	END_IF;
	
	//Unload
	FIMSUnloadDlyOn.In := UnloadCmd_In_b ;
	FIMSUnloadDlyOn((*In:=,*) PT:=T#100MS(*, Q=>, ET=>*));
	UNLOAD_STEP_DELAY(In:=UNLOAD_STEP_DELAY_EN,PT:=UNLOAD_STEP_DELAY_TIME);
	IF UnloadCmd_In_b THEN
		FIMSUnloadTrig(	Clk:= FIMSUnloadDlyOn.Q );
		IF FIMSUnloadTrig.Q THEN
			UnloadStage := 0 ;
		END_IF;
		CASE UnloadStage OF
			0://门板Y轴归位
				PodLoadDone_Out_b := FALSE ;
				PodUnloadDone_Out_b := FALSE ;
				PodUnloadRunning_b := TRUE ;
				PodDrYClsVal_Out_b := TRUE ;
				PodDrYOpVal_Out_b := FALSE ;
				(*UnloadOTAlm(	In:= PodDrYClsVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodDrYClsVal_Out_b AND PodDrYClsPos_In_b AND NOT PodDrYOpPos_In_b AND NOT UnloadOTAlm_Out_b 
				 THEN
					UNLOAD_STEP_DELAY_EN:=TRUE;
					UNLOAD_STEP_NEXT:=10;
					UNLOAD_STEP_DELAY_TIME:=T#200ms;
					UnloadStage := 200 ;
				END_IF;
			10://Pod 门板移动 seal
				PodSealVal_Out_b := TRUE ;
				PodRealseVal_Out_b := FALSE ;
				(*UnloadOTAlm(	In:= PodSealVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodSealVal_Out_b AND FoupInSealPos_In_b AND NOT FoupInRlsPos_In_b AND NOT UnloadOTAlm_Out_b THEN
					N2PurgePodClsVal_Out_b := TRUE ;
					UNLOAD_STEP_DELAY_EN:=TRUE;
					UNLOAD_STEP_NEXT:=30;
					UNLOAD_STEP_DELAY_TIME:=T#200ms;
					UnloadStage := 200 ;
				END_IF;
			(*20://pod门板x轴避让归位
				PodDrXaxisAvoidClsVal_Out_b :=TRUE ;
				PodDrXaxisAvoidOpVal_Out_b := FALSE ;
				[*UnloadOTAlm(	In:= PodDrXaxisAvoidClsVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*]
				IF PodDrXaxisAvoidClsVal_Out_b AND PodDrXaxisAvoidInDnPos_In_b AND NOT PodDrXaxisAvoidInUpPos_In_b AND NOT UnloadOTAlm_Out_b THEN 
					UnloadStage := 30;
				END_IF;*)
			30://foup latch on
				PodFoupLatchonVal_Out_b := TRUE ;
				PodFoupLatchoffVal_Out_b  := FALSE ;
				KeyStatusTON(In:=PodFoupLatchonVal_Out_b, PT:=T#1s(*, Q=>, ET=>*));
				(*UnloadOTAlm(	In:= PodFoupLatchonVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodFoupLatchonVal_Out_b AND FoupLatchOnPos_In_b AND NOT FoupLatchOffPos_In_b AND NOT UnloadOTAlm_Out_b AND KeyStatusTON.Q THEN
					UNLOAD_STEP_DELAY_EN:=TRUE;
					UNLOAD_STEP_NEXT:=40;
					UNLOAD_STEP_DELAY_TIME:=T#200ms;
					UnloadStage := 200 ;
				END_IF;
			
			40://Vacuum off
				PodVacClsVal_Out_b := TRUE ;
				PodVacOpVal_Out_b := FALSE ;
				UnloadVacOffDly(In:=PodVacClsVal_Out_b, PT:=T#1.5s(*, Q=>, ET=>*));
				IF PodVacATM_In_b OR UnloadVacOffDly.Q(*PodVacClsVal_Out_b AND PodVacStatus_In_b*) THEN
					UNLOAD_STEP_DELAY_EN:=TRUE;
					UNLOAD_STEP_NEXT:=50;
					UNLOAD_STEP_DELAY_TIME:=T#200ms;
					UnloadStage := 200 ;
				END_IF;
			
			50:// retract
				KeyStatusTON(In:=FALSE, PT:=T#1s(*, Q=>, ET=>*));
				PodRetractVal_Out_b := TRUE ;
				PodExtendVal_Out_b := FALSE ;
				(*UnloadOTAlm(	In:= PodRetractVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodRetractVal_Out_b AND FoupInRetractPos_In_b AND NOT FoupInExtendPos_In_b AND NOT UnloadOTAlm_Out_b (*AND FoupInPodPos_In_b*)THEN
					UNLOAD_STEP_DELAY_EN:=TRUE;
					UNLOAD_STEP_NEXT:=100;
					UNLOAD_STEP_DELAY_TIME:=T#200ms;
					UnloadStage := 200 ;
				END_IF;
			100://Unload done
				UnloadOTAlm(	In:= FALSE , PT:= T#60s , Q=> UnloadOTAlm_Out_b (*, ET=>*));
				PodUnloadRunning_b := FALSE ;
				PodUnloadDone_Out_b := TRUE ;
				UNLOAD_STEP_DELAY_EN:=FALSE;
				
			200://each step delay time
				 IF UNLOAD_STEP_DELAY.Q
					 THEN
					 UNLOAD_STEP_DELAY_EN:=FALSE;
					 UnloadStage := UNLOAD_STEP_NEXT ;
				 END_IF;
		END_CASE;
	END_IF;
	
	//Load
	(*FIMSTrigDleyOn.In := LoadCmd_In_b ;*)
	FIMSTrigDleyOn.In := LoadCmd_In_b ;
	FIMSTrigDleyOn((*In:= LoadCmd_In_b ,*) PT:= T#100MS (*, Q=>, ET=>*));
	LOAD_STEP_DELAY(In:=LOAD_STEP_DELAY_EN,PT:=LOAD_STEP_DELAY_TIME);
	IF LoadCmd_In_b THEN
		FIMSLoadTrig(	Clk:= FIMSTrigDleyOn.Q );
		IF FIMSLoadTrig.Q=TRUE THEN
			LoadStage:= 0;
		END_IF;
		CASE LoadStage OF
			0://载台上foup有无检测
				PodUnloadDone_Out_b := FALSE ;
				PodLoadDone_Out_b := FALSE ;
				PodLoadRunning_b := TRUE ;
				(*LoadOTAlm.In := NOT PodSeqAlmRst_In_b ;*)
				(*LoadOTAlm([*In:=,*] PT:=T#60s, Q=>LoadOTAlm_Out_b[*, ET=>*]);*)
				IF FoupInPodPos_In_b AND NOT LoadOTAlm_Out_b THEN
					LoadOTAlm.In :=FALSE ;
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=10;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
			10: //dock
				PodExtendVal_Out_b :=TRUE;
				PodRetractVal_Out_b:=FALSE;
				(*LoadOTAlm1(In:= PodExtendVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s, Q=> LoadOTAlm_Out_b [*, ET=>*] );*)
				IF PodExtendVal_Out_b=TRUE AND FoupInExtendPos_In_b=TRUE AND NOT FoupInRetractPos_In_b=TRUE AND NOT LoadOTAlm_Out_b=TRUE THEN
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=20;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
			20: //vacuum on
				PodVacOpVal_Out_b := TRUE ;
				PodVacClsVal_Out_b := FALSE ;
				IF PodVacOpVal_Out_b=TRUE (* AND PodVacStatus_In_b=TRUE *) THEN
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=30;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
			30: //foup latch off
				PodFoupLatchoffVal_Out_b := TRUE ;
				PodFoupLatchonVal_Out_b := FALSE ;
				KeyStatusTON1(In:=PodFoupLatchoffVal_Out_b, PT:=T#1s(*, Q=>, ET=>*));
				(*LoadOTAlm2(	In:= PodFoupLatchoffVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> LoadOTAlm_Out_b [*, ET=>*] );*)
				IF PodFoupLatchoffVal_Out_b AND FoupLatchOffPos_In_b AND NOT FoupLatchOnPos_In_b AND NOT LoadOTAlm_Out_b AND KeyStatusTON1.Q THEN
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=31;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
			
			31://N2 Purge Judge
				IF N2PurgeBypassEN_In_b AND O2Check_EN
					THEN 
					loadStage := 40 ;
				ELSE
					loadStage := 50;
				END_IF;
			
			
			40://pod门板x轴避让归位   N2 SEAL
				PodDrXaxisAvoidClsVal_Out_b :=TRUE ;
				PodDrXaxisAvoidOpVal_Out_b := FALSE ;
				(*UnloadOTAlm(	In:= PodDrXaxisAvoidClsVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodDrXaxisAvoidClsVal_Out_b AND PodDrXaxisAvoidInDnPos_In_b AND NOT PodDrXaxisAvoidInUpPos_In_b AND NOT UnloadOTAlm_Out_b THEN 
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=41;
					LOAD_STEP_DELAY_TIME:=T#0ms;
					loadStage := 41 ;
				END_IF;
			41: //Pod 门板移动 release
				PodRealseVal_Out_b := TRUE ;
				PodSealVal_Out_b := FALSE ;
				(*LoadOTAlm3(	In:= PodRealseVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> LoadOTAlm_Out_b [*, ET=>*] );*)		
				IF PodRealseVal_Out_b AND FoupInRlsPos_In_b AND NOT FoupInSealPos_In_b AND NOT LoadOTAlm_Out_b THEN
					N2PurgePodClsVal_Out_b := TRUE ;
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=42;
					LOAD_STEP_DELAY_TIME:=T#0ms;
					loadStage := 42 ;
				END_IF;
			42: //N2 Purge and O2 detect
				N2PurgePodOpVal_Out_b := TRUE ;
				N2PurgePodClsVal_Out_b :=FALSE ;
				O2CheckVal_Out_b := TRUE ;
				IF N2PurgePodOpVal_Out_b AND N2PurgeValOpPos_In_b AND NOT N2PurgeValClPos_In_b AND O2Check_Done_In_b AND NOT LoadOTAlm_Out_b THEN
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=43;
					LOAD_STEP_DELAY_TIME:=T#0ms;
					loadStage := 43 ;
				END_IF;
			43://Pod 门板移动 seal
				PodSealVal_Out_b := TRUE ;
				PodRealseVal_Out_b := FALSE ;
				(*UnloadOTAlm(	In:= PodSealVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodSealVal_Out_b AND FoupInSealPos_In_b AND NOT FoupInRlsPos_In_b AND NOT UnloadOTAlm_Out_b THEN
					N2PurgePodClsVal_Out_b := TRUE ;
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=50;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
			50: // X轴避让
				PodDrXaxisAvoidOpVal_Out_b := TRUE ;
				PodDrXaxisAvoidClsVal_Out_b := FALSE ;
				(*LoadOTAlm4(	In:= PodDrXaxisAvoidOpVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> LoadOTAlm_Out_b [*, ET=>*] );*)
				IF PodDrXaxisAvoidOpVal_Out_b AND PodDrXaxisAvoidInUpPos_In_b AND NOT PodDrXaxisAvoidInDnPos_In_b AND NOT LoadOTAlm_Out_b THEN 
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=51;
					LOAD_STEP_DELAY_TIME:=T#0ms;
					loadStage := 51 ;
				END_IF;
			51: //Pod 门板移动 release
				PodRealseVal_Out_b := TRUE ;
				PodSealVal_Out_b := FALSE ;
				(*LoadOTAlm3(	In:= PodRealseVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> LoadOTAlm_Out_b [*, ET=>*] );*)
				IF PodRealseVal_Out_b AND FoupInRlsPos_In_b AND NOT FoupInSealPos_In_b AND NOT LoadOTAlm_Out_b THEN
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=52;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
			52://X轴避让
				PodDrXaxisAvoidOpVal_Out_b := TRUE ;
				PodDrXaxisAvoidClsVal_Out_b := FALSE ;
				//LoadOTAlm4(	In:= PodDrXaxisAvoidOpVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> LoadOTAlm_Out_b [*, ET=>*] );
				IF PodDrXaxisAvoidOpVal_Out_b AND PodDrXaxisAvoidInUpPos_In_b AND NOT PodDrXaxisAvoidInDnPos_In_b AND NOT LoadOTAlm_Out_b THEN 
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=60;
					LOAD_STEP_DELAY_TIME:=T#200ms;
					loadStage := 200 ;
				END_IF;
				
			 (*53://vacuum off
				KeyStatusTON(In:=FALSE, PT:=T#1s[*, Q=>, ET=>*]);
				PodVacClsVal_Out_b := TRUE ;
				PodVacOpVal_Out_b := FALSE ;
				IF PodVacClsVal_Out_b AND PodVacStatus_In_b THEN
					LoadStage := 60 ;
				END_IF; *)
			60://Y轴移动
				PodDrYOpVal_Out_b := TRUE ;
				PodDrYClsVal_Out_b := FALSE ;
				(*LoadOTAlm5(	In:= PodDrYOpVal_Out_b AND NOT PodSeqAlmRst_In_b , PT:= T#60s , Q=> UnloadOTAlm_Out_b [*, ET=>*] );*)
				IF PodDrYOpVal_Out_b AND PodDrYOpPos_In_b AND NOT PodDrYClsPos_In_b AND NOT UnloadOTAlm_Out_b THEN
					LOAD_STEP_DELAY_EN:=TRUE;
					LOAD_STEP_NEXT:=100;
					LOAD_STEP_DELAY_TIME:=T#0ms;
					loadStage := 100 ;
				END_IF;
			100://Load done
				LoadOTAlm(	In:= FALSE , PT:= T#60s , Q=> LoadOTAlm_Out_b (*, ET=>*));
				PodLoadRunning_b := FALSE ;
				PodLoadDone_Out_b := TRUE ;
						
			200://each step delay time
				 IF LOAD_STEP_DELAY.Q
					 THEN
					 LOAD_STEP_DELAY_EN:=FALSE;
					 loadStage := LOAD_STEP_NEXT ;
				 END_IF;
		END_CASE;
	END_IF;
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	PodRunning_Out_b := PodLoadRunning_b OR PodUnloadRunning_b ;
	
	END_IF;]]></ST>
    </Implementation>
    <LineIds Name="FIMSSEQUENCE">
      <LineId Id="17" Count="36" />
      <LineId Id="412" Count="0" />
      <LineId Id="54" Count="78" />
      <LineId Id="134" Count="11" />
      <LineId Id="411" Count="0" />
      <LineId Id="146" Count="154" />
      <LineId Id="302" Count="29" />
      <LineId Id="9" Count="0" />
    </LineIds>
  </POU>
</TcPlcObject>