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							- <?xml version="1.0" encoding="utf-8"?>
 
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
 
-   <DUT Name="STR_FIMS_TPSt" Id="{ef0ab687-20e8-4ddc-ba6a-285063ef5f21}">
 
-     <Declaration><![CDATA[TYPE STR_FIMS_TPSt :
 
- STRUCT
 
- 	FIMS1LatchOff1_b	:	BOOL	;
 
- 	FIMS1LatchOn1_b	:	BOOL	;
 
- 	FIMS1LatchOff2_b	:	BOOL	;
 
- 	FIMS1LatchOn2_b	:	BOOL	;
 
- 	FIMS2LatchOff1_b	:	BOOL	;
 
- 	FIMS2LatchOn1_b	:	BOOL	;
 
- 	FIMS2LatchOff2_b	:	BOOL	;
 
- 	FIMS2LatchOn2_b	:	BOOL	;
 
- 	FIMS1Seal_b	:	BOOL	;
 
- 	FIMS1Release_b	:	BOOL	;
 
- 	FIMS2Seal_b	:	BOOL	;
 
- 	FIMS2Release_b	:	BOOL	;
 
- 	FIMS1DoorClose_b	:	BOOL	;
 
- 	FIMS1DoorOpen_b	:	BOOL	;
 
- 	FIMS2DoorClose_b	:	BOOL	;
 
- 	FIMS2DoorOpen_b	:	BOOL	;
 
- 	FIMS1AvoidanceDown_b	:	BOOL	;
 
- 	FIMS1AvoidanceUp_b	:	BOOL	;
 
- 	FIMS2AvoidanceDown_b	:	BOOL	;
 
- 	FIMS2AvoidanceUp_b	:	BOOL	;
 
- 	FIMS1Undock_b	:	BOOL	;
 
- 	FIMS1Dock_b	:	BOOL	;
 
- 	FIMS2Undock_b	:	BOOL	;
 
- 	FIMS2Dock_b	:	BOOL	;
 
- 	FIMS1VacuumClose_b	:	BOOL	;
 
- 	FIMS1VacuumOpen_b	:	BOOL	;
 
- 	FIMS2VacuumClose_b	:	BOOL	;
 
- 	FIMS2VacuumOpen_b	:	BOOL	;
 
- 	AutoOrManual_b	:	BOOL	;	//	0:Manual,1:Auto
 
- 	FIMS1AutoLoadCmd_b	:	BOOL	;
 
- 	FIMS1AutoUnloadCmd_b	:	BOOL	;
 
- 	FIMS2AutoLoadCmd_b	:	BOOL	;
 
- 	FIMS2AutoUnloadCmd_b	:	BOOL	;
 
- 	FIMS1AutoOpOTAlarm_b	:	BOOL	;
 
- 	FIMS2AutoOpOTAlarm_b	:	BOOL	;
 
- 	FIMSAlarmReset_b	:	BOOL	;
 
- 	FIMS1Stop_b	:	BOOL	;
 
- 	FIMS2Stop_b	:	BOOL	;
 
- 	FIMS1FoupBypass_b	:	BOOL	;
 
- 	FIMS2FoupBypass_b	:	BOOL	;
 
- 	FIMS1N2PurgeBypass_b	:	BOOL	;
 
- 	FIMS2N2PurgeBypass_b	:	BOOL	;
 
- 	SpareA_b	:	BOOL	;
 
- 	SpareB_b	:	BOOL	;
 
- 	SpareC_b	:	BOOL	;
 
- 	SpareD_b	:	BOOL	;
 
- 	SpareE_b	:	BOOL	;
 
- 	SpareF_b	:	BOOL	;
 
- END_STRUCT
 
- END_TYPE
 
- ]]></Declaration>
 
-   </DUT>
 
- </TcPlcObject>
 
 
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