| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113 | <?xml version="1.0" encoding="utf-8"?><TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">  <POU Name="IO_EXCHANGE" Id="{ad4ee5b9-37d9-412d-9c8a-ff9848ac518a}" SpecialFunc="None">    <Declaration><![CDATA[PROGRAM IO_EXCHANGEVAREND_VAR]]></Declaration>    <Implementation>      <ST><![CDATA[//FIMS	NDI.FIMS1_FOUP_exist	:=	LAI.I500_02	;	NDI.FIMS1_FOUP_undock	:=	LAI.I500_01	;	NDI.FIMS1_FOUP_dock	:=	LAI.I500_00	;	NDI.FIMS1_seal	:=	LAI.I502_00	;	NDI.FIMS1_release	:=	LAI.I502_01	;	NDI.FIMS1_FOUP_latch_on	:=	LAI.I502_04	;	NDI.FIMS1_FOUP_latch_off	:=	LAI.I502_05	;	NDI.FIMS1_FOUP_negative_Pressure	:=	LAI.I500_08	;	NDI.FIMS1_FOUP_ordinary_Pressure	:=	LAI.I500_09	;	NDI.FIMS1_collision_avoidance_up	:=	LAI.I502_06	;	NDI.FIMS1_collision_avoidance_down	:=	LAI.I502_07	;	NDI.FIMS1_door_close	:=	LAI.I502_03	;	NDI.FIMS1_door_open	:=	LAI.I502_02	;	NDI.FIMS1_exhaust_open_position	:=	LAI.I501_08	;	NDI.FIMS1_exhaust_close_position	:=	LAI.I501_09	;									LAQ.Q501_00	:=	NDO.POD1_exhaust_switch_open	;					NDI.FIMS2_FOUP_exist	:=	LAI.I500_05	;	NDI.FIMS2_FOUP_undock	:=	LAI.I500_04	;	NDI.FIMS2_FOUP_dock	:=	LAI.I500_03	;	NDI.FIMS2_seal	:=	LAI.I502_08	;	NDI.FIMS2_release	:=	LAI.I502_09	;	NDI.FIMS2_FOUP_latch_on	:=	LAI.I502_12	;	NDI.FIMS2_FOUP_latch_off	:=	LAI.I502_13	;	NDI.FIMS2_FOUP_negative_Pressure	:=	LAI.I500_10	;	NDI.FIMS2_FOUP_ordinary_Pressure	:=	LAI.I500_11	;	NDI.FIMS2_collision_avoidance_up	:=	LAI.I502_14	;	NDI.FIMS2_collision_avoidance_down	:=	LAI.I502_15	;	NDI.FIMS2_door_close	:=	LAI.I502_11	;	NDI.FIMS2_door_open	:=	LAI.I502_10	;	NDI.FIMS2_exhaust_open_position	:=	LAI.I501_10	;	NDI.FIMS2_exhaust_close_position	:=	LAI.I501_11	;									LAQ.Q501_02	:=	NDO.POD2_exhaust_switch_open	;//VT802																			ECC.	VT802.	A	.	0	:=	GVL.	FIMSValveAct.FIMS1LatchOff1_b	;	ECC.	VT802.	A	.	1	:=	GVL.	FIMSValveAct.FIMS1LatchOn1_b	;	ECC.	VT802.	A	.	2	:=	GVL.	FIMSValveAct.FIMS1LatchOff2_b	;	ECC.	VT802.	A	.	3	:=	GVL.	FIMSValveAct.FIMS1LatchOn2_b	;	ECC.	VT802.	A	.	4	:=	GVL.	FIMSValveAct.FIMS2LatchOff1_b	;	ECC.	VT802.	A	.	5	:=	GVL.	FIMSValveAct.FIMS2LatchOn1_b	;	ECC.	VT802.	A	.	6	:=	GVL.	FIMSValveAct.FIMS2LatchOff2_b	;	ECC.	VT802.	A	.	7	:=	GVL.	FIMSValveAct.FIMS2LatchOn2_b	;										ECC.	VT802.	B	.	0	:=	GVL.	FIMSValveAct.FIMS1Seal_b	;	ECC.	VT802.	B	.	1	:=	GVL.	FIMSValveAct.FIMS1Release_b	;	ECC.	VT802.	B	.	2	:=	GVL.	FIMSValveAct.FIMS2Seal_b	;	ECC.	VT802.	B	.	3	:=	GVL.	FIMSValveAct.FIMS2Release_b	;	ECC.	VT802.	B	.	4	:=	GVL.	FIMSValveAct.FIMS1DoorClose_b	;	ECC.	VT802.	B	.	5	:=	GVL.	FIMSValveAct.FIMS1DoorOpen_b	;	ECC.	VT802.	B	.	6	:=	GVL.	FIMSValveAct.FIMS2DoorClose_b	;	ECC.	VT802.	B	.	7	:=	GVL.	FIMSValveAct.FIMS2DoorOpen_b	;										ECC.	VT802.	C	.	0	:=	GVL.	FIMSValveAct.FIMS1AvoidanceDown_b	;	ECC.	VT802.	C	.	1	:=	GVL.	FIMSValveAct.FIMS1AvoidanceUp_b	;	ECC.	VT802.	C	.	2	:=	GVL.	FIMSValveAct.FIMS2AvoidanceDown_b	;	ECC.	VT802.	C	.	3	:=	GVL.	FIMSValveAct.FIMS2AvoidanceUp_b	;	ECC.	VT802.	C	.	4	:=	GVL.	FIMSValveAct.FIMS1Undock_b	;	ECC.	VT802.	C	.	5	:=	GVL.	FIMSValveAct.FIMS1Dock_b	;	ECC.	VT802.	C	.	6	:=	GVL.	FIMSValveAct.FIMS2Undock_b	;	ECC.	VT802.	C	.	7	:=	GVL.	FIMSValveAct.FIMS2Dock_b	;																		//VT803																		ECC.	VT803.	A	.	0	:=	GVL.	FIMSValveAct.FIMS1VacuumClose_b	;	ECC.	VT803.	A	.	1	:=	GVL.	FIMSValveAct.FIMS1VacuumOpen_b	;	ECC.	VT803.	A	.	2	:=	GVL.	FIMSValveAct.FIMS2VacuumClose_b	;										ECC.	VT803.	A	.	3	:=	GVL.	FIMSValveAct.FIMS2VacuumOpen_b	;																	//	ECC.	VT803.	A	.	4	:=			;//	ECC.	VT803.	A	.	5	:=			;//	ECC.	VT803.	A	.	6	:=			;//	ECC.	VT803.	A	.	7	:=			;									//	ECC.	VT803.	B	.	0	:=			;//	ECC.	VT803.	B	.	1	:=			;//	ECC.	VT803.	B	.	2	:=			;//	ECC.	VT803.	B	.	3	:=			;							]]></ST>    </Implementation>    <LineIds Name="IO_EXCHANGE">      <LineId Id="49" Count="0" />      <LineId Id="6" Count="36" />      <LineId Id="47" Count="1" />      <LineId Id="46" Count="0" />      <LineId Id="294" Count="47" />      <LineId Id="245" Count="0" />      <LineId Id="149" Count="0" />      <LineId Id="50" Count="0" />    </LineIds>  </POU></TcPlcObject>
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