TIN_PMC/TIN001-PLC/TIN001/PMC/GVLs/TO PMC/AO.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="AO" Id="{73895e21-a438-452e-8e37-833712051620}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//MFC
	MFC1_SV  AT%I*:REAL;
	MFC1_Rate  AT%I*:REAL;
	
	MFC2_SV  AT%I*:REAL;
	MFC2_Rate  AT%I*:REAL;
	
	MFC3_SV  AT%I*:REAL;
	MFC3_Rate  AT%I*:REAL;
	
	MFC4_SV  AT%I*:REAL;
	MFC4_Rate  AT%I*:REAL;
	
	MFC5_SV  AT%I*:REAL;
	MFC5_Rate  AT%I*:REAL;
	
	MFC6_SV  AT%I*:REAL;
	MFC6_Rate  AT%I*:REAL;
	
	MFC7_SV  AT%I*:REAL;
	MFC7_Rate  AT%I*:REAL;
	
	MFC8_SV  AT%I*:REAL;
	MFC8_Rate  AT%I*:REAL;
	
	MFC9_SV  AT%I*:REAL;
	MFC9_Rate  AT%I*:REAL;
	
	MFC10_SV  AT%I*:REAL;
	MFC10_Rate  AT%I*:REAL;
	
	MFC11_SV  AT%I*:REAL;
	MFC11_Rate  AT%I*:REAL;
	
	MFC12_SV  AT%I*:REAL;
	MFC12_Rate  AT%I*:REAL;
	
	MFC13_SV  AT%I*:REAL;
	MFC13_Rate  AT%I*:REAL;
	
	MFC14_SV  AT%I*:REAL;
	MFC14_Rate  AT%I*:REAL;
	
	MFC15_SV  AT%I*:REAL;
	MFC15_Rate  AT%I*:REAL;
	
	MFC16_SV  AT%I*:REAL;
	MFC16_Rate  AT%I*:REAL;
	
	MFC17_SV  AT%I*:REAL;
	MFC17_Rate  AT%I*:REAL;
	
	MFC51_SV  AT%I*:REAL;
	MFC51_Rate  AT%I*:REAL;
//FURNACE
	FURNACE_Tube_Film_Thickness	,
	RecipeNo	,

	FURNACE_WR_EN	,
	FURNACE_JETCMode	,
	U_SP	,
	U_Offset	,
//		,
	U_Forced_MV	,
	U_Control_Mode	,
	U_Enable_Out	,
	CU_SP	,
	CU_Offset	,
//		,
	CU_Forced_MV	,
	CU_Control_Mode	,
	CU_Enable_Out	,
	C_SP	,
	C_Offset	,
//		,
	C_Forced_MV	,
	C_Control_Mode	,
	C_Enable_Out	,
	CL_SP	,
	CL_Offset	,
//		,
	CL_Forced_MV	,
	CL_Control_Mode	,
	CL_Enable_Out	,
	L_SP	,
	L_Offset	,
//		,
	L_Forced_MV	,
	L_Control_Mode	,
	L_Enable_Out	,
	SL_SP	,
	SL_Offset	,
//		,
	SL_Forced_MV	,
	SL_Control_Mode	,
	SL_Enable_Out	,
	SUB_SP	,
	SUB_Offset	,
//		,
	SUB_Forced_MV	,
	SUB_Control_Mode	,
	SUB_Enable_Out	,
//		,
//		,
//		,
//		,
//		,
	U_Open_Offset	,
	CU_Open_Offset	,
	C_Open_Offset	,
	CL_Open_Offset	,
	L_Open_Offset	,
	SL_Open_Offset	,
	SUB_Up_Rate	,
	SUB_Down_Rate	,
	SUB_PID_P	,
	SUB_PID_I	,
	SUB_PID_D	,
	U_Cascade_Mode_Selection	,
	U_Up_Rate	,
	U_Down_Rate	,
	U_Secondary_SP	,
	U_Main_TC_Select	,
	U_Primary_PID_P	,
	U_Primary_PID_I	,
	U_Primary_PID_D	,
	U_PID_P	,
	U_PID_I	,
	U_PID_D	,
	CU_Cascade_Mode_Selection	,
	CU_Up_Rate	,
	CU_Down_Rate	,
	CU_Secondary_SP	,
	CU_Main_TC_Select	,
	CU_Primary_PID_P	,
	CU_Primary_PID_I	,
	CU_Primary_PID_D	,
	CU_PID_P	,
	CU_PID_I	,
	CU_PID_D	,
	C_Cascade_Mode_Selection	,
	C_Up_Rate	,
	C_Down_Rate	,
	C_Secondary_SP	,
	C_Main_TC_Select	,
	C_Primary_PID_P	,
	C_Primary_PID_I	,
	C_Primary_PID_D	,
	C_PID_P	,
	C_PID_I	,
	C_PID_D	,
	CL_Cascade_Mode_Selection	,
	CL_Up_Rate	,
	CL_Down_Rate	,
	CL_Secondary_SP	,
	CL_Main_TC_Select	,
	CL_Primary_PID_P	,
	CL_Primary_PID_I	,
	CL_Primary_PID_D	,
	CL_PID_P	,
	CL_PID_I	,
	CL_PID_D	,
	L_Cascade_Mode_Selection	,
	L_Up_Rate	,
	L_Down_Rate	,
	L_Secondary_SP	,
	L_Main_TC_Select	,
	L_Primary_PID_P	,
	L_Primary_PID_I	,
	L_Primary_PID_D	,
	L_PID_P	,
	L_PID_I	,
	L_PID_D	,
	SL_Cascade_Mode_Selection	,
	SL_Up_Rate	,
	SL_Down_Rate	,
	SL_Secondary_SP	,
	SL_Main_TC_Select	,
	SL_Primary_PID_P	,
	SL_Primary_PID_I	,
	SL_Primary_PID_D	,
	SL_PID_P	,
	SL_PID_I	,
	SL_PID_D	,
	Instrument_ForceStandby	
	  AT%I*:REAL;








	
//GAS LINE HEATER
	HEATER1_SP	,
	HEATER1_Clear_Alarms	,
	HEATER1_Forced_MV	,
	HEATER1_Auto_Manual	,
	HEATER1_Inhibit	,
	HEATER1_SBrkAlarm_EN	,
	HEATER1_Temp_Hi_Alarm_Inhibit	,
	HEATER1_RateUp	,
	HEATER1_RateDown	,
	HEATER1_AutotuneActivate	,
	HEATER1_PID_P	,
	HEATER1_PID_I	,
	HEATER1_PID_D	,
	HEATER1_WR_EN	,
	
	HEATER2_SP	,
	HEATER2_Clear_Alarms	,
	HEATER2_Forced_MV	,
	HEATER2_Auto_Manual	,
	HEATER2_Inhibit	,
	HEATER2_SBrkAlarm_EN	,
	HEATER2_Temp_Hi_Alarm_Inhibit	,
	HEATER2_RateUp	,
	HEATER2_RateDown	,
	HEATER2_AutotuneActivate	,
	HEATER2_PID_P	,
	HEATER2_PID_I	,
	HEATER2_PID_D	,
	HEATER2_WR_EN	,
	
	HEATER3_SP	,
	HEATER3_Clear_Alarms	,
	HEATER3_Forced_MV	,
	HEATER3_Auto_Manual	,
	HEATER3_Inhibit	,
	HEATER3_SBrkAlarm_EN	,
	HEATER3_Temp_Hi_Alarm_Inhibit	,
	HEATER3_RateUp	,
	HEATER3_RateDown	,
	HEATER3_AutotuneActivate	,
	HEATER3_PID_P	,
	HEATER3_PID_I	,
	HEATER3_PID_D	,
	HEATER3_WR_EN	,
	
	HEATER4_SP	,
	HEATER4_Clear_Alarms	,
	HEATER4_Forced_MV	,
	HEATER4_Auto_Manual	,
	HEATER4_Inhibit	,
	HEATER4_SBrkAlarm_EN	,
	HEATER4_Temp_Hi_Alarm_Inhibit	,
	HEATER4_RateUp	,
	HEATER4_RateDown	,
	HEATER4_AutotuneActivate	,
	HEATER4_PID_P	,
	HEATER4_PID_I	,
	HEATER4_PID_D	,
	HEATER4_WR_EN	,
	
	HEATER5_SP	,
	HEATER5_Clear_Alarms	,
	HEATER5_Forced_MV	,
	HEATER5_Auto_Manual	,
	HEATER5_Inhibit	,
	HEATER5_SBrkAlarm_EN	,
	HEATER5_Temp_Hi_Alarm_Inhibit	,
	HEATER5_RateUp	,
	HEATER5_RateDown	,
	HEATER5_AutotuneActivate	,
	HEATER5_PID_P	,
	HEATER5_PID_I	,
	HEATER5_PID_D	,
	HEATER5_WR_EN	,
	
	HEATER6_SP	,
	HEATER6_Clear_Alarms	,
	HEATER6_Forced_MV	,
	HEATER6_Auto_Manual	,
	HEATER6_Inhibit	,
	HEATER6_SBrkAlarm_EN	,
	HEATER6_Temp_Hi_Alarm_Inhibit	,
	HEATER6_RateUp	,
	HEATER6_RateDown	,
	HEATER6_AutotuneActivate	,
	HEATER6_PID_P	,
	HEATER6_PID_I	,
	HEATER6_PID_D	,
	HEATER6_WR_EN	,
	
	HEATER7_SP	,
	HEATER7_Clear_Alarms	,
	HEATER7_Forced_MV	,
	HEATER7_Auto_Manual	,
	HEATER7_Inhibit	,
	HEATER7_SBrkAlarm_EN	,
	HEATER7_Temp_Hi_Alarm_Inhibit	,
	HEATER7_RateUp	,
	HEATER7_RateDown	,
	HEATER7_AutotuneActivate	,
	HEATER7_PID_P	,
	HEATER7_PID_I	,
	HEATER7_PID_D	,
	HEATER7_WR_EN	,
	
	HEATER8_SP	,
	HEATER8_Clear_Alarms	,
	HEATER8_Forced_MV	,
	HEATER8_Auto_Manual	,
	HEATER8_Inhibit	,
	HEATER8_SBrkAlarm_EN	,
	HEATER8_Temp_Hi_Alarm_Inhibit	,
	HEATER8_RateUp	,
	HEATER8_RateDown	,
	HEATER8_AutotuneActivate	,
	HEATER8_PID_P	,
	HEATER8_PID_I	,
	HEATER8_PID_D	,
	HEATER8_WR_EN	,
	
	HEATER9_SP	,
	HEATER9_Clear_Alarms	,
	HEATER9_Forced_MV	,
	HEATER9_Auto_Manual	,
	HEATER9_Inhibit	,
	HEATER9_SBrkAlarm_EN	,
	HEATER9_Temp_Hi_Alarm_Inhibit	,
	HEATER9_RateUp	,
	HEATER9_RateDown	,
	HEATER9_AutotuneActivate	,
	HEATER9_PID_P	,
	HEATER9_PID_I	,
	HEATER9_PID_D	,
	HEATER9_WR_EN	,
	
	HEATER10_SP	,
	HEATER10_Clear_Alarms	,
	HEATER10_Forced_MV	,
	HEATER10_Auto_Manual	,
	HEATER10_Inhibit	,
	HEATER10_SBrkAlarm_EN	,
	HEATER10_Temp_Hi_Alarm_Inhibit	,
	HEATER10_RateUp	,
	HEATER10_RateDown	,
	HEATER10_AutotuneActivate	,
	HEATER10_PID_P	,
	HEATER10_PID_I	,
	HEATER10_PID_D	,
	HEATER10_WR_EN	,
	
	HEATER11_SP	,
	HEATER11_Clear_Alarms	,
	HEATER11_Forced_MV	,
	HEATER11_Auto_Manual	,
	HEATER11_Inhibit	,
	HEATER11_SBrkAlarm_EN	,
	HEATER11_Temp_Hi_Alarm_Inhibit	,
	HEATER11_RateUp	,
	HEATER11_RateDown	,
	HEATER11_AutotuneActivate	,
	HEATER11_PID_P	,
	HEATER11_PID_I	,
	HEATER11_PID_D	,
	HEATER11_WR_EN	,
	
	HEATER12_SP	,
	HEATER12_Clear_Alarms	,
	HEATER12_Forced_MV	,
	HEATER12_Auto_Manual	,
	HEATER12_Inhibit	,
	HEATER12_SBrkAlarm_EN	,
	HEATER12_Temp_Hi_Alarm_Inhibit	,
	HEATER12_RateUp	,
	HEATER12_RateDown	,
	HEATER12_AutotuneActivate	,
	HEATER12_PID_P	,
	HEATER12_PID_I	,
	HEATER12_PID_D	,
	HEATER12_WR_EN	,
	
	HEATER13_SP	,
	HEATER13_Clear_Alarms	,
	HEATER13_Forced_MV	,
	HEATER13_Auto_Manual	,
	HEATER13_Inhibit	,
	HEATER13_SBrkAlarm_EN	,
	HEATER13_Temp_Hi_Alarm_Inhibit	,
	HEATER13_RateUp	,
	HEATER13_RateDown	,
	HEATER13_AutotuneActivate	,
	HEATER13_PID_P	,
	HEATER13_PID_I	,
	HEATER13_PID_D	,
	HEATER13_WR_EN	,
	
	HEATER14_SP	,
	HEATER14_Clear_Alarms	,
	HEATER14_Forced_MV	,
	HEATER14_Auto_Manual	,
	HEATER14_Inhibit	,
	HEATER14_SBrkAlarm_EN	,
	HEATER14_Temp_Hi_Alarm_Inhibit	,
	HEATER14_RateUp	,
	HEATER14_RateDown	,
	HEATER14_AutotuneActivate	,
	HEATER14_PID_P	,
	HEATER14_PID_I	,
	HEATER14_PID_D	,
	HEATER14_WR_EN	,
	
	HEATER15_SP	,
	HEATER15_Clear_Alarms	,
	HEATER15_Forced_MV	,
	HEATER15_Auto_Manual	,
	HEATER15_Inhibit	,
	HEATER15_SBrkAlarm_EN	,
	HEATER15_Temp_Hi_Alarm_Inhibit	,
	HEATER15_RateUp	,
	HEATER15_RateDown	,
	HEATER15_AutotuneActivate	,
	HEATER15_PID_P	,
	HEATER15_PID_I	,
	HEATER15_PID_D	,
	HEATER15_WR_EN	,
	
	HEATER16_SP	,
	HEATER16_Clear_Alarms	,
	HEATER16_Forced_MV	,
	HEATER16_Auto_Manual	,
	HEATER16_Inhibit	,
	HEATER16_SBrkAlarm_EN	,
	HEATER16_Temp_Hi_Alarm_Inhibit	,
	HEATER16_RateUp	,
	HEATER16_RateDown	,
	HEATER16_AutotuneActivate	,
	HEATER16_PID_P	,
	HEATER16_PID_I	,
	HEATER16_PID_D	,
	HEATER16_WR_EN	,
	
	HEATER17_SP	,
	HEATER17_Clear_Alarms	,
	HEATER17_Forced_MV	,
	HEATER17_Auto_Manual	,
	HEATER17_Inhibit	,
	HEATER17_SBrkAlarm_EN	,
	HEATER17_Temp_Hi_Alarm_Inhibit	,
	HEATER17_RateUp	,
	HEATER17_RateDown	,
	HEATER17_AutotuneActivate	,
	HEATER17_PID_P	,
	HEATER17_PID_I	,
	HEATER17_PID_D	,
	HEATER17_WR_EN	,
	
	HEATER18_SP	,
	HEATER18_Clear_Alarms	,
	HEATER18_Forced_MV	,
	HEATER18_Auto_Manual	,
	HEATER18_Inhibit	,
	HEATER18_SBrkAlarm_EN	,
	HEATER18_Temp_Hi_Alarm_Inhibit	,
	HEATER18_RateUp	,
	HEATER18_RateDown	,
	HEATER18_AutotuneActivate	,
	HEATER18_PID_P	,
	HEATER18_PID_I	,
	HEATER18_PID_D	,
	HEATER18_WR_EN	,
	
	HEATER19_SP	,
	HEATER19_Clear_Alarms	,
	HEATER19_Forced_MV	,
	HEATER19_Auto_Manual	,
	HEATER19_Inhibit	,
	HEATER19_SBrkAlarm_EN	,
	HEATER19_Temp_Hi_Alarm_Inhibit	,
	HEATER19_RateUp	,
	HEATER19_RateDown	,
	HEATER19_AutotuneActivate	,
	HEATER19_PID_P	,
	HEATER19_PID_I	,
	HEATER19_PID_D	,
	HEATER19_WR_EN	,
	
	HEATER20_SP	,
	HEATER20_Clear_Alarms	,
	HEATER20_Forced_MV	,
	HEATER20_Auto_Manual	,
	HEATER20_Inhibit	,
	HEATER20_SBrkAlarm_EN	,
	HEATER20_Temp_Hi_Alarm_Inhibit	,
	HEATER20_RateUp	,
	HEATER20_RateDown	,
	HEATER20_AutotuneActivate	,
	HEATER20_PID_P	,
	HEATER20_PID_I	,
	HEATER20_PID_D	,
	HEATER20_WR_EN	,
	
	HEATER21_SP	,
	HEATER21_Clear_Alarms	,
	HEATER21_Forced_MV	,
	HEATER21_Auto_Manual	,
	HEATER21_Inhibit	,
	HEATER21_SBrkAlarm_EN	,
	HEATER21_Temp_Hi_Alarm_Inhibit	,
	HEATER21_RateUp	,
	HEATER21_RateDown	,
	HEATER21_AutotuneActivate	,
	HEATER21_PID_P	,
	HEATER21_PID_I	,
	HEATER21_PID_D	,
	HEATER21_WR_EN	,
	
	HEATER22_SP	,
	HEATER22_Clear_Alarms	,
	HEATER22_Forced_MV	,
	HEATER22_Auto_Manual	,
	HEATER22_Inhibit	,
	HEATER22_SBrkAlarm_EN	,
	HEATER22_Temp_Hi_Alarm_Inhibit	,
	HEATER22_RateUp	,
	HEATER22_RateDown	,
	HEATER22_AutotuneActivate	,
	HEATER22_PID_P	,
	HEATER22_PID_I	,
	HEATER22_PID_D	,
	HEATER22_WR_EN	,
	
	HEATER23_SP	,
	HEATER23_Clear_Alarms	,
	HEATER23_Forced_MV	,
	HEATER23_Auto_Manual	,
	HEATER23_Inhibit	,
	HEATER23_SBrkAlarm_EN	,
	HEATER23_Temp_Hi_Alarm_Inhibit	,
	HEATER23_RateUp	,
	HEATER23_RateDown	,
	HEATER23_AutotuneActivate	,
	HEATER23_PID_P	,
	HEATER23_PID_I	,
	HEATER23_PID_D	,
	HEATER23_WR_EN	,
	
	HEATER24_SP	,
	HEATER24_Clear_Alarms	,
	HEATER24_Forced_MV	,
	HEATER24_Auto_Manual	,
	HEATER24_Inhibit	,
	HEATER24_SBrkAlarm_EN	,
	HEATER24_Temp_Hi_Alarm_Inhibit	,
	HEATER24_RateUp	,
	HEATER24_RateDown	,
	HEATER24_AutotuneActivate	,
	HEATER24_PID_P	,
	HEATER24_PID_I	,
	HEATER24_PID_D	,
	HEATER24_WR_EN	,
	
	HEATER25_SP	,
	HEATER25_Clear_Alarms	,
	HEATER25_Forced_MV	,
	HEATER25_Auto_Manual	,
	HEATER25_Inhibit	,
	HEATER25_SBrkAlarm_EN	,
	HEATER25_Temp_Hi_Alarm_Inhibit	,
	HEATER25_RateUp	,
	HEATER25_RateDown	,
	HEATER25_AutotuneActivate	,
	HEATER25_PID_P	,
	HEATER25_PID_I	,
	HEATER25_PID_D	,
	HEATER25_WR_EN	,
	
	HEATER26_SP	,
	HEATER26_Clear_Alarms	,
	HEATER26_Forced_MV	,
	HEATER26_Auto_Manual	,
	HEATER26_Inhibit	,
	HEATER26_SBrkAlarm_EN	,
	HEATER26_Temp_Hi_Alarm_Inhibit	,
	HEATER26_RateUp	,
	HEATER26_RateDown	,
	HEATER26_AutotuneActivate	,
	HEATER26_PID_P	,
	HEATER26_PID_I	,
	HEATER26_PID_D	,
	HEATER26_WR_EN	,
	
	HEATER27_SP	,
	HEATER27_Clear_Alarms	,
	HEATER27_Forced_MV	,
	HEATER27_Auto_Manual	,
	HEATER27_Inhibit	,
	HEATER27_SBrkAlarm_EN	,
	HEATER27_Temp_Hi_Alarm_Inhibit	,
	HEATER27_RateUp	,
	HEATER27_RateDown	,
	HEATER27_AutotuneActivate	,
	HEATER27_PID_P	,
	HEATER27_PID_I	,
	HEATER27_PID_D	,
	HEATER27_WR_EN	,
	
	HEATER28_SP	,
	HEATER28_Clear_Alarms	,
	HEATER28_Forced_MV	,
	HEATER28_Auto_Manual	,
	HEATER28_Inhibit	,
	HEATER28_SBrkAlarm_EN	,
	HEATER28_Temp_Hi_Alarm_Inhibit	,
	HEATER28_RateUp	,
	HEATER28_RateDown	,
	HEATER28_AutotuneActivate	,
	HEATER28_PID_P	,
	HEATER28_PID_I	,
	HEATER28_PID_D	,
	HEATER28_WR_EN	,
	
	HEATER29_SP	,
	HEATER29_Clear_Alarms	,
	HEATER29_Forced_MV	,
	HEATER29_Auto_Manual	,
	HEATER29_Inhibit	,
	HEATER29_SBrkAlarm_EN	,
	HEATER29_Temp_Hi_Alarm_Inhibit	,
	HEATER29_RateUp	,
	HEATER29_RateDown	,
	HEATER29_AutotuneActivate	,
	HEATER29_PID_P	,
	HEATER29_PID_I	,
	HEATER29_PID_D	,
	HEATER29_WR_EN	,
	
	HEATER30_SP	,
	HEATER30_Clear_Alarms	,
	HEATER30_Forced_MV	,
	HEATER30_Auto_Manual	,
	HEATER30_Inhibit	,
	HEATER30_SBrkAlarm_EN	,
	HEATER30_Temp_Hi_Alarm_Inhibit	,
	HEATER30_RateUp	,
	HEATER30_RateDown	,
	HEATER30_AutotuneActivate	,
	HEATER30_PID_P	,
	HEATER30_PID_I	,
	HEATER30_PID_D	,
	HEATER30_WR_EN	,
	
	HEATER31_SP	,
	HEATER31_Clear_Alarms	,
	HEATER31_Forced_MV	,
	HEATER31_Auto_Manual	,
	HEATER31_Inhibit	,
	HEATER31_SBrkAlarm_EN	,
	HEATER31_Temp_Hi_Alarm_Inhibit	,
	HEATER31_RateUp	,
	HEATER31_RateDown	,
	HEATER31_AutotuneActivate	,
	HEATER31_PID_P	,
	HEATER31_PID_I	,
	HEATER31_PID_D	,
	HEATER31_WR_EN	,
	
	HEATER32_SP	,
	HEATER32_Clear_Alarms	,
	HEATER32_Forced_MV	,
	HEATER32_Auto_Manual	,
	HEATER32_Inhibit	,
	HEATER32_SBrkAlarm_EN	,
	HEATER32_Temp_Hi_Alarm_Inhibit	,
	HEATER32_RateUp	,
	HEATER32_RateDown	,
	HEATER32_AutotuneActivate	,
	HEATER32_PID_P	,
	HEATER32_PID_I	,
	HEATER32_PID_D	,
	HEATER32_WR_EN	,
	
	HEATER33_SP	,
	HEATER33_Clear_Alarms	,
	HEATER33_Forced_MV	,
	HEATER33_Auto_Manual	,
	HEATER33_Inhibit	,
	HEATER33_SBrkAlarm_EN	,
	HEATER33_Temp_Hi_Alarm_Inhibit	,
	HEATER33_RateUp	,
	HEATER33_RateDown	,
	HEATER33_AutotuneActivate	,
	HEATER33_PID_P	,
	HEATER33_PID_I	,
	HEATER33_PID_D	,
	HEATER33_WR_EN	,
	
	HEATER34_SP	,
	HEATER34_Clear_Alarms	,
	HEATER34_Forced_MV	,
	HEATER34_Auto_Manual	,
	HEATER34_Inhibit	,
	HEATER34_SBrkAlarm_EN	,
	HEATER34_Temp_Hi_Alarm_Inhibit	,
	HEATER34_RateUp	,
	HEATER34_RateDown	,
	HEATER34_AutotuneActivate	,
	HEATER34_PID_P	,
	HEATER34_PID_I	,
	HEATER34_PID_D	,
	HEATER34_WR_EN	,
	
	HEATER35_SP	,
	HEATER35_Clear_Alarms	,
	HEATER35_Forced_MV	,
	HEATER35_Auto_Manual	,
	HEATER35_Inhibit	,
	HEATER35_SBrkAlarm_EN	,
	HEATER35_Temp_Hi_Alarm_Inhibit	,
	HEATER35_RateUp	,
	HEATER35_RateDown	,
	HEATER35_AutotuneActivate	,
	HEATER35_PID_P	,
	HEATER35_PID_I	,
	HEATER35_PID_D	,
	HEATER35_WR_EN	,
	
	HEATER36_SP	,
	HEATER36_Clear_Alarms	,
	HEATER36_Forced_MV	,
	HEATER36_Auto_Manual	,
	HEATER36_Inhibit	,
	HEATER36_SBrkAlarm_EN	,
	HEATER36_Temp_Hi_Alarm_Inhibit	,
	HEATER36_RateUp	,
	HEATER36_RateDown	,
	HEATER36_AutotuneActivate	,
	HEATER36_PID_P	,
	HEATER36_PID_I	,
	HEATER36_PID_D	,
	HEATER36_WR_EN	,
	
	HEATER37_SP	,
	HEATER37_Clear_Alarms	,
	HEATER37_Forced_MV	,
	HEATER37_Auto_Manual	,
	HEATER37_Inhibit	,
	HEATER37_SBrkAlarm_EN	,
	HEATER37_Temp_Hi_Alarm_Inhibit	,
	HEATER37_RateUp	,
	HEATER37_RateDown	,
	HEATER37_AutotuneActivate	,
	HEATER37_PID_P	,
	HEATER37_PID_I	,
	HEATER37_PID_D	,
	HEATER37_WR_EN	,
	
	HEATER38_SP	,
	HEATER38_Clear_Alarms	,
	HEATER38_Forced_MV	,
	HEATER38_Auto_Manual	,
	HEATER38_Inhibit	,
	HEATER38_SBrkAlarm_EN	,
	HEATER38_Temp_Hi_Alarm_Inhibit	,
	HEATER38_RateUp	,
	HEATER38_RateDown	,
	HEATER38_AutotuneActivate	,
	HEATER38_PID_P	,
	HEATER38_PID_I	,
	HEATER38_PID_D	,
	HEATER38_WR_EN	,
	
	HEATER39_SP	,
	HEATER39_Clear_Alarms	,
	HEATER39_Forced_MV	,
	HEATER39_Auto_Manual	,
	HEATER39_Inhibit	,
	HEATER39_SBrkAlarm_EN	,
	HEATER39_Temp_Hi_Alarm_Inhibit	,
	HEATER39_RateUp	,
	HEATER39_RateDown	,
	HEATER39_AutotuneActivate	,
	HEATER39_PID_P	,
	HEATER39_PID_I	,
	HEATER39_PID_D	,
	HEATER39_WR_EN	,
	
	HEATER40_SP	,
	HEATER40_Clear_Alarms	,
	HEATER40_Forced_MV	,
	HEATER40_Auto_Manual	,
	HEATER40_Inhibit	,
	HEATER40_SBrkAlarm_EN	,
	HEATER40_Temp_Hi_Alarm_Inhibit	,
	HEATER40_RateUp	,
	HEATER40_RateDown	,
	HEATER40_AutotuneActivate	,
	HEATER40_PID_P	,
	HEATER40_PID_I	,
	HEATER40_PID_D	,
	HEATER40_WR_EN	,
	
	HEATER41_SP	,
	HEATER41_Clear_Alarms	,
	HEATER41_Forced_MV	,
	HEATER41_Auto_Manual	,
	HEATER41_Inhibit	,
	HEATER41_SBrkAlarm_EN	,
	HEATER41_Temp_Hi_Alarm_Inhibit	,
	HEATER41_RateUp	,
	HEATER41_RateDown	,
	HEATER41_AutotuneActivate	,
	HEATER41_PID_P	,
	HEATER41_PID_I	,
	HEATER41_PID_D	,
	HEATER41_WR_EN	,
	
	HEATER42_SP	,
	HEATER42_Clear_Alarms	,
	HEATER42_Forced_MV	,
	HEATER42_Auto_Manual	,
	HEATER42_Inhibit	,
	HEATER42_SBrkAlarm_EN	,
	HEATER42_Temp_Hi_Alarm_Inhibit	,
	HEATER42_RateUp	,
	HEATER42_RateDown	,
	HEATER42_AutotuneActivate	,
	HEATER42_PID_P	,
	HEATER42_PID_I	,
	HEATER42_PID_D	,
	HEATER42_WR_EN	,
	
	HEATER43_SP	,
	HEATER43_Clear_Alarms	,
	HEATER43_Forced_MV	,
	HEATER43_Auto_Manual	,
	HEATER43_Inhibit	,
	HEATER43_SBrkAlarm_EN	,
	HEATER43_Temp_Hi_Alarm_Inhibit	,
	HEATER43_RateUp	,
	HEATER43_RateDown	,
	HEATER43_AutotuneActivate	,
	HEATER43_PID_P	,
	HEATER43_PID_I	,
	HEATER43_PID_D	,
	HEATER43_WR_EN	,
	
	HEATER44_SP	,
	HEATER44_Clear_Alarms	,
	HEATER44_Forced_MV	,
	HEATER44_Auto_Manual	,
	HEATER44_Inhibit	,
	HEATER44_SBrkAlarm_EN	,
	HEATER44_Temp_Hi_Alarm_Inhibit	,
	HEATER44_RateUp	,
	HEATER44_RateDown	,
	HEATER44_AutotuneActivate	,
	HEATER44_PID_P	,
	HEATER44_PID_I	,
	HEATER44_PID_D	,
	HEATER44_WR_EN	,
	
	HEATER45_SP	,
	HEATER45_Clear_Alarms	,
	HEATER45_Forced_MV	,
	HEATER45_Auto_Manual	,
	HEATER45_Inhibit	,
	HEATER45_SBrkAlarm_EN	,
	HEATER45_Temp_Hi_Alarm_Inhibit	,
	HEATER45_RateUp	,
	HEATER45_RateDown	,
	HEATER45_AutotuneActivate	,
	HEATER45_PID_P	,
	HEATER45_PID_I	,
	HEATER45_PID_D	,
	HEATER45_WR_EN	,
	
	HEATER46_SP	,
	HEATER46_Clear_Alarms	,
	HEATER46_Forced_MV	,
	HEATER46_Auto_Manual	,
	HEATER46_Inhibit	,
	HEATER46_SBrkAlarm_EN	,
	HEATER46_Temp_Hi_Alarm_Inhibit	,
	HEATER46_RateUp	,
	HEATER46_RateDown	,
	HEATER46_AutotuneActivate	,
	HEATER46_PID_P	,
	HEATER46_PID_I	,
	HEATER46_PID_D	,
	HEATER46_WR_EN	,
	
	HEATER47_SP	,
	HEATER47_Clear_Alarms	,
	HEATER47_Forced_MV	,
	HEATER47_Auto_Manual	,
	HEATER47_Inhibit	,
	HEATER47_SBrkAlarm_EN	,
	HEATER47_Temp_Hi_Alarm_Inhibit	,
	HEATER47_RateUp	,
	HEATER47_RateDown	,
	HEATER47_AutotuneActivate	,
	HEATER47_PID_P	,
	HEATER47_PID_I	,
	HEATER47_PID_D	,
	HEATER47_WR_EN	,
	
	HEATER48_SP	,
	HEATER48_Clear_Alarms	,
	HEATER48_Forced_MV	,
	HEATER48_Auto_Manual	,
	HEATER48_Inhibit	,
	HEATER48_SBrkAlarm_EN	,
	HEATER48_Temp_Hi_Alarm_Inhibit	,
	HEATER48_RateUp	,
	HEATER48_RateDown	,
	HEATER48_AutotuneActivate	,
	HEATER48_PID_P	,
	HEATER48_PID_I	,
	HEATER48_PID_D	,
	HEATER48_WR_EN	,
	
	HEATER49_SP	,
	HEATER49_Clear_Alarms	,
	HEATER49_Forced_MV	,
	HEATER49_Auto_Manual	,
	HEATER49_Inhibit	,
	HEATER49_SBrkAlarm_EN	,
	HEATER49_Temp_Hi_Alarm_Inhibit	,
	HEATER49_RateUp	,
	HEATER49_RateDown	,
	HEATER49_AutotuneActivate	,
	HEATER49_PID_P	,
	HEATER49_PID_I	,
	HEATER49_PID_D	,
	HEATER49_WR_EN	,
	
	HEATER50_SP	,
	HEATER50_Clear_Alarms	,
	HEATER50_Forced_MV	,
	HEATER50_Auto_Manual	,
	HEATER50_Inhibit	,
	HEATER50_SBrkAlarm_EN	,
	HEATER50_Temp_Hi_Alarm_Inhibit	,
	HEATER50_RateUp	,
	HEATER50_RateDown	,
	HEATER50_AutotuneActivate	,
	HEATER50_PID_P	,
	HEATER50_PID_I	,
	HEATER50_PID_D	,
	HEATER50_WR_EN	,
	
	HEATER51_SP	,
	HEATER51_Clear_Alarms	,
	HEATER51_Forced_MV	,
	HEATER51_Auto_Manual	,
	HEATER51_Inhibit	,
	HEATER51_SBrkAlarm_EN	,
	HEATER51_Temp_Hi_Alarm_Inhibit	,
	HEATER51_RateUp	,
	HEATER51_RateDown	,
	HEATER51_AutotuneActivate	,
	HEATER51_PID_P	,
	HEATER51_PID_I	,
	HEATER51_PID_D	,
	HEATER51_WR_EN	,
	
	HEATER52_SP	,
	HEATER52_Clear_Alarms	,
	HEATER52_Forced_MV	,
	HEATER52_Auto_Manual	,
	HEATER52_Inhibit	,
	HEATER52_SBrkAlarm_EN	,
	HEATER52_Temp_Hi_Alarm_Inhibit	,
	HEATER52_RateUp	,
	HEATER52_RateDown	,
	HEATER52_AutotuneActivate	,
	HEATER52_PID_P	,
	HEATER52_PID_I	,
	HEATER52_PID_D	,
	HEATER52_WR_EN	,
	
	HEATER53_SP	,
	HEATER53_Clear_Alarms	,
	HEATER53_Forced_MV	,
	HEATER53_Auto_Manual	,
	HEATER53_Inhibit	,
	HEATER53_SBrkAlarm_EN	,
	HEATER53_Temp_Hi_Alarm_Inhibit	,
	HEATER53_RateUp	,
	HEATER53_RateDown	,
	HEATER53_AutotuneActivate	,
	HEATER53_PID_P	,
	HEATER53_PID_I	,
	HEATER53_PID_D	,
	HEATER53_WR_EN	,
	
	HEATER54_SP	,
	HEATER54_Clear_Alarms	,
	HEATER54_Forced_MV	,
	HEATER54_Auto_Manual	,
	HEATER54_Inhibit	,
	HEATER54_SBrkAlarm_EN	,
	HEATER54_Temp_Hi_Alarm_Inhibit	,
	HEATER54_RateUp	,
	HEATER54_RateDown	,
	HEATER54_AutotuneActivate	,
	HEATER54_PID_P	,
	HEATER54_PID_I	,
	HEATER54_PID_D	,
	HEATER54_WR_EN	,
	
	HEATER55_SP	,
	HEATER55_Clear_Alarms	,
	HEATER55_Forced_MV	,
	HEATER55_Auto_Manual	,
	HEATER55_Inhibit	,
	HEATER55_SBrkAlarm_EN	,
	HEATER55_Temp_Hi_Alarm_Inhibit	,
	HEATER55_RateUp	,
	HEATER55_RateDown	,
	HEATER55_AutotuneActivate	,
	HEATER55_PID_P	,
	HEATER55_PID_I	,
	HEATER55_PID_D	,
	HEATER55_WR_EN	,
	
	HEATER56_SP	,
	HEATER56_Clear_Alarms	,
	HEATER56_Forced_MV	,
	HEATER56_Auto_Manual	,
	HEATER56_Inhibit	,
	HEATER56_SBrkAlarm_EN	,
	HEATER56_Temp_Hi_Alarm_Inhibit	,
	HEATER56_RateUp	,
	HEATER56_RateDown	,
	HEATER56_AutotuneActivate	,
	HEATER56_PID_P	,
	HEATER56_PID_I	,
	HEATER56_PID_D	,
	HEATER56_WR_EN	,
	
	HEATER57_SP	,
	HEATER57_Clear_Alarms	,
	HEATER57_Forced_MV	,
	HEATER57_Auto_Manual	,
	HEATER57_Inhibit	,
	HEATER57_SBrkAlarm_EN	,
	HEATER57_Temp_Hi_Alarm_Inhibit	,
	HEATER57_RateUp	,
	HEATER57_RateDown	,
	HEATER57_AutotuneActivate	,
	HEATER57_PID_P	,
	HEATER57_PID_I	,
	HEATER57_PID_D	,
	HEATER57_WR_EN	,
	
	HEATER58_SP	,
	HEATER58_Clear_Alarms	,
	HEATER58_Forced_MV	,
	HEATER58_Auto_Manual	,
	HEATER58_Inhibit	,
	HEATER58_SBrkAlarm_EN	,
	HEATER58_Temp_Hi_Alarm_Inhibit	,
	HEATER58_RateUp	,
	HEATER58_RateDown	,
	HEATER58_AutotuneActivate	,
	HEATER58_PID_P	,
	HEATER58_PID_I	,
	HEATER58_PID_D	,
	HEATER58_WR_EN	,
	
	HEATER59_SP	,
	HEATER59_Clear_Alarms	,
	HEATER59_Forced_MV	,
	HEATER59_Auto_Manual	,
	HEATER59_Inhibit	,
	HEATER59_SBrkAlarm_EN	,
	HEATER59_Temp_Hi_Alarm_Inhibit	,
	HEATER59_RateUp	,
	HEATER59_RateDown	,
	HEATER59_AutotuneActivate	,
	HEATER59_PID_P	,
	HEATER59_PID_I	,
	HEATER59_PID_D	,
	HEATER59_WR_EN	,
	
	HEATER60_SP	,
	HEATER60_Clear_Alarms	,
	HEATER60_Forced_MV	,
	HEATER60_Auto_Manual	,
	HEATER60_Inhibit	,
	HEATER60_SBrkAlarm_EN	,
	HEATER60_Temp_Hi_Alarm_Inhibit	,
	HEATER60_RateUp	,
	HEATER60_RateDown	,
	HEATER60_AutotuneActivate	,
	HEATER60_PID_P	,
	HEATER60_PID_I	,
	HEATER60_PID_D	,
	HEATER60_WR_EN	,
	
	HEATER61_SP	,
	HEATER61_Clear_Alarms	,
	HEATER61_Forced_MV	,
	HEATER61_Auto_Manual	,
	HEATER61_Inhibit	,
	HEATER61_SBrkAlarm_EN	,
	HEATER61_Temp_Hi_Alarm_Inhibit	,
	HEATER61_RateUp	,
	HEATER61_RateDown	,
	HEATER61_AutotuneActivate	,
	HEATER61_PID_P	,
	HEATER61_PID_I	,
	HEATER61_PID_D	,
	HEATER61_WR_EN	,
	
	HEATER62_SP	,
	HEATER62_Clear_Alarms	,
	HEATER62_Forced_MV	,
	HEATER62_Auto_Manual	,
	HEATER62_Inhibit	,
	HEATER62_SBrkAlarm_EN	,
	HEATER62_Temp_Hi_Alarm_Inhibit	,
	HEATER62_RateUp	,
	HEATER62_RateDown	,
	HEATER62_AutotuneActivate	,
	HEATER62_PID_P	,
	HEATER62_PID_I	,
	HEATER62_PID_D	,
	HEATER62_WR_EN	,
	
	HEATER63_SP	,
	HEATER63_Clear_Alarms	,
	HEATER63_Forced_MV	,
	HEATER63_Auto_Manual	,
	HEATER63_Inhibit	,
	HEATER63_SBrkAlarm_EN	,
	HEATER63_Temp_Hi_Alarm_Inhibit	,
	HEATER63_RateUp	,
	HEATER63_RateDown	,
	HEATER63_AutotuneActivate	,
	HEATER63_PID_P	,
	HEATER63_PID_I	,
	HEATER63_PID_D	,
	HEATER63_WR_EN	,
	
	HEATER64_SP	,
	HEATER64_Clear_Alarms	,
	HEATER64_Forced_MV	,
	HEATER64_Auto_Manual	,
	HEATER64_Inhibit	,
	HEATER64_SBrkAlarm_EN	,
	HEATER64_Temp_Hi_Alarm_Inhibit	,
	HEATER64_RateUp	,
	HEATER64_RateDown	,
	HEATER64_AutotuneActivate	,
	HEATER64_PID_P	,
	HEATER64_PID_I	,
	HEATER64_PID_D	,
	HEATER64_WR_EN	,
	
	HEATER65_SP	,
	HEATER65_Clear_Alarms	,
	HEATER65_Forced_MV	,
	HEATER65_Auto_Manual	,
	HEATER65_Inhibit	,
	HEATER65_SBrkAlarm_EN	,
	HEATER65_Temp_Hi_Alarm_Inhibit	,
	HEATER65_RateUp	,
	HEATER65_RateDown	,
	HEATER65_AutotuneActivate	,
	HEATER65_PID_P	,
	HEATER65_PID_I	,
	HEATER65_PID_D	,
	HEATER65_WR_EN	,
	
	HEATER66_SP	,
	HEATER66_Clear_Alarms	,
	HEATER66_Forced_MV	,
	HEATER66_Auto_Manual	,
	HEATER66_Inhibit	,
	HEATER66_SBrkAlarm_EN	,
	HEATER66_Temp_Hi_Alarm_Inhibit	,
	HEATER66_RateUp	,
	HEATER66_RateDown	,
	HEATER66_AutotuneActivate	,
	HEATER66_PID_P	,
	HEATER66_PID_I	,
	HEATER66_PID_D	,
	HEATER66_WR_EN	,
	
	HEATER67_SP	,
	HEATER67_Clear_Alarms	,
	HEATER67_Forced_MV	,
	HEATER67_Auto_Manual	,
	HEATER67_Inhibit	,
	HEATER67_SBrkAlarm_EN	,
	HEATER67_Temp_Hi_Alarm_Inhibit	,
	HEATER67_RateUp	,
	HEATER67_RateDown	,
	HEATER67_AutotuneActivate	,
	HEATER67_PID_P	,
	HEATER67_PID_I	,
	HEATER67_PID_D	,
	HEATER67_WR_EN	,
	
	HEATER68_SP	,
	HEATER68_Clear_Alarms	,
	HEATER68_Forced_MV	,
	HEATER68_Auto_Manual	,
	HEATER68_Inhibit	,
	HEATER68_SBrkAlarm_EN	,
	HEATER68_Temp_Hi_Alarm_Inhibit	,
	HEATER68_RateUp	,
	HEATER68_RateDown	,
	HEATER68_AutotuneActivate	,
	HEATER68_PID_P	,
	HEATER68_PID_I	,
	HEATER68_PID_D	,
	HEATER68_WR_EN	,
	
	HEATER69_SP	,
	HEATER69_Clear_Alarms	,
	HEATER69_Forced_MV	,
	HEATER69_Auto_Manual	,
	HEATER69_Inhibit	,
	HEATER69_SBrkAlarm_EN	,
	HEATER69_Temp_Hi_Alarm_Inhibit	,
	HEATER69_RateUp	,
	HEATER69_RateDown	,
	HEATER69_AutotuneActivate	,
	HEATER69_PID_P	,
	HEATER69_PID_I	,
	HEATER69_PID_D	,
	HEATER69_WR_EN	,
	
	HEATER70_SP	,
	HEATER70_Clear_Alarms	,
	HEATER70_Forced_MV	,
	HEATER70_Auto_Manual	,
	HEATER70_Inhibit	,
	HEATER70_SBrkAlarm_EN	,
	HEATER70_Temp_Hi_Alarm_Inhibit	,
	HEATER70_RateUp	,
	HEATER70_RateDown	,
	HEATER70_AutotuneActivate	,
	HEATER70_PID_P	,
	HEATER70_PID_I	,
	HEATER70_PID_D	,
	HEATER70_WR_EN	,
	
	HEATER71_SP	,
	HEATER71_Clear_Alarms	,
	HEATER71_Forced_MV	,
	HEATER71_Auto_Manual	,
	HEATER71_Inhibit	,
	HEATER71_SBrkAlarm_EN	,
	HEATER71_Temp_Hi_Alarm_Inhibit	,
	HEATER71_RateUp	,
	HEATER71_RateDown	,
	HEATER71_AutotuneActivate	,
	HEATER71_PID_P	,
	HEATER71_PID_I	,
	HEATER71_PID_D	,
	HEATER71_WR_EN	,
	
	HEATER72_SP	,
	HEATER72_Clear_Alarms	,
	HEATER72_Forced_MV	,
	HEATER72_Auto_Manual	,
	HEATER72_Inhibit	,
	HEATER72_SBrkAlarm_EN	,
	HEATER72_Temp_Hi_Alarm_Inhibit	,
	HEATER72_RateUp	,
	HEATER72_RateDown	,
	HEATER72_AutotuneActivate	,
	HEATER72_PID_P	,
	HEATER72_PID_I	,
	HEATER72_PID_D	,
	HEATER72_WR_EN	,
	
	HEATER73_SP	,
	HEATER73_Clear_Alarms	,
	HEATER73_Forced_MV	,
	HEATER73_Auto_Manual	,
	HEATER73_Inhibit	,
	HEATER73_SBrkAlarm_EN	,
	HEATER73_Temp_Hi_Alarm_Inhibit	,
	HEATER73_RateUp	,
	HEATER73_RateDown	,
	HEATER73_AutotuneActivate	,
	HEATER73_PID_P	,
	HEATER73_PID_I	,
	HEATER73_PID_D	,
	HEATER73_WR_EN	,
	
	HEATER74_SP	,
	HEATER74_Clear_Alarms	,
	HEATER74_Forced_MV	,
	HEATER74_Auto_Manual	,
	HEATER74_Inhibit	,
	HEATER74_SBrkAlarm_EN	,
	HEATER74_Temp_Hi_Alarm_Inhibit	,
	HEATER74_RateUp	,
	HEATER74_RateDown	,
	HEATER74_AutotuneActivate	,
	HEATER74_PID_P	,
	HEATER74_PID_I	,
	HEATER74_PID_D	,
	HEATER74_WR_EN	,
	
	HEATER75_SP	,
	HEATER75_Clear_Alarms	,
	HEATER75_Forced_MV	,
	HEATER75_Auto_Manual	,
	HEATER75_Inhibit	,
	HEATER75_SBrkAlarm_EN	,
	HEATER75_Temp_Hi_Alarm_Inhibit	,
	HEATER75_RateUp	,
	HEATER75_RateDown	,
	HEATER75_AutotuneActivate	,
	HEATER75_PID_P	,
	HEATER75_PID_I	,
	HEATER75_PID_D	,
	HEATER75_WR_EN	,
	
	HEATER76_SP	,
	HEATER76_Clear_Alarms	,
	HEATER76_Forced_MV	,
	HEATER76_Auto_Manual	,
	HEATER76_Inhibit	,
	HEATER76_SBrkAlarm_EN	,
	HEATER76_Temp_Hi_Alarm_Inhibit	,
	HEATER76_RateUp	,
	HEATER76_RateDown	,
	HEATER76_AutotuneActivate	,
	HEATER76_PID_P	,
	HEATER76_PID_I	,
	HEATER76_PID_D	,
	HEATER76_WR_EN	,
	
	HEATER77_SP	,
	HEATER77_Clear_Alarms	,
	HEATER77_Forced_MV	,
	HEATER77_Auto_Manual	,
	HEATER77_Inhibit	,
	HEATER77_SBrkAlarm_EN	,
	HEATER77_Temp_Hi_Alarm_Inhibit	,
	HEATER77_RateUp	,
	HEATER77_RateDown	,
	HEATER77_AutotuneActivate	,
	HEATER77_PID_P	,
	HEATER77_PID_I	,
	HEATER77_PID_D	,
	HEATER77_WR_EN	,
	
	HEATER78_SP	,
	HEATER78_Clear_Alarms	,
	HEATER78_Forced_MV	,
	HEATER78_Auto_Manual	,
	HEATER78_Inhibit	,
	HEATER78_SBrkAlarm_EN	,
	HEATER78_Temp_Hi_Alarm_Inhibit	,
	HEATER78_RateUp	,
	HEATER78_RateDown	,
	HEATER78_AutotuneActivate	,
	HEATER78_PID_P	,
	HEATER78_PID_I	,
	HEATER78_PID_D	,
	HEATER78_WR_EN	,
	
	HEATER79_SP	,
	HEATER79_Clear_Alarms	,
	HEATER79_Forced_MV	,
	HEATER79_Auto_Manual	,
	HEATER79_Inhibit	,
	HEATER79_SBrkAlarm_EN	,
	HEATER79_Temp_Hi_Alarm_Inhibit	,
	HEATER79_RateUp	,
	HEATER79_RateDown	,
	HEATER79_AutotuneActivate	,
	HEATER79_PID_P	,
	HEATER79_PID_I	,
	HEATER79_PID_D	,
	HEATER79_WR_EN	,
	
	HEATER80_SP	,
	HEATER80_Clear_Alarms	,
	HEATER80_Forced_MV	,
	HEATER80_Auto_Manual	,
	HEATER80_Inhibit	,
	HEATER80_SBrkAlarm_EN	,
	HEATER80_Temp_Hi_Alarm_Inhibit	,
	HEATER80_RateUp	,
	HEATER80_RateDown	,
	HEATER80_AutotuneActivate	,
	HEATER80_PID_P	,
	HEATER80_PID_I	,
	HEATER80_PID_D	,
	HEATER80_WR_EN	,
	
	HEATER81_SP	,
	HEATER81_Clear_Alarms	,
	HEATER81_Forced_MV	,
	HEATER81_Auto_Manual	,
	HEATER81_Inhibit	,
	HEATER81_SBrkAlarm_EN	,
	HEATER81_Temp_Hi_Alarm_Inhibit	,
	HEATER81_RateUp	,
	HEATER81_RateDown	,
	HEATER81_AutotuneActivate	,
	HEATER81_PID_P	,
	HEATER81_PID_I	,
	HEATER81_PID_D	,
	HEATER81_WR_EN	,
	
	HEATER82_SP	,
	HEATER82_Clear_Alarms	,
	HEATER82_Forced_MV	,
	HEATER82_Auto_Manual	,
	HEATER82_Inhibit	,
	HEATER82_SBrkAlarm_EN	,
	HEATER82_Temp_Hi_Alarm_Inhibit	,
	HEATER82_RateUp	,
	HEATER82_RateDown	,
	HEATER82_AutotuneActivate	,
	HEATER82_PID_P	,
	HEATER82_PID_I	,
	HEATER82_PID_D	,
	HEATER82_WR_EN	,
	
	HEATER83_SP	,
	HEATER83_Clear_Alarms	,
	HEATER83_Forced_MV	,
	HEATER83_Auto_Manual	,
	HEATER83_Inhibit	,
	HEATER83_SBrkAlarm_EN	,
	HEATER83_Temp_Hi_Alarm_Inhibit	,
	HEATER83_RateUp	,
	HEATER83_RateDown	,
	HEATER83_AutotuneActivate	,
	HEATER83_PID_P	,
	HEATER83_PID_I	,
	HEATER83_PID_D	,
	HEATER83_WR_EN	,
	
	HEATER84_SP	,
	HEATER84_Clear_Alarms	,
	HEATER84_Forced_MV	,
	HEATER84_Auto_Manual	,
	HEATER84_Inhibit	,
	HEATER84_SBrkAlarm_EN	,
	HEATER84_Temp_Hi_Alarm_Inhibit	,
	HEATER84_RateUp	,
	HEATER84_RateDown	,
	HEATER84_AutotuneActivate	,
	HEATER84_PID_P	,
	HEATER84_PID_I	,
	HEATER84_PID_D	,
	HEATER84_WR_EN	,
	
	HEATER85_SP	,
	HEATER85_Clear_Alarms	,
	HEATER85_Forced_MV	,
	HEATER85_Auto_Manual	,
	HEATER85_Inhibit	,
	HEATER85_SBrkAlarm_EN	,
	HEATER85_Temp_Hi_Alarm_Inhibit	,
	HEATER85_RateUp	,
	HEATER85_RateDown	,
	HEATER85_AutotuneActivate	,
	HEATER85_PID_P	,
	HEATER85_PID_I	,
	HEATER85_PID_D	,
	HEATER85_WR_EN	,
	
	HEATER86_SP	,
	HEATER86_Clear_Alarms	,
	HEATER86_Forced_MV	,
	HEATER86_Auto_Manual	,
	HEATER86_Inhibit	,
	HEATER86_SBrkAlarm_EN	,
	HEATER86_Temp_Hi_Alarm_Inhibit	,
	HEATER86_RateUp	,
	HEATER86_RateDown	,
	HEATER86_AutotuneActivate	,
	HEATER86_PID_P	,
	HEATER86_PID_I	,
	HEATER86_PID_D	,
	HEATER86_WR_EN	,
	
	HEATER87_SP	,
	HEATER87_Clear_Alarms	,
	HEATER87_Forced_MV	,
	HEATER87_Auto_Manual	,
	HEATER87_Inhibit	,
	HEATER87_SBrkAlarm_EN	,
	HEATER87_Temp_Hi_Alarm_Inhibit	,
	HEATER87_RateUp	,
	HEATER87_RateDown	,
	HEATER87_AutotuneActivate	,
	HEATER87_PID_P	,
	HEATER87_PID_I	,
	HEATER87_PID_D	,
	HEATER87_WR_EN	,
	
	HEATER88_SP	,
	HEATER88_Clear_Alarms	,
	HEATER88_Forced_MV	,
	HEATER88_Auto_Manual	,
	HEATER88_Inhibit	,
	HEATER88_SBrkAlarm_EN	,
	HEATER88_Temp_Hi_Alarm_Inhibit	,
	HEATER88_RateUp	,
	HEATER88_RateDown	,
	HEATER88_AutotuneActivate	,
	HEATER88_PID_P	,
	HEATER88_PID_I	,
	HEATER88_PID_D	,
	HEATER88_WR_EN	,
	
	HEATER89_SP	,
	HEATER89_Clear_Alarms	,
	HEATER89_Forced_MV	,
	HEATER89_Auto_Manual	,
	HEATER89_Inhibit	,
	HEATER89_SBrkAlarm_EN	,
	HEATER89_Temp_Hi_Alarm_Inhibit	,
	HEATER89_RateUp	,
	HEATER89_RateDown	,
	HEATER89_AutotuneActivate	,
	HEATER89_PID_P	,
	HEATER89_PID_I	,
	HEATER89_PID_D	,
	HEATER89_WR_EN	,
	
	HEATER90_SP	,
	HEATER90_Clear_Alarms	,
	HEATER90_Forced_MV	,
	HEATER90_Auto_Manual	,
	HEATER90_Inhibit	,
	HEATER90_SBrkAlarm_EN	,
	HEATER90_Temp_Hi_Alarm_Inhibit	,
	HEATER90_RateUp	,
	HEATER90_RateDown	,
	HEATER90_AutotuneActivate	,
	HEATER90_PID_P	,
	HEATER90_PID_I	,
	HEATER90_PID_D	,
	HEATER90_WR_EN	,
	
	HEATER91_SP	,
	HEATER91_Clear_Alarms	,
	HEATER91_Forced_MV	,
	HEATER91_Auto_Manual	,
	HEATER91_Inhibit	,
	HEATER91_SBrkAlarm_EN	,
	HEATER91_Temp_Hi_Alarm_Inhibit	,
	HEATER91_RateUp	,
	HEATER91_RateDown	,
	HEATER91_AutotuneActivate	,
	HEATER91_PID_P	,
	HEATER91_PID_I	,
	HEATER91_PID_D	,
	HEATER91_WR_EN	,
	
	HEATER92_SP	,
	HEATER92_Clear_Alarms	,
	HEATER92_Forced_MV	,
	HEATER92_Auto_Manual	,
	HEATER92_Inhibit	,
	HEATER92_SBrkAlarm_EN	,
	HEATER92_Temp_Hi_Alarm_Inhibit	,
	HEATER92_RateUp	,
	HEATER92_RateDown	,
	HEATER92_AutotuneActivate	,
	HEATER92_PID_P	,
	HEATER92_PID_I	,
	HEATER92_PID_D	,
	HEATER92_WR_EN	,
	
	HEATER93_SP	,
	HEATER93_Clear_Alarms	,
	HEATER93_Forced_MV	,
	HEATER93_Auto_Manual	,
	HEATER93_Inhibit	,
	HEATER93_SBrkAlarm_EN	,
	HEATER93_Temp_Hi_Alarm_Inhibit	,
	HEATER93_RateUp	,
	HEATER93_RateDown	,
	HEATER93_AutotuneActivate	,
	HEATER93_PID_P	,
	HEATER93_PID_I	,
	HEATER93_PID_D	,
	HEATER93_WR_EN	,
	
	HEATER94_SP	,
	HEATER94_Clear_Alarms	,
	HEATER94_Forced_MV	,
	HEATER94_Auto_Manual	,
	HEATER94_Inhibit	,
	HEATER94_SBrkAlarm_EN	,
	HEATER94_Temp_Hi_Alarm_Inhibit	,
	HEATER94_RateUp	,
	HEATER94_RateDown	,
	HEATER94_AutotuneActivate	,
	HEATER94_PID_P	,
	HEATER94_PID_I	,
	HEATER94_PID_D	,
	HEATER94_WR_EN	,
	
	HEATER95_SP	,
	HEATER95_Clear_Alarms	,
	HEATER95_Forced_MV	,
	HEATER95_Auto_Manual	,
	HEATER95_Inhibit	,
	HEATER95_SBrkAlarm_EN	,
	HEATER95_Temp_Hi_Alarm_Inhibit	,
	HEATER95_RateUp	,
	HEATER95_RateDown	,
	HEATER95_AutotuneActivate	,
	HEATER95_PID_P	,
	HEATER95_PID_I	,
	HEATER95_PID_D	,
	HEATER95_WR_EN	,
	
	HEATER96_SP	,
	HEATER96_Clear_Alarms	,
	HEATER96_Forced_MV	,
	HEATER96_Auto_Manual	,
	HEATER96_Inhibit	,
	HEATER96_SBrkAlarm_EN	,
	HEATER96_Temp_Hi_Alarm_Inhibit	,
	HEATER96_RateUp	,
	HEATER96_RateDown	,
	HEATER96_AutotuneActivate	,
	HEATER96_PID_P	,
	HEATER96_PID_I	,
	HEATER96_PID_D	,
	HEATER96_WR_EN	,
	
	HEATER97_SP	,
	HEATER97_Clear_Alarms	,
	HEATER97_Forced_MV	,
	HEATER97_Auto_Manual	,
	HEATER97_Inhibit	,
	HEATER97_SBrkAlarm_EN	,
	HEATER97_Temp_Hi_Alarm_Inhibit	,
	HEATER97_RateUp	,
	HEATER97_RateDown	,
	HEATER97_AutotuneActivate	,
	HEATER97_PID_P	,
	HEATER97_PID_I	,
	HEATER97_PID_D	,
	HEATER97_WR_EN	,
	
	HEATER98_SP	,
	HEATER98_Clear_Alarms	,
	HEATER98_Forced_MV	,
	HEATER98_Auto_Manual	,
	HEATER98_Inhibit	,
	HEATER98_SBrkAlarm_EN	,
	HEATER98_Temp_Hi_Alarm_Inhibit	,
	HEATER98_RateUp	,
	HEATER98_RateDown	,
	HEATER98_AutotuneActivate	,
	HEATER98_PID_P	,
	HEATER98_PID_I	,
	HEATER98_PID_D	,
	HEATER98_WR_EN	,
	
	HEATER99_SP	,
	HEATER99_Clear_Alarms	,
	HEATER99_Forced_MV	,
	HEATER99_Auto_Manual	,
	HEATER99_Inhibit	,
	HEATER99_SBrkAlarm_EN	,
	HEATER99_Temp_Hi_Alarm_Inhibit	,
	HEATER99_RateUp	,
	HEATER99_RateDown	,
	HEATER99_AutotuneActivate	,
	HEATER99_PID_P	,
	HEATER99_PID_I	,
	HEATER99_PID_D	,
	HEATER99_WR_EN	,
	
	HEATER100_SP	,
	HEATER100_Clear_Alarms	,
	HEATER100_Forced_MV	,
	HEATER100_Auto_Manual	,
	HEATER100_Inhibit	,
	HEATER100_SBrkAlarm_EN	,
	HEATER100_Temp_Hi_Alarm_Inhibit	,
	HEATER100_RateUp	,
	HEATER100_RateDown	,
	HEATER100_AutotuneActivate	,
	HEATER100_PID_P	,
	HEATER100_PID_I	,
	HEATER100_PID_D	,
	HEATER100_WR_EN	,
	
	HEATER101_SP	,
	HEATER101_Clear_Alarms	,
	HEATER101_Forced_MV	,
	HEATER101_Auto_Manual	,
	HEATER101_Inhibit	,
	HEATER101_SBrkAlarm_EN	,
	HEATER101_Temp_Hi_Alarm_Inhibit	,
	HEATER101_RateUp	,
	HEATER101_RateDown	,
	HEATER101_AutotuneActivate	,
	HEATER101_PID_P	,
	HEATER101_PID_I	,
	HEATER101_PID_D	,
	HEATER101_WR_EN	,
	
	HEATER102_SP	,
	HEATER102_Clear_Alarms	,
	HEATER102_Forced_MV	,
	HEATER102_Auto_Manual	,
	HEATER102_Inhibit	,
	HEATER102_SBrkAlarm_EN	,
	HEATER102_Temp_Hi_Alarm_Inhibit	,
	HEATER102_RateUp	,
	HEATER102_RateDown	,
	HEATER102_AutotuneActivate	,
	HEATER102_PID_P	,
	HEATER102_PID_I	,
	HEATER102_PID_D	,
	HEATER102_WR_EN	,
	
	HEATER103_SP	,
	HEATER103_Clear_Alarms	,
	HEATER103_Forced_MV	,
	HEATER103_Auto_Manual	,
	HEATER103_Inhibit	,
	HEATER103_SBrkAlarm_EN	,
	HEATER103_Temp_Hi_Alarm_Inhibit	,
	HEATER103_RateUp	,
	HEATER103_RateDown	,
	HEATER103_AutotuneActivate	,
	HEATER103_PID_P	,
	HEATER103_PID_I	,
	HEATER103_PID_D	,
	HEATER103_WR_EN	,
	
	HEATER104_SP	,
	HEATER104_Clear_Alarms	,
	HEATER104_Forced_MV	,
	HEATER104_Auto_Manual	,
	HEATER104_Inhibit	,
	HEATER104_SBrkAlarm_EN	,
	HEATER104_Temp_Hi_Alarm_Inhibit	,
	HEATER104_RateUp	,
	HEATER104_RateDown	,
	HEATER104_AutotuneActivate	,
	HEATER104_PID_P	,
	HEATER104_PID_I	,
	HEATER104_PID_D	,
	HEATER104_WR_EN	,
	
	HEATER105_SP	,
	HEATER105_Clear_Alarms	,
	HEATER105_Forced_MV	,
	HEATER105_Auto_Manual	,
	HEATER105_Inhibit	,
	HEATER105_SBrkAlarm_EN	,
	HEATER105_Temp_Hi_Alarm_Inhibit	,
	HEATER105_RateUp	,
	HEATER105_RateDown	,
	HEATER105_AutotuneActivate	,
	HEATER105_PID_P	,
	HEATER105_PID_I	,
	HEATER105_PID_D	,
	HEATER105_WR_EN	,
	
	HEATER106_SP	,
	HEATER106_Clear_Alarms	,
	HEATER106_Forced_MV	,
	HEATER106_Auto_Manual	,
	HEATER106_Inhibit	,
	HEATER106_SBrkAlarm_EN	,
	HEATER106_Temp_Hi_Alarm_Inhibit	,
	HEATER106_RateUp	,
	HEATER106_RateDown	,
	HEATER106_AutotuneActivate	,
	HEATER106_PID_P	,
	HEATER106_PID_I	,
	HEATER106_PID_D	,
	HEATER106_WR_EN	,
	
	HEATER107_SP	,
	HEATER107_Clear_Alarms	,
	HEATER107_Forced_MV	,
	HEATER107_Auto_Manual	,
	HEATER107_Inhibit	,
	HEATER107_SBrkAlarm_EN	,
	HEATER107_Temp_Hi_Alarm_Inhibit	,
	HEATER107_RateUp	,
	HEATER107_RateDown	,
	HEATER107_AutotuneActivate	,
	HEATER107_PID_P	,
	HEATER107_PID_I	,
	HEATER107_PID_D	,
	HEATER107_WR_EN	,
	
	HEATER108_SP	,
	HEATER108_Clear_Alarms	,
	HEATER108_Forced_MV	,
	HEATER108_Auto_Manual	,
	HEATER108_Inhibit	,
	HEATER108_SBrkAlarm_EN	,
	HEATER108_Temp_Hi_Alarm_Inhibit	,
	HEATER108_RateUp	,
	HEATER108_RateDown	,
	HEATER108_AutotuneActivate	,
	HEATER108_PID_P	,
	HEATER108_PID_I	,
	HEATER108_PID_D	,
	HEATER108_WR_EN	,
	
	HEATER109_SP	,
	HEATER109_Clear_Alarms	,
	HEATER109_Forced_MV	,
	HEATER109_Auto_Manual	,
	HEATER109_Inhibit	,
	HEATER109_SBrkAlarm_EN	,
	HEATER109_Temp_Hi_Alarm_Inhibit	,
	HEATER109_RateUp	,
	HEATER109_RateDown	,
	HEATER109_AutotuneActivate	,
	HEATER109_PID_P	,
	HEATER109_PID_I	,
	HEATER109_PID_D	,
	HEATER109_WR_EN	,
	
	HEATER110_SP	,
	HEATER110_Clear_Alarms	,
	HEATER110_Forced_MV	,
	HEATER110_Auto_Manual	,
	HEATER110_Inhibit	,
	HEATER110_SBrkAlarm_EN	,
	HEATER110_Temp_Hi_Alarm_Inhibit	,
	HEATER110_RateUp	,
	HEATER110_RateDown	,
	HEATER110_AutotuneActivate	,
	HEATER110_PID_P	,
	HEATER110_PID_I	,
	HEATER110_PID_D	,
	HEATER110_WR_EN	,
	
	HEATER111_SP	,
	HEATER111_Clear_Alarms	,
	HEATER111_Forced_MV	,
	HEATER111_Auto_Manual	,
	HEATER111_Inhibit	,
	HEATER111_SBrkAlarm_EN	,
	HEATER111_Temp_Hi_Alarm_Inhibit	,
	HEATER111_RateUp	,
	HEATER111_RateDown	,
	HEATER111_AutotuneActivate	,
	HEATER111_PID_P	,
	HEATER111_PID_I	,
	HEATER111_PID_D	,
	HEATER111_WR_EN	,
	
	HEATER112_SP	,
	HEATER112_Clear_Alarms	,
	HEATER112_Forced_MV	,
	HEATER112_Auto_Manual	,
	HEATER112_Inhibit	,
	HEATER112_SBrkAlarm_EN	,
	HEATER112_Temp_Hi_Alarm_Inhibit	,
	HEATER112_RateUp	,
	HEATER112_RateDown	,
	HEATER112_AutotuneActivate	,
	HEATER112_PID_P	,
	HEATER112_PID_I	,
	HEATER112_PID_D	,
	HEATER112_WR_EN	,
	
	HEATER113_SP	,
	HEATER113_Clear_Alarms	,
	HEATER113_Forced_MV	,
	HEATER113_Auto_Manual	,
	HEATER113_Inhibit	,
	HEATER113_SBrkAlarm_EN	,
	HEATER113_Temp_Hi_Alarm_Inhibit	,
	HEATER113_RateUp	,
	HEATER113_RateDown	,
	HEATER113_AutotuneActivate	,
	HEATER113_PID_P	,
	HEATER113_PID_I	,
	HEATER113_PID_D	,
	HEATER113_WR_EN	,
	
	HEATER114_SP	,
	HEATER114_Clear_Alarms	,
	HEATER114_Forced_MV	,
	HEATER114_Auto_Manual	,
	HEATER114_Inhibit	,
	HEATER114_SBrkAlarm_EN	,
	HEATER114_Temp_Hi_Alarm_Inhibit	,
	HEATER114_RateUp	,
	HEATER114_RateDown	,
	HEATER114_AutotuneActivate	,
	HEATER114_PID_P	,
	HEATER114_PID_I	,
	HEATER114_PID_D	,
	HEATER114_WR_EN	,
	
	HEATER115_SP	,
	HEATER115_Clear_Alarms	,
	HEATER115_Forced_MV	,
	HEATER115_Auto_Manual	,
	HEATER115_Inhibit	,
	HEATER115_SBrkAlarm_EN	,
	HEATER115_Temp_Hi_Alarm_Inhibit	,
	HEATER115_RateUp	,
	HEATER115_RateDown	,
	HEATER115_AutotuneActivate	,
	HEATER115_PID_P	,
	HEATER115_PID_I	,
	HEATER115_PID_D	,
	HEATER115_WR_EN	,
	
	HEATER116_SP	,
	HEATER116_Clear_Alarms	,
	HEATER116_Forced_MV	,
	HEATER116_Auto_Manual	,
	HEATER116_Inhibit	,
	HEATER116_SBrkAlarm_EN	,
	HEATER116_Temp_Hi_Alarm_Inhibit	,
	HEATER116_RateUp	,
	HEATER116_RateDown	,
	HEATER116_AutotuneActivate	,
	HEATER116_PID_P	,
	HEATER116_PID_I	,
	HEATER116_PID_D	,
	HEATER116_WR_EN	,
	
	HEATER117_SP	,
	HEATER117_Clear_Alarms	,
	HEATER117_Forced_MV	,
	HEATER117_Auto_Manual	,
	HEATER117_Inhibit	,
	HEATER117_SBrkAlarm_EN	,
	HEATER117_Temp_Hi_Alarm_Inhibit	,
	HEATER117_RateUp	,
	HEATER117_RateDown	,
	HEATER117_AutotuneActivate	,
	HEATER117_PID_P	,
	HEATER117_PID_I	,
	HEATER117_PID_D	,
	HEATER117_WR_EN	,
	
	HEATER118_SP	,
	HEATER118_Clear_Alarms	,
	HEATER118_Forced_MV	,
	HEATER118_Auto_Manual	,
	HEATER118_Inhibit	,
	HEATER118_SBrkAlarm_EN	,
	HEATER118_Temp_Hi_Alarm_Inhibit	,
	HEATER118_RateUp	,
	HEATER118_RateDown	,
	HEATER118_AutotuneActivate	,
	HEATER118_PID_P	,
	HEATER118_PID_I	,
	HEATER118_PID_D	,
	HEATER118_WR_EN	,
	
	HEATER119_SP	,
	HEATER119_Clear_Alarms	,
	HEATER119_Forced_MV	,
	HEATER119_Auto_Manual	,
	HEATER119_Inhibit	,
	HEATER119_SBrkAlarm_EN	,
	HEATER119_Temp_Hi_Alarm_Inhibit	,
	HEATER119_RateUp	,
	HEATER119_RateDown	,
	HEATER119_AutotuneActivate	,
	HEATER119_PID_P	,
	HEATER119_PID_I	,
	HEATER119_PID_D	,
	HEATER119_WR_EN	,
	
	HEATER120_SP	,
	HEATER120_Clear_Alarms	,
	HEATER120_Forced_MV	,
	HEATER120_Auto_Manual	,
	HEATER120_Inhibit	,
	HEATER120_SBrkAlarm_EN	,
	HEATER120_Temp_Hi_Alarm_Inhibit	,
	HEATER120_RateUp	,
	HEATER120_RateDown	,
	HEATER120_AutotuneActivate	,
	HEATER120_PID_P	,
	HEATER120_PID_I	,
	HEATER120_PID_D	,
	HEATER120_WR_EN	
	  AT%I*:REAL;

//SYS
	TPUINumber AT%I*:INT;
	
//FFU
	FFU_ALARM_EN	 AT%I*:REAL;	//报警输出使能
	FFU_HSPEED		 AT%I*:REAL;	//转速上限
	FFU_LSPEED		 AT%I*:REAL;	//转速下限
	
	FFU1_1_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU1_2_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU1_3_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU1_4_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU1_5_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU1_6_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU2_1_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU2_2_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU2_3_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU2_4_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU2_5_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU2_6_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU3_1_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU3_2_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU3_3_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU3_4_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU3_5_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行
	FFU3_6_POWER_ON	 AT%I*:REAL	;	//	0:停止，1：运行

	FFU1_1_SPEED_SV	 AT%I*:REAL	;	//	FFU1_1设定转速
	FFU1_2_SPEED_SV	 AT%I*:REAL	;	//	FFU1_2设定转速
	FFU1_3_SPEED_SV	 AT%I*:REAL	;	//	FFU1_3设定转速
	FFU1_4_SPEED_SV	 AT%I*:REAL	;	//	FFU1_4设定转速
	FFU1_5_SPEED_SV	 AT%I*:REAL	;	//	FFU1_5设定转速
	FFU1_6_SPEED_SV	 AT%I*:REAL	;	//	FFU1_6设定转速
	FFU2_1_SPEED_SV	 AT%I*:REAL	;	//	FFU2_1设定转速
	FFU2_2_SPEED_SV	 AT%I*:REAL	;	//	FFU2_2设定转速
	FFU2_3_SPEED_SV	 AT%I*:REAL	;	//	FFU2_3设定转速
	FFU2_4_SPEED_SV	 AT%I*:REAL	;	//	FFU2_4设定转速
	FFU2_5_SPEED_SV	 AT%I*:REAL	;	//	FFU2_5设定转速
	FFU2_6_SPEED_SV	 AT%I*:REAL	;	//	FFU2_6设定转速
	FFU3_1_SPEED_SV	 AT%I*:REAL	;	//	FFU3_1设定转速
	FFU3_2_SPEED_SV	 AT%I*:REAL	;	//	FFU3_2设定转速
	FFU3_3_SPEED_SV	 AT%I*:REAL	;	//	FFU3_3设定转速
	FFU3_4_SPEED_SV	 AT%I*:REAL	;	//	FFU3_4设定转速
	FFU3_5_SPEED_SV	 AT%I*:REAL	;	//	FFU3_5设定转速
	FFU3_6_SPEED_SV	 AT%I*:REAL	;	//	FFU3_6设定转速

	FFU1_1_EN		 AT%I*:REAL	;	//	FFU1_1使能
	FFU1_2_EN		 AT%I*:REAL	;	//	FFU1_2使能
	FFU1_3_EN		 AT%I*:REAL	;	//	FFU1_3使能
	FFU1_4_EN		 AT%I*:REAL	;	//	FFU1_4使能
	FFU1_5_EN		 AT%I*:REAL	;	//	FFU1_5使能
	FFU1_6_EN		 AT%I*:REAL	;	//	FFU1_6使能
	FFU2_1_EN		 AT%I*:REAL	;	//	FFU2_1使能
	FFU2_2_EN		 AT%I*:REAL	;	//	FFU2_2使能
	FFU2_3_EN		 AT%I*:REAL	;	//	FFU2_3使能
	FFU2_4_EN		 AT%I*:REAL	;	//	FFU2_4使能
	FFU2_5_EN		 AT%I*:REAL	;	//	FFU2_5使能
	FFU2_6_EN		 AT%I*:REAL	;	//	FFU2_6使能
	FFU3_1_EN		 AT%I*:REAL	;	//	FFU3_1使能
	FFU3_2_EN		 AT%I*:REAL	;	//	FFU3_2使能
	FFU3_3_EN		 AT%I*:REAL	;	//	FFU3_3使能
	FFU3_4_EN		 AT%I*:REAL	;	//	FFU3_4使能
	FFU3_5_EN		 AT%I*:REAL	;	//	FFU3_5使能
	FFU3_6_EN		 AT%I*:REAL	;	//	FFU3_6使能
	
//FIMS
	UI_LA_O2_Over_Time					,
	UI_LA_O2_Check_Time					,
	UI_FOUP_O2_Over_Time				,
	UI_FOUP_O2_Check_Time				,
	UI_Exchange_LA_TO_FOUP_Wait_Time	,
	UI_Exchange_FOUP_TO_LA_Wait_Time	,
	UI_Exchange_FOUP_TO_FOUP_Wait_Time	,
	UI_LA_O2_Check_SV					,
	UI_FOUP_O2_Check_SV					  AT%I*:REAL;

	
//APC
	//CKD
	CKD_APC_Control_Mode	,
	CKD_APC_Process_Setpoint	,
	CKD_APC_Position_Setpoint	,
	CKD_APC_Exh_Rate	,
	CKD_APC_Active_Controller	,
	CKD_APC_Slow_exhaust_control_arrival_pressure	 AT%I*:REAL	;

	
	CKD_APC_Zero_Reset_P1	,
	CKD_APC_Zero_adjust_P1	,
	CKD_APC_Span_adjust_P1	,
	CKD_APC_Zero_Reset_P2	,
	CKD_APC_Zero_adjust_P2	,
	CKD_APC_Span_adjust_P2	,
	CKD_APC_Slow_vacuum_control_target_vacuum_Pressure	,
	CKD_APC_Valve_status_threshold	,
	CKD_APC_Forbid_interlock_outbreak	,
	CKD_APC_Slow_vacuum_mode_setting	,
	CKD_APC_Interlock1	,
	CKD_APC_Interlock2	,
	CKD_APC_Interlock3	,
	CKD_APC_Interlock_constant_of_interlock3	,
	CKD_APC_P1_sensor_offset_setting	,
	CKD_APC_Pos_mon_offset_setting	,
	CKD_APC_Sensor_adjust_reset	,
	CKD_APC_Slow_vacuum_rate	,
	CKD_APC_Slow_vacuum_control_P	,
	CKD_APC_Slow_vacuum_control_I	,
	CKD_APC_Slow_vacuum_control_D	,
	CKD_APC_Slow_vacuum_control_a	,
	CKD_APC_controller_mode_select	,
	CKD_APC_Specify_target_vacuum_Pressure_control	,
	CKD_APC_Specify_target_opening_for_valve_opening_control	,
	CKD_APC_Specify_control_mode	,
	CKD_APC_Range_Upper_Limit_Sensor_Input1	,
	CKD_APC_Range_Upper_Limit_Sensor_Input2	  AT%I*:REAL;

	
	CKD_APC_P_constant_for_process_controller1	,
	CKD_APC_I_constant_for_process_controller1	,
	CKD_APC_D_constant_for_process_controller1	,
	CKD_APC_a_sensor_differential_controller1	,
	CKD_APC_CH_controller1	,
	CKD_APC_CL1_controller1	,
	CKD_APC_OFFSET_for_Pocess_Controller_1	,
	CKD_APC_P_constant_for_process_controller2	,
	CKD_APC_I_constant_for_process_controller2	,
	CKD_APC_D_constant_for_process_controller2	,
	CKD_APC_a_sensor_differential_controller2	,
	CKD_APC_CH_controller2	,
	CKD_APC_CL1_controller2	,
	CKD_APC_OFFSET_for_Pocess_Controller_2	,
	CKD_APC_P_constant_for_process_controller3	,
	CKD_APC_I_constant_for_process_controller3	,
	CKD_APC_D_constant_for_process_controller3	,
	CKD_APC_a_sensor_differential_controller3	,
	CKD_APC_CH_controller3	,
	CKD_APC_CL1_controller3	,
	CKD_APC_OFFSET_for_Pocess_Controller_3	,
	CKD_APC_P_constant_for_process_controller4	,
	CKD_APC_I_constant_for_process_controller4	,
	CKD_APC_D_constant_for_process_controller4	,
	CKD_APC_a_sensor_differential_controller4	,
	CKD_APC_CH_controller4	,
	CKD_APC_CL1_controller4	,
	CKD_APC_OFFSET_for_Pocess_Controller_4	,
	CKD_APC_P_constant_for_process_controller5	,
	CKD_APC_I_constant_for_process_controller5	,
	CKD_APC_D_constant_for_process_controller5	,
	CKD_APC_a_sensor_differential_controller5	,
	CKD_APC_CH_controller5	,
	CKD_APC_CL1_controller5	,
	CKD_APC_OFFSET_for_Pocess_Controller_5	,
	CKD_APC_P_constant_for_process_controller6	,
	CKD_APC_I_constant_for_process_controller6	,
	CKD_APC_D_constant_for_process_controller6	,
	CKD_APC_a_sensor_differential_controller6	,
	CKD_APC_CH_controller6	,
	CKD_APC_CL1_controller6	,
	CKD_APC_OFFSET_for_Pocess_Controller_6	,
	CKD_APC_P_constant_for_process_controller7	,
	CKD_APC_I_constant_for_process_controller7	,
	CKD_APC_D_constant_for_process_controller7	,
	CKD_APC_a_sensor_differential_controller7	,
	CKD_APC_CH_controller7	,
	CKD_APC_CL1_controller7	,
	CKD_APC_OFFSET_for_Pocess_Controller_7	,
	CKD_APC_P_constant_for_process_controller8	,
	CKD_APC_I_constant_for_process_controller8	,
	CKD_APC_D_constant_for_process_controller8	,
	CKD_APC_a_sensor_differential_controller8	,
	CKD_APC_CH_controller8	,
	CKD_APC_CL1_controller8	,
	CKD_APC_OFFSET_for_Pocess_Controller_8	,
	CKD_APC_P_constant_for_process_controller9	,
	CKD_APC_I_constant_for_process_controller9	,
	CKD_APC_D_constant_for_process_controller9	,
	CKD_APC_a_sensor_differential_controller9	,
	CKD_APC_CH_controller9	,
	CKD_APC_CL1_controller9	,
	CKD_APC_OFFSET_for_Pocess_Controller_9	,
	CKD_APC_P_constant_for_process_controller10	,
	CKD_APC_I_constant_for_process_controller10	,
	CKD_APC_D_constant_for_process_controller10	,
	CKD_APC_a_sensor_differential_controller10	,
	CKD_APC_CH_controller10	,
	CKD_APC_CL1_controller10	,
	CKD_APC_OFFSET_for_Pocess_Controller_10	  AT%I*:REAL;


	//VAT
	Target_Pressure		,	
	Target_Position		,
	Pressure_Input_Digital_Sensor_1		,
	Pressure_Input_Digital_Sensor_2		,
	Control_Mode		,
	General_Control_Setpoint			,
	Pressure_Ramp_Time  AT%I*:REAL;



//BUFFER
	TargetPositionBufferAxis	AT%I*:LREAL;
	BufferRotationSpeed			AT%I*:LREAL;
//Boat
	BoatPosition				AT%I*:LREAL;
	BoatRotationSpeed			AT%I*:LREAL;
//CAPS
	RotationSpeed				AT%I*:LREAL;


//Axis Data
BufferPos0  AT%I*:REAL;
BufferPos1  AT%I*:REAL;
BufferPos2  AT%I*:REAL;
BufferPos3  AT%I*:REAL;
BufferPos4 AT%I*:REAL;
BufferPos5 AT%I*:REAL;
BufferPos6 AT%I*:REAL;
BufferPos7 AT%I*:REAL;
BufferPos8 AT%I*:REAL;
BufferPos9 AT%I*:REAL;
BufferPos10 AT%I*:REAL;
BufferPos11 AT%I*:REAL;
BufferPos12 AT%I*:REAL;
BufferPos13  AT%I*:REAL;
BufferPos14  AT%I*:REAL;
BufferPos15  AT%I*:REAL;
BufferPos16  AT%I*:REAL;
BufferPos17 AT%I*:REAL;
BufferPos18 AT%I*:REAL;
BufferPos19 AT%I*:REAL;
BufferPos20 AT%I*:REAL;
BufferPos21 AT%I*:REAL;
BufferPos22 AT%I*:REAL;
BufferPos23 AT%I*:REAL;
BufferPos24 AT%I*:REAL;
BufferPos25 AT%I*:REAL;
BufferPos26  AT%I*:REAL;
BufferPos27 AT%I*:REAL;
BufferPos28 AT%I*:REAL;
BufferPos29 AT%I*:REAL;
BufferPos30 AT%I*:REAL;
BufferPos31 AT%I*:REAL;
BoatPos0  AT%I*:REAL;
BoatPos1  AT%I*:REAL;
BoatPos2  AT%I*:REAL;
BoatPos3  AT%I*:REAL;
BoatPos4 AT%I*:REAL;
BoatPos5 AT%I*:REAL;
BoatPos6 AT%I*:REAL;
BoatPos7 AT%I*:REAL;
BoatPos8 AT%I*:REAL;
BoatPos9 AT%I*:REAL;
BoatPos10 AT%I*:REAL;
BoatPos11 AT%I*:REAL;
BoatPos12 AT%I*:REAL;
BoatPos13  AT%I*:REAL;
BoatPos14  AT%I*:REAL;
BoatPos15  AT%I*:REAL;
BoatPos16  AT%I*:REAL;
BoatPos17 AT%I*:REAL;
BoatPos18 AT%I*:REAL;
BoatPos19 AT%I*:REAL;
BoatPos20 AT%I*:REAL;
BoatPos21 AT%I*:REAL;
BoatPos22 AT%I*:REAL;
BoatPos23 AT%I*:REAL;
BoatPos24 AT%I*:REAL;
BoatPos25 AT%I*:REAL;
BoatPos26  AT%I*:REAL;
BoatPos27 AT%I*:REAL;
BoatPos28 AT%I*:REAL;
BoatPos29 AT%I*:REAL;
BoatPos30 AT%I*:REAL;
BoatPos31 AT%I*:REAL;
CapPos0  AT%I*:REAL;
CapPos1  AT%I*:REAL;
CapPos2  AT%I*:REAL;
CapPos3  AT%I*:REAL;
CapPos4 AT%I*:REAL;
CapPos5 AT%I*:REAL;
CapPos6 AT%I*:REAL;
CapPos7 AT%I*:REAL;
CapPos8 AT%I*:REAL;
CapPos9 AT%I*:REAL;
CapPos10 AT%I*:REAL;
CapPos11 AT%I*:REAL;
CapPos12 AT%I*:REAL;
CapPos13  AT%I*:REAL;
CapPos14  AT%I*:REAL;
CapPos15  AT%I*:REAL;
CapPos16  AT%I*:REAL;
CapPos17 AT%I*:REAL;
CapPos18 AT%I*:REAL;
CapPos19 AT%I*:REAL;
CapPos20 AT%I*:REAL;
CapPos21 AT%I*:REAL;
CapPos22 AT%I*:REAL;
CapPos23 AT%I*:REAL;
CapPos24 AT%I*:REAL;
CapPos25 AT%I*:REAL;
CapPos26  AT%I*:REAL;
CapPos27 AT%I*:REAL;
CapPos28 AT%I*:REAL;
CapPos29 AT%I*:REAL;
CapPos30 AT%I*:REAL;
CapPos31 AT%I*:REAL;
BufferVel0  AT%I*:REAL;
BufferVel1  AT%I*:REAL;
BufferVel2  AT%I*:REAL;
BufferVel3  AT%I*:REAL;
BufferVel4 AT%I*:REAL;
BufferVel5 AT%I*:REAL;
BufferVel6 AT%I*:REAL;
BufferVel7 AT%I*:REAL;
BufferVel8 AT%I*:REAL;
BufferVel9 AT%I*:REAL;
BufferVel10 AT%I*:REAL;
BufferVel11 AT%I*:REAL;
BufferVel12 AT%I*:REAL;
BufferVel13  AT%I*:REAL;
BufferVel14  AT%I*:REAL;
BufferVel15  AT%I*:REAL;
BufferVel16  AT%I*:REAL;
BufferVel17 AT%I*:REAL;
BufferVel18 AT%I*:REAL;
BufferVel19 AT%I*:REAL;
BufferVel20 AT%I*:REAL;
BufferVel21 AT%I*:REAL;
BufferVel22 AT%I*:REAL;
BufferVel23 AT%I*:REAL;
BufferVel24 AT%I*:REAL;
BufferVel25 AT%I*:REAL;
BufferVel26  AT%I*:REAL;
BufferVel27 AT%I*:REAL;
BufferVel28 AT%I*:REAL;
BufferVel29 AT%I*:REAL;
BufferVel30 AT%I*:REAL;
BufferVel31 AT%I*:REAL;
BoatVel0  AT%I*:REAL;
BoatVel1  AT%I*:REAL;
BoatVel2  AT%I*:REAL;
BoatVel3  AT%I*:REAL;
BoatVel4 AT%I*:REAL;
BoatVel5 AT%I*:REAL;
BoatVel6 AT%I*:REAL;
BoatVel7 AT%I*:REAL;
BoatVel8 AT%I*:REAL;
BoatVel9 AT%I*:REAL;
BoatVel10 AT%I*:REAL;
BoatVel11 AT%I*:REAL;
BoatVel12 AT%I*:REAL;
BoatVel13  AT%I*:REAL;
BoatVel14  AT%I*:REAL;
BoatVel15  AT%I*:REAL;
BoatVel16  AT%I*:REAL;
BoatVel17 AT%I*:REAL;
BoatVel18 AT%I*:REAL;
BoatVel19 AT%I*:REAL;
BoatVel20 AT%I*:REAL;
BoatVel21 AT%I*:REAL;
BoatVel22 AT%I*:REAL;
BoatVel23 AT%I*:REAL;
BoatVel24 AT%I*:REAL;
BoatVel25 AT%I*:REAL;
BoatVel26  AT%I*:REAL;
BoatVel27 AT%I*:REAL;
BoatVel28 AT%I*:REAL;
BoatVel29 AT%I*:REAL;
BoatVel30 AT%I*:REAL;
BoatVel31 AT%I*:REAL;
CapVel0  AT%I*:REAL;
CapVel1  AT%I*:REAL;
CapVel2  AT%I*:REAL;
CapVel3  AT%I*:REAL;
CapVel4 AT%I*:REAL;
CapVel5 AT%I*:REAL;
CapVel6 AT%I*:REAL;
CapVel7 AT%I*:REAL;
CapVel8 AT%I*:REAL;
CapVel9 AT%I*:REAL;
CapVel10 AT%I*:REAL;
CapVel11 AT%I*:REAL;
CapVel12 AT%I*:REAL;
CapVel13  AT%I*:REAL;
CapVel14  AT%I*:REAL;
CapVel15  AT%I*:REAL;
CapVel16  AT%I*:REAL;
CapVel17 AT%I*:REAL;
CapVel18 AT%I*:REAL;
CapVel19 AT%I*:REAL;
CapVel20 AT%I*:REAL;
CapVel21 AT%I*:REAL;
CapVel22 AT%I*:REAL;
CapVel23 AT%I*:REAL;
CapVel24 AT%I*:REAL;
CapVel25 AT%I*:REAL;
CapVel26  AT%I*:REAL;
CapVel27 AT%I*:REAL;
CapVel28 AT%I*:REAL;
CapVel29 AT%I*:REAL;
CapVel30 AT%I*:REAL;
CapVel31 AT%I*:REAL;

FTRPickPlaceCMD  AT%I*:REAL;//PC=>PLC)机器人取放指令
WTRPickPlaceCMD  AT%I*:REAL;//PC=>PLC)机器人取放指令
//VDF
    VDF_frequency :WORD;

END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>