TIN_PMC/TIN001-PLC/PLC/GVLs/TO PMC/NDI.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="NDI" Id="{b0358dd4-ae0f-4260-bf2a-9fea49c66993}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//**************HARDWARE***********************⬇		
//PW
	KM101_ON	:BOOL;
	
	KM201_ON	:BOOL;
		
	KM102_ON	:BOOL;
	Furnace_main_breaker_status_monitor	:BOOL;
	KM103_ON	:BOOL;
	KM106_ON	:BOOL;
	Zone1_Circuit_Breaker_Status_Monitor	:BOOL;
	Zone2_Circuit_Breaker_Status_Monitor	:BOOL;
	Zone3_Circuit_Breaker_Status_Monitor	:BOOL;
	Zone4_Circuit_Breaker_Status_Monitor	:BOOL;
	Zone5_Circuit_Breaker_Status_Monitor	:BOOL;
	Zone6_Circuit_Breaker_Status_Monitor	:BOOL;
	Zone7_Circuit_Breaker_Status_Monitor	:BOOL;
	Blower_Breaker_status_feedback	:BOOL;
	UPS_Fault	:BOOL;
	UPS_Alarm	:BOOL;
	UPS_Bypass_Status	:BOOL;
	UPS_Battery_Voltage_Low	:BOOL;
	UPS_Start	:BOOL;
	UPS_AC_Input_Cut_Off	:BOOL;
	AUTOREFILL_1_MINOR_FAILURE_OF_FAULT_Minor_	:BOOL;
	AUITOREFILL_1_CRMCAL_FAILURE_Or_SHUTDOWN_Major_	:BOOL;
	AUTOREFILL_1_SUPPLY_POSSIBLE_Or_CHEMICAL_ON_System_Ready_	:BOOL;
	AUITOREFLLL_1_OP_CALL_Or_SPARE_Liquid_Level	:BOOL;
	AUTTOREFILL_1_CHARGE_ALM_Or_SPARE_Empty	:BOOL;
	ALTOREFILL_2_WARNINS_OF_FAULT_Minor_	:BOOL;
	AUTOREFILL_2_ALARM_Or_SHUTDOWN_Major_	:BOOL;
	AUTOREFILL_2_SUPPLY_POSSIBLE_Or_CHEMICAL_ON_System_Ready_	:BOOL;
	AUTOREFILL_2_OP_CALL_OR_SPARE_Liquid_Level	:BOOL;
	AUTOREFILL_2_CHARGE_ALM_Or_SPARE_Empty	:BOOL;
	Vaccum1_Pump_Both_On	:BOOL;
	Vaccum1_Pump_Warning	:BOOL;
	Vaccum1_Pump_Alarm	:BOOL;
		
		
		
	N2_Purge_BOX_PG14_CNT1	:BOOL;
	N2_Purge_BOX_PG14_CNT2	:BOOL;
	N2_Purge_BOX_PG15_CNT1	:BOOL;
	N2_Purge_BOX_PG15_CNT2	:BOOL;
	N2_Purge_Box_PG16_CNT1	:BOOL;
	N2_Purge_Box_PG16_CNT2	:BOOL;
	N2_Purge_Box_PG70_CNT1	:BOOL;
	N2_Purge_Box_PG70_CNT2	:BOOL;
	PS17_Value_Out_Limit_Alarm1	:BOOL;
	
	
//GAS 
	PG3_LOW_ALARM	:BOOL;	//	I200.00
	PG3_HIGH_ALARM	:BOOL;	//	I200.01
	PG4_LOW_ALARM	:BOOL;	//	I200.02
	PG4_HIGH_ALARM	:BOOL;	//	I200.03
	PG5_LOW_ALARM	:BOOL;	//	I200.04
	PG5_HIGH_ALARM	:BOOL;	//	I200.05
	PG6_LOW_ALARM	:BOOL;	//	I200.06
	PG6_HIGH_ALARM	:BOOL;	//	I200.07
	PG7_LOW_ALARM	:BOOL;	//	I200.08
	PG7_HIGH_ALARM	:BOOL;	//	I200.09
	PG8_LOW_ALARM	:BOOL;	//	I200.10
	PG8_HIGH_ALARM	:BOOL;	//	I200.11
	PG31_LOW_ALARM	:BOOL;	//	I200.12
	PG31_HIGH_ALARM	:BOOL;	//	I200.13
	PG32_LOW_ALARM	:BOOL;	//	I200.14
	PG32_HIGH_ALARM	:BOOL;	//	I200.15
	LSC_H_LEVEL	:BOOL;	//	I201.00
	LSC_M_LEVEL	:BOOL;	//	I201.01
	LSC_L_LEVEL	:BOOL;	//	I201.02
	VG31_STATUS_OK	:BOOL;	//	I201.03
	VG31_LOW_ALARM	:BOOL;	//	I201.04
	VG31_HIGH_ALARM	:BOOL;	//	I201.05
	GD_FAN1_STOP	:BOOL;	//	I201.06
	GD_FAN2_STOP	:BOOL;	//	I201.07
	OX_MS1	:BOOL;	//	I201.08
	OX_MS2	:BOOL;	//	I201.09
	OX_MS3	:BOOL;	//	I201.10
	OX_MSI1	:BOOL;	//	I201.11
	OX_MSI2	:BOOL;	//	I201.12
	OX_RC1	:BOOL;	//	I201.13
	OX_RC2	:BOOL;	//	I201.14
	OX_RC3	:BOOL;	//	I201.15


//EXHAUST
	FS105_flow_alarm	:BOOL;	//	FS105水流量检测		I300.00
	FS106_flow_alarm	:BOOL;	//	FS106水流量检测		I300.01
	FS202_flow_alarm	:BOOL;	//	FS202水流量检测		I300.02
	FS104_flow_alarm	:BOOL;	//	FS104水流量检测		I300.03
	FS111_flow_alarm	:BOOL;	//	FS111水流量检测		I300.04
	FS102_flow_alarm	:BOOL;	//	FS102水流量检测		I300.05
			//			I300.06
			//			I300.07
	VG11_STATUS_OK	:BOOL;	//	VG11_STATUS_OK		I300.08
	VG11_LOW_ALARM	:BOOL;	//	VG11_LOW_ALARM		I300.09
	VG11_HIGH_ALARM	:BOOL;	//	VG11_HIGH_ALARM		I300.10
	VG13_STATUS_OK	:BOOL;	//	VG13_STATUS_OK		I300.11
	VG13_LOW_ALARM	:BOOL;	//	VG13_LOW_ALARM		I300.12
	VG13_HIGH_ALARM	:BOOL;	//	VG13_HIGH_ALARM		I300.13
	AV71_fan_1_alarm	:BOOL;	//	AV79散热1		I300.14
	AV71_fan_2_alarm	:BOOL;	//	AV79散热2		I300.15
	DG1_low_limit_alarm	:BOOL;	//	DG1测量显示压力1		I301.00
	DG1_high_limit_alarm	:BOOL;	//	DG1测量显示压力2		I301.01
		//			I301.02
		//			I301.03
		//			I301.04
		//			I301.05
		//			I301.06
		//			I301.07
	MP21_PS_Pressure_low_alarm	:BOOL;	//	MP21/PS压力检测		I301.08
	FS101_flow_alarm_1	:BOOL;	//	FS101回水流量检测1		I301.09
	FS101_flow_alarm_2	:BOOL;	//	FS101回水流量检测2		I301.10
	FL301_flow_switch	:BOOL;	//	FL301浮子流量开关		I301.11
		//			I301.12
	FS116_flow_alarm	:BOOL;	//	FS116水流量检测		I301.13
	PS110_Pressure_low_alarm	:BOOL;	//	PS110测量显示压力1		I301.14
	PS110_Pressure_high_alarm	:BOOL;	//	PS110测量显示压力2		I301.15
	PG_PS12_Pressure_low_alarm	:BOOL;	//	PG/PS12测量显示压力1		I302.00
	PG_PS12_Pressure_high_alarm	:BOOL;	//	PG/PS12测量显示压力2		I302.01
	PS13_ATM_status	:BOOL;	//	PS13_LL_OUT		I302.02
	PS13_high_limit_alarm	:BOOL;	//	PS13_H_OUT		I302.03
	PG101_water_Pressure_low_alarm	:BOOL;	//	PG101测量进水压力1		I302.04
	PG101_water_Pressure_high_alarm	:BOOL;	//	PG101测量进水压力2		I302.05
	VG14_STATUS_OK	:BOOL;	//	VG14_STATUS_OK		I302.06
	VG14_LOW_ALARM	:BOOL;	//	VG14_LOW_ALARM		I302.07
	VG14_HIGH_ALARM	:BOOL;	//	VG14_HIGH_ALARM		I302.08
	PS14_Pressure_low_alarm	:BOOL;	//	PS14测量显示压力1		I302.09
	PS14_Pressure_high_alarm	:BOOL;	//	PS14测量显示压力2		I302.10
															//			I302.11
															//			I302.12
															//			I302.13
															//			I302.14
															//			I302.15
	APC_valve_status	:BOOL;	//			I303.00
	APC_alarm_status	:BOOL;	//			I303.01
	RHC_cooling_air_cylinder_1_open	:BOOL;	//			I303.02
	RHC_cooling_air_cylinder_1_close	:BOOL;	//			I303.03
	RHC_cooling_air_cylinder_2_open	:BOOL;	//			I303.04
	RHC_cooling_air_cylinder_2_close	:BOOL;	//			I303.05
	RHC_cooling_valve_open	:BOOL;	//			I303.06
	RHC_cooling_valve_close	:BOOL;	//			I303.07
	RHC_cooling_Butterfly_Valves_open	:BOOL;	//			I303.08
	RHC_cooling_Butterfly_Valves_close	:BOOL;	//			I303.09

	
//FB
	No1_Left_Extended_Detect1	:BOOL;	//	I400.00
	No1_Left_Back_Detect1		:BOOL;	//	I400.01
	No1_Left_Extended_Detect2	:BOOL;	//	I400.02
	No1_Left_Back_Detect2		:BOOL;	//	I400.03
	No1_Left_InPos_Detect1		:BOOL;	//	I400.04
	No1_Left_InPos_Detect2		:BOOL;	//	I400.05
	No1_Left_InPos_Detect3		:BOOL;	//	I400.06
	No1_Left_Spare				:BOOL;	//	I400.07
	No1_Right_Extended_Detect1	:BOOL;	//	I400.08
	No1_Right_Back_Detect1		:BOOL;	//	I400.09
	No1_Right_Extended_Detect2	:BOOL;	//	I400.10
	No1_Right_Back_Detect2		:BOOL;	//	I400.11
	No1_Right_InPos_Detect1		:BOOL;	//	I400.12
	No1_Right_InPos_Detect2		:BOOL;	//	I400.13
	No1_Right_InPos_Detect3		:BOOL;	//	I400.14
	No1_Right_Spare				:BOOL;	//	I400.15
	No2_Left_Back_Detect		:BOOL;	//	I401.00
	No2_Left_Extended_Detect	:BOOL;	//	I401.01
	No2_Left_Flow_Detect1		:BOOL;	//	I401.02
	No2_Left_Flow_Detect2		:BOOL;	//	I401.03
	No2_Left_InPos_Detect1		:BOOL;	//	I401.04
	No2_Right_Back_Detect		:BOOL;	//	I401.05
	No2_Right_Extended_Detect	:BOOL;	//	I401.06
	No2_Right_Flow_Detect1		:BOOL;	//	I401.07
	No2_Right_Flow_Detect2		:BOOL;	//	I401.08
	No2_Right_InPos_Detect1		:BOOL;	//	I401.09
	No3_Left_Back_Detect		:BOOL;	//	I401.10
	No3_Left_Extended_Detect	:BOOL;	//	I401.11
	No3_Left_Flow_Detect1		:BOOL;	//	I401.12
	No3_Left_Flow_Detect2		:BOOL;	//	I401.13
	No3_Left_InPos_Detect1		:BOOL;	//	I401.14
	No3_Right_Back_Detect		:BOOL;	//	I401.15
	No3_Right_Extended_Detect	:BOOL;	//	I402.00
	No3_Right_Flow_Detect1		:BOOL;	//	I402.01
	No3_Right_Flow_Detect2		:BOOL;	//	I402.02
	No3_Right_InPos_Detect1		:BOOL;	//	I402.03
	No4_Left_InPos_Detect1		:BOOL;	//	I402.04
	No4_Left_InPos_Detect2		:BOOL;	//	I402.05
	No4_Left_InPos_Detect3		:BOOL;	//	I402.06
	No4_Left_Spare				:BOOL;	//	I402.07
	No4_Left_Productor_Detect	:BOOL;	//	I402.08
	No4_Right_InPos_Detect1		:BOOL;	//	I402.09
	No4_Right_InPos_Detect2		:BOOL;	//	I402.10
	No4_Right_InPos_Detect3		:BOOL;	//	I402.11
	No4_Right_Spare				:BOOL;	//	I402.12
	No4_Right_Productor_Detect	:BOOL;	//	I402.13
	Door_Up_Detect				:BOOL;	//	I402.14
	Door_Down_Detect			:BOOL;	//	I402.15
	No1_Left_Productor_Detect	:BOOL;	//	I403.00
	No1_Right_Productor_Detect	:BOOL;	//	I403.01
										//	I403.02
										//	I403.03
										//	I403.04
										//	I403.05
										//	I403.06
										//	I403.07
										//	I403.08
										//	I403.09
										//	I403.10
										//	I403.11
										//	I403.12
										//	I403.13
										//	I403.14
										//	I403.15
	Robot_Loadport1_E84_Valid	:BOOL;	//	I404.00
	Robot_Loadport1_E84_CS_1	:BOOL;	//	I404.01
	Robot_Loadport1_E84_TR_REQ	:BOOL;	//	I404.02
	Robot_Loadport1_E84_busy	:BOOL;	//	I404.03
	Robot_Loadport1_E84_COMPT	:BOOL;	//	I404.04
	Robot_Loadport1_E84_CONT	:BOOL;	//	I404.05
	Robot_Loadport2_E84_Valid	:BOOL;	//	I404.06
	Robot_Loadport2_E84_CS_0	:BOOL;	//	I404.07
	Robot_Loadport2_E84_CS_1	:BOOL;	//	I404.08
	Robot_Loadport2_E84_TR_REQ	:BOOL;	//	I404.09
	Robot_Loadport2_E84_busy	:BOOL;	//	I404.10
	Robot_Loadport2_E84_COMPT1	:BOOL;	//	I404.11
	Robot_Loadport2_E84_COMPT2	:BOOL;	//	I404.12
	Robot_Loadport2_E84_CONT	:BOOL;	//	I404.13
	Robot_Spare1				:BOOL;	//	I404.14
	Robot_Spare2				:BOOL;	//	I404.15
	Robot_Spare3				:BOOL;	//	I405.00
	Robot_Spare4				:BOOL;	//	I405.01
	Robot_Spare5				:BOOL;	//	I405.02
	Robot_Spare6				:BOOL;	//	I405.03
	Robot_Spare7				:BOOL;	//	I405.04
	Robot_Spare8				:BOOL;	//	I405.05
	Robot_Spare9				:BOOL;	//	I405.06
	Robot_Spare10				:BOOL;	//	I405.07
	Robot_Spare11				:BOOL;	//	I405.08
	Robot_Spare12				:BOOL;	//	I405.09
	Robot_Spare13				:BOOL;	//	I405.10
	Robot_Spare14				:BOOL;	//	I405.11
	Robot_Spare15				:BOOL;	//	I405.12
	Robot_Spare16				:BOOL;	//	I405.13
	Robot_Spare17				:BOOL;	//	I405.14
	Robot_Spare18				:BOOL;	//	I405.15
	Stop_Button					:BOOL;	//	I406.00
	Pause_Button				:BOOL;	//	I406.01
	Plugging_Button				:BOOL;	//	I406.02
	Left_Error_Rst				:BOOL;	//	I406.03
	Right_Error_Rst				:BOOL;	//	I406.04


//LA
	FIMS1_FOUP_dock						:BOOL;	//	POD1_FOUP_载台靠紧		I500.00
	FIMS1_FOUP_undock					:BOOL;	//	POD1_FOUP_载台松离		I500.01
	FIMS1_FOUP_exist					:BOOL;	//	POD1_FOUP检测有无		I500.02
	FIMS2_FOUP_dock						:BOOL;	//	POD2_FOUP_载台靠紧		I500.03
	FIMS2_FOUP_undock					:BOOL;	//	POD2_FOUP_载台松离		I500.04
	FIMS2_FOUP_exist					:BOOL;	//	POD2_FOUP检测有无		I500.05
	FIMS1_FOUP_wafer_shift_detection	:BOOL;	//	POD1_FOUP_Wafer移位检测		I500.06
	FIMS2_FOUP_wafer_shift_detection	:BOOL;	//	POD2_FOUP_Wafer移位检测		I500.07
	FIMS1_FOUP_negative_Pressure		:BOOL;	//	POD1_FOUP_负压		I500.08
	FIMS1_FOUP_ordinary_Pressure		:BOOL;	//	POD1_FOUP_常压		I500.09
	FIMS2_FOUP_negative_Pressure		:BOOL;	//	POD2_FOUP_负压		I500.10
	FIMS2_FOUP_ordinary_Pressure		:BOOL;	//	POD2_FOUP_常压		I500.11
	BOAT_slow_down_position_detection	:BOOL;	//	BOAT升降减速位		I500.12
	buffer_rotation_conv_detect_sensor	:BOOL;	//	buffer同步带张紧		I500.13
												//			I500.14
												//			I500.15
	LA_internal_cycle_switch_1_open		:BOOL;	//	LA内循环切换1开位		I501.00
	LA_internal_cycle_switch_1_close	:BOOL;	//	LA内循环切换1关位		I501.01
	LA_internal_cycle_switch_2_open		:BOOL;	//	LA内循环切换2开位		I501.02
	LA_internal_cycle_switch_2_close	:BOOL;	//	LA内循环切换2关位		I501.03
	R_axis_air_cylinder_extend_position	:BOOL;	//	CAP气缸伸位		I501.04
	R_axis_air_cylinder_retract_position	:BOOL;	//	CAP气缸缩位		I501.05
	Furnace_shutter_open				:BOOL;	//	SHUTTER开位		I501.06
	Furnace_shutter_close				:BOOL;	//	SHUTTER关位		I501.07
	FIMS1_exhaust_open_position			:BOOL;	//	POD1排气开位		I501.08
	FIMS1_exhaust_close_position		:BOOL;	//	POD1排气关位		I501.09
	FIMS2_exhaust_open_position			:BOOL;	//	POD2排气开位		I501.10
	FIMS2_exhaust_close_position		:BOOL;	//	POD2排气关位		I501.11
		//			I501.12
		//			I501.13
		//			I501.14
		//			I501.15
	FIMS1_seal							:BOOL;	//	POD1_FOUP盖板压紧		I502.00
	FIMS1_release						:BOOL;	//	POD1_FOUP盖板脱离		I502.01
	FIMS1_door_close					:BOOL;	//	POD1_FOUP盖板横移初始位		I502.02
	FIMS1_door_open						:BOOL;	//	POD1_FOUP盖板横移打开位		I502.03
	FIMS1_FOUP_latch_off				:BOOL;	//	POD1_FOUP门锁打开		I502.04
	FIMS1_FOUP_latch_on					:BOOL;	//	POD1_FOUP门锁关闭		I502.05
	FIMS1_collision_avoidance_up		:BOOL;	//	POD1_FOUP避让挡板缩回		I502.06
	FIMS1_collision_avoidance_down		:BOOL;	//	POD1_FOUP避让挡板伸出		I502.07
	FIMS2_seal							:BOOL;	//	POD2_FOUP盖板压紧		I502.08
	FIMS2_release						:BOOL;	//	POD2_FOUP盖板脱离		I502.09
	FIMS2_door_close					:BOOL;	//	POD2_FOUP盖板横移初始位		I502.10
	FIMS2_door_open						:BOOL;	//	POD2_FOUP盖板横移打开位		I502.11
	FIMS2_FOUP_latch_off				:BOOL;	//	POD2_FOUP门锁打开		I502.12
	FIMS2_FOUP_latch_on					:BOOL;	//	POD2_FOUP门锁关闭		I502.13
	FIMS2_collision_avoidance_up		:BOOL;	//	POD2_FOUP避让挡板缩回		I502.14
	FIMS2_collision_avoidance_down		:BOOL;	//	POD2_FOUP避让挡板伸出		I502.15
																//			I503.00
																//			I503.01
																//			I503.02
																//			I503.03
																//			I503.04
																//			I503.05
																//			I503.06
																//			I503.07
																//			I503.08
																//			I503.09
																//			I503.10
																//			I503.11
																//			I503.12
																//			I503.13
																//			I503.14
																//			I503.15
																//			I504.00
																//			I504.01
																//			I504.02
																//			I504.03
																//			I504.04
																//			I504.05
																//			I504.06
																//			I504.07
																//			I504.08
																//			I504.09
																//			I504.10
																//			I504.11
																//			I504.12
																//			I504.13
																//			I504.14
																//			I504.15
	Buffer_A1_N2_Pressure_alarm	:BOOL;	//	buffer_foup1_1内压检测		I505.00
	Buffer_A1_FOUP_detect		:BOOL;	//	buffer_foup1_1检测有无		I505.01
	Buffer_B1_N2_Pressure_alarm	:BOOL;	//	buffer_foup1_2内压检测		I505.02
	Buffer_B1_FOUP_detect		:BOOL;	//	buffer_foup1_2检测有无		I505.03
	Buffer_C1_N2_Pressure_alarm	:BOOL;	//	buffer_foup1_3内压检测		I505.04
	Buffer_C1_FOUP_detect		:BOOL;	//	buffer_foup1_3检测有无		I505.05
	Buffer_D1_N2_Pressure_alarm	:BOOL;	//	buffer_foup1_4内压检测		I505.06
	Buffer_D1_FOUP_detect		:BOOL;	//	buffer_foup1_4检测有无		I505.07
	Buffer_A2_N2_Pressure_alarm	:BOOL;	//	buffer_foup2_1内压检测		I505.08
	Buffer_A2_FOUP_detect		:BOOL;	//	buffer_foup2_1检测有无		I505.09
	Buffer_B2_N2_Pressure_alarm	:BOOL;	//	buffer_foup2_2内压检测		I505.10
	Buffer_B2_FOUP_detect		:BOOL;	//	buffer_foup2_2检测有无		I505.11
	Buffer_C2_N2_Pressure_alarm	:BOOL;	//	buffer_foup2_3内压检测		I505.12
	Buffer_C2_FOUP_detect		:BOOL;	//	buffer_foup2_3检测有无		I505.13
	Buffer_D2_N2_Pressure_alarm	:BOOL;	//	buffer_foup2_4内压检测		I505.14
	Buffer_D2_FOUP_detect		:BOOL;	//	buffer_foup2_4检测有无		I505.15
	Buffer_A3_N2_Pressure_alarm	:BOOL;	//	buffer_foup3_1内压检测		I506.00
	Buffer_A3_FOUP_detect		:BOOL;	//	buffer_foup3_1检测有无		I506.01
	Buffer_B3_N2_Pressure_alarm	:BOOL;	//	buffer_foup3_2内压检测		I506.02
	Buffer_B3_FOUP_detect		:BOOL;	//	buffer_foup3_2检测有无		I506.03
	Buffer_C3_N2_Pressure_alarm	:BOOL;	//	buffer_foup3_3内压检测		I506.04
	Buffer_C3_FOUP_detect		:BOOL;	//	buffer_foup3_3检测有无		I506.05
	Buffer_D3_N2_Pressure_alarm	:BOOL;	//	buffer_foup3_4内压检测		I506.06
	Buffer_D3_FOUP_detect		:BOOL;	//	buffer_foup3_4检测有无		I506.07
	Buffer_A4_N2_Pressure_alarm	:BOOL;	//	buffer_foup4_1内压检测		I506.08
	Buffer_A4_FOUP_detect		:BOOL;	//	buffer_foup4_1检测有无		I506.09
	Buffer_B4_N2_Pressure_alarm	:BOOL;	//	buffer_foup4_2内压检测		I506.10
	Buffer_B4_FOUP_detect		:BOOL;	//	buffer_foup4_2检测有无		I506.11
	Buffer_C4_N2_Pressure_alarm	:BOOL;	//	buffer_foup4_3内压检测		I506.12
	Buffer_C4_FOUP_detect		:BOOL;	//	buffer_foup4_3检测有无		I506.13
	Buffer_D4_N2_Pressure_alarm	:BOOL;	//	buffer_foup4_4内压检测		I506.14
	Buffer_D4_FOUP_detect		:BOOL;	//	buffer_foup4_4检测有无		I506.15

//**************HARDWARE***********************⬆	

//SystemData
	SysData_PLCReset_b	:	BOOL	;
	SysData_BlowerSwitch_b	:	BOOL	;
	SysData_LightCurtainBypass_b	:	BOOL	;
	SysData_FFUAlarmReset_b	:	BOOL	;
	SysData_MINI8AlarmReset_b	:	BOOL	;
	SysData_VGUnitConversion_b	:	BOOL	;
	SysData_F2_CleanSwitch_b	:	BOOL	;
	SysData_APC_DATA_READ_SYSCONFIG		:	BOOL	;
	SysData_APC_DATA_WRITE_SYSCONFIG	:	BOOL	;
	SysData_APC_DATA_READ_CUSCONFIG		:	BOOL	;
	SysData_APC_DATA_WRITE_CUSCONFIG	:	BOOL	;
	SysData_HTR1_Temp_alarm				:	BOOL	;
	SysData_HTR2_Temp_alarm				:	BOOL	;
	SysData_Abnormal_seal_cap_HTR_temp	:	BOOL	;
	SysData_Abnormal_furnace_heater_temp	:	BOOL	;
	SysData_HTR3_Temp_alarm				:	BOOL	;
	SysData_HTR1_ON					:	BOOL	;
	SysData_HTR2_ON					:	BOOL	;
	SysData_HTR3_ON					:	BOOL	;
	SysData_HTR1_SW_ON				:	BOOL	;
	SysData_HTR2_SW_ON				:	BOOL	;
	SysData_HTR3_SW_ON				:	BOOL	;
	SysData_HF_CleanSwitch			:	BOOL	;
	SysData_DEPO_SW					:	BOOL	;
	SysData_LA_O2_Check_First_EN	:	BOOL	;
	SysData_FIMS1_O2_Check_EN		:	BOOL	;
	SysData_FIMS2_O2_Check_EN		:	BOOL	;
	SysData_N2_PURGE_PROCESS		:	BOOL	;


//FIMS
	ILK_LA_O2_Check_OT:BOOL;
	ILK_FIMS1_O2_Check_OT:BOOL;
	ILK_FIMS2_O2_Check_OT:BOOL;

	
END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>