TIN_PMC/TIN001-PLC/TIN001/PMC/GVLs/TO PMC/NDI.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="NDI" Id="{53379386-b5b2-4a68-8f4a-a706e834dbf2}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//**************HARDWARE***********************⬇		
//PW
	UPS_Fault								  AT%Q*:BOOL;
	UPS_Alarm								  AT%Q*:BOOL;
	UPS_Bypass_Status						  AT%Q*:BOOL;
	UPS_Battery_Voltage_Low					  AT%Q*:BOOL;
	UPS_Start								  AT%Q*:BOOL;
	UPS_AC_Input_Cut_Off					  AT%Q*:BOOL;
	Powerbox_front_doorswitch_1				  AT%Q*:BOOL;
	Powerbox_front_doorswitch_2				  AT%Q*:BOOL;
	Powerbox_back_doorswitch_1				  AT%Q*:BOOL;
	Powerbox_back_doorswitch_2				  AT%Q*:BOOL;
	External_HPM_In							  AT%Q*:BOOL;
	
	KM101_ON								  AT%Q*:BOOL;
	KM201_ON								  AT%Q*:BOOL;	
	KM102_ON								  AT%Q*:BOOL;
	KM103_ON								  AT%Q*:BOOL;
	KM106_ON								  AT%Q*:BOOL;
	
	
	Furnace_main_breaker_status_monitor		  AT%Q*:BOOL;
	Blower_Breaker_status_feedback			  AT%Q*:BOOL;
	Zone1_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	Zone2_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	Zone3_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	Zone4_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	Zone5_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	Zone6_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	Zone7_Circuit_Breaker_Status_Monitor	  AT%Q*:BOOL;
	
	LDS1_Bulk_to_Process_Running			  AT%Q*:BOOL;
	LDS1_Supply_Doing						  AT%Q*:BOOL;
	LDS1_System_Ready						  AT%Q*:BOOL;
	LDS1_Major_Alarm						  AT%Q*:BOOL;
	LDS1_Minor_Alarm						  AT%Q*:BOOL;
	LDS1_Low_Level_Alram					  AT%Q*:BOOL;
	LDS1_Empty_Alarm						  AT%Q*:BOOL;
	LDS2_Bulk_to_Process_Running			  AT%Q*:BOOL;
	LDS2_Supply_Doing						  AT%Q*:BOOL;
	LDS2_System_Ready						  AT%Q*:BOOL;
	LDS2_Major_Alarm						  AT%Q*:BOOL;
	LDS2_Minor_Alarm						  AT%Q*:BOOL;
	LDS2_Low_Level_Alram					  AT%Q*:BOOL;
	LDS2_Empty_Alarm						  AT%Q*:BOOL;
	
	
	Vaccum1_Pump_Both_On					  AT%Q*:BOOL;
	Vaccum1_Pump_Warning					  AT%Q*:BOOL;
	Vaccum1_Pump_Alarm						  AT%Q*:BOOL;
	
	
		
	N2_Purge_BOX_PG13_CNT1					  AT%Q*:BOOL;
	N2_Purge_BOX_PG13_CNT2					  AT%Q*:BOOL;	
	N2_Purge_BOX_PG14_CNT1					  AT%Q*:BOOL;
	N2_Purge_BOX_PG14_CNT2					  AT%Q*:BOOL;
	N2_Purge_BOX_PG15_CNT1					  AT%Q*:BOOL;
	N2_Purge_BOX_PG15_CNT2					  AT%Q*:BOOL;
	N2_Purge_Box_PG16_CNT1					  AT%Q*:BOOL;
	N2_Purge_Box_PG16_CNT2					  AT%Q*:BOOL;
	N2_Purge_Box_PG130_CNT1					  AT%Q*:BOOL;
	N2_Purge_Box_PG130_CNT2					  AT%Q*:BOOL;
	PS17_Value_Out_Limit_Alarm1				  AT%Q*:BOOL;
	
	
	//GAS 
	PG3_LOW_ALARM				  AT%Q*:BOOL;	//	I200.00
	PG3_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.01
	PG4_LOW_ALARM				  AT%Q*:BOOL;	//	I200.02
	PG4_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.03
	PG5_LOW_ALARM				  AT%Q*:BOOL;	//	I200.04
	PG5_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.05
	PG6_LOW_ALARM				  AT%Q*:BOOL;	//	I200.06
	PG6_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.07
	PG7_LOW_ALARM				  AT%Q*:BOOL;	//	I200.08
	PG7_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.09
	PG8_LOW_ALARM				  AT%Q*:BOOL;	//	I200.10
	PG8_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.11
	PG31_LOW_ALARM				  AT%Q*:BOOL;	//	I200.12
	PG31_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.13
	PG32_LOW_ALARM				  AT%Q*:BOOL;	//	I200.14
	PG32_HIGH_ALARM				  AT%Q*:BOOL;	//	I200.15
	LSC_H_LEVEL					  AT%Q*:BOOL;	//	I201.00
	LSC_M_LEVEL					  AT%Q*:BOOL;	//	I201.01
	LSC_L_LEVEL					  AT%Q*:BOOL;	//	I201.02
	VG31_STATUS_OK				  AT%Q*:BOOL;	//	I201.03
	VG31_LOW_ALARM				  AT%Q*:BOOL;	//	I201.04
	VG31_HIGH_ALARM				  AT%Q*:BOOL;	//	I201.05
	GD_FAN1_STOP				  AT%Q*:BOOL;	//	I201.06
	GD_FAN2_STOP				  AT%Q*:BOOL;	//	I201.07
	OX_MS1						  AT%Q*:BOOL;	//	I201.08
	OX_MS2						  AT%Q*:BOOL;	//	I201.09
	OX_MS3						  AT%Q*:BOOL;	//	I201.10
	OX_MSI1						  AT%Q*:BOOL;	//	I201.11
	OX_MSI2						  AT%Q*:BOOL;	//	I201.12
	OX_RC1						  AT%Q*:BOOL;	//	I201.13
	OX_RC2						  AT%Q*:BOOL;	//	I201.14
	OX_RC3						  AT%Q*:BOOL;	//	I201.15
	MS2_Pressure_LOW_ALARM        AT%Q*:BOOL;   //I202_00
	MS2_Pressure_HIGH_ALARM       AT%Q*:BOOL;   //I202_01
	MS321_Pressure_LOW_ALARM      AT%Q*:BOOL;   //I202_02
	MS321_Pressure_HIGH_ALARM     AT%Q*:BOOL;   //I202_03
	//SPARE                         AT%Q*:BOOL;   //I202_04
	//SPARE                         AT%Q*:BOOL;   //I202_05
	MP_PS20_Pressure_ALARM        AT%Q*:BOOL;   //I202_06
	MP_PS11_Pressure_ALARM        AT%Q*:BOOL;   //I202_07
	//SPARE                         AT%Q*:BOOL;   //I202_08
	//SPARE                         AT%Q*:BOOL;   //I202_09
	//SPARE                         AT%Q*:BOOL;   //I202_10
	PG1_LOW_ALARM                 AT%Q*:BOOL;   //I202_11
	PG1_HIGH_ALARM                AT%Q*:BOOL;   //I202_12
	PG2_LOW_ALARM                        AT%Q*:BOOL;   //I202_13
	PG2_HIGH_ALARM                        AT%Q*:BOOL;   //I202_14
	//SPARE                         AT%Q*:BOOL;   //I202_15

//EXHAUST
	FS105_flow_alarm					  AT%Q*:BOOL;	//	FS105水流量检测		I300.00
	FS106_flow_alarm					  AT%Q*:BOOL;	//	FS106水流量检测		I300.01
	FS202_flow_alarm					  AT%Q*:BOOL;	//	FS202水流量检测		I300.02
	FS104_flow_alarm					  AT%Q*:BOOL;	//	FS104水流量检测		I300.03
	FS111_flow_alarm					  AT%Q*:BOOL;	//	FS111水流量检测		I300.04
	FS102_flow_alarm					  AT%Q*:BOOL;	//	FS102水流量检测		I300.05
	//spare										//			I300.06
	//spare										//			I300.07
	VG11_STATUS_OK						  AT%Q*:BOOL;	//	VG11_STATUS_OK		I300.08
	VG11_LOW_ALARM						  AT%Q*:BOOL;	//	VG11_LOW_ALARM		I300.09
	VG11_HIGH_ALARM						  AT%Q*:BOOL;	//	VG11_HIGH_ALARM		I300.10
	VG13_STATUS_OK						  AT%Q*:BOOL;	//	VG13_STATUS_OK		I300.11
	VG13_LOW_ALARM						  AT%Q*:BOOL;	//	VG13_LOW_ALARM		I300.12
	VG13_HIGH_ALARM						  AT%Q*:BOOL;	//	VG13_HIGH_ALARM		I300.13
	AV71_fan_1_alarm					  AT%Q*:BOOL;	//	AV79散热1		I300.14
	AV71_fan_2_alarm					  AT%Q*:BOOL;	//	AV79散热2		I300.15
	DG1_low_limit_alarm					  AT%Q*:BOOL;	//	DG1测量显示压力1		I301.00
	DG1_high_limit_alarm				  AT%Q*:BOOL;	//	DG1测量显示压力2		I301.01
	//spare										//			I301.02
	//spare										//			I301.03
	//spare										//			I301.04
	//spare										//			I301.05
	//spare										//			I301.06
	//spare										//			I301.07
	MP21_PS_Pressure_low_alarm			  AT%Q*:BOOL;	//	MP21/PS压力检测		I301.08
	FS101_flow_alarm_1					  AT%Q*:BOOL;	//	FS101回水流量检测1		I301.09
	FS101_flow_alarm_2					  AT%Q*:BOOL;	//	FS101回水流量检测2		I301.10
	FL301_flow_switch					  AT%Q*:BOOL;	//	FL301浮子流量开关		I301.11
	//spare										//			I301.12
	FS116_flow_alarm					  AT%Q*:BOOL;	//	FS116水流量检测		I301.13
	PS110_Pressure_low_alarm			  AT%Q*:BOOL;	//	PS110测量显示压力1		I301.14
	PS110_Pressure_high_alarm			  AT%Q*:BOOL;	//	PS110测量显示压力2		I301.15
	PG_PS12_Pressure_low_alarm			  AT%Q*:BOOL;	//	PG/PS12测量显示压力1		I302.00
	PG_PS12_Pressure_high_alarm			  AT%Q*:BOOL;	//	PG/PS12测量显示压力2		I302.01
	PS13_ATM_status						  AT%Q*:BOOL;	//	PS13_LL_OUT		I302.02
	PS13_high_limit_alarm				  AT%Q*:BOOL;	//	PS13_H_OUT		I302.03
	PG101_water_Pressure_low_alarm		  AT%Q*:BOOL;	//	PG101测量进水压力1		I302.04
	PG101_water_Pressure_high_alarm		  AT%Q*:BOOL;	//	PG101测量进水压力2		I302.05
	VG14_STATUS_OK						  AT%Q*:BOOL;	//	VG14_STATUS_OK		I302.06
	VG14_LOW_ALARM						  AT%Q*:BOOL;	//	VG14_LOW_ALARM		I302.07
	VG14_HIGH_ALARM						  AT%Q*:BOOL;	//	VG14_HIGH_ALARM		I302.08
	PS14_Pressure_low_alarm				  AT%Q*:BOOL;	//	PS14测量显示压力1		I302.09
	PS14_Pressure_high_alarm			  AT%Q*:BOOL;	//	PS14测量显示压力2		I302.10
	//spare										//			I302.11
	//spare										//			I302.12
	//spare										//			I302.13
	//spare										//			I302.14
	//spare										//			I302.15
	APC_valve_status					  AT%Q*:BOOL;	//			I303.00
	APC_alarm_status					  AT%Q*:BOOL;	//			I303.01
	RHC_cooling_air_cylinder_1_open		  AT%Q*:BOOL;	//			I303.02
	RHC_cooling_air_cylinder_1_close	  AT%Q*:BOOL;	//			I303.03
	RHC_cooling_air_cylinder_2_open		  AT%Q*:BOOL;	//			I303.04
	RHC_cooling_air_cylinder_2_close	  AT%Q*:BOOL;	//			I303.05
	RHC_cooling_valve_open				  AT%Q*:BOOL;	//			I303.06
	RHC_cooling_valve_close				  AT%Q*:BOOL;	//			I303.07
	RHC_cooling_Butterfly_Valves_open	  AT%Q*:BOOL;	//			I303.08
	RHC_cooling_Butterfly_Valves_close	  AT%Q*:BOOL;	//			I303.09
	//spare										//			I303.10
	//spare										//			I303.11
	//spare										//			I303.12
	//spare										//			I303.13
	//spare										//			I303.14
	//spare										//			I303.15
	
//FB
	No1_Left_Extended_Detect1	  AT%Q*:BOOL;	//	I400.00
	No1_Left_Back_Detect1		  AT%Q*:BOOL;	//	I400.01
	No1_Left_Extended_Detect2	  AT%Q*:BOOL;	//	I400.02
	No1_Left_Back_Detect2		  AT%Q*:BOOL;	//	I400.03
	No1_Left_InPos_Detect1		  AT%Q*:BOOL;	//	I400.04
	No1_Left_InPos_Detect2		  AT%Q*:BOOL;	//	I400.05
	No1_Left_InPos_Detect3		  AT%Q*:BOOL;	//	I400.06
	No1_Left_Spare				  AT%Q*:BOOL;	//	I400.07
	No1_Right_Extended_Detect1	  AT%Q*:BOOL;	//	I400.08
	No1_Right_Back_Detect1		  AT%Q*:BOOL;	//	I400.09
	No1_Right_Extended_Detect2	  AT%Q*:BOOL;	//	I400.10
	No1_Right_Back_Detect2		  AT%Q*:BOOL;	//	I400.11
	No1_Right_InPos_Detect1		  AT%Q*:BOOL;	//	I400.12
	No1_Right_InPos_Detect2		  AT%Q*:BOOL;	//	I400.13
	No1_Right_InPos_Detect3		  AT%Q*:BOOL;	//	I400.14
	No1_Right_Spare				  AT%Q*:BOOL;	//	I400.15
	No2_Left_Back_Detect		  AT%Q*:BOOL;	//	I401.00
	No2_Left_Extended_Detect	  AT%Q*:BOOL;	//	I401.01
	No2_Left_Flow_Detect1		  AT%Q*:BOOL;	//	I401.02
	No2_Left_Flow_Detect2		  AT%Q*:BOOL;	//	I401.03
	No2_Left_InPos_Detect1		  AT%Q*:BOOL;	//	I401.04
	No2_Right_Back_Detect		  AT%Q*:BOOL;	//	I401.05
	No2_Right_Extended_Detect	  AT%Q*:BOOL;	//	I401.06
	No2_Right_Flow_Detect1		  AT%Q*:BOOL;	//	I401.07
	No2_Right_Flow_Detect2		  AT%Q*:BOOL;	//	I401.08
	No2_Right_InPos_Detect1		  AT%Q*:BOOL;	//	I401.09
	No3_Left_Back_Detect		  AT%Q*:BOOL;	//	I401.10
	No3_Left_Extended_Detect	  AT%Q*:BOOL;	//	I401.11
	No3_Left_Flow_Detect1		  AT%Q*:BOOL;	//	I401.12
	No3_Left_Flow_Detect2		  AT%Q*:BOOL;	//	I401.13
	No3_Left_InPos_Detect1		  AT%Q*:BOOL;	//	I401.14
	No3_Right_Back_Detect		  AT%Q*:BOOL;	//	I401.15
	No3_Right_Extended_Detect	  AT%Q*:BOOL;	//	I402.00
	No3_Right_Flow_Detect1		  AT%Q*:BOOL;	//	I402.01
	No3_Right_Flow_Detect2		  AT%Q*:BOOL;	//	I402.02
	No3_Right_InPos_Detect1		  AT%Q*:BOOL;	//	I402.03
	No4_Left_InPos_Detect1		  AT%Q*:BOOL;	//	I402.04
	No4_Left_InPos_Detect2		  AT%Q*:BOOL;	//	I402.05
	No4_Left_InPos_Detect3		  AT%Q*:BOOL;	//	I402.06
	No4_Left_Spare				  AT%Q*:BOOL;	//	I402.07
	No4_Left_Productor_Detect	  AT%Q*:BOOL;	//	I402.08
	No4_Right_InPos_Detect1		  AT%Q*:BOOL;	//	I402.09
	No4_Right_InPos_Detect2		  AT%Q*:BOOL;	//	I402.10
	No4_Right_InPos_Detect3		  AT%Q*:BOOL;	//	I402.11
	No4_Right_Spare				  AT%Q*:BOOL;	//	I402.12
	No4_Right_Productor_Detect	  AT%Q*:BOOL;	//	I402.13
	Door_Up_Detect				  AT%Q*:BOOL;	//	I402.14
	Door_Down_Detect			  AT%Q*:BOOL;	//	I402.15
	No1_Left_Productor_Detect	  AT%Q*:BOOL;	//	I403.00
	No1_Right_Productor_Detect	  AT%Q*:BOOL;	//	I403.01
										//	I403.02
										//	I403.03
										//	I403.04
										//	I403.05
										//	I403.06
										//	I403.07
										//	I403.08
										//	I403.09
										//	I403.10
										//	I403.11
										//	I403.12
										//	I403.13
										//	I403.14
										//	I403.15
	Robot_Loadport1_E84_Valid	  AT%Q*:BOOL;	//	I404.00
	Robot_Loadport1_E84_CS_1	  AT%Q*:BOOL;	//	I404.01
	Robot_Loadport1_E84_TR_REQ	  AT%Q*:BOOL;	//	I404.02
	Robot_Loadport1_E84_busy	  AT%Q*:BOOL;	//	I404.03
	Robot_Loadport1_E84_COMPT	  AT%Q*:BOOL;	//	I404.04
	Robot_Loadport1_E84_CONT	  AT%Q*:BOOL;	//	I404.05
	Robot_Loadport2_E84_Valid	  AT%Q*:BOOL;	//	I404.06
	Robot_Loadport2_E84_CS_0	  AT%Q*:BOOL;	//	I404.07
	Robot_Loadport2_E84_CS_1	  AT%Q*:BOOL;	//	I404.08
	Robot_Loadport2_E84_TR_REQ	  AT%Q*:BOOL;	//	I404.09
	Robot_Loadport2_E84_busy	  AT%Q*:BOOL;	//	I404.10
	Robot_Loadport2_E84_COMPT1	  AT%Q*:BOOL;	//	I404.11
	Robot_Loadport2_E84_COMPT2	  AT%Q*:BOOL;	//	I404.12
	Robot_Loadport2_E84_CONT	  AT%Q*:BOOL;	//	I404.13
	Robot_Spare1				  AT%Q*:BOOL;	//	I404.14
	Robot_Spare2				  AT%Q*:BOOL;	//	I404.15
	Robot_Spare3				  AT%Q*:BOOL;	//	I405.00
	Robot_Spare4				  AT%Q*:BOOL;	//	I405.01
	Robot_Spare5				  AT%Q*:BOOL;	//	I405.02
	Robot_Spare6				  AT%Q*:BOOL;	//	I405.03
	Robot_Spare7				  AT%Q*:BOOL;	//	I405.04
	Robot_Spare8				  AT%Q*:BOOL;	//	I405.05
	Robot_Spare9				  AT%Q*:BOOL;	//	I405.06
	Robot_Spare10				  AT%Q*:BOOL;	//	I405.07
	Robot_Spare11				  AT%Q*:BOOL;	//	I405.08
	Robot_Spare12				  AT%Q*:BOOL;	//	I405.09
	Robot_Spare13				  AT%Q*:BOOL;	//	I405.10
	Robot_Spare14				  AT%Q*:BOOL;	//	I405.11
	Robot_Spare15				  AT%Q*:BOOL;	//	I405.12
	Robot_Spare16				  AT%Q*:BOOL;	//	I405.13
	Robot_Spare17				  AT%Q*:BOOL;	//	I405.14
	Robot_Spare18				  AT%Q*:BOOL;	//	I405.15
	Stop_Button					  AT%Q*:BOOL;	//	I406.00
	Pause_Button				  AT%Q*:BOOL;	//	I406.01
	Plugging_Button				  AT%Q*:BOOL;	//	I406.02
	Left_Error_Rst				  AT%Q*:BOOL;	//	I406.03
	Right_Error_Rst				  AT%Q*:BOOL;	//	I406.04


//LA
	FIMS1_FOUP_dock						  AT%Q*:BOOL;	//	POD1_FOUP_载台靠紧		I500.00
	FIMS1_FOUP_undock					  AT%Q*:BOOL;	//	POD1_FOUP_载台松离		I500.01
	FIMS1_FOUP_exist					  AT%Q*:BOOL;	//	POD1_FOUP检测有无		I500.02
	FIMS2_FOUP_dock						  AT%Q*:BOOL;	//	POD2_FOUP_载台靠紧		I500.03
	FIMS2_FOUP_undock					  AT%Q*:BOOL;	//	POD2_FOUP_载台松离		I500.04
	FIMS2_FOUP_exist					  AT%Q*:BOOL;	//	POD2_FOUP检测有无		I500.05
	FIMS1_FOUP_wafer_shift_detection	  AT%Q*:BOOL;	//	POD1_FOUP_Wafer移位检测	I500.06
	FIMS2_FOUP_wafer_shift_detection	  AT%Q*:BOOL;	//	POD2_FOUP_Wafer移位检测	I500.07
	FIMS1_FOUP_negative_Pressure		  AT%Q*:BOOL;	//	POD1_FOUP_负压			I500.08
	FIMS1_FOUP_ordinary_Pressure		  AT%Q*:BOOL;	//	POD1_FOUP_常压			I500.09
	FIMS2_FOUP_negative_Pressure		  AT%Q*:BOOL;	//	POD2_FOUP_负压			I500.10
	FIMS2_FOUP_ordinary_Pressure		  AT%Q*:BOOL;	//	POD2_FOUP_常压			I500.11
	BOAT_slow_down_position_detection	  AT%Q*:BOOL;	//	BOAT升降减速位			I500.12
	buffer_rotation_conv_detect_sensor	  AT%Q*:BOOL;	//	buffer同步带张紧		I500.13
												//			I500.14
												//			I500.15
	LA_internal_cycle_switch_1_open		  AT%Q*:BOOL;	//	LA内循环切换1开位		I501.00
	LA_internal_cycle_switch_1_close	  AT%Q*:BOOL;	//	LA内循环切换1关位		I501.01
	LA_internal_cycle_switch_2_open		  AT%Q*:BOOL;	//	LA内循环切换2开位		I501.02
	LA_internal_cycle_switch_2_close	  AT%Q*:BOOL;	//	LA内循环切换2关位		I501.03
	R_axis_air_cylinder_extend_position	  AT%Q*:BOOL;	//	CAP气缸伸位				I501.04
	R_axis_air_cylinder_retract_position	  AT%Q*:BOOL;	//	CAP气缸缩位			I501.05
	Furnace_shutter_open				  AT%Q*:BOOL;	//	SHUTTER开位				I501.06
	Furnace_shutter_close				  AT%Q*:BOOL;	//	SHUTTER关位				I501.07
	FIMS1_exhaust_open_position			  AT%Q*:BOOL;	//	POD1排气开位			I501.08
	FIMS1_exhaust_close_position		  AT%Q*:BOOL;	//	POD1排气关位			I501.09
	FIMS2_exhaust_open_position			  AT%Q*:BOOL;	//	POD2排气开位			I501.10
	FIMS2_exhaust_close_position		  AT%Q*:BOOL;	//	POD2排气关位			I501.11
		//			I501.12
		//			I501.13
		//			I501.14
		//			I501.15
	FIMS1_seal							  AT%Q*:BOOL;	//	POD1_FOUP盖板压紧		I502.00
	FIMS1_release						  AT%Q*:BOOL;	//	POD1_FOUP盖板脱离		I502.01
	FIMS1_door_close					  AT%Q*:BOOL;	//	POD1_FOUP盖板横移初始位		I502.02
	FIMS1_door_open						  AT%Q*:BOOL;	//	POD1_FOUP盖板横移打开位		I502.03
	FIMS1_FOUP_latch_off				  AT%Q*:BOOL;	//	POD1_FOUP门锁打开		I502.04
	FIMS1_FOUP_latch_on					  AT%Q*:BOOL;	//	POD1_FOUP门锁关闭		I502.05
	FIMS1_collision_avoidance_up		  AT%Q*:BOOL;	//	POD1_FOUP避让挡板缩回		I502.06
	FIMS1_collision_avoidance_down		  AT%Q*:BOOL;	//	POD1_FOUP避让挡板伸出		I502.07
	FIMS2_seal							  AT%Q*:BOOL;	//	POD2_FOUP盖板压紧		I502.08
	FIMS2_release						  AT%Q*:BOOL;	//	POD2_FOUP盖板脱离		I502.09
	FIMS2_door_close					  AT%Q*:BOOL;	//	POD2_FOUP盖板横移初始位		I502.10
	FIMS2_door_open						  AT%Q*:BOOL;	//	POD2_FOUP盖板横移打开位		I502.11
	FIMS2_FOUP_latch_off				  AT%Q*:BOOL;	//	POD2_FOUP门锁打开		I502.12
	FIMS2_FOUP_latch_on					  AT%Q*:BOOL;	//	POD2_FOUP门锁关闭		I502.13
	FIMS2_collision_avoidance_up		  AT%Q*:BOOL;	//	POD2_FOUP避让挡板缩回		I502.14
	FIMS2_collision_avoidance_down		  AT%Q*:BOOL;	//	POD2_FOUP避让挡板伸出		I502.15
																//			I503.00
																//			I503.01
																//			I503.02
																//			I503.03
																//			I503.04
																//			I503.05
																//			I503.06
																//			I503.07
																//			I503.08
																//			I503.09
																//			I503.10
																//			I503.11
																//			I503.12
																//			I503.13
																//			I503.14
																//			I503.15
																//			I504.00
																//			I504.01
																//			I504.02
																//			I504.03
																//			I504.04
																//			I504.05
																//			I504.06
																//			I504.07
																//			I504.08
																//			I504.09
																//			I504.10
																//			I504.11
																//			I504.12
																//			I504.13
																//			I504.14
																//			I504.15
	Buffer_A1_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup1_1内压检测		I505.00
	Buffer_A1_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup1_1检测有无		I505.01
	Buffer_B1_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup1_2内压检测		I505.02
	Buffer_B1_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup1_2检测有无		I505.03
	Buffer_C1_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup1_3内压检测		I505.04
	Buffer_C1_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup1_3检测有无		I505.05
	Buffer_D1_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup1_4内压检测		I505.06
	Buffer_D1_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup1_4检测有无		I505.07
	Buffer_A2_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup2_1内压检测		I505.08
	Buffer_A2_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup2_1检测有无		I505.09
	Buffer_B2_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup2_2内压检测		I505.10
	Buffer_B2_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup2_2检测有无		I505.11
	Buffer_C2_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup2_3内压检测		I505.12
	Buffer_C2_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup2_3检测有无		I505.13
	Buffer_D2_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup2_4内压检测		I505.14
	Buffer_D2_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup2_4检测有无		I505.15
	Buffer_A3_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup3_1内压检测		I506.00
	Buffer_A3_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup3_1检测有无		I506.01
	Buffer_B3_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup3_2内压检测		I506.02
	Buffer_B3_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup3_2检测有无		I506.03
	Buffer_C3_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup3_3内压检测		I506.04
	Buffer_C3_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup3_3检测有无		I506.05
	Buffer_D3_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup3_4内压检测		I506.06
	Buffer_D3_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup3_4检测有无		I506.07
	Buffer_A4_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup4_1内压检测		I506.08
	Buffer_A4_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup4_1检测有无		I506.09
	Buffer_B4_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup4_2内压检测		I506.10
	Buffer_B4_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup4_2检测有无		I506.11
	Buffer_C4_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup4_3内压检测		I506.12
	Buffer_C4_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup4_3检测有无		I506.13
	Buffer_D4_N2_Pressure_alarm	  AT%Q*:BOOL;	//	buffer_foup4_4内压检测		I506.14
	Buffer_D4_FOUP_detect		  AT%Q*:BOOL;	//	buffer_foup4_4检测有无		I506.15
	
//FTR
   FTRTPStatus  AT%Q*:BOOL;
//WaterRobot
	WaferRobotTPstatus  AT%Q*:BOOL;
	WaferRobotPowerStatus  AT%Q*:BOOL;
	WaferRobotAlarm  AT%Q*:BOOL;
	WaferRobotWafer_1Checked  AT%Q*:BOOL;
	WaferRobotWafer_2Checked  AT%Q*:BOOL;
	WaferRobotWafer_3Checked  AT%Q*:BOOL;
	WaferRobotWafer_4Checked  AT%Q*:BOOL;
	WaferRobotWafer_5Checked  AT%Q*:BOOL;
	WaferRobotAxis_Zhome  AT%Q*:BOOL;
	WaferRobotAxis_THhome  AT%Q*:BOOL;
	WaferRobotAxis_EX1home  AT%Q*:BOOL;
	WaferRobotAxis_EX2home  AT%Q*:BOOL;
	WaferRobotAxis_Phome  AT%Q*:BOOL;
	WaferRobotRunning  AT%Q*:BOOL;
//OP
	MS8_RHC_ExhPress_LOW_ALARM			  AT%Q*:BOOL;	// I600_00
    MS8_RHC_ExhPress_HIGH_ALARM       	  AT%Q*:BOOL;  // I600_01
    MS1_Heater_ExhPress_LOW_ALARM         AT%Q*:BOOL;  // I600_02
    MS1_Heater_ExhPress_HIGH_ALARM        AT%Q*:BOOL;  // I600_03
    MS3_Scavenger_ExhPress_LOW_ALARM      AT%Q*:BOOL;  // I600_04
    MS3_Scavenger_ExhPress_HIGH_ALARM     AT%Q*:BOOL;  // I600_05
    MS6_Frontbody_ExhPress_LOW_ALARM      AT%Q*:BOOL;  // I600_06
    MS6_Frontbody_ExhPress_HIGH_ALARM     AT%Q*:BOOL;  // I600_07
    MS9_LSC1_ExhPress_LOW_ALARM           AT%Q*:BOOL;  // I600_08
    MS9_LSC1_ExhPress_HIGH_ALARM          AT%Q*:BOOL;  // I600_09
    MS11_GasBox_ExhPress_LOW_ALARM        AT%Q*:BOOL;  // I600_10
    MS11_GasBox_ExhPress_HIGH_ALARM       AT%Q*:BOOL;  // I600_11
    MS12_GasBox_ExhPress_LOW_ALARM        AT%Q*:BOOL;  // I600_12
    MS12_GasBox_ExhPress_HIGH_ALARM       AT%Q*:BOOL;  // I600_13
    //SPARE                               AT%Q*:BOOL;  // I600_14
    //SPARE                               AT%Q*:BOOL;  // I600_15



//**************HARDWARE***********************⬆	

//SystemData
	SysData_PLCReset_b	 AT%Q*:BOOL	;
	SysData_BlowerSwitch_b	 AT%Q*:BOOL	;
	SysData_LightCurtainBypass_b	 AT%Q*:BOOL	;
	SysData_FFUAlarmReset_b	 AT%Q*:BOOL	;
	SysData_MINI8AlarmReset_b	 AT%Q*:BOOL	;
	SysData_VGUnitConversion_b	 AT%Q*:BOOL	;
	SysData_F2_CleanSwitch_b	 AT%Q*:BOOL	;
	SysData_APC_DATA_READ_SYSCONFIG		 AT%Q*:BOOL	;
	SysData_APC_DATA_WRITE_SYSCONFIG	 AT%Q*:BOOL	;
	SysData_APC_DATA_READ_CUSCONFIG		 AT%Q*:BOOL	;
	SysData_APC_DATA_WRITE_CUSCONFIG	 AT%Q*:BOOL	;
	SysData_HTR1_Temp_alarm				 AT%Q*:BOOL	;
	SysData_HTR2_Temp_alarm				 AT%Q*:BOOL	;
	SysData_Abnormal_seal_cap_HTR_temp	 AT%Q*:BOOL	;
	SysData_Abnormal_furnace_heater_temp	 AT%Q*:BOOL	;
	SysData_HTR3_Temp_alarm				 AT%Q*:BOOL	;
	SysData_HTR1_ON					 AT%Q*:BOOL	;
	SysData_HTR2_ON					 AT%Q*:BOOL	;
	SysData_HTR3_ON					 AT%Q*:BOOL	;
	SysData_HTR1_SW_ON				 AT%Q*:BOOL	;
	SysData_HTR2_SW_ON				 AT%Q*:BOOL	;
	SysData_HTR3_SW_ON				 AT%Q*:BOOL	;
	SysData_HF_CleanSwitch			 AT%Q*:BOOL	;
	SysData_DEPO_SW					 AT%Q*:BOOL	;
	ILK_LA_O2_Check_First_EN	 AT%Q*:BOOL	;
	SysData_FIMS1_O2_Check_EN		 AT%Q*:BOOL	;
	SysData_FIMS2_O2_Check_EN		 AT%Q*:BOOL	;
	SysData_N2_PURGE_PROCESS		 AT%Q*:BOOL	;


//FIMS
	ILK_LA_O2_Check_OT  AT%Q*:BOOL;
	ILK_FIMS1_O2_Check_OT  AT%Q*:BOOL;
	ILK_FIMS2_O2_Check_OT  AT%Q*:BOOL;
	
	FIMS1_Load_Complete	,
	FIMS1_Unload_Complete,
	FIMS1_Home_Complete,
	FIMS1_Running,	
	FIMS1_LoadAlarm,
	FIMS1_UnloadAlarm,
	FIMS1_AutoManualMode	  AT%Q*:BOOL;
	
	FIMS2_Load_Complete,
	FIMS2_Unload_Complete,
	FIMS2_Home_Complete,
	FIMS2_Running,
	FIMS2_LoadAlarm,
	FIMS2_UnloadAlarm,
	FIMS2_AutoManualMode  AT%Q*:BOOL;

	O2_Detect_Side_LA,
	O2_Detect_Side_FIMS1,
	O2_Detect_Side_FIMS2  AT%Q*:BOOL;
//BUFFER
	MvAbsBusyBufferAxis			  AT%Q*:BOOL;
	BufferFaultBufferAxis		  AT%Q*:BOOL;
	BufferInPositionA1			  AT%Q*:BOOL;
	BufferInPositionB1			  AT%Q*:BOOL;
	BufferInPositionC1			  AT%Q*:BOOL;
	BufferInPositionD1			  AT%Q*:BOOL;
	BufferInPositionA2			  AT%Q*:BOOL;
	BufferInPositionB2			  AT%Q*:BOOL;
	BufferInPositionC2			  AT%Q*:BOOL;
	BufferInPositionD2			  AT%Q*:BOOL;
	BufferInPositionA3			  AT%Q*:BOOL;
	BufferInPositionB3			  AT%Q*:BOOL;
	BufferInPositionC3			  AT%Q*:BOOL;
	BufferInPositionD3			  AT%Q*:BOOL;
	BufferInPositionA4			  AT%Q*:BOOL;
	BufferInPositionB4			  AT%Q*:BOOL;
	BufferInPositionC4			  AT%Q*:BOOL;
	BufferInPositionD4			  AT%Q*:BOOL;
	ServoOnBufferAxis			  AT%Q*:BOOL;
//Boat
	PwrErrBufferAxis				  AT%Q*:BOOL;
	PwrBusyBoatZAxis			  AT%Q*:BOOL;
	MvAbsBusyBoatZAxis			  AT%Q*:BOOL;
	HmPosBoatZAxis				  AT%Q*:BOOL;
	NegLmtPosBoatZAxis			  AT%Q*:BOOL;
	PotLmtPosBoatZAxis			  AT%Q*:BOOL;
	ReadytoSwitchOnBoatZAxis	  AT%Q*:BOOL;
	SwitchedOnBoatZAxis			  AT%Q*:BOOL;
	BoatFaultBoatZAxis			  AT%Q*:BOOL;
	MiddlePos1BoatZAxis			  AT%Q*:BOOL;
	MiddlePos2BoatZAxis			  AT%Q*:BOOL;
	MiddlePos3BoatZAxis			  AT%Q*:BOOL;
	BoatLiftMotorUpPosition		  AT%Q*:BOOL;
	BoatLiftMotorDownPosition	  AT%Q*:BOOL;
	
//CAPS
	BoatRAxisMoving				  AT%Q*:BOOL;
	BoatRAxisHomeBusy			  AT%Q*:BOOL;
	BoatRAxisHomeDone			  AT%Q*:BOOL;
	BoatRAxisRotationBusy		  AT%Q*:BOOL;
	BoatRAxisInHomePosition		  AT%Q*:BOOL;
	BoatRAxisAlarm				  AT%Q*:BOOL;	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	
	// PLC与PMC通信断开信号
	bHeartBeatPMC_PLC_Monitor	  AT%Q*:BOOL;
	// PMC与IPC通信断开信号
	bHeartBeatPMC_IPC_Monitor	  AT%Q*:BOOL;
	
	//interlock status
	DP					,
	BWR					,
	DPR1				,
	DPR2				,
	WAT_R				,
	WAT_F				,
	HTR1				,
	HTR2				,
	HTR3				,
	HTR4				,
	HTR5				,
	T_MNT				,
	T_REF				,
	DEPO				,
	CLN					,
	ECO					,
	AGV					,
	SP1					,
	PZ					,
	P_CONT				,
	DGZERO				,
	C_EXH				,
	F2_CLN				,
	F_N					
	AT%Q*:BOOL;
	
	//automatic valve status
	P_RUN				AT%Q*:BOOL;
	LSC1_Level_HH		AT%Q*:BOOL;
	LSC1_Level_H		AT%Q*:BOOL;
	LSC1_Level_M		AT%Q*:BOOL;
	LSC1_Level_L		AT%Q*:BOOL;
	LSC1_OverFill		AT%Q*:BOOL;
	LSC1_Ref_RDY		AT%Q*:BOOL;
	T_REF_On			AT%Q*:BOOL;
	D_Gas_OK			AT%Q*:BOOL;
	DEPO_OK				AT%Q*:BOOL;
	CLN_OK				AT%Q*:BOOL;
	ATM					AT%Q*:BOOL;
	F2_CLN_OK			AT%Q*:BOOL;
	VAC1				AT%Q*:BOOL;	// NF3
	VAC2				AT%Q*:BOOL;	// Ti
	VAC3				AT%Q*:BOOL;	// NH3
	VAC4				AT%Q*:BOOL;	// SiH4
	VAC5				AT%Q*:BOOL;	// F2
	VAC6				AT%Q*:BOOL;	// spare
	VAC7				AT%Q*:BOOL;	// spare
	VAC8				AT%Q*:BOOL;	// spare
	VAC9				AT%Q*:BOOL;	// spare
	VAC10				AT%Q*:BOOL;	// spare
	bBoatUnLoad_ILK		AT%Q*:BOOL;	// boat unload condition
	
	//valve interlock
	AV1_ILK		,
	AV2_ILK		,
	AV3_ILK		,
	AV4_ILK		,
	AV5_ILK		,
	AV6_ILK		,
	AV7_ILK		,
	AV8_ILK		,
	AV9_ILK		,
	AV10_ILK	,
	AV11_ILK	,
	AV12_ILK	,
	AV13_ILK	,
	AV14_ILK	,
	AV15_ILK	,
	AV16_ILK	,
	AV17_ILK	,
	AV18_ILK	,
	AV19_ILK	,
	AV20_ILK	,
	AV21_ILK	,
	AV22_ILK	,
	AV23_ILK	,
	AV24_ILK	,
	AV25_ILK	,
	AV26_ILK	,
	AV27_ILK	,
	AV28_ILK	,
	AV29_ILK	,
	AV30_ILK	,
	AV31_ILK	,
	AV32_ILK	,
	AV33_ILK	,
	AV34_ILK	,
	AV35_ILK	,
	AV36_ILK	,
	AV37_ILK	,
	AV38_ILK	,
	AV39_ILK	,
	AV40_ILK	,
	AV41_ILK	,
	AV42_ILK	,
	AV43_ILK	,
	AV44_ILK	,
	AV45_ILK	,
	AV46_ILK	,
	AV47_ILK	,
	AV48_ILK	,
	AV49_ILK	,
	AV50_ILK	,
	AV51_ILK	,
	AV52_ILK	,
	AV53_ILK	,
	AV54_ILK	,
	AV55_ILK	,
	AV56_ILK	,
	AV57_ILK	,
	AV58_ILK	,
	AV59_ILK	,
	AV60_ILK	,
	AV61_ILK	,
	AV62_ILK	,
	AV63_ILK	,
	AV64_ILK	,
	AV65_ILK	,
	AV66_ILK	,
	AV67_ILK	,
	AV68_ILK	,
	AV69_ILK	,
	AV70_ILK	,
	AV71_ILK	,
	AV72_ILK	,
	AV73_ILK	,
	AV74_ILK	,
	AV75_ILK	,
	AV76_ILK	,
	AV77_ILK	,
	AV78_ILK	,
	AV79_ILK	,
	AV80_ILK	,
	AV81_ILK	,
	AV82_ILK	,
	AV83_ILK	,
	AV84_ILK	,
	AV85_ILK	,
	AV86_ILK	,
	AV87_ILK	,
	AV88_ILK	,
	AV89_ILK	,
	AV90_ILK	,
	AV91_ILK	,
	AV92_ILK	,
	AV93_ILK	,
	AV94_ILK	,
	AV95_ILK	,
	AV96_ILK	,
	AV97_ILK	,
	AV98_ILK	,
	AV99_ILK	,
	AV100_ILK	,
	AV101_ILK	,
	AV102_ILK	,
	AV103_ILK	,
	AV104_ILK	,
	AV105_ILK	,
	AV106_ILK	,
	AV107_ILK	,
	AV108_ILK	,
	AV109_ILK	,
	AV110_ILK	,
	AV111_ILK	,
	AV112_ILK	,
	AV113_ILK	,
	AV114_ILK	,
	AV115_ILK	,
	AV116_ILK	,
	AV117_ILK	,
	AV118_ILK	,
	AV119_ILK	,
	AV120_ILK	,
	AV121_ILK	,
	AV122_ILK	,
	AV123_ILK	,
	AV124_ILK	,
	AV125_ILK	,
	AV126_ILK	,
	AV127_ILK	,
	AV128_ILK	,
	AV129_ILK	,
	AV130_ILK	,
	AV131_ILK	,
	AV132_ILK	,
	AV133_ILK	,
	AV134_ILK	,
	AV135_ILK	,
	AV136_ILK	,
	AV137_ILK	,
	AV138_ILK	,
	AV139_ILK	,
	AV140_ILK	,
	AV141_ILK	,
	AV142_ILK	,
	AV143_ILK	,
	AV144_ILK	,
	AV145_ILK	,
	AV146_ILK	,
	AV147_ILK	,
	AV148_ILK	,
	AV149_ILK	,
	AV150_ILK	,
	AV151_ILK	,
	AV152_ILK	,
	AV153_ILK	,
	AV154_ILK	,
	AV155_ILK	,
	AV156_ILK	,
	AV157_ILK	,
	AV158_ILK	,
	AV159_ILK	,
	AV160_ILK	,
	AV161_ILK	,
	AV162_ILK	,
	AV163_ILK	,
	AV164_ILK	,
	AV165_ILK	,
	AV166_ILK	,
	AV167_ILK	,
	AV168_ILK	,
	AV169_ILK	,
	AV170_ILK	,
	AV171_ILK	,
	AV172_ILK	,
	AV173_ILK	,
	AV174_ILK	,
	AV175_ILK	,
	AV176_ILK	,
	AV177_ILK	,
	AV178_ILK	,
	AV179_ILK	,
	AV180_ILK	,
	AV181_ILK	,
	AV182_ILK	,
	AV183_ILK	,
	AV184_ILK	,
	AV185_ILK	,
	AV186_ILK	,
	AV187_ILK	,
	AV188_ILK	,
	AV189_ILK	,
	AV190_ILK	,
	AV191_ILK	,
	AV192_ILK	,
	AV193_ILK	,
	AV194_ILK	,
	AV195_ILK	,
	AV196_ILK	,
	AV197_ILK	,
	AV198_ILK	,
	AV199_ILK	,
	AV200_ILK	,
	AV201_ILK	,
	AV202_ILK	,
	AV203_ILK	,
	AV204_ILK	,
	AV205_ILK	,
	AV206_ILK	,
	AV207_ILK	,
	AV208_ILK	,
	AV209_ILK	,
	AV210_ILK	,
	AV211_ILK	,
	AV212_ILK	,
	AV213_ILK	,
	AV214_ILK	,
	AV215_ILK	,
	AV216_ILK	,
	AV217_ILK	,
	AV218_ILK	,
	AV219_ILK	,
	AV220_ILK	,
	AV221_ILK	,
	AV222_ILK	,
	AV223_ILK	,
	AV224_ILK	,
	AV225_ILK	,
	AV226_ILK	,
	AV227_ILK	,
	AV228_ILK	,
	AV229_ILK	,
	AV230_ILK	,
	AV231_ILK	,
	AV232_ILK	,
	AV233_ILK	,
	AV234_ILK	,
	AV235_ILK	,
	AV236_ILK	,
	AV237_ILK	,
	AV238_ILK	,
	AV239_ILK	,
	AV240_ILK	,
	AV241_ILK	,
	AV242_ILK	,
	AV243_ILK	,
	AV244_ILK	,
	AV245_ILK	,
	AV246_ILK	,
	AV247_ILK	,
	AV248_ILK	,
	AV249_ILK	,
	AV250_ILK	
	  AT%Q*:BOOL;
	AV540_ILK	  AT%Q*:BOOL;

	//interlock
	Interlock1		,
	Interlock2		,
	Interlock3		,
	Interlock4		,
	Interlock5		,
	Interlock6		,
	Interlock7		,
	Interlock8		,
	Interlock9		,
	Interlock10		,
	Interlock11		,
	Interlock12		,
	Interlock13		,
	Interlock14		,
	Interlock15		,
	Interlock16		,
	Interlock17		,
	Interlock18		,
	Interlock19		,
	Interlock20		,
	Interlock21		,
	Interlock22		,
	Interlock23		,
	Interlock24		,
	Interlock25		,
	Interlock26		,
	Interlock27		,
	Interlock28		,
	Interlock29		,
	Interlock30		,
	Interlock31		,
	Interlock32		,
	Interlock33		,
	Interlock34		,
	Interlock35		,
	Interlock36		,
	Interlock37		,
	Interlock38		,
	Interlock39		,
	Interlock40		,
	Interlock41		,
	Interlock42		,
	Interlock43		,
	Interlock44		,
	Interlock45		,
	Interlock46		,
	Interlock47		,
	Interlock48		,
	Interlock49		,
	Interlock50		,
	Interlock51		,
	Interlock52		,
	Interlock53		,
	Interlock54		,
	Interlock55		,
	Interlock56		,
	Interlock57		,
	Interlock58		,
	Interlock59		,
	Interlock60		,
	Interlock61		,
	Interlock62		,
	Interlock63		,
	Interlock64		,
	Interlock65		,
	Interlock66		,
	Interlock67		,
	Interlock68		,
	Interlock69		,
	Interlock70		,
	Interlock71		,
	Interlock72		,
	Interlock73		,
	Interlock74		,
	Interlock75		,
	Interlock76		,
	Interlock77		,
	Interlock78		,
	Interlock79		,
	Interlock80		,
	Interlock81		,
	Interlock82		,
	Interlock83		,
	Interlock84		,
	Interlock85		,
	Interlock86		,
	Interlock87		,
	Interlock88		,
	Interlock89		,
	Interlock90		,
	Interlock91		,
	Interlock92		,
	Interlock93		,
	Interlock94		,
	Interlock95		,
	Interlock96		,
	Interlock97		,
	Interlock98		,
	Interlock99		,
	Interlock100	,
	Interlock101	,
	Interlock102	,
	Interlock103	,
	Interlock104	,
	Interlock105	,
	Interlock106	,
	Interlock107	,
	Interlock108	,
	Interlock109	,
	Interlock110	,
	Interlock111	,
	Interlock112	,
	Interlock113	,
	Interlock114	,
	Interlock115	,
	Interlock116	,
	Interlock117	,
	Interlock118	,
	Interlock119	,
	Interlock120	,
	Interlock121	,
	Interlock122	,
	Interlock123	,
	Interlock124	,
	Interlock125	,
	Interlock126	,
	Interlock127	,
	Interlock128	,
	Interlock129	,
	Interlock130	,
	Interlock131	,
	Interlock132	,
	Interlock133	,
	Interlock134	,
	Interlock135	,
	Interlock136	,
	Interlock137	,
	Interlock138	,
	Interlock139	,
	Interlock140	,
	Interlock141	,
	Interlock142	,
	Interlock143	,
	Interlock144	,
	Interlock145	,
	Interlock146	,
	Interlock147	,
	Interlock148	,
	Interlock149	,
	Interlock150	
	  AT%Q*:BOOL;
	
	Mini8_OffLine  AT%Q*:BOOL;	
END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>