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							- <?xml version="1.0" encoding="utf-8"?>
 
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
 
-   <DUT Name="SafeDI" Id="{a4fff075-b4b1-44f6-8b05-cb6faa91b1c0}">
 
-     <Declaration><![CDATA[TYPE SafeDI :
 
- STRUCT
 
- 	//IO mapping
 
- 	O2_analyzer_over_range_alarm	,
 
- 	SCR_ONOFF_SWITCH	,
 
- 	O2_analyzer_fault	,
 
- 	SMK1_detector_operator	,
 
- 	SMK1_detector_fault	,
 
- 	SMK1_detector_fire_alarm	,
 
- 	GD201_NF3_gas_leak_1st_alarm	,
 
- 	GD201_NF3_gas_leak_2nd_alarm	,
 
- 	GD202_SiH4_gas_leak_1st_alarm	,
 
- 	GD201_fault	,
 
- 	GD202_SiH4_gas_leak_2nd_alarm	,
 
- 	GD202_fault	,
 
- 	GD203_NH3_gas_leak_2nd_alarm	,
 
- 	GD203_NH3_gas_leak_1st_alarm	,
 
- 	GD203_fault	,
 
- 	GD204_HCL_gas_leak_1st_alarm	,
 
- 	GD204_fault	,
 
- 	GD204_HCL_gas_leak_2nd_alarm	,
 
- 	GD205_F2_gas_leak_1st_alarm		,
 
- 	GD205_F2_gas_leak_2nd_alarm		,
 
- 	GD206_NF3_gas_leak_1st_alarm	,
 
- 	GD205_fault	,
 
- 	GD206_NF3_gas_leak_2nd_alarm	,
 
- 	GD206_fault	,
 
- 	GD207_SiH4_gas_leak_2nd_alarm	,
 
- 	GD207_SiH4_gas_leak_1st_alarm	,
 
- 	GD207_fault	,
 
- 	GD208_NH3_gas_leak_1st_alarm	,
 
- 	GD208_fault	,
 
- 	GD208_NH3_gas_leak_2nd_alarm	,
 
- 	GD209_HCL_gas_leak_1st_alarm	,
 
- 	GD209_HCL_gas_leak_2nd_alarm	,
 
- 	GD210_F2_gas_leak_1st_alarm	,
 
- 	GD209_fault	,
 
- 	GD210_F2_gas_leak_2nd_alarm	,
 
- 	GD210_fault	,
 
- 	TS31_Cap_outside_temp_sw	,
 
- 	TS30_Cap_inside_temp_sw	,
 
- 	TS34_R_axis_rotation_temp_sw	,
 
- 	Loading_area_EMS	,
 
- 	SL201_gas_box_door_sw1_1	,
 
- 	FFU_temp_sw	,
 
- 	SL201_gas_box_door_sw1_2	,
 
- 	SL202_gas_box_door_sw2_1	,
 
- 	SL203_gas_box_door_sw3_1	,
 
- 	SL202_gas_box_door_sw2_2	,
 
- 	SL203_gas_box_door_sw3_2	,
 
- 	SL204_gas_box_door_sw4_1	,
 
- 	SL205_gas_box_door_sw5_1	,
 
- 	SL204_gas_box_door_sw4_2	,
 
- 	SL205_gas_box_door_sw5_2	,
 
- 	SL501_LA_door_sw1	,
 
- 	SL503_LA_door_sw3	,
 
- 	SL502_LA_door_sw2	,
 
- 	SL504_furnace_door_sw	,
 
- 	Gas_box_exhaust_pressure_alarm_1st	,
 
- 	MS2_S_gas_box_exhaust_alarm	,
 
- 	Gas_box_exhaust_pressure_alarm_2nd	,
 
- 	MS11_S_gas_box_exhaust_alarm	,
 
- 	MS12_S_gas_box_exhaust_alarm	,
 
- 	LSC_1_leak_alarm	,
 
- 	LD501_Magnetic_fluid_leak	,
 
- 	LD502_Cooling_water_leak	,
 
- 	TS305_RHC_temp_sw	,
 
- 	LD503_RHC_leak	,
 
- 	TS306_Main_furnace_Temp_sw	,
 
- 	LD301_water_leak_alarm	,
 
- 	EMO301_Exhaust_box_EMO	,
 
- 	LD302_water_leak_alarm	,
 
- 	Buffer_motor_EDM	,
 
- 	R_axis_motor_EDM	,
 
- 	Boat_motor_EDM	,
 
- 	EMO101_power_box_EMO	,
 
- 	Furnace_transformer_temp_sw	,
 
- 	Power_box_fire_detector_alarm	,
 
- 	AC100V_transformer_temp_sw	,
 
- 	Furnace_power_on_switch	,
 
- 	Power_box_reset_button	,
 
- 	AC100V_transformer_power_on_switch	,
 
- 	VFD_EDM	,
 
- 	Light_curtain_fault	,
 
- 	Light_curtain_OSSD2	,
 
- 	Light_curtain_OSSD1	,
 
- 	Gas_box_reset_button	,
 
- 	EMO401_frontbody_EMO	,
 
- 	Frontbody_IO_shutter	,
 
- 	Frontbody_door_sw	,
 
- 	Frontbody_reset_button	
 
- 	:BOOL;
 
- END_STRUCT
 
- END_TYPE
 
- ]]></Declaration>
 
-   </DUT>
 
- </TcPlcObject>
 
 
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